公开(公告)号：JP2009226499A

公开(公告)日：2009-10-08

申请号：JP2008071571

申请日：2008-03-19

Applicant: Toshiba Corp ,  株式会社東芝

Inventor： OBATA SUSUMU ,  INOUE MICHINOBU ,  MIYAGI TAKESHI

IPC: B81B3/00 ,  B81C1/00 ,  H01G5/16 ,  H01H49/00 ,  H01H59/00

CPC classification number: B81B3/0078 ,  B81B2201/016 ,  B81B2203/0109 ,  H01H1/50 ,  H01H3/60 ,  H01H59/0009 ,  Y10T29/49002

Abstract: PROBLEM TO BE SOLVED: To provide a micromechanical apparatus can reduce noise of an output signal by constituting it to easily settle vibration of a micromachine; and a manufacturing method of the micromechanical apparatus. SOLUTION: This micromechanical apparatus 1 is provided with: a substrate 11 having a signal wire 15 on its principal surface; the micromachine 16 that is mounted to the principal surface of the substrate 11, constituted from a conductive material into a beam-like shape, is elastically deformed to approach to or separate from the signal wire by the operation of an electric field, and changes its electric characteristics with the deformation; a deformation regulation section 18 that is constituted from a material having a higher coefficient of viscosity than that of the conductive material, installed at an opposite side to the signal wire 15 of the micromachine 16 and regulates the deformation of the micromachine 16 separating from the signal wire 15; and sealing bodies 21 and 22 that are provided on the principal surface of the substrate 11 and cover the micromachine via a hollow part 17. COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：为了提供一种微机械装置，可以通过构成微机械的振动来降低输出信号的噪声; 以及微机械装置的制造方法。 解决方案：该微机械装置1设置有：在其主表面上具有信号线15的基板11; 安装到基板11的主表面的微机械16由导电材料构成为波束形状，通过电场的操作而弹性变形以接近信号线或与信号线分离，并且将其改变为 电特性随变形; 变形调节部分18，其由具有比导电材料更高的粘度系数的材料构成，该材料安装在与微型机器16的信号线15相反的一侧，并调节与信号分离的微型机器16的变形 电线15; 以及设置在基板11的主表面上并通过中空部分17覆盖微机械的密封体21和22.版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2009510785A

公开(公告)日：2009-03-12

申请号：JP2008533549

申请日：2006-09-27

Applicant: コーネル・リサーチ・ファウンデーション・インコーポレーテッド ,  サムスン エレクトロニクス カンパニー リミテッド

Inventor： サンディップ・ティワリ ,  チュン−ウー・キム

IPC: H01L27/10 ,  B81B3/00 ,  H01L27/28 ,  H01L51/05 ,  H01L51/30

CPC classification number: H01L27/115 ,  B81B3/0072 ,  B81B2201/016 ,  B82Y10/00 ,  G11C13/0014 ,  G11C13/0016 ,  G11C13/025 ,  G11C23/00 ,  G11C2213/14 ,  G11C2213/17 ,  G11C2213/77 ,  H01H9/547 ,  H01H59/0009 ,  H01H61/0107 ,  H01L21/28273 ,  H01L27/112 ,  H01L29/66825 ,  H01L29/785

Abstract: Mechanical devices having bistable positions are utilized to form switches and memory devices. The devices are actuatable to different positions and may be coupled to a transistor device in various configurations to provide memory devices. Actuation mechanisms include electrostatic methods and heat. In one form, the mechanical device forms a gate for a field effect transistor. In a further form, the device may be a switch that may be coupled to the transistor in various manners to affect its electrical characteristics when on and off. The memory switch in one embodiment comprises side walls formed with tensile or compressive films. A cross point switch is formed from a plurality of intersecting conductive rows and columns of conductors. Actuatable switches are positioned between each intersection of the rows and columns such that each intersection is independently addressable.

公开(公告)号：JP2006263905A

公开(公告)日：2006-10-05

申请号：JP2005336886

申请日：2005-11-22

Applicant: Commissariat A L'energie Atomique ,  Stmicroelectronics Sa ,  エステーミクロエレクトロニクス ソシエテ アノニム ,  コミサリア、ア、レネルジ、アトミクCommissariat A L’Energie Atomique

Inventor： CASSET FABRICE ,  SEGUENI KARIM ,  DE GRAVE ARNAUD ,  ABELE NICOLAS

IPC: B81B3/00 ,  B06B1/06 ,  B81C1/00 ,  H02N11/00 ,  H03B5/30 ,  H03H3/007 ,  H03H9/24

CPC classification number: H03H9/2463 ,  B81B3/007 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/0118 ,  H03H3/0076 ,  H03H9/2447

Abstract: PROBLEM TO BE SOLVED: To provide an easy-to-manufacture micro electromechanical system having high deformability.
SOLUTION: This micro electromechanical system has a beam 1, and an electrode 10 coupled with the beam by an electrostatic interaction. The beam is configured to be elastically deformed by bending, and has an approximately constant cross section. The beam 1 extends across an overall length L of the beam, and comprises four flat faces P
1 -P
4 having thickness smaller than outside dimensions w, t of the cross section. Therefore, bending vibration frequency of the beam 1 becomes larger than that of a solid beam with the same outside dimension. This micro electromechanical system is suitable for the usage requiring a very short transition time, namely for manufacturing a high frequency oscillator and resonator.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 要解决的问题：提供具有高变形性的易于制造的微机电系统。 解决方案：该微机电系统具有光束1和通过静电相互作用与光束耦合的电极10。 梁被构造成通过弯曲弹性变形，并且具有大致恒定的横截面。 梁1横跨梁的整个长度L延伸，并且包括厚度小于横截面的外部尺寸w，t的四个平坦面P P 4 。 因此，梁1的弯曲振动频率变得比具有相同外部尺寸的实心梁的弯曲振动频率大。 该微机电系统适用于需要非常短的转换时间的用途，即用于制造高频振荡器和谐振器。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP3651671B2

公开(公告)日：2005-05-25

申请号：JP2001261999

申请日：2001-08-30

Applicant: 株式会社東芝

Inventor： 英之 舟木

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/00 ,  H01H13/80 ,  H01H59/00 ,  H03H3/007 ,  H03H9/24 ,  H03H9/46

CPC classification number: H03H9/462 ,  B81B3/0021 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/051 ,  H01H13/80 ,  H01H59/0009 ,  H01H2001/0078 ,  H01H2201/008 ,  H03H3/0072

公开(公告)号：JP2003062798A

公开(公告)日：2003-03-05

申请号：JP2001250915

申请日：2001-08-21

Applicant: Advantest Corp ,  株式会社アドバンテスト

Inventor： YASUOKA MASAZUMI ,  SANPEI HIROKAZU ,  MIZUNO JUN

IPC: B81B3/00 ,  B81C1/00 ,  H01H11/00 ,  H01H37/52 ,  H01H61/02

CPC classification number: H01H61/02 ,  B81B3/0024 ,  B81B2201/016 ,  B81B2203/0109 ,  B81B2203/053 ,  H01H2001/0042 ,  H01H2001/0084 ,  H01H2061/006

Abstract: PROBLEM TO BE SOLVED: To provide an extremely low power consumption switch. SOLUTION: The switch 100 has a moving part 50 whose both ends are supported. The switch 100 has a contact 70 provided at the moving part 50. The moving part 50 has a first bimetal 10 for displacing the contact in a prescribed direction corresponding to temperature and a second bimetal 20 for displacing the contact to a direction opposite to the prescribed direction corresponding to temperature.

Abstract translation: 要解决的问题：提供极低功耗开关。 解决方案：开关100具有支撑其两端的移动部件50。 开关100具有设置在移动部件50处的触点70.移动部件50具有第一双金属片10，用于使触点沿与温度相对应的规定方向移动，第二双金属片20用于将触点移向与规定的相反方向 方向对应温度。

公开(公告)号：WO2017087342A1

公开(公告)日：2017-05-26

申请号：PCT/US2016/061938

申请日：2016-11-15

Applicant: CAVENDISH KINETICS, INC.

Inventor： VAN KAMPEN, Robertus Petrus ,  KNIPE, Richard L. ,  RENAULT, Mickael ,  DASTIDER, Shibajyoti Ghosh ,  MUYANGO, Jaques Marcel

IPC: H01H59/00 ,  B81B3/00

CPC classification number: H01H59/0009 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0086 ,  B81B2201/016 ,  H01H2059/0018

Abstract: A MEMS switch contains an RF electrode 102, pull-down electrodes 104 and anchor electrodes 108 located on a substrate 101. A plurality of islands 226 are provided in the pull-down electrode and electrically isolated therefrom. On top of the RF electrode is the RF contact 206 to which the MEMS-bridge 212, 214 forms an ohmic contact in the pulled-down state. The pull-down electrodes 104 are covered with a dielectric layer 202 to avoid a short-circuit between the bridge and the pull-down electrode. Contact stoppers 224 are disposed on the dielectric layer 202 at locations corresponding to the islands 226, and the resulting gap between the bridge and the dielectric layer in the pulled-down state reduces dielectric charging. In alternative embodiments, the contact stoppers are provide within the dielectric layer 202 or disposed on the islands themselves and under the dielectric layer. The switch provides good controllability of the contact resistance of MEMS switches over a wide voltage operating range.

Abstract translation: MEMS开关包含位于衬底101上的RF电极102，下拉电极104和锚电极108.多个岛226设置在下拉电极中并与其电隔离。 在RF电极的顶部上是MEMS桥212,214在下拉状态下形成欧姆接触的RF接触206。 下拉电极104覆盖有介电层202以避免桥与下拉电极之间的短路。 接触止动件224设置在介电层202上对应于岛状物226的位置处，并且在下拉状态下桥和介电层之间的间隙减小了介电充电。 在替代实施例中，接触止动件设置在电介质层202内或设置在岛本身上和电介质层下。 该开关在宽电压工作范围内提供了MEMS开关接触电阻的良好可控性。

公开(公告)号：WO2017087339A1

公开(公告)日：2017-05-26

申请号：PCT/US2016/061934

申请日：2016-11-14

Applicant: CAVENDISH KINETICS, INC.

Inventor： VAN KAMPEN, Robertus Petrus ,  HUFFMAN, James Douglas ,  RENAULT, Mickael ,  DASTIDER, Shibajyoti Ghosh ,  MUYANGO, Jacques Marcel

IPC: H01H1/00 ,  B81B3/00 ,  B81C1/00

CPC classification number: H01H1/0036 ,  B81B3/0021 ,  B81B2201/016 ,  B81C1/00142 ,  H01H2001/0084

Abstract: The present invention generally relates to a mechanism for making a MEMS switch that has a robust RF-contact by avoiding currents to run through a thin sidewall in a via from the RF-contact to the underlying RF-electrode.

Abstract translation: 本发明总体上涉及一种用于通过避免电流穿过通孔中的薄侧壁从RF接触件到下面的RF接触件来制造具有稳健RF接触的MEMS开关的机构， 电极

公开(公告)号：WO2013184223A1

公开(公告)日：2013-12-12

申请号：PCT/US2013/031980

申请日：2013-03-15

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： BACHMAN, Mark, G. ,  LI, Guann Pyng ,  ZHANG, Yang ,  WANG, Minfeng

IPC: H01H59/00 ,  B81B3/00

CPC classification number: H01H50/32 ,  B81B3/0054 ,  B81B2201/016 ,  H01H1/0036 ,  H01H50/005 ,  H01H50/44 ,  H01H50/58 ,  H01H2001/0042

Abstract: Micro-electromagnetically actuated latched miniature relay switches formed from laminate layers comprising a spring and magnet, electromagnetic coils, magnetic latching material, and transmission line with contacts. Preferably the miniature relay switches transmit up to about 50 W of DC or AC line power, and carry up to about 10 A of load current, with an overall volume of less than about 100 mm3. In addition to switching large power, the device preferably requires less than 3 V to actuate, and has a latching feature that retains the switch state after actuation without the need for external applied voltage or current.

Abstract translation: 由包括弹簧和磁体的层压层形成的微电磁致动的小型继电器开关，电磁线圈，磁性闭锁材料和具有触点的传输线。 优选地，小型继电器开关传输高达约50W的DC或AC线路功率，并且承载大约10A的负载电流，总体积小于约100mm 3。 除了切换大功率之外，该装置优选地需要小于3V来致动，并且具有锁定特征，其在致动之后保持开关状态，而不需要外部施加的电压或电流。

公开(公告)号：WO2013051064A1

公开(公告)日：2013-04-11

申请号：PCT/JP2011/005632

申请日：2011-10-06

Applicant: 富士通株式会社 ,  豊田 治 ,  島内 岳明

Inventor： 豊田　治 ,  島内　岳明

IPC: H01H57/00

CPC classification number: H01L41/094 ,  B81B2201/016 ,  B81C1/00976 ,  H01H57/00 ,  H01H2057/006

Abstract: 【課題】　製造が容易で、スティッキングを有効に抑制できるＭＥＭＳスイッチを提供する。 【解決手段】　ＭＥＭＳスイッチは、固定支持部と、固定支持部に少なくとも１端が固定支持され、延在する可動表面を有する板状可撓梁と、可撓梁の可動表面に配置された可動電気接点と、固定支持部に対する位置が固定され、可動電気接点に対向する固定電気接点と、固定支持部から可動電気接点に向かって、可撓梁の可動表面上方に延在し、電圧駆動することにより可動電気接点を固定電気接点に向かって変位させることのできる第１圧電駆動素子と、少なくとも可撓梁の可動表面に配置され、電圧駆動することにより可動電気接点が固定電気接点から離れる向きに、可撓梁の可動部を駆動する第２圧電駆動素子と、を有する。

Abstract translation: [问题]提供易于制造并且可以有效地控制粘附的MEMS开关。 [解决方案]该MEMS开关具有：固定支撑部分; 板状柔性梁，其具有可移动表面，其可移动表面的至少一端固定到固定支撑部分并从固定支撑部分延伸; 布置在柔性梁的可移动表面上的可移动电触头; 固定的电触点，其位置相对于固定支撑部分固定，并与可动电接触件相对; 第一压电驱动元件，其在柔性梁的可移动表面上方从固定支撑部分朝向可移动电触点延伸，并且能够通过电压驱动将可移动电触头移向固定电触点; 以及第二压电驱动元件，其设置在柔性梁的至少可移动表面上，并且通过电压驱动将柔性梁的可移动部分沿着可移动电触点与该柔性梁分离的方向驱动 固定电接触。

公开(公告)号：WO2013033526A2

公开(公告)日：2013-03-07

申请号：PCT/US2012/053327

申请日：2012-08-31

Applicant: CAVENDISH KINETICS, INC ,  RENAULT, Mickael ,  JOSHI, Vikram ,  KNIPE, Richard, L. ,  UNAMUNO, Anartz

Inventor： RENAULT, Mickael ,  JOSHI, Vikram ,  KNIPE, Richard, L. ,  UNAMUNO, Anartz

IPC: B81C1/00

CPC classification number: B81B7/00 ,  B81B2201/016 ,  B81B2203/0307 ,  B81C1/00039 ,  B81C2203/0136 ,  H01G5/16 ,  H01H59/0009 ,  Y10T29/49105

Abstract: Embodiments of the present invention generally relate to a MEMS device that is anchored using the layer that is deposited to form the cavity sealing layer and/or with the layer that is deposited to form the pull-off electrode. The switching element of the MEMS device will have a flexible or movable portion and will also have a fixed or anchor portion that is electrically coupled to ground. The layer that is used to seal the cavity in which the switching element is disposed can also be coupled to the fixed or anchor portion of the switching element to anchor the fixed or anchor portion within the cavity. Additionally, the layer that is used to form one of the electrodes may be used to provide additional leverage for anchoring the fixed or anchor portion within the cavity. In either situation, the movement of the flexible or movable portion is not hindered.

Abstract translation: 本发明的实施例总体上涉及一种MEMS器件，其使用被沉积以形成空腔密封层的层和/或被沉积以形成拉脱电极的层来锚定 。 MEMS器件的开关元件将具有柔性或可移动部分，并且还将具有电耦合到地的固定或锚定部分。 用于密封设置开关元件的空腔的层也可以耦合到开关元件的固定部分或锚定部分，以将固定部分或锚定部分锚定在空腔内。 另外，用于形成电极中的一个的层可以用于提供用于将固定或锚定部分锚定在空腔内的附加杠杆作用。 在任何一种情况下，柔性或活动部分的移动都不会受到阻碍。