公开(公告)号：US20120092658A1

公开(公告)日：2012-04-19

申请号：US13330649

申请日：2011-12-19

Applicant: Masud AZIMI ,  Arran BIBBY ,  Christopher D. BROWN ,  Peili CHEN ,  Kevin J. KNOPP ,  Daryoosh VAKHSHOORI ,  Peidong WANG ,  Stephen MCLAUGHLIN

Inventor： Masud AZIMI ,  Arran BIBBY ,  Christopher D. BROWN ,  Peili CHEN ,  Kevin J. KNOPP ,  Daryoosh VAKHSHOORI ,  Peidong WANG ,  Stephen MCLAUGHLIN

IPC: G01N21/01

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/4535 ,  G01N21/552

Abstract: We disclose an apparatus comprising: a hand-portable optical analysis unit including an optical interface; and a device configured to receive and releasably engage the hand-portable optical analysis unit. The device comprises: a housing; a sample unit in the housing; and a resilient member configured to bias the sample unit and the hand-portable analysis unit towards each other when the hand-portable optical analysis unit is received in the device to compress a sample disposed between the sample unit and the optical interface of the optical analysis unit. Methods of analyzing samples are also disclosed.

Abstract translation: 我们公开了一种装置，包括：手持式光学分析单元，包括光学接口; 以及被配置为接收和可释放地接合手持式光学分析单元的设备。 该装置包括：壳体; 壳体中的样品单元; 以及弹性构件，其构造成当所述手持式光学分析单元被接收在所述装置中时，将所述样本单元和所述手持式分析单元朝向彼此偏置，以压缩设置在所述样本单元和所述光学分析的所述光学界面之间的样本 单元。 还公开了分析样品的方法。

公开(公告)号：US07916291B2

公开(公告)日：2011-03-29

申请号：US12614281

申请日：2009-11-06

Applicant: Thomas D. Milster ,  Pramod Kumar Khulbe ,  Barry Gelernt

Inventor： Thomas D. Milster ,  Pramod Kumar Khulbe ,  Barry Gelernt

IPC: G01J3/44

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/024 ,  G01J3/2823 ,  G01J3/44 ,  G02B21/16

Abstract: Apparatuses and methods for performing spectroscopy and optical microscopy are disclosed. In at least one embodiment, a Raman spectrometer includes a vacuum ultraviolet light source configured to generate light having a wavelength within a window in the vacuum ultraviolet region of the electromagnetic spectrum within which a local minimum in the absorption coefficient of Oxygen occurs. The spectrometer also includes a lens device that receives a first portion of the generated light, directs at least some of the first portion of the generated light toward a target location, receives reflected light from the target location, and directs the reflected light toward a further location. The spectrometer further includes a dispersive device that receives at least some of the reflected light and outputs dispersed light produced based thereupon, and a camera module that is positioned at additional location, where the camera module receives at least some of the dispersed light.

Abstract translation: 公开了用于执行光谱和光学显微镜的装置和方法。 在至少一个实施例中，拉曼光谱仪包括真空紫外光源，其被配置为产生在电磁光谱的真空紫外区域内具有波长的光的光，其中发生氧吸收系数的局部最小值。 光谱仪还包括接收所产生的光的第一部分的透镜装置，将所产生的光的第一部分中的至少一部分导向目标位置，接收来自目标位置的反射光，并将反射光引向另一个 位置。 光谱仪还包括分散装置，其接收至少一些反射光并输出基于其产生的分散光;以及相机模块，其位于附加位置处，其中相机模块接收至少一些分散的光。

公开(公告)号：US07869041B2

公开(公告)日：2011-01-11

申请号：US12230641

申请日：2008-09-03

Applicant: Ming-Sen Tsao

Inventor： Ming-Sen Tsao

IPC: G01J3/46

CPC classification number: G01J3/50 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/0267 ,  G02B27/0955 ,  G02B27/0994

Abstract: The color measurement instrument includes an illumination system and a sensing system. The illumination system is composed of a light emitting element and a light pipe. The light pipe has an incident surface at an illuminating end of the light emitting element and an ejected surface adjacent to a sensing platform of a sensing system. The sensing system includes a light collection device and a sensing platform for disposing a testing object. The light collection device includes an aperture stop for adjusting the shape of a light spot on a color sensor, a light collection lens set for detecting and projecting an image of a testing object on the sensing platform, a field stop for separating a light from an area, an uniform lens set for spreading the image on the field stop, and a color sensor for capturing and analyzing the color to adjust the brightness.

Abstract translation: 色彩测量仪器包括照明系统和感测系统。 照明系统由发光元件和光管构成。 光管具有在发光元件的照明端处的入射表面和与感测系统的感测平台相邻的喷射表面。 感测系统包括光收集装置和用于设置测试对象的感测平台。 光采集装置包括用于调整颜色传感器上的光点的形状的孔径光阑，用于检测和投影检测对象在感测平台上的图像的光收集透镜组，用于将光从 区域，用于在场停止处展开图像的均匀透镜，以及用于捕获和分析颜色以调节亮度的颜色传感器。

公开(公告)号：US07837383B2

公开(公告)日：2010-11-23

申请号：US12104938

申请日：2008-04-17

Applicant: Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

Inventor： Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

IPC: G01J5/58 ,  G01R31/265

CPC classification number: G01J5/0003 ,  C23C16/46 ,  C23C16/52 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/10 ,  G01J5/0007 ,  G01J5/0821 ,  G01J5/60

Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.

Abstract translation: 本发明是用于在薄膜生长和晶片处理期间实时测量半导体衬底的温度的光学方法和装置。 利用带间光吸收边缘对温度的近似线性依赖性，本方法和装置实时地实现了对扩散反射和透射几何形状的吸收边的高度精确测量，具有足够的精度和灵敏度以实现闭环温度控制 的薄膜生长和加工中的晶片。 该装置在涵盖普通半导体衬底的所有范围的宽范围的温度范围内工作。

公开(公告)号：US07787125B2

公开(公告)日：2010-08-31

申请号：US11732093

申请日：2007-04-02

Applicant: Christina Tatarczyk ,  Joachim Tatarczyk

Inventor： Christina Tatarczyk ,  Joachim Tatarczyk

IPC: G01N21/55

CPC classification number: B41F33/0036 ,  G01J3/02 ,  G01J3/024 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/10 ,  G01J3/18 ,  G01N21/8901

Abstract: An apparatus (10) measures a spectral distribution of a printed product (12) produced with a printing device. The apparatus (10) has an illuminating source (20) for illuminating the printed product (12), an optoelectronic measuring means (32) for measurer the reflectance value of a section of the spectrum of the light (26) reflected from the printed product (12), an optical disperser (28) for dispersing the wavelengths of the reflected light (26), and a light entry gap plane that is definitive for the disperser (28). The light entry gap plane that is definitive for the disperser (28) is created by the surface of the printed product (12) to be examined.

Abstract translation: 装置（10）测量用打印装置产生的印刷品（12）的光谱分布。 该装置（10）具有用于照射印刷品（12）的照明源（20），用于测量从印刷品反射的光（26）的光谱的一部分的反射率的光电测量装置（32） （12），用于分散反射光（26）的波长的光学分散器（28）和对分散器（28）确定的光入口间隙平面。 对于分散器（28）确定的光进入间隙平面由待检查的印刷品（12）的表面产生。

公开(公告)号：US20100208238A1

公开(公告)日：2010-08-19

申请号：US12372698

申请日：2009-02-17

Applicant: Stephen K. Wilcken

Inventor： Stephen K. Wilcken

IPC: G01J3/00 ,  G02B6/00

CPC classification number: G01J3/4412 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/027 ,  G01J3/0272 ,  G01N21/3563 ,  G01N21/474 ,  G01N21/8422

Abstract: A device for making spectroscopy measurements with reduced or eliminated surface reflections is provided, the device including an elongated member including an outermost opaque thin walled enclosure; an optically transparent thin-walled enclosure adjacent an inner surface of said outermost thin walled enclosure; one or more optical fibers centrally and axially disposed and spaced apart a distance B with respect to the optically transparent thin-walled enclosure; wherein the elongated member is adapted to be coupled to a spectrometer and an illumination source to provide a light signal from the illumination source along said optically transparent thin-walled enclosure and collect a scattered light signal from the sample by said one or more optical fibers to provide to the spectrometer.

Abstract translation: 提供了一种用于进行具有减少或消除的表面反射的光谱测量的装置，该装置包括细长构件，其包括最外侧的不透明薄壁外壳; 邻近所述最外薄壁外壳的内表面的光学透明薄壁外壳; 一个或多个光纤中心并且轴向地布置并相对于光学透明的薄壁外壳隔开距离B; 其中所述细长构件适于耦合到光谱仪和照明源，以沿着所述光学透明薄壁外壳提供来自所述照明源的光信号，并且从所述一个或多个光纤收集来自所述样本的散射光信号， 提供给光谱仪。

公开(公告)号：US20100133437A1

公开(公告)日：2010-06-03

申请号：US12691047

申请日：2010-01-21

Applicant: Masud Azimi ,  Arran Bibby ,  Christopher D. Brown ,  Peili Chen ,  Kevin J. Knopp ,  Daryoosh Vakhshoori ,  Peidong Wang

Inventor： Masud Azimi ,  Arran Bibby ,  Christopher D. Brown ,  Peili Chen ,  Kevin J. Knopp ,  Daryoosh Vakhshoori ,  Peidong Wang

IPC: G01J3/44 ,  G01J5/02

CPC classification number: G01N21/552 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/024 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/4535 ,  G01N2021/3595

Abstract: We disclose apparatus that includes: (a) an enclosure including an aperture; (b) a prism mounted in the enclosure so that a surface of the prism is exposed through the aperture; (c) an optical assembly contained within the enclosure, the optical assembly including a radiation source and a radiation detector, the source being configured to direct radiation towards the prism and the detector being configured to detect radiation from the source reflected from the exposed surface of the prism; and (d) an electronic processor contained within the enclosure, the electronic processor being in communication with the detector. The apparatus can be configured so that, during operation, the electronic processor determines information about a sample placed in contact with the exposed surface of the prism based on radiation reflected from the exposed prism surface while it is in contact with the sample.

Abstract translation: 我们公开了包括以下设备：（a）包括孔的外壳; （b）安装在外壳中的棱镜，使得棱镜的表面通过该孔露出; （c）包含在所述外壳内的光学组件，所述光学组件包括辐射源和辐射探测器，所述源被配置成将辐射引向所述棱镜，并且所述检测器被配置为检测来自所述源的反射的源的辐射， 棱镜; 以及（d）包含在所述外壳内的电子处理器，所述电子处理器与所述检测器通信。 该装置可以被配置为使得在操作期间，电子处理器在与样品接触的同时基于从暴露的棱镜表面反射的辐射来确定关于与棱镜的暴露表面接触的样品的信息。

公开(公告)号：US20100110423A1

公开(公告)日：2010-05-06

申请号：US12478381

申请日：2009-06-04

Applicant: Julien S. Villaumie

Inventor： Julien S. Villaumie

IPC: G01J3/44

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/44 ,  G01J2003/1213 ,  G01J2003/1243 ,  G01N21/65 ,  G01N2021/6419 ,  G01N2021/6484 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: Certain examples described herein are directed to optical devices and systems that include first and second optical elements. In some examples, the first optical element may be configured to pass light received from an excitation source, and the second optical element may be optically coupled to the first optical element and may be configured to reflect incident light from the first optical element back to the first optical element and configured to pass the light reflected from the first optical element. Methods using the devices and systems are also described.

Abstract translation: 本文描述的某些示例涉及包括第一和第二光学元件的光学装置和系统。 在一些示例中，第一光学元件可以被配置为通过从激励源接收的光，并且第二光学元件可以光耦合到第一光学元件，并且可以被配置为将来自第一光学元件的入射光反射回到 第一光学元件并且被配置为使从第一光学元件反射的光通过。 还描述了使用装置和系统的方法。

公开(公告)号：US07703932B2

公开(公告)日：2010-04-27

申请号：US11796637

申请日：2007-04-27

Applicant: Lacy G. Cook

Inventor： Lacy G. Cook

IPC: G02B5/10

CPC classification number: G02B17/0636 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/024 ,  G01J3/14 ,  G02B17/0657

Abstract: An imaging optical system includes a set of mirrors including at least three mirrors on a beam path. Only a last mirror on the beam path has a positive optical power and all other mirrors have negative optical power. The sum of the optical powers of the mirrors is zero. An external posterior aperture stop is on the beam path between the last mirror and the image plane. A back focal length of the optical system is equal to or greater than an effective focal length of the optical system. The field of view is large, and typically at least 30-40 degrees in one plane.

Abstract translation: 成像光学系统包括一组反射镜，其包括在光束路径上的至少三个反射镜。 只有光束路径上的最后一个反射镜具有正光焦度，所有其它反射镜都具有负光焦度。 反射镜的光功率之和为零。 外部后孔径光阑在最后一个反射镜和图像平面之间的光束路径上。 光学系统的后焦距等于或大于光学系统的有效焦距。 视野很大，一个平面通常至少有30-40度。

公开(公告)号：US20100066999A1

公开(公告)日：2010-03-18

申请号：US12555046

申请日：2009-09-08

Applicant: Christina Tatarczyk ,  Joachim Tatarczyk

Inventor： Christina Tatarczyk ,  Joachim Tatarczyk

IPC: G01J3/28

CPC classification number: G01J3/02 ,  B41F33/0036 ,  G01J3/024 ,  G01J3/0262 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/10 ,  G01J3/18 ,  G01N21/86 ,  G01N21/8901

Abstract: An apparatus (10) measures a spectral distribution of a translucent printed product (12) produced with a printing device. The apparatus (10) has an illuminating source (20) for illuminating the printed product (12), an optoelectronic measuring means (32) for measurer the transmittance value of a section of the spectrum of the light (26) transmitted through the printed product (12), an optical disperser (28) for dispersing the wavelengths of the transmitted light (26), and a light entry gap plane that is definitive for the disperser (28). The light entry gap plane that is definitive for the disperser (28) is created by the surface of the printed product (12) to be examined.

Abstract translation: 一种装置（10）测量由印刷装置生产的半透明印刷品（12）的光谱分布。 所述设备（10）具有用于照亮所述印刷品（12）的照明源（20），用于测量透过所述印刷品的所述光（26）的光谱的一部分的透射率值的光电测量装置（32） （12），用于分散透射光（26）的波长的光学分散器（28）和对分散器（28）确定的光入口间隙平面。 对于分散器（28）确定的光进入间隙平面由待检查的印刷品（12）的表面产生。