Abstract:
PURPOSE: A manufacturing method of a mold, the mold, and a forming method of fine patterns using the mold are provided to reduce costs needed for manufacturing processes and to form nano-sized line patterns on a substrate. CONSTITUTION: A manufacturing method of a mold includes the following: a first pattern is formed on a substrate(210) using ultraviolet ray shielding materials; a molding resin is applied on the substrate; a mask mold with a second pattern is pressurized on the substrate with the molding resin in order to arrange a surface which is shared by the first pattern and the second pattern; the patterns are imprinted; the molding resin is cured; and the master mold is removed from the substrate.
Abstract:
PURPOSE: A fine pattern forming method with a photo mask and a nano-imprinting mold is provided to form patterns of various shapes and to form nano-sized line patterns by using micro-sized line patterns. CONSTITUTION: A fine pattern forming method includes the following: Pattern forming resist(120) is applied on a substrate(110); a master mold with a first pattern is in contact with the upper side of the pattern forming resist; the master mold is pressurized to be imprinted; the master mold is irradiated with ultraviolet rays through a photo-mask with a second pattern which is different from the first pattern; and the master mold and the photo-mask are separated from the substrate to develop the pattern forming resist.