公开(公告)号：WO2006026211A1

公开(公告)日：2006-03-09

申请号：PCT/US2005/029700

申请日：2005-08-19

Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY L.P. ,  GAO, Jun ,  PICCIOTTO, Carl E.

Inventor： GAO, Jun ,  PICCIOTTO, Carl E.

IPC: G01B11/00

CPC classification number: G01B11/002 ,  G06T7/262 ,  G06T7/37

Abstract: A measurement process (300) or system (100) transforms image data corresponding to images of an object (110) to the frequency domain and analyzes the frequency domain data to determine a displacement of the object (110) occurring between first and second images. Analysis in the frequency domain simplifies identification and handling of data expected to be noisy. In particular, frequencies corresponding to modes of vibration, lighting variation, or sensor error characteristic of a measurement system (136) or frequencies corresponding to small magnitude frequency-domain data can be given little or no weighting in analysis that provides the displacement measurement. In one embodiment, Fourier transforms of shifted and unshifted images (200 and 250) differ by a phase delay. A least square fit slope of the phase values associated with the phase delay can indicate displacements to accuracies less than 1% of a pixel width, thereby providing nanometer scale precision using imaging systems (130) having a pixel width of about 1 µm.

Abstract translation: 测量处理（300）或系统（100）将对应于对象（110）的图像的图像数据变换到频域，并分析频域数据以确定在第一和第二图像之间发生的对象（110）的位移。 频域分析简化了预计嘈杂的数据的识别和处理。 特别地，对于提供测量系统（136）的振动模式，照明变化或传感器误差特性的频率或对应于小幅度频域数据的频率，分析中可以给予很少或没有提供位移测量的加权的频率。 在一个实施例中，移位和未移位图像（200和250）的傅里叶变换相位延迟。 与相位延迟相关联的相位值的最小平方拟合斜率可以指示小于像素宽度的1％的精度位移，从而使用具有约1μm的像素宽度的成像系统（130）提供纳米级精度。