公开(公告)号：US08564780B2

公开(公告)日：2013-10-22

申请号：US12844851

申请日：2010-07-28

Applicant: Phillip Walsh ,  Dale Harrison

Inventor： Phillip Walsh ,  Dale Harrison

IPC: G01N21/55

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/36 ,  G01N21/274 ,  G01N21/4788

Abstract: A method and apparatus is disclosed for using below deep ultra-violet (DUV) wavelength reflectometry for measuring properties of diffracting and/or scattering structures on semiconductor work-pieces is disclosed. The system can use polarized light in any incidence configuration, but one technique disclosed herein advantageously uses un-polarized light in a normal incidence configuration. The system thus provides enhanced optical measurement capabilities using below deep ultra-violet (DUV) radiation, while maintaining a small optical module that is easily integrated into other process tools. A further refinement utilizes an r-θ stage to further reduce the footprint.

Abstract translation: 公开了一种用于使用下面的深紫外（DUV）波长反射测量法来测量半导体工件上的衍射和/或散射结构的性质的方法和装置。 该系统可以使用任何入射配置的偏振光，但是本文公开的一种技术有利地使用正常入射配置中的非偏振光。 因此，该系统使用下面的深紫外（DUV）辐射提供增强的光学测量能力，同时保持容易集成到其它工艺工具中的小型光学模块。 进一步的细化使用r-θ级来进一步减少占地面积。

公开(公告)号：US08400637B2

公开(公告)日：2013-03-19

申请号：US13540109

申请日：2012-07-02

Applicant: Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

IPC: G01N21/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/1293

Abstract: The present subject matter relates to an apparatus and related method of high-speed analysis of product samples during production of the product. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward optical detectors. Signals from the optical detectors are compared to determine characteristics of the product under analysis. Temperature within the monitoring system may be monitored in order to provide compensation for the signals produced by the optical detectors. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本发明涉及在产品生产过程中产品样品的高速分析的装置和相关方法。 光被引导到被分析产品的一部分，从产品反射或透射到光学检测器。 将来自光学检测器的信号进行比较，以确定正在分析的产品的特性。 可以监视监视系统内的温度，以便为由光学检测器产生的信号提供补偿。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US20120190034A1

公开(公告)日：2012-07-26

申请号：US13388885

申请日：2010-08-05

Applicant: Hideji Tajima

Inventor： Hideji Tajima

IPC: G01N21/76 ,  C12M1/34

CPC classification number: G01N21/6452 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0235 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/32 ,  G01J3/4406 ,  G01J2003/1213 ,  G01N21/253 ,  G01N35/028 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833 ,  G02B6/4298

Abstract: Disclosed is a highly reliable optical fiber measurement device and measurement method having a simple and compact structure. The device includes a planar liquid holder having a plurality of liquid holding portions arranged along a flat face; a plurality of light receiving optical fibers for transmitting fluorescence generated in the liquid holding portions; a plurality of light emitting optical fibers for transmitting excitation light into the liquid holding portions; a measurement head capable of being positioned in the each liquid holding portion while supporting a plurality of measurement ends having a bundle of one light receiving end of the light receiving optical fibers and one light emitting end of light emitting optical fibers; a light reception selecting element that, by sequentially selecting one by one from plural the light receiving optical fibers and sequentially selecting one by one from plural kinds of wavelength or wavelength bands, sequentially guides the light of the selected wavelength or wavelength band of the fluorescence received by the selected light receiving optical fibers to one photoelectric element; and a photoelectric element for sequentially conducting photoelectric conversion on the guided fluorescence.

Abstract translation: 公开了一种具有简单紧凑结构的高度可靠的光纤测量装置和测量方法。 该装置包括具有沿着平坦表面布置的多个液体保持部分的平面液体保持器; 多个用于透射在液体保持部分中产生的荧光的光接收光纤; 用于将激发光发射到液体保持部分中的多个发光光纤; 测量头，其能够定位在每个液体保持部分中，同时支撑具有光接收光纤的一个光接收端的束和发光光纤的一个发光端的多个测量端; 光接收选择元件，通过从多个光接收光纤中逐一选择并从多种波长或波长带中逐个选择一个顺序地选择所接收的荧光的所选波长或波长带的光， 通过所选择的光接收光纤到一个光电元件; 以及用于对引导荧光进行光电转换的光电元件。

公开(公告)号：US20120026484A1

公开(公告)日：2012-02-02

申请号：US13196802

申请日：2011-08-02

Applicant: Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

IPC: G01N21/01

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/1293

Abstract: The present subject matter relates to methods of high-speed analysis of product samples during production of the product. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward optical detectors. Signals from the optical detectors are compared to determine characteristics of the product under analysis. Temperature within the monitoring system may be monitored in order to provide compensation for the signals produced by the optical detectors. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本主题涉及产品生产过程中产品样品的高速分析方法。 光被引导到被分析产品的一部分，从产品反射或透射到光学检测器。 将来自光学检测器的信号进行比较，以确定正在分析的产品的特性。 可以监视监视系统内的温度，以便为由光学检测器产生的信号提供补偿。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US08054453B2

公开(公告)日：2011-11-08

申请号：US12876242

申请日：2010-09-07

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01J3/00

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

公开(公告)号：US08049881B2

公开(公告)日：2011-11-01

申请号：US12094469

申请日：2006-11-27

Applicant: Michael L. Myrick ,  Robert P. Freese ,  John C. Blackburn ,  Ryan J. Priore

Inventor： Michael L. Myrick ,  Robert P. Freese ,  John C. Blackburn ,  Ryan J. Priore

IPC: G01J3/40

CPC classification number: G01J3/08 ,  A61K8/046 ,  A61K8/25 ,  A61K8/26 ,  A61K8/44 ,  A61Q11/00 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0291 ,  G01J3/28 ,  G01N21/274 ,  G01N21/31

Abstract: A method of arranging and utilizing a multivariate optical computing and analysis system includes transmitting light from a light source; reflecting the light from the sample; directing a portion of the light reflected from the sample with a beamsplitter; and arranging an optical filter mechanism in a normal incidence orientation to receive the light reflected from the sample, the optical filter mechanism configured to filter and measure data carried by the light reflected from the sample.

Abstract translation: 一种布置和利用多变量光学计算和分析系统的方法，包括从光源发射光; 反映样品的光; 用分束器引导从样品反射的一部分光; 以及将法兰入射方向的滤光器机构布置成接收从样品反射的光，所述滤光器机构被配置为过滤和测量由样品反射的光携带的数据。

公开(公告)号：US20100328648A1

公开(公告)日：2010-12-30

申请号：US12876242

申请日：2010-09-07

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01N21/55 ,  G01J3/00

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.

Abstract translation: 提供了一种光谱系统，其被优化用于在VUV区域中的操作并且能够在DUV-NIR区域中表现良好。 此外，该系统还包含一个光学模块，该模块提供可用于VUV和DUV-NIR中优化的可选择的源和检测器。 同样，光学模块提供通用的传送和收集光学器件，以使得能够使用类似的光点特性来收集两个光谱区域中的测量。 该模块还提供了快速参考测量数据的方法，以确保实现高度可重复的结果。 该模块还在VUV源，样品室和VUV检测器之间提供受控的环境，其作用是以可重复的方式限制VUV光子的吸收。 除了DUV-NIR波长之外，使用包含VUV波长的宽带数据集使得可以有意义地表征更多种类的材料。 可以利用基于阵列的检测仪器来允许同时收集更大的波长区域。

公开(公告)号：US20100245650A1

公开(公告)日：2010-09-30

申请号：US12748035

申请日：2010-03-26

Applicant: Douglas Kreysar ,  Ronald F. Rykowski ,  Richard E. Albrecht

Inventor： Douglas Kreysar ,  Ronald F. Rykowski ,  Richard E. Albrecht

IPC: H04N5/335

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0235 ,  G01J3/08 ,  G01J3/50 ,  G01J3/505 ,  G01J3/51

Abstract: The present disclosure is directed to imaging device, systems, and methods for collecting optical data for use with spectrometers. An imaging device configured in accordance with one aspect of the disclosure includes a lens configured to introduce light into the imaging device along an optical path, and an image sensor spaced apart from the lens and configured to receive at least a portion of the light along the optical path. The imaging device further includes a filter assembly positioned between the lens and the image sensor, and a reflector or mirror carried by the filter assembly. The filter assembly is configured to move the reflector between first and second positions. In the first position the reflector is at least partially aligned with the optical path and reflects at least a portion of the light to a corresponding light input for a spectrometer. In the second position the reflector is positioned outside of the optical path.

Abstract translation: 本公开涉及用于收集用于光谱仪的光学数据的成像装置，系统和方法。 根据本公开的一个方面构造的成像装置包括被配置为沿着光路将光引入成像装置的透镜以及与透镜间隔开的并被配置为沿着光路接收光的至少一部分的图像传感器 光路。 成像装置还包括位于透镜和图像传感器之间的过滤器组件以及由过滤器组件承载的反射器或反射镜。 过滤器组件被配置为在第一和第二位置之间移动反射器。 在第一位置，反射器至少部分地与光路对准，并且将至少一部分光反射到用于光谱仪的相应光输入。 在第二位置，反射器位于光路的外侧。

公开(公告)号：US20100141952A1

公开(公告)日：2010-06-10

申请号：US12447591

申请日：2007-11-01

Applicant: Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins ,  Terrell Teague ,  William Soltmann

Inventor： Michael L. Myrick ,  Robert P. Freese ,  David L. Perkins ,  Terrell Teague ,  William Soltmann

IPC: G01J3/45

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/08 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/128 ,  G01N2201/1293

Abstract: The present subject matter relates to methods of high-speed analysis of product samples. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward an optical detector. Signals for the detector are compared with reference signals based on a portion of the illuminating light passing through a reference element to determine characteristics of the product under analysis. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本主题涉及产品样品的高速分析方法。 光被引导到被分析的产品的一部分，从产品反射或透过产品朝向光学检测器。 基于通过参考元件的照明光的一部分，将检测器的信号与参考信号进行比较，以确定被分析产品的特性。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US20100091277A1

公开(公告)日：2010-04-15

申请号：US12574213

申请日：2009-10-06

Applicant: Kazuo YAMAUCHI

Inventor： Kazuo YAMAUCHI

IPC: G01N21/74 ,  G01J3/30

CPC classification number: G01N21/3103 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/08 ,  G01J3/42

Abstract: The present invention has been accomplished to provide an atomic absorption spectrophotometer capable of obtaining measurement data always in the state where the lowest detection limit performance is optimized, without depending on the frequency of the power supply. In a control program which runs on the microcomputer chip 42 mounted on the atomic absorption spectrophotometer 110, a plurality of lighting periods of the light sources 11 and 12 and extraction periods of the sampling data are memorized, whose lowest detection limit performance are optimized for the frequencies (50 Hz and 60 Hz) of the AC power source for driving the AC motor 22. In using the apparatus, by the control program, the frequency of the power source used in this apparatus is identified, the lighting period and sampling data extraction period corresponding to the identified frequency and the measurement mode that a user of the apparatus has previously set are selected from among a plurality of memorized values, and the appropriate lighting period is set to the hardware (PLD 43). Accordingly, without depending on the frequency, it is possible to obtain measurement data always in the state where the lowest detection limit performance is optimized.

Abstract translation: 本发明的目的是提供一种原子吸收分光光度计，其能够在不依赖于电源的频率的情况下始终以最低检测极限性能优化的状态获得测量数据。 在安装在原子吸收分光光度计110上的微计算机芯片42上运行的控制程序中，存储光源11和12的多个点亮周期和采样数据的提取周期，其最低检测限性能针对 用于驱动AC电动机22的AC电源的频率（50Hz和60Hz）。在使用该装置时，通过控制程序识别在该装置中使用的电源的频率，照明周期和采样数据提取 从多个存储值中选择对应于所识别的频率和装置的用户预先设置的测量模式的周期，并且将适当的发光周期设置到硬件（PLD 43）。 因此，在不依赖于频率的情况下，可以在最低检测极限性能优化的状态下始终获得测量数据。