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Patent Agency Ranking
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28.发明公开반도체 제조 장치의 웨이퍼 카세트 로드 포트의 셔틀을자동으로 수평 조절할 수 있는 셔틀 어셈블리 및 이를이용한 셔틀 어셈블리 운용방법 无效用于控制自动水平的手柄组件用于半导体制造装置和使用其的操作方法
公开(公告)号：KR1020060130437A
公开(公告)日：2006-12-19
申请号：KR1020050051115
申请日：2005-06-14
Applicant: 삼성전자주식회사
Inventor： 김국환
IPC: H01L21/68
CPC classification number: H01L21/67775 , H01L21/67259
Abstract: A shuttle assembly for controlling automatically a level of a shuttle in a wafer cassette load port of a semiconductor fabrication apparatus and an operating method of the same are provided to control automatically the level of the shuttle by using a digital leveler, a fine driver, and a controller. A wafer cassette is loaded into a shuttle(100). A digital leveler(106) is installed on a surface of the shuttle. A body(108) is coupled with the shuttle and includes a fine driver(110) for performing a horizontal leveling operation of the shuttle and a controller(114) connected with the digital leveler in order to control finely the fine driver. A level of the shuttle is controlled automatically by using the digital leveler, the fine driver, and the controller.
Abstract translation: 提供了一种用于自动控制半导体制造装置的晶片盒装载端口中的梭子水平及其操作方法的梭组件，以通过使用数字调平器，精细驱动器和 一个控制器 将一个晶片盒装载到梭子（100）中。 数字调平器（106）安装在梭子的表面上。 主体（108）与往复梭连接，并且包括用于执行梭子的水平调平操作的精细驱动器（110）和与数字调平器连接的控制器（114），以便精细地控制精细驾驶员。 使用数字调平器，精细驱动器和控制器自动控制梭子的水平。
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公开(公告)号：KR102056582B1
公开(公告)日：2020-01-22
申请号：KR1020130064761
申请日：2013-06-05
Applicant: 삼성전자주식회사
IPC: H01L27/105 , H01L21/336 , H01L29/78
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