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    A FILTER
    245.
    发明公开
    A FILTER 审中-公开
    过滤器

    公开(公告)号：EP1234164A1

    公开(公告)日：2002-08-28

    申请号：EP00979760.6

    申请日：2000-11-28

    Applicant: ECOLOTROL, INC.

    Inventor： NOVIKOV, Valeri Alexey

    IPC: G01J3/447

    CPC classification number: G01J3/447 ,  G01J3/433 ,  G01N21/3504

    Abstract: The present invention relates to a controlled interference polarization spectrometer for determining the concentration of a substance within a sample. The spectrometer includes first and second filters for filtering first and second portions of radiation transmitted by the sample. The filters having a number of pass bands at wavelengths corresponding to absorption peaks in the absorption spectrum of the substance to be detected, and are responsive to an applied signal to modulate the wavelengths of the pass bands in respective first and second directions. A detector detects the filtered radiation and determines the difference in the maximum and the minimum intensities of the radiation transmitted by the sample to thereby determine the concentration of the substance.

    Abstract translation: 本发明涉及用于确定样品内物质浓度的受控干涉偏振光谱仪。 光谱仪包括第一和第二滤光器，用于过滤由样品透射的辐射的第一和第二部分。 这些滤光器在与待检测物质的吸收光谱中的吸收峰值相对应的波长处具有多个通带，并且响应于所施加的信号来调制各个第一和第二方向上的通带的波长。 检测器检测经过滤的辐射并确定由样品透射的辐射的最大强度和最小强度的差异，从而确定物质的浓度。

    Tissue chromophore measurement system
    246.
    发明公开
    Tissue chromophore measurement system 失效
    Gewebe发色团Mess系统

    公开(公告)号：EP0816829A2

    公开(公告)日：1998-01-07

    申请号：EP97108773.9

    申请日：1997-06-02

    Applicant: HUTCHINSON TECHNOLOGY, INC.

    Inventor： Anderson, David L. ,  Houk, Galen D. ,  Lewandowski, Mark S. ,  Myers, Dean E. ,  Ortner, Joseph P.

    IPC: G01N21/31

    CPC classification number: G01J3/433 ,  A61B5/14551 ,  A61B5/14553 ,  A61B5/1495 ,  A61B5/7264 ,  A61B2562/0242 ,  G01N21/314

    Abstract: A method and apparatus for determining concentrations of a predetermined tissue chromophore with respect to the total concentration of a different, but related tissue chromophore within a predetermined tissue of interest which may, but need not have physiological characteristics observed in blood-containing tissue. The aforesaid is achieved by first measuring an absorbance spectrum for the tissue at a multiplicity of predetermined wavelengths. The absorbance spectrum is transformed into a second derivative spectrum which is subsequently scaled, rendering a spectrum which is robust to changes in amplitude and constant slope bias as well as to changes in optical pathlength and total chromophore concentration. Selected spectra obtained from the scaled second derivative spectrum is manipulated within a neural network to generate quantified output data values representative of actual concentrations of the predetermined tissue chromophore with respect to the total concentration of the different, but related chromophore.

    Abstract translation: 一种用于确定预定组织发色团的浓度的方法和装置，其相对于感兴趣的预定组织内的不同但相关的组织发色团的总浓度，其可能但不必具有在含血液组织中观察到的生理特征。 上述是通过首先以多种预定波长测量组织的吸收光谱来实现的。 吸收光谱被转换成随后缩放的二阶导数光谱，使得对振幅和恒定斜率偏差变化以及光程长度和总发色团浓度变化是鲁棒的光谱。 从缩放的二阶导数光谱获得的选定光谱在神经网络内被操纵以产生代表预定组织发色团的实际浓度的量化输出数据值，相对于不同但相关的发色团的总浓度。

    Method for stabilizing the wavelength in a laser spectrometer system
    247.
    发明公开
    Method for stabilizing the wavelength in a laser spectrometer system 失效
    一种用于在激光光谱仪系统稳定波长的方法

    公开(公告)号：EP0768524A3

    公开(公告)日：1997-10-08

    申请号：EP96402129.9

    申请日：1996-10-07

    Applicant: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE

    Inventor： Mc Andrew, James J.F. ,  Inman, Ronald S.

    IPC: G01N21/39

    CPC classification number: G01N21/39 ,  G01J3/433 ,  G01N21/3504

    Abstract: Provided is a novel method for wavelength stabilization in a laser spectrometer useful in spectroscopic measurement. According to the method, an initial scan is performed which comprises applying a current or voltage signal to a laser. In the scan, a current or voltage signal value is increased incrementally from a minimum signal value to a maximum signal value over a predetermined total number of signal values. The minimum and maximum signal values are selected such that an absorption feature of a species to be measured falls within the scan bounded by the minimum and the maximum signal values. The relative position of the absorption feature is determined with respect to the applied signal values in the previous scan by analysis of detector outputs corresponding to the signal values in the previous scan. An absorption value corresponding to the absorption feature is determined, and the concentration of the species to be measured can optionally be calculated. A new current or voltage signal scan is defined by resetting the signal values from the previous scan, so as to set the absorption feature in the new current or voltage scan in the same relative position with respect to the applied signal values as in the previous scan. An additional scan is performed, and the steps can be repeated until completion of the spectroscopic measurement. The inventive method allows for automatic correction and stabilization of wavelength in real time without the need for significant computation beyond what is typically required for determining the concentration of the species of interest from the spectroscopic data. Particular applicability is found in tunable diode laser absorption spectroscopy (TDLAS).

    System for monitoring chamber exit gases by means of absorption spectroscopy, and semiconductor processing system incorporating the same
    248.
    发明公开
    System for monitoring chamber exit gases by means of absorption spectroscopy, and semiconductor processing system incorporating the same 失效
    系统用于通过吸收光谱来监控腔室废气，因此搭载半导体处理系统

    公开(公告)号：EP0768525A2

    公开(公告)日：1997-04-16

    申请号：EP96402130.7

    申请日：1996-10-07

    Applicant: L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE

    Inventor： Mc Andrew, James J.F. ,  Wang, Hwa-Chi ,  Jurcik, Benjamin J.

    IPC: G01N21/39 ,  G01N21/35

    CPC classification number: G01N21/031 ,  C23C16/4412 ,  G01J3/433 ,  G01N21/3504 ,  G01N21/3554 ,  G01N21/39

    Abstract: Provided is a novel chamber effluent monitoring system. The system comprises a chamber having an exhaust line connected thereto. The exhaust line includes a sample region, wherein substantially all of a chamber effluent also passes through the sample region. The system further comprises an absorption spectroscopy measurement system for detecting a gas phase molecular species. The measurement system comprises a light source and a main detector in optical communication with the sample region through one or more light transmissive window. The light source directs a light beam into the sample region through one of the one or more light transmissive window. The light beam passes through the sample region and exits the sample region through one of the one or more light transmissive window. The main detector responds to the light beam exiting the sample region. The system allows for in situ measurement of molecular gas impurities in a chamber effluent, and in particular, in the effluent from a semiconductor processing chamber. Particular applicability is found in semiconductor manufacturing process control and hazardous gas leak detection.

    Abstract translation: 本发明提供一种新颖的腔室的流出物监测系统。该系统包括具有与其连接的排气线路的腔室。 排气管线包括样品区域，worin基本上所有的腔室的流出物穿过，从而样品区。 吸收光谱测量系统的用于检测各种气相分子形式的系统，还包括。 该测量系统包括光源和通过一个或多个光透射窗在光学通信的主检测器与所述样本区域。 光源通过所述一个或多个光透射窗口的一个ausrichtet光束到样品区。 光束穿过样品区域，并通过一个或多个光透射窗口的一个离开所述样本区域。 主检测器响应该光束离开样品区。 该系统允许在在腔室中流出的分子气体杂质的原位测量，并且特别地，在从半导体处理腔室的流出物。 特别适用于半导体制造过程中控制有害气体泄漏检测发现。

    INFRARED SPECTROCHEMICAL GAS ANALYSIS AND APPARATUS USED FOR THE SAME
    249.
    发明公开
    INFRARED SPECTROCHEMICAL GAS ANALYSIS AND APPARATUS USED FOR THE SAME 失效
    SPEKTROCHEMISCHE INFRAROT-GASANALYSE SOWIE EINRICHTUNGDAFÜR

    公开(公告)号：EP0706042A1

    公开(公告)日：1996-04-10

    申请号：EP95913317.4

    申请日：1995-03-22

    Applicant: NIPPON SANSO CORPORATION

    Inventor： ISHIHARA, Yoshio ,  MASUSAKI, Hiroshi ,  WU, Shang-Qian ,  MATSUMOTO, Koh

    IPC: G01N21/35 ,  G01N21/39

    CPC classification number: G01N21/39 ,  G01J3/433 ,  G01N21/3504 ,  G01N21/3554 ,  G01N2021/399

    Abstract: A method and apparatus for measuring the concentration of a very small amount of impurities in an object gas by an infrared spectroscopic analysis using a semiconductor laser. In order to carry out the analysis with a high sensitivity and a high accuracy, an object gas is introduced into a sample cell (5) and the cell is evacuated by a vacuum pump (16). An infrared beam of a wavelength in a region in which a high absorption peak due to impurities appears is emitted from a semiconductor laser (1) and passed through the sample cell (5) and a reference sample cell (8) in which impurities alone are sealed to measure a differential value absorption spectrum. The impurities are identified by comparing the spectrum of the object gas with that of impurities alone and determining a plurality of absorption peaks concerning the impurities, and the quantity of the impurities is determined on the basis of the absorption intensity at the highest peak. When impurity gas molecules form clusters in the object gas, the light of not less than 0.5 eV is applied to the clusters to dissociate the same, and the analysis of the gas is then carried out. This invention is suitably utilized, especially, for analyzing a very small amount of impurities in a semiconductor material gas.

    Abstract translation: 一种通过使用半导体激光的红外光谱分析来测量目标气体中非常少量的杂质的浓度的方法和装置。 为了以高灵敏度和高精度进行分析，将目标气体引入样品池（5）中，并且通过真空泵（16）将单元抽真空。 从半导体激光器（1）发射出现杂质出现高吸收峰的区域中的波长的红外光束，并通过样品池（5）和仅含有杂质的参考样品池（8） 密封以测量差分值吸收光谱。 通过将目标气体的光谱与单独的杂质的光谱进行比较来确定杂质，并且确定关于杂质的多个吸收峰，并且基于最高峰处的吸收强度来确定杂质的量。 当杂质气体分子在物体气体中形成团簇时，将不小于0.5eV的光施加到簇上以使其解离，然后进行气体分析。 本发明特别适用于分析半导体材料气体中非常少量的杂质。

    Non-invasive determination of glucose concentration in body of patient
    250.
    发明公开
    Non-invasive determination of glucose concentration in body of patient 失效
    Unblutige Bestimmue des Glukose-Gehaltes imKörpereines Patienten。

    公开(公告)号：EP0548418A1

    公开(公告)日：1993-06-30

    申请号：EP91311421.1

    申请日：1991-12-09

    Applicant: DIASENSE, INC.

    Inventor： Barnes, Russell H. ,  Brasch, Jimmy W.,Sr. ,  Purdy, David L. ,  Lougheed, William D.

    IPC: A61B5/00 ,  G01J3/433

    CPC classification number: A61B5/1455 ,  A61B5/14532 ,  G01J3/433

    Abstract: Radiation in the near infrared over a limited range of wavelengths about 1660 nanometers is projected on a portion (31) of the body, for example, the ear, of the patient. The resulting radiation emitted by the portion, either scattered from the portion or transmitted after absorption and scattered by the portion, is processed to derive an expression of the resulting radiation as a function of the wavelength. The second derivative of this function over a very narrow range of this function between 1640 and 1670 nanometers is expanded and the glucose concentration is determined from the magnitude, or intensity, of the scattered or transmitted radiation at the maximum or minimum point of this derivative. Also disclosed is apparatus for non-invasive determination of glucose concentration in the patient. Radiation in the near infrared is transmitted through a first fiber-optic radiation conductor (29) to the outer surface of a portion (31) of the patient's body, penetrating into the portion. A second fiber-optic conductor (33) transmits the resulting radiation emitted from the portion to data processing means (23) which produces the desired second derivative as a function of the wavelength of the incident radiation. The processor includes a spectrum analyzer (21) which produces a spectrum of the resulting radiation.

    Abstract translation: 在约1660纳米的有限的波长范围内的近红外线的辐射被投射在患者的身体（例如耳朵）的部分（31）上。 由该部分发射的或者从该部分散射或在吸收之后透射并由该部分散射的部分产生的辐射被处理以导致所得辐射的表达作为波长的函数。 在1640和1670纳米之间的这个功能的非常窄的范围内，该函数的二阶导数被扩展，并且葡萄糖浓度是根据该导数的最大或最小点处的散射或透射辐射的大小或强度来确定的。 还公开了用于非侵入性测定患者葡萄糖浓度的装置。 近红外线的辐射通过第一光纤辐射导体（29）透射到患者身体的部分（31）的外表面，从而穿透该部分。 第二光纤导体（33）将从该部分发射的所得到的辐射传输到数据处理装置（23），该数据处理装置产生作为入射辐射的波长的函数的期望二次导数。 该处理器包括频谱分析仪（21），其产生所得辐射的频谱。

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