公开(公告)号：WO02060811A2

公开(公告)日：2002-08-08

申请号：PCT/US0202348

申请日：2002-01-22

Applicant: AXSUN TECH INC ,  LE MINH VAN ,  WONG JO-EY

Inventor： LE MINH VAN ,  WONG JO-EY

IPC: B81C1/00 ,  G02B26/08 ,  H01L21/00 ,  H01L21/301 ,  G02B26/00

CPC classification number: H01L21/67132 ,  B81C1/00896 ,  G02B26/0841 ,  H01L21/67092

Abstract: A process for singulating MOEMS optical devices (10) from a precursor structure (110), in which the precursor structure (110) comprises device material (12), having movable optical structures (14), and handle material (22), through which optical ports (30) are formed to provide for optical access to the movable optical structures (14). The process comprises coating a frontside and a backside of the precursor structure (110) with protection material (610). The precursor structure (110) is then attached to a substrate such as dicing tape and the precursor structure (110) separated into individual optical devices (10) by a process, including die sawing. Thereafter, the optical devices (10) are removed from the tape and the protection material (610) removed from the optical devices (10).

Abstract translation: 一种用于从前体结构（110）分离MOEMS光学器件（10）的方法，其中前体结构（110）包括器件材料（12），具有可移动的光学结构（14）和手柄材料（22） 光端口（30）被形成为提供对可移动光学结构（14）的光学访问。 该方法包括用保护材料（610）涂覆前体结构（110）的前侧和后侧。 然后，前体结构（110）通过包括模切法的工艺被连接到诸如切割带的基底上，并将前体结构（110）分离成各个光学器件（10）。 此后，将光学装置（10）从带上取下，保护材料（610）从光学装置（10）中取出。

公开(公告)号：WO0137019A9

公开(公告)日：2002-07-25

申请号：PCT/US0031175

申请日：2000-11-14

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S

Inventor： FLANDERS DALE C ,  WHITNEY PETER S

IPC: G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B6/38 ,  G02B6/42 ,  G02B7/00 ,  G02B27/62

CPC classification number: G02B27/62 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3586 ,  G02B6/3636 ,  G02B6/3644 ,  G02B6/3656 ,  G02B6/3692 ,  G02B6/4201 ,  G02B6/4225 ,  G02B6/4226 ,  G02B6/4237 ,  G02B6/4238 ,  G02B6/4243 ,  G02B6/4249 ,  G02B6/4256 ,  G02B7/003

Abstract: An alignment structure (100) maintains an optical fiber in a bore (113). The structure is fixed on a bench and is passively or actively aligned with a light source. Then the structure may be welded or soldered to the optical bench whereby the alignment may suffer due to heat transfer. To correct this, the alignment structure can be plastically deformed to correct the alignment after the components have been fixed. The alignment structure has a substantially constant cross section in a z-axis direction as well as flexible links in order to allow displacements orthogonal to the optical axis. This movement will be initiated by seizing the component with a micro-positioner at a handle (136) and displacing it over the elastic limit to achieve permanent deformation.

Abstract translation: 对准结构（100）将光纤维持在孔（113）中。 该结构固定在工作台上，被动或主动地与光源对准。 然后可以将结构焊接或焊接到光学工作台，由此由于热传递可能会导致对准。 为了纠正这一点，在组件固定之后，对准结构可以塑性变形以校正对准。 对准结构在z轴方向上具有基本恒定的横截面以及柔性连杆，以允许与光轴正交的位移。 这种运动将通过在手柄（136）处用微定位器抓住部件并将其移动超过弹性极限来实现永久变形来启动。

公开(公告)号：WO0235667A2

公开(公告)日：2002-05-02

申请号：PCT/US0145422

申请日：2001-10-24

Applicant: AXSUN TECH INC ,  FLANDERS DALE C

Inventor： FLANDERS DALE C

IPC: H01S3/105 ,  H01S3/106 ,  H01S5/022 ,  H01S5/14 ,  H01S5/0687

CPC classification number: H01S5/141 ,  H01S3/08068 ,  H01S3/105 ,  H01S3/1062 ,  H01S5/02248 ,  H01S5/02284 ,  H01S5/0687 ,  H01S5/1039

Abstract: A semiconductor tunable laser system includes a tunable Fabry-Perot cavity and a cavity length modulator, which controls an optical length of the cavity at least over a distance corresponding to the spacings between the longitudinal modes of the laser cavity. Thus, the tunable Fabry-Perot cavity allows the laser cavity to have gain at the desired wavelength of operation while the cavity length modulator tunes the cavity length such that a longitudinal cavity mode exists at the desired wavelength of operation. Also, in one embodiment, a wavelength locker system is further provided that has a differential wavelength filter, e.g., stepped etalon, and a multi-element detector, e.g., a quad-detector. The controller then modulates the Fabry-Perot cavity to control the wavelength in response to the signal received from the multi-element detector.

Abstract translation: 半导体可调谐激光器系统包括可调谐的法布里 - 珀罗腔和空腔长度调制器，其控制空腔的光学长度至少在与激光腔的纵向模式之间的间隔相对应的距离上。 因此，可调谐法布里 - 珀罗腔允许激光腔在所需的操作波长下具有增益，而空腔长度调制器调谐腔长度，使得在期望的操作波长处存在纵向腔模式。 而且，在一个实施例中，还提供了一种波长锁定系统，其具有差分波长滤波器，例如阶梯式标准具，以及多元件检测器，例如四检测器。 然后，控制器对Fabry-Perot腔进行调制，以响应于从多元件检测器接收到的信号来控制波长。

公开(公告)号：WO0224295A2

公开(公告)日：2002-03-28

申请号：PCT/US0129329

申请日：2001-09-19

Applicant: AXSUN TECH INC ,  JENNER ROBERT K ,  FLANDERS DALE C ,  WHITNEY PETER S ,  COPPETA JONATHAN R

Inventor： JENNER ROBERT K ,  FLANDERS DALE C ,  WHITNEY PETER S ,  COPPETA JONATHAN R

IPC: G02B6/42 ,  H01S5/022 ,  B01B

CPC classification number: G02B6/4226 ,  G02B6/4225 ,  G02B6/4227 ,  G02B6/4237 ,  G02B6/4238 ,  Y10T29/49764 ,  Y10T29/49769 ,  Y10T29/49771 ,  Y10T29/49778 ,  Y10T29/4978 ,  Y10T29/49895 ,  Y10T29/49902 ,  Y10T29/53061 ,  Y10T29/53083 ,  Y10T29/53087 ,  Y10T29/53091 ,  Y10T29/53222 ,  Y10T29/53261 ,  Y10T29/53265

Abstract: An optical component manipulation system (100) has two opposed jaws (120A, 120B), which can each be independently positioned relative to each other in a coordinate plane to thereby effect the desired positioning of optical components (10) within the larger system. Z-axis rigidity is provided by air-bearings (124A, 124B). Laser heating (220) of the jaws is used for solder, or similar heat driven bonding, processes.

Abstract translation: 光学部件操纵系统（100）具有两个相对的夹爪（120A，120B），它们各自可以在坐标平面中相对于彼此独立地定位，从而实现光学部件（10）在较大系统内的期望定位。 Z轴刚度由空气轴承（124A，124B）提供。 钳口的激光加热（220）用于焊接或类似的热驱焊接工艺。

公开(公告)号：WO0167157A3

公开(公告)日：2002-02-28

申请号：PCT/US0106853

申请日：2001-03-01

Applicant: AXSUN TECH INC

Inventor： FLANDERS DALE C ,  WHITNEY PETER S ,  MILLER MICHAEL F

IPC: G01J3/26 ,  G02B26/00 ,  G02B26/02 ,  B81B3/00

CPC classification number: G01J3/26 ,  G02B26/00 ,  G02B26/001 ,  G02B26/02

Abstract: A process for fabricating an optical membrane device comprises providing a handle wafer and then oxidizing a surface of the handle wafer to form an insulating layer. A device wafer is then bonded to the handle wafer. An optical membrane structure is formed in this device wafer. The insulating layer is selectively removed to release the membrane structure. This device wafer can be manufactured from silicon wafer material. Such material typically has a low number of dislocations yielding a stable mechanical membrane structure. The insulating layer defines the electrical cavity across which electrical fields are established that are used to electrostatically deflect the membrane structure. The insulating layer is between 3 and 6 micrometers ( mu m) in thickness.

Abstract translation: 一种制造光学膜装置的方法包括提供一个处理晶片，然后氧化该处理晶片的表面以形成绝缘层。 然后将器件晶片接合到处理晶片。 在该器件晶片中形成光学膜结构。 选择性地除去绝缘层以释放膜结构。 该器件晶片可以由硅晶片材料制造。 这种材料通常具有低数目的位错，产生稳定的机械膜结构。 绝缘层限定了用于静电偏转膜结构的用于建立电场的电腔。 绝缘层的厚度在3至6微米（μm）之间。

公开(公告)号：WO0167156A3

公开(公告)日：2002-01-31

申请号：PCT/US0106676

申请日：2001-03-01

Applicant: AXSUN TECH INC ,  FLANDERS DALE C

Inventor： FLANDERS DALE C

IPC: G01J3/26 ,  G02B26/00 ,  G02B26/02

CPC classification number: G02B26/02 ,  G01J3/26 ,  G02B26/00 ,  G02B26/001 ,  Y10S359/90

Abstract: A tunable Fabry-Perot filter includes an optical cavity bounded by a stationary reflector and a deformable or movable membrane reflector. A second electrostatic cavity outside of the optical cavity includes a pair of electrodes, one of which is mechanically coupled to the movable membrane reflector. Voltage applied to the electrodes across the electrostatic cavity causes deflection of the membrane, thereby changing the length of the optical cavity and tuning the filter. The filter with the movable membrane can be formed by micro device photolithographic and fabrication processes from a semiconductor material in an integrated device structure. The membrane can include an inner movable membrane portion connected within an outer body portion by a pattern of tethers. The pattern can be such that straight or radial tethers connect the inner membrane with the outer body. Alternatively, a tether pattern with tethers arranged in a substantially spiral pattern can be used.

Abstract translation: 可调的法布里 - 珀罗滤光器包括由固定反射器和可变形或可移动的膜反射器限定的光学腔。 光腔外的第二静电腔包括一对电极，其中一个电极机械耦合到可动膜反射器。 跨过静电腔施加到电极的电压引起膜的偏转，从而改变光腔的长度并调谐滤光片。 具有可移动膜的过滤器可以通过微结构的光刻和制造工艺由集成器件结构中的半导体材料形成。 膜可以包括通过系绳图案在外部主体部分内连接的内部可移动膜部分。 图案可以是直的或径向的系绳将内膜与外体连接。 或者，可以使用具有以大致螺旋图案布置的系绳的系绳图案。

公开(公告)号：WO0137019A2

公开(公告)日：2001-05-25

申请号：PCT/US0031175

申请日：2000-11-14

Applicant: AXSUN TECH INC ,  FLANDERS DALE C ,  WHITNEY PETER S

Inventor： FLANDERS DALE C ,  WHITNEY PETER S

IPC: G02B6/32 ,  G02B6/35 ,  G02B6/36 ,  G02B6/38 ,  G02B6/42 ,  G02B7/00 ,  G02B27/62

CPC classification number: G02B27/62 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3586 ,  G02B6/3636 ,  G02B6/3644 ,  G02B6/3656 ,  G02B6/3692 ,  G02B6/4201 ,  G02B6/4225 ,  G02B6/4226 ,  G02B6/4237 ,  G02B6/4238 ,  G02B6/4243 ,  G02B6/4249 ,  G02B6/4256 ,  G02B7/003

Abstract: An alignment structure (100) maintains an optical fiber in a bore (113). The structure is fixed on a bench and is passively or actively aligned with a light source. Then the structure may be welded or soldered to the optical bench whereby the alignment may suffer due to heat transfer. To correct this, the alignment structure can be plastically deformed to correct the alignment after the components have been fixed. The alignment structure has a substantially constant cross section in a z-axis direction as well as flexible links in order to allow displacements orthogonal to the optical axis. This movement will be initiated by seizing the component with a micro-positioner at a handle (136) and displacing it over the elastic limit to achieve permanent deformation.

Abstract translation: 对准结构（100）将光纤维持在孔（113）中。 该结构固定在工作台上，被动或主动地与光源对准。 然后可以将结构焊接或焊接到光学工作台，由此由于热传递可能会导致对准。 为了纠正这一点，在组件固定之后，对准结构可以塑性变形以校正对准。 对准结构在z轴方向上具有基本恒定的横截面以及柔性连杆，以允许与光轴正交的位移。 这种运动将通过在手柄（136）处用微定位器抓住部件并将其移动超过弹性极限来实现永久变形来启动。

公开(公告)号：WO2012091958A2

公开(公告)日：2012-07-05

申请号：PCT/US2011065397

申请日：2011-12-16

Applicant: AXSUN TECH INC ,  FLANDERS DALE C

Inventor： FLANDERS DALE C

IPC: G01B9/02

CPC classification number: G01B9/02091 ,  G01B9/02004 ,  G01B9/02051 ,  G01B9/02059 ,  G01B9/02069 ,  G01B2290/45 ,  G01B2290/70

Abstract: An optical detector system comprises a hermetic optoelectronic package, an optical bench installed within the optoelectronic package, a balanced detector system installed on the optical bench. The balanced detector system includes at least two optical detectors that receive interference signals. An electronic amplifier system installed within the optoelectronic package amplifies an output of at least two optical detectors. Also disclosed is an integrated optical coherence tomography system. Embodiments are provided in which the amplifiers, typically transimpedance amplifiers, are closely integrated with the optical detectors that detect the interference signals from the interferometer. Further embodiments are provided in which the interferometer but also preferably its detectors are integrated together on a common optical bench. Systems that have little or no optical fiber can thus be implemented.

Abstract translation: 光学检测器系统包括密封光电子封装，安装在光电封装内的光学平台，安装在光学平台上的平衡检测器系统。 平衡检测器系统包括至少两个接收干扰信号的光学检测器。 安装在光电封装内的电子放大器系统放大至少两个光学检测器的输出。 还公开了一种集成的光学相干断层摄影系统。 提供了实施例，其中放大器，通常是跨阻放大器，与检测来自干涉仪的干扰信号的光学检测器紧密集成。 提供了其它实施例，其中干涉仪还优选地其检测器在公共光学台上集成在一起。 因此可以实现具有很少或不具有光纤的系统。

公开(公告)号：WO02052316A3

公开(公告)日：2004-02-19

申请号：PCT/US0149426

申请日：2001-12-19

Applicant: AXSUN TECH INC ,  ATIA WALID A ,  MURDZA RANDAL A

Inventor： ATIA WALID A ,  MURDZA RANDAL A

IPC: G02B6/34 ,  G02B6/42 ,  G01J3/26 ,  G01J3/00 ,  G02B6/293

CPC classification number: G02B6/4246 ,  G02B6/29358 ,  G02B6/29395 ,  G02B6/4222

Abstract: A process for tunable filter train alignment comprises detecting a spectral response of the filter train and aligning an optical fiber (10) that transmits an input optical signal to the filter train during operation. Further, the tunable filter (18) is moved relative to the filter train in response to a spectral response of the filter train. As a result, the alignment and spectral response of the tunable filter train are optimized. In the preferred embodiment, the alignment and SMSR optimization occur simultaneously with respect to each other.

Abstract translation: 用于可调谐过滤器排列的过程包括检测过滤器系列的光谱响应，并且在操作期间对准将输入光信号传输到过滤器列的光纤（10）。 此外，响应于过滤器列的频谱响应，可调谐滤波器（18）相对于滤波器序列移动。 结果，优化了可调滤波器串的对准和光谱响应。 在优选实施例中，对齐和SMSR优化相对于彼此同时发生。

公开(公告)号：WO0218989A3

公开(公告)日：2003-03-27

申请号：PCT/US0126156

申请日：2001-08-22

Applicant: AXSUN TECH INC ,  PAYER ROBERT L ,  RACZ LIVIA M

Inventor： PAYER ROBERT L ,  RACZ LIVIA M

IPC: G02B6/36 ,  G02B6/38 ,  G02B6/42 ,  G02B7/00 ,  G02B27/62

CPC classification number: G02B6/4226 ,  G02B6/3656 ,  G02B6/3692 ,  G02B6/4237 ,  G02B6/4238 ,  G02B6/4239 ,  G02B7/003 ,  G02B27/62

Abstract: A micro-optical component comprises an optical element (52) for interacting with an optical beam and a mounting structure (50) for attaching the optical element (52) to an optical bench (10). This optical element (52) is solid phase welded to the mounting structure (50). Solid phase welding has advantages in that it can be performed at lower temperatures than most soldering, even some eutectic soldering. Solid-phase welding, however, is much more robust during subsequent temperature cycling. This is especially important when the optical components undergo subsequent high temperature cycling.

Abstract translation: 微型光学部件包括用于与光束相互作用的光学元件（52）和用于将光学元件（52）附接到光学台架（10）的安装结构（50）。 该光学元件（52）与固定结构（50）固相焊接。 固相焊接的优点在于它可以在比大多数焊接更低的温度下进行，甚至是一些共晶焊接。 然而，在随后的温度循环中，固相焊接更加坚固。 当光学部件经历随后的高温循环时，这尤其重要。