公开(公告)号：JP2002270576A

公开(公告)日：2002-09-20

申请号：JP2001062284

申请日：2001-03-06

Applicant: TOKYO ELECTRON LTD

Inventor： IIJIMA ETSUO ,  TSUCHIYA HIROSHI

IPC: H05H1/46 ,  B01J19/08 ,  B05D1/04 ,  B05D1/08 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/311 ,  H01L21/3213 ,  H01L21/68 ,  H01L21/683 ,  H05H1/26

Abstract: PROBLEM TO BE SOLVED: To suppress adsorption of particles while controlling the etching amount accurately. SOLUTION: When an end point detector 17 (EPD) detects an end point (t5), RF power (Bottom RF) from a high frequency power supply 12 is turned off (t5), supply of He gas 14 to the rear surface of a wafer W is interrupted (t5), and a DC high voltage power supply 13 (HV) is turned off (t6) under a state (t5) where RF power (Top RF) from a high frequency power supply 11 is controlled within such a range as etching does not progress but plasma discharge can be sustained.

公开(公告)号：JP2002080956A

公开(公告)日：2002-03-22

申请号：JP2000272233

申请日：2000-09-07

Applicant: DAIHEN CORP ,  NAKAGAWA MIYOSHI

Inventor： KOBAYASHI MITSUTOMO ,  MASUSHIRO KOJI ,  NAKAGAWA MIYOSHI

IPC: B05D1/02 ,  B05D1/08 ,  C23C4/02 ,  C23C4/12 ,  C23C4/18

Abstract: PROBLEM TO BE SOLVED: To provide a continuous thermal-spraying method for an inclined thermal- spraying surface having sharply changing thermal-spraying surface in a shape having the edge part or the corner part. SOLUTION: In the thermal-spraying method for the inclined thermal-spraying surface having the sharply changing thermal-spraying surface, composed of a pre- process containing a blasting treatment for roughening the surface of the material to be thermal-sprayed, a thermal-spraying process for forming the thermal-sprayed film on the rough-surfaced material to be thermal-sprayed and a post-process containing a sealing treatment, such as the reinforcement of the thermal-sprayed film, the correction of finish dimensional precision, the shifting course of control points for performing the thermal-spraying treatment, is calculated with a robot control unit from signals of the shape condition on the sloping thermal-spraying surface. The signal of the sharply changing angle on the thermal-spraying surface, is inputted, and the advancing angle, the retreating angle and the shifting speed of the thermal-spraying gun are decided corresponding to the shifting course to perform the thermal-spraying treatment with the articulated robot.

公开(公告)号：JP3231199B2

公开(公告)日：2001-11-19

申请号：JP31853894

申请日：1994-12-21

IPC: B05D1/08 ,  B22D19/00

公开(公告)号：JP3027214B2

公开(公告)日：2000-03-27

申请号：JP7490291

申请日：1991-04-08

IPC: B05D1/08 ,  C23C4/02 ,  C23C4/067 ,  C23C4/18 ,  F01D5/02 ,  F01D5/28 ,  F01D25/00

Abstract: In a process for coating the impeller blades of a rotating heat engine, the said blades are subjected in the operating state of the engine, i.e. "on line", to a first cleaning process, the appropriate agent for this, which depends on whether the blades are uncoated or coated, being mixed in the air stream to the compressor. After switching off the engine and opening it, the impeller blades are subjected in the stationary state, that is in the bladed state of the corresponding rotor or stator, to a preparation process for the following treatment stage. This preparation process may, for example, comprise, if required, dipping the blades into an oscillating erosive bath. The actual coating of the blades is performed by means of a high-speed flame spraying process, in which the protective layer is sprayed onto the surface of the base material at a particle speed of at least 300 m/s. After this, the blades are also subjected to a post-treatment, which if required serves to reduce the surface roughness and/or is provided for applying a top layer.

公开(公告)号：JP2973449B2

公开(公告)日：1999-11-08

申请号：JP4670390

申请日：1990-02-27

Applicant: ISHIKAWAJIMA HARIMA JUKOGYO KK

Inventor： YOSHIDA KAZUO

IPC: B05D7/14 ,  B05D1/08 ,  C23C4/18

公开(公告)号：JPH09256135A

公开(公告)日：1997-09-30

申请号：JP5811996

申请日：1996-03-14

Applicant: UNITED CONTAINER MACH GROUP IN

Inventor： GUREN FURANSHISU HAIDO

IPC: B05D1/08 ,  C23C4/10 ,  C23C4/12

公开(公告)号：JPH09225378A

公开(公告)日：1997-09-02

申请号：JP3497296

申请日：1996-02-22

Applicant: AISAN IND

Inventor： FUJINO MINEO

IPC: B05D1/08 ,  C23C4/12

Abstract: PROBLEM TO BE SOLVED: To prevent the back-flow of combustion flame immediately after the end of flame coating and the deterioration of the end part of a flame spray gun. SOLUTION: A flame spray gun is equipped with a flame spray material supply route 100 in which a flame spray material protrusion port 101, a compressed air discharge opening 301, and a combustion gas outflow opening 201 are formed respectively, a compressed air supply route 300, and a combustion gas supply route 200, the discharge opening 301 is positioned around the protrusion port 101, and the opening 201 is located between the port 101 and the opening 201. A vacuum route 400 has a compressed air introduction port 401 which opens to the route 300 and a compressed air discharge opening 402 which opens to the route 100, the opening 402 is located closer to the front end than the port 401, and a straight line route is installed between the port 401 and the opening 402.

公开(公告)号：JPH09502769A

公开(公告)日：1997-03-18

申请号：JP50935295

申请日：1994-09-14

IPC: B05D1/08 ,  B22F1/02 ,  B22F9/02 ,  C23C4/08

公开(公告)号：JP2530240B2

公开(公告)日：1996-09-04

申请号：JP5853690

申请日：1990-03-09

Applicant: NODA CORP

Inventor： HONDA TOMYASU

IPC: B32B15/14 ,  B05D1/08 ,  B32B9/00 ,  B32B15/10 ,  C23C4/08

公开(公告)号：JP2520812B2

公开(公告)日：1996-07-31

申请号：JP1055892

申请日：1992-01-24

Applicant: DAINIPPON TORYO KK

Inventor： FURUYA AKIO ,  HASUI KENJI

IPC: B05D1/08 ,  B05D1/36 ,  B05D5/02 ,  B05D7/14 ,  B05D7/24