Method of reducing oxygen content in ECP solution
    21.
    发明申请
    Method of reducing oxygen content in ECP solution 审中-公开
    降低ECP溶液中氧含量的方法

    公开(公告)号:US20080067076A1

    公开(公告)日:2008-03-20

    申请号:US11523135

    申请日:2006-09-19

    CPC classification number: C25D3/02 C02F3/34

    Abstract: A novel method, which is suitable to substantially reduce the presence of oxygen micro-bubbles in an electroplating bath solution, is disclosed. The method includes the addition of aerobic bacteria to the electroplating bath solution to consume oxygen in the solution. Reduction of the oxygen content in the electroplating bath solution prevents oxygen micro-bubbles from forming in the solution and becoming trapped between the solution and the surface of a metal seed layer on a substrate to block the electroplating of a metal film onto the seed layer. Consequently, the presence of surface pits and other structural defects in the surface of the electroplated metal film is substantially reduced.

    Abstract translation: 公开了一种适合于显着减少电镀浴液中氧微气泡存在的新方法。 该方法包括向电镀浴溶液中加入需氧细菌以消耗溶液中的氧气。 电镀浴溶液中的氧含量的降低防止溶液中形成氧微气泡并被困在溶液与基底上的金属种子层的表面之间,以阻止金属膜在种子层上的电镀。 因此,电镀金属膜的表面中存在表面凹坑等结构缺陷。

    Networking hardware element to couple computer network elements and method of displaying a network layout map thereon
    22.
    发明申请
    Networking hardware element to couple computer network elements and method of displaying a network layout map thereon 有权
    用于耦合计算机网络元件的网络硬件元件以及在其上显示网络布局图的方法

    公开(公告)号:US20080043626A1

    公开(公告)日:2008-02-21

    申请号:US11506351

    申请日:2006-08-17

    CPC classification number: H04L41/22 H04L41/12

    Abstract: In one embodiment, a networking hardware element (1100, 3100) capable of coupling computer network elements (1010) comprises a network diagnostic mechanism (2140) that is capable of mapping the computer network elements and that is also capable of determining a connection status for the computer network elements. The networking hardware element also comprises a display (2110, 3110, 5110) that is capable of communicating with the network diagnostic mechanism and that is also capable of displaying a network layout map (2111, 5111) of representations of the computer network elements and the connection status of the computer network elements.

    Abstract translation: 在一个实施例中,能够耦合计算机网络元件(1010)的联网硬件元件(1100,3100)包括网络诊断机构(2140),其能够映射计算机网络元件,并且还能够确定连接状态 计算机网络元素。 网络硬件元件还包括能够与网络诊断机构通信的显示器(2110,310,5110),并且还能够显示计算机网络元件的表示的网络布局图(2111,5111)和 计算机网络元件的连接状态。

    ALTERNATING PLATE HEADERLESS HEAT EXCHANGERS
    23.
    发明申请
    ALTERNATING PLATE HEADERLESS HEAT EXCHANGERS 有权
    替代板无头热交换器

    公开(公告)号:US20080041570A1

    公开(公告)日:2008-02-21

    申请号:US11465207

    申请日:2006-08-17

    CPC classification number: F28F9/0221 F28D1/0316 F28F3/025

    Abstract: A plate and fin type heat exchanger has a heat exchanger core made from a plurality of stacked, alternating first and second heat exchange plates of a generally inverted, U-shaped cross-section. Each plate has a top wall, closed peripheral sidewalls and open ends, and the open ends of the first plates are oriented at 90° to the open ends of the second plates. The sidewalls of the plates have end portions, which in adjacent plates, are aligned to form corners of the heat exchanger core. Opposed U-shaped manifold bodies are provided having open ends and lateral walls joined in a fluid tight manner to the aligned plate sidewall end portions. End plates close off the open ends of the U-shaped bodies to form manifolds. The corners formed by the aligned plate sidewall end portions allow for an improved connection between the heat exchanger core and the U-shaped manifold bodies. This helps to ensure that a fluid tight seal is created between the heat exchanger core and the manifold bodies when the components are joined together.

    Abstract translation: 板翅式热交换器具有由大致倒U形横截面的多个层叠的,交替的第一和第二热交换板制成的热交换器芯。 每个板具有顶壁,封闭的外围侧壁和开口端,并且第一板的开口端与第二板的开口端成90°取向。 板的侧壁具有端部,其在相邻的板中对齐以形成热交换器芯的角部。 提供了相对的U形歧管体,其具有以流体密封的方式连接到对齐的板侧壁端部的开口端和侧壁。 端板封闭U形体的开口端形成歧管。 由对准的板侧壁端部形成的角部允许在热交换器芯和U形歧管主体之间改善连接。 这有助于确保当组件接合在一起时,在热交换器芯和歧管本体之间产生流体密封。

    INTERCONNECTION IN AN INSULATING LAYER ON A WAFER
    24.
    发明申请
    INTERCONNECTION IN AN INSULATING LAYER ON A WAFER 审中-公开
    绝缘层上的互连互连

    公开(公告)号:US20070152216A1

    公开(公告)日:2007-07-05

    申请号:US11687663

    申请日:2007-03-18

    CPC classification number: H01L21/76892

    Abstract: An interconnection in an insulating layer on a wafer is described herein. A wafer having a plurality of conductive lines thereon is provided. An insulating layer is formed over the conductive lines. Two via holes are formed in the insulating layer to expose two of the conductive lines waiting to be repaired. A first conductive layer is filled into the via holes to form two pattern marks. A mask is formed over the wafer to cover the insulating layer and the two pattern marks. The mask located above and between the two pattern marks is removed to form a trench exposing the two pattern marks and a portion of the insulating layer. A second conductive layer is formed over the mask to cover the two exposed pattern marks and the exposed insulating layer. The mask and the second conductive layer above the mask are removed simultaneously.

    Abstract translation: 本文描述了晶片上的绝缘层中的互连。 提供其上具有多条导线的晶片。 在导线上形成绝缘层。 在绝缘层中形成两个通孔,以露出等待修理的两根导电线。 将第一导电层填充到通孔中以形成两个图案标记。 在晶片上形成掩模以覆盖绝缘层和两个图案标记。 去除位于两个图案标记之上和之间的掩模,以形成暴露两个图案标记和绝缘层的一部分的沟槽。 在掩模上形成第二导电层以覆盖两个暴露的图案标记和暴露的绝缘层。 掩模和掩模上方的第二导电层同时被去除。

    Post ECP multi-step anneal/H2 treatment to reduce film impurity
    25.
    发明授权
    Post ECP multi-step anneal/H2 treatment to reduce film impurity 失效
    后期ECP多步退火/ H2处理以降低膜杂质

    公开(公告)号:US07030016B2

    公开(公告)日:2006-04-18

    申请号:US10812729

    申请日:2004-03-30

    CPC classification number: H01L21/76877 H01L21/2885

    Abstract: A method of forming a copper interconnect in a dual damascene scheme is described. After a diffusion barrier layer and seed layer are sequentially formed on the sidewalls and bottoms of a trench and via in a dielectric layer, a first copper layer is deposited by a first ECP process at a 10 mA/cm2 current density to fill the via and part of the trench. A first anneal step is performed to remove carbon impurities and optionally includes a H2 plasma treatment. A second ECP process with a first deposition step at a 40 mA/cm2 current density and second deposition step at a 60 mA/cm2 current density is used to deposit a second copper layer-that overfills the trench. After a second anneal step, a CMP process planarizes the copper layers. Fewer copper defects, reduced S, Cl, and C impurities, and improved Rc performance are achieved by this method.

    Abstract translation: 描述了在双镶嵌方案中形成铜互连的方法。 在扩散阻挡层和种子层依次形成在电介质层中的沟槽和通孔的侧壁和底部上之后,通过第一ECP工艺以10mA / cm 2 / >电流密度以填充通孔和部分沟槽。 进行第一退火步骤以除去碳杂质,并且任选地包括H 2 O 3等离子体处理。 使用在40mA / cm 2电流密度下的第一沉积步骤和以60mA / cm 2电流密度进行第二沉积步骤的第二个ECP工艺来沉积 第二铜层 - 过度填充沟槽。 在第二退火步骤之后,CMP工艺使铜层平坦化。 通过该方法可以实现更少的铜缺陷,降低的S,Cl和C杂质,以及Rc性能的提高。

    Post ECP multi-step anneal/H2 treatment to reduce film impurity
    26.
    发明申请
    Post ECP multi-step anneal/H2 treatment to reduce film impurity 失效
    后期ECP多步退火/ H2处理以降低膜杂质

    公开(公告)号:US20050227479A1

    公开(公告)日:2005-10-13

    申请号:US10812729

    申请日:2004-03-30

    CPC classification number: H01L21/76877 H01L21/2885

    Abstract: A method of forming a copper interconnect in a dual damascene scheme is described. After a diffusion barrier layer and seed layer are sequentially formed on the sidewalls and bottoms of a trench and via in a dielectric layer, a first copper layer is deposited by a first ECP process at a 10 mA/cm2 current density to fill the via and part of the trench. A first anneal step is performed to remove carbon impurities and optionally includes a H2 plasma treatment. A second ECP process with a first deposition step at a 40 mA/cm2 current density and second deposition step at a 60 mA/cm2 current density is used to deposit a second copper layer-that overfills the trench. After a second anneal step, a CMP process planarizes the copper layers. Fewer copper defects, reduced S, Cl, and C impurities, and improved Rc performance are achieved by this method.

    Abstract translation: 描述了在双镶嵌方案中形成铜互连的方法。 在扩散阻挡层和种子层依次形成在电介质层中的沟槽和通孔的侧壁和底部上之后,通过第一ECP工艺以10mA / cm 2 / >电流密度以填充通孔和部分沟槽。 进行第一退火步骤以除去碳杂质,并且任选地包括H 2 O 3等离子体处理。 使用在40mA / cm 2电流密度下的第一沉积步骤和以60mA / cm 2电流密度进行第二沉积步骤的第二个ECP工艺来沉积 第二铜层 - 过度填充沟槽。 在第二退火步骤之后,CMP工艺使铜层平坦化。 通过该方法可以实现更少的铜缺陷,降低的S,Cl和C杂质,以及Rc性能的提高。

    Computer implemented program for inventory management
    27.
    发明授权
    Computer implemented program for inventory management 失效
    计算机实施库存管理程序

    公开(公告)号:US06325283B1

    公开(公告)日:2001-12-04

    申请号:US09695230

    申请日:2000-10-25

    CPC classification number: G06F8/65

    Abstract: The NYTBridge allows a user to bridge the gap between data collected by hand-held scanning devices and conventional databases used in the field of inventory management without database or procedural programming knowledge on the part of the user. The NYTBridge does this by first allowing the user to access an existing database. The user may then select data fields, such as the location of an item in inventory, from the database without writing coded database queries. The NYTBridge then allows the user to download the selected data fields as a data set along with a scanner program that will read the created data set. Both the data set and the scanner program are either saved on a PCMCIA card to be used in a scanner, or downloaded directly into the hand held scanner via either serial port communication or communication dock tethering. When the scanner program is run on the scanner, the scanner program creates a scanner file for the collected, verified and/or corrected data. After the data is collected, verified and/or corrected, NYTBridge reads the scanner file from the hand held scanner and allows the user to update the relational database. The NYTBridge utilizes a graphical user interface and does not require low level programming by the user at any stage of the inventory management process.

    Abstract translation: NYTBridge允许用户弥补手持扫描设备收集的数据与库存管理领域中常用的数据库之间的差距,而不需要用户的数据库或程序编程知识。 NYTBridge首先允许用户访问现有的数据库。 然后,用户可以从数据库中选择数据字段,例如库存中的项目的位置,而不需要编写数据库查询。 NYTBridge然后允许用户将所选择的数据字段作为数据集以及将读取创建的数据集的扫描器程序一起下载。 数据组和扫描仪程序都保存在PCMCIA卡上,以便在扫描仪中使用,或者通过串行端口通信或通信基座系统直接下载到手持式扫描仪中。 当扫描仪程序在扫描仪上运行时,扫描仪程序为收集,验证和/或校正的数据创建一个扫描仪文件。 在数据收集,验证和/或更正后,NYTBridge从手持式扫描仪读取扫描仪文件,并允许用户更新关系数据库。 NYTBridge利用图形用户界面,并且不需要用户在库存管理过程的任何阶段进行低级编程。

    Filter-based forwarding in a network
    29.
    发明授权
    Filter-based forwarding in a network 有权
    网络中基于过滤器的转发

    公开(公告)号:US09106506B2

    公开(公告)日:2015-08-11

    申请号:US12878849

    申请日:2010-09-09

    CPC classification number: H04L45/00 H04L45/50 H04L45/54 H04L69/22

    Abstract: A router receives a packet at an ingress interface. The router classifies the received packet based on at least a first field value contained in the header of the packet. According to the classification of the received packet, the router associates one of the plurality of forwarding tables to the packet. The router then performs a lookup operation in the associated forwarding table according to at least a second field value contained in the header of the packet. Based on the lookup operation, the router determines an egress interface and transmits the received packet from the determined egress interface.

    Abstract translation: 路由器在入口接口接收数据包。 所述路由器至少基于所述分组报头中包含的第一字段值对接收到的分组进行分类。 根据接收到的分组的分类,路由器将多个转发表中的一个与该分组相关联。 然后,路由器根据分组头部中的至少第二字段值在相关联的转发表中执行查找操作。 基于查找操作,路由器确定出口接口并从确定的出口接口发送接收的分组。

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