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    ELLIPSOMETRE SPECTROSCOPIQUE A FAIBLE BRUIT
    221.
    发明授权
    ELLIPSOMETRE SPECTROSCOPIQUE A FAIBLE BRUIT 有权
    OUT CHARM分光椭率

    公开(公告)号：EP1290417B1

    公开(公告)日：2009-03-04

    申请号：EP01945381.0

    申请日：2001-06-08

    Applicant: Fahrenheit Thermoscope LLC

    Inventor： FERRIEU, Frédéric

    IPC: G01J4/00 ,  G01N21/21

    CPC classification number: G01J4/00 ,  G01N21/211

    Abstract: The invention concerns a spectroscopic ellipsometer comprising a light source (1) emitting an optical beam, a polarizer (2) arranged on the path of the optical beam emitted by the light source, a sample holder (9) receiving the optical beam from the polarizer output, a polarisation analyser (3) designed to be traversed by the beam reflected by the sample to be analysed, a detection set which receives the beam from the analyser output and which comprises a monochromator (5) and a photodetector (4), means (6) for processing the signal in said detection set output, which include an electronic counter (13). Cooling means (12) maintain the detection set at a temperature lower than room temperature, minimising the noise of the detector so as to be constantly in the condition of minimum photon noise. The optimal measuring condition of the ellipsometer is reached by minimising all the sources of noise (lamps, detection, ambient noise).

    Wavelength dispersion measuring apparatus and polarization dispersion measuring appparatus
    225.
    发明公开
    Wavelength dispersion measuring apparatus and polarization dispersion measuring appparatus 审中-公开
    设备，用于测量的波长色散和偏振色散测量装置

    公开(公告)号：EP1411339A3

    公开(公告)日：2004-05-12

    申请号：EP04001628.9

    申请日：1999-02-17

    Applicant: Anritus Corporation ,  Nippon Telegraph and Telephone Corporation

    Inventor： Otani, Akihito ,  Otsubo, Toshinobu ,  Takara, Hidehiko ,  Kawanishi, Satoki ,  Yamabayashi, Yoshiaki

    IPC: G01J9/02 ,  G01M11/00

    CPC classification number: G01M11/336 ,  G01J4/00 ,  G01J7/00 ,  G01J2009/0261 ,  G01M11/332 ,  G01M11/335

    Abstract: A first tunable wavelength pulse light source (22) is driven by a reference signal to emit a first optical pulse. An optical demultiplexer (24) demultiplexes a first optical pulse emitted from the first pulse light source (22) into a reference optical pulse and an incident optical pulse to be sent into an object to be measured. An optical multiplexer (26) multiplexes the reference optical pulse and an outgoing optical pulse passing through the object to output multiplexed light. A second pulse light source (23) generates a second optical pulse which is synchronous with the first optical pulse and delays a predetermined time for each period of the first optical pulse. A sampling unit (27, 27a, 27b) receives the multiplexed light and the second optical pulse to obtain an optical pulse train signal proportional to the intensity of the multiplexed light obtained in synchronism with the second optical pulse. From the optical pulse train signal from the sampling unit (27, 27a, 27b), a signal processor (37) obtains an envelope formed by peaks of individual optical pulses forming the optical pulse train. The wavelength dispersion of the object is obtained by measuring the delay time of the outgoing optical pulse passing through the object on the basis of intervals between the peaks of the envelope.

    Method of measuring angle of rotation and polarimeter
    226.
    发明公开
    Method of measuring angle of rotation and polarimeter 失效
    测量旋转角度和旋光仪的方法

    公开(公告)号：EP1300670A2

    公开(公告)日：2003-04-09

    申请号：EP02028994.8

    申请日：1996-11-15

    Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

    Inventor： Kawamura, Tatsurou ,  Onishi, Hiroshi ,  Sonoda, Nobuo

    IPC: G01N21/21 ,  G01J4/04

    CPC classification number: G01J4/00 ,  G01N21/21 ,  G01N33/493

    Abstract: The present invention provides for a method of measuring an angle of rotation for urinalysis. Also, a polarimeter, which is reliable, compact and inexpensive is provided by using a polarimeter including means for transmitting the polarized light through a specimen, applying a magnetic field to the specimen and detecting the change in the direction of light polarization due to the application of the magnetic field.

    Abstract translation: 本发明提供了一种测量尿分析旋转角度的方法。 而且，通过使用偏光计来提供可靠，紧凑且便宜的偏光计，所述偏光计包括用于使偏振光透过样本，将磁场施加到样本并检测由于应用导致的偏振方向的改变的装置 的磁场。

    ELLIPSOMETRE SPECTROSCOPIQUE A FAIBLE BRUIT
    227.
    发明公开
    ELLIPSOMETRE SPECTROSCOPIQUE A FAIBLE BRUIT 有权
    OUT CHARM分光椭率

    公开(公告)号：EP1290417A1

    公开(公告)日：2003-03-12

    申请号：EP01945381.0

    申请日：2001-06-08

    Applicant: FRANCE TELECOM

    Inventor： FERRIEU, Frédéric

    IPC: G01J4/00 ,  G01N21/21

    CPC classification number: G01J4/00 ,  G01N21/211

    Abstract: The invention concerns a spectroscopic ellipsometer comprising a light source (1) emitting an optical beam, a polarizer (2) arranged on the path of the optical beam emitted by the light source, a sample holder (9) receiving the optical beam from the polarizer output, a polarisation analyser (3) designed to be traversed by the beam reflected by the sample to be analysed, a detection set which receives the beam from the analyser output and which comprises a monochromator (5) and a photodetector (4), means (6) for processing the signal in said detection set output, which include an electronic counter (13). Cooling means (12) maintain the detection set at a temperature lower than room temperature, minimising the noise of the detector so as to be constantly in the condition of minimum photon noise. The optimal measuring condition of the ellipsometer is reached by minimising all the sources of noise (lamps, detection, ambient noise).

    Polarimeter
    230.
    发明公开
    Polarimeter 审中-公开
    旋光仪

    公开(公告)号：EP1118847A2

    公开(公告)日：2001-07-25

    申请号：EP01100646.7

    申请日：2001-01-11

    Applicant: A. Krüss Optronic GmbH

    Inventor： Pannhoff, Helge

    IPC: G01J4/00

    CPC classification number: G01N21/21 ,  G01J4/00

    Abstract: Die Erfindung bezieht sich auf ein Polarimeter zur Ermittlung von Eigenschaften einer Probe über Phasenauflösung und Fourieranalyse mit einer Quelle (1, 2, 3, 4, 5) für linear polarisierte Strahlung, einer Probenkammer zur Aufnahme der Polarimeterröhre (6) für die Probe, einen Analysator (7), der am Ausgang der Probenkammer (6) angeordnet ist, der das von der Probe optisch beeinflusste Licht erhält und der kontinuierlich drehbar ist, einen Motor mit Inkrementalgeber (10) als Antrieb für den Analysator (7), einen Detektor (9) mit Linse (8), der das vom Analysator (7) ausgegebene Signal hinsichtlich Analysatorstellung und Intensitätssignal erfasst und an einen Analog-Digitalwandler (11) abgibt, der von dem Inkrementalgeber (19) getriggert wird, und einen Rechner (12), der das Ausgangssignal vom Analog-Digitalwandler (11) erhält und über eine Fourieranalyse eine Aussage über die Eigenschaften der Probe macht.

    Abstract translation: 卤素灯（2）将光照射到室（6）中的样品上。 从样品反射的光被分析仪（7）接收，并送入强度检测器（9）。 检测器的输出由增量式传感器触发的模拟数字转换器（11）转换成数字信号。 数字信号被馈送到计算机（12），以获得频率信息。

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