公开(公告)号：KR100506221B1

公开(公告)日：2005-08-08

申请号：KR1020020069172

申请日：2002-11-08

Applicant: 삼성전자주식회사

Inventor： 손원정 ,  박연룡 ,  백영민 ,  오정현

IPC: C03B19/06

CPC classification number: C03B19/12

Abstract: 본 발명에 따른 솔-젤 공법에 의하여 형성된 젤 튜브를 소결시키기 위한 장치는 상기 젤 튜브를 내부에 실장하는 진공 씰링된 반응 챔버와, 제어 신호에 따라 상기 반응 챔버 내부의 진공도를 조절하는 진공 펌프와, 상기 반응 챔버 내부의 진공도를 계측하는 진공 게이지와, 상기 젤-튜브를 회전 및 수직 상하 운동이 가능하게 지지하기 위한 모션부와, 상기 반응 챔버 내부의 온도를 계측하는 온도 센서와, 제어 신호에 따라 상기 반응 챔버 내부의 온도를 조절하는 히터와, 상기 진공 펌프, 히터 및 모션부를 제어하기 위한 제어부를 포함한다.

公开(公告)号：KR1020030083210A

公开(公告)日：2003-10-30

申请号：KR1020020021651

申请日：2002-04-19

Applicant: 삼성전자주식회사

Inventor： 김병삼 ,  백영민 ,  이미경 ,  이형민

IPC: G01N21/25

Abstract: PURPOSE: An apparatus for measuring content of a hydroxide radical in a silica tube using spectrometry is provided to allow steric measurement of content of the hydroxide radical in the silica tube. CONSTITUTION: An apparatus(10) includes a Teflon reflector(11b), a probe(13), a spectrum analyzer(15), and a data processor(17). The Teflon reflector is inserted to a penetrating hole of a silica tube(11a) to reflect light incident through the probe. The probe sends light to the silica tube for measurement of content of the hydroxide radical, and receives light reflected by the Teflon reflector to transmit to the spectrum analyzer. The incident light is projected perpendicularly to longitudinal direction(A) of the silica tube, and toward a center of a section of the silica tube perpendicular to the longitudinal direction of the silica tube so that the light reflected by the Teflon reflector is inputted to the probe. A wavelength of the light projected by the probe is identical with a wavelength of optical signal transmitted through optical fiber to be manufactured using the silica tube.

Abstract translation: 目的：提供一种用于使用光谱测定法测量二氧化硅管中氢氧根自由基的装置，以允许对硅石管中的氢氧根自由基的含量进行空间测量。 构成：装置（10）包括特氟龙反射器（11b），探头（13），频谱分析仪（15）和数据处理器（17）。 将特氟隆反射器插入石英管（11a）的穿透孔中以反射通过探针入射的光。 探头将光发射到二氧化硅管，用于测量氢氧根的含量，并接收由特氟龙反射器反射的光，以传输到光谱分析仪。 入射光垂直于石英管的长度方向（A）投射，并朝着与石英管的长度方向垂直的二氧化硅管的一部分的中心投影，使得由特氟龙反射器反射的光被输入到 探测。 由探针投射的光的波长与通过使用硅胶管制造的光纤传输的光信号的波长相同。

公开(公告)号：KR100326173B1

公开(公告)日：2002-02-27

申请号：KR1019990067040

申请日：1999-12-30

Applicant: 삼성전자주식회사

Inventor： 정원일 ,  백영민

IPC: C03B27/012

CPC classification number: C03B19/12 ,  C03B37/016 ,  Y10S65/90 ,  Y10S65/901

Abstract: 본발명은공정가스의유입및 방출을위해흡기라인및 배기라인을구비한저온열처리설비를이용한솔-젤공법에의한실리카글래스제조공정에있어서, 상기배기라인크기가변화되었는지를확인하는제1단계와; 상기제1단계에서배기라인의크기변화에따라상기공정가스의공급유량을조절하는제2단계와; 상기배기라인을통해방출되는배기가스속도를측정하는제3단계와; 상기제3단계에서측정된배기가스속도를배기라인크기가변화되기전의배기가스속도인기준배기가스속도와비교하여양자가상이할경우양자를일치시키기위해상기제2단계로피드백하는제4단계를포함함을특징으로하는고순도실리카글래스제조공정의열처리제어방법을제공한다.

公开(公告)号：KR1020020007590A

公开(公告)日：2002-01-29

申请号：KR1020000040963

申请日：2000-07-18

Applicant: 삼성전자주식회사

Inventor： 백영민

IPC: H01L21/306

Abstract: PURPOSE: An etcher having a measuring unit for measuring an exhaust pressure is provided to prevent an etch defect caused by defective exhaustion, by cleaning an exhaust pipe before the exhaust pipe is stopped up and the exhaustion capacity is reduced. CONSTITUTION: A turbo pump(14) is connected in series to an etch reaction chamber(12) by the first exhaust pipe. A dry pump(16) is connected in series to the turbo pump by the second exhaust pipe. A gas scrubber(18) is connected in series to the dry pump by the third exhaust pipe. The measuring units(20,22,24) for measuring the exhaust pressure are installed in at least two of the first, second and third exhaust pipes.

Abstract translation: 目的：提供一种具有用于测量排气压力的测量单元的蚀刻器，用于通过在排气管停止之前清洁排气管并减少排气能力来防止由于排气不良引起的蚀刻缺陷。 构成：涡轮泵（14）通过第一排气管与蚀刻反应室（12）串联连接。 干泵（16）通过第二排气管与涡轮泵串联连接。 气体洗涤器（18）通过第三排气管与干泵串联连接。 用于测量排气压力的测量单元（20,22,24）安装在第一，第二和第三排气管中的至少两个中。

公开(公告)号：KR1020010096260A

公开(公告)日：2001-11-07

申请号：KR1020000020285

申请日：2000-04-18

Applicant: 삼성전자주식회사

Inventor： 백운출 ,  김덕영 ,  백영민

IPC: C03B37/022

CPC classification number: G02B6/02333 ,  C03B37/01205 ,  C03B37/016 ,  C03B37/027 ,  C03B37/0756 ,  C03B2201/31 ,  C03B2201/34 ,  C03B2203/14 ,  C03B2203/42 ,  C03B2205/10 ,  G02B6/02347

Abstract: PURPOSE: A production method of optical fiber with many holes in a cladding part is provided to prevent transformation of holes which enables mass production of fiber having homogeneous characteristics. CONSTITUTION: The method comprises the steps of: preparing a sol by mixing starting materials containing fumed silica or silicon alkoxide, deionized water and additives as dispersant, catalyst or binder(100); filling a mold with sol and gelling(200); forming a core by filling core-forming materials such as silica doped with Er, Ge or B, to the center of gel(300); arranging several tubes, glass tubes to the core, perpendicularly(400); demolding and drying; thermal treating at low temperature with gas such as Cl2, He or O2 flown to remove organics, metals and hydroxyl group(500); sintering gel over 1300deg.C in He atmosphere for glassification(600); supplying a gas(N2) to the holes of optical fiber preform and heating the end of preform for drawing an optical fiber(700). The apparatus comprises preform cover attaching a rod to fix the preform, a gas supplier, a gas pressure controller and a heater.

Abstract translation: 目的：提供一种在包层部分中具有许多孔的光纤的制造方法，以防止能够大量生产具有均匀特性的纤维的孔的转变。 方法：该方法包括以下步骤：通过混合含有热解法二氧化硅或硅烷醇的原料，去离子水和添加剂作为分散剂，催化剂或粘合剂（100）制备溶胶; 用溶胶和凝胶填充模具（200）; 通过将诸如掺杂有Er，Ge或B的二氧化硅的芯形成材料填充到凝胶（300）的中心来形成芯; 将几根管子，玻璃管排列到核心，垂直（400）; 脱模和干燥; 在低温下用Cl 2，He或O 2等气体进行热处理以除去有机物，金属和羟基（500）; 烧结凝胶超过1300℃，在He气氛中进行玻璃化（600）; 向光纤预制棒的孔提供气体（N2），并加热用于拉制光纤（700）的预成型件的端部。 该装置包括连接杆以固定预制件的预制件盖，气体供应器，气体压力控制器和加热器。

公开(公告)号：KR100310090B1

公开(公告)日：2001-10-17

申请号：KR1019990040035

申请日：1999-09-17

Applicant: 삼성전자주식회사 ,  재단법인 포항산업과학연구원

Inventor： 김선욱 ,  전명철 ,  백영민

IPC: C03C3/06

Abstract: 본발명은졸-겔공정용실리카글래스조성물을개시한다. 상기조성물은실리카입자, 주겔화제인폴리에테르이미드와, 겔강화및 건조보조제인포름아미드와, 분산제및 탈이온수를포함하고있는것을특징으로한다. 본발명의실리카글래스조성물을이용하면통상적인졸-겔공정에따라실리카글래스를제조하는경우에비하여환경친화적이면서도, 고가의겔화제사용을배제함으로써경제적으로실리카글래스를제조할수 있게된다.

Abstract translation: 本发明公开了用于溶胶 - 凝胶法的二氧化硅玻璃组合物。 该组合物的特征在于含有二氧化硅颗粒，作为主要胶凝剂的聚醚酰亚胺，作为凝胶强化和干燥助剂的甲酰胺，分散剂和去离子水。 通过使用本发明的常规的二氧化硅玻璃组合物的溶胶 - 通过排除，但环保相比根据凝胶方法的二氧化硅玻璃的情况下，它使用昂贵的胶凝剂有可能客户经济高效地制造的石英玻璃。

公开(公告)号：KR1020010019933A

公开(公告)日：2001-03-15

申请号：KR1019990036611

申请日：1999-08-31

Applicant: 삼성전자주식회사

Inventor： 오정현 ,  박근덕 ,  백영민

IPC: C03B5/00

Abstract: PURPOSE: A mold device for preparing a silica glass is provided which prepares flawless excellent silica glass by removing bubbles, impurities and cohered materials contained in a brush before injecting the brush into a mold. CONSTITUTION: The mold device for preparing a silica glass comprises: (i) a brush reservoir(100) which has a brush outlet(101) and a brush(102); (ii) a cylindrical mold(160) which has a brush injecting hole(164); (iii) a connecting hose(120), either end of which is connected to the brush outlet of the brush reservoir and the brush injecting hole of the mold; and (iv) a filter(150) which is installed on the course of the connecting hose and filters bubbles and impurities in the brush.

Abstract translation: 目的：提供一种用于制备石英玻璃的模具装置，其通过在将刷子注入模具中之前除去刷子中包含的气泡，杂质和粘结材料来制备无瑕疵的优良二氧化硅玻璃。 构成：用于制备石英玻璃的模具装置包括：（i）具有刷出口（101）和刷子（102）的刷子贮存器（100）; （ii）具有刷注入孔（164）的圆柱形模具（160）; （iii）连接软管（120），其两端连接到刷子储存器的刷子出口和模具的刷子注入孔; 和（iv）过滤器（150），其安装在连接软管的过程中并且过滤毛刷中的气泡和杂质。

公开(公告)号：KR100252185B1

公开(公告)日：2000-04-15

申请号：KR1019980019263

申请日：1998-05-27

Applicant: 삼성전자주식회사

Inventor： 백영민 ,  오정현

IPC: C03B20/00

CPC classification number: C03C3/06 ,  C03C1/006 ,  C03C2203/22 ,  C03C2203/30

Abstract: PURPOSE: A manufacturing method of high purity silica glasses by sol-gel process is provided. The resultant silica glasses having no cracks, and much reduced drying time and shrinkage are applied to large-sized silica glass tubes for optical fiber preforms, semiconductors and optical lenses. CONSTITUTION: The method comprises the steps of: preparing a sol by adding fumed silica and dispersant to premix solution obtained from dissolving 2-20wt.% of monomer for forming acrylic resin and 0.05-1.0wt.% of crosslinker into distilled water, based on the amount of premix solution, where the mixing ratio of silica and premix solution is 4:6-6:4, mixing and dispersing, and adjusting to pH11-13; defoaming and aging; adding polymerization initiator such as ammonium persulfate, catalyst such as N, N, N', N'-tetraethylenediamine, gelling promoter such as methyl formate, methyl lactate and ethyl lactate, and adjusting to pH9-11; gelling and aging at 60-100deg.C for 0.5-3hrs.; drying at 20-50deg.C; thermal-treating at 300-700deg.C for 2-8hrs in air, and 800-1100deg.C for 1-8hrs. in Cl2 gas atmosphere for removing organics and hydroxides, respectively; sintering at 1100-1500deg.C for 1-8hrs. in He gas atmosphere.

Abstract translation: 目的：提供通过溶胶 - 凝胶法制备高纯度二氧化硅玻璃的方法。 对于光纤预制棒，半导体和光学透镜的大尺寸石英玻璃管，将不产生裂纹的所得二氧化硅玻璃以及干燥时间和收缩率大大降低。 方法：该方法包括以下步骤：通过将热解法二氧化硅和分散剂加入到预混物溶液中制备溶胶，该预混合溶液是将2-20重量％的形成丙烯酸树脂的单体和0.05-1.0重量％的交联剂溶解在蒸馏水中得到的，基于 二氧化硅和预混溶液的混合比为4：6-6：4，混合分散，调节至pH11-13; 消泡和老化; 加入聚合引发剂如过硫酸铵，N，N，N'，N'-四亚乙基二胺等催化剂，甲酸甲酯，乳酸甲酯，乳酸乙酯等胶凝促进剂，调节至pH9-11; 胶凝和老化60-100℃，持续0.5-3小时。 20-50℃干燥; 热处理300-700℃，空气中2-8小时，800-1100℃，1-8小时。 在Cl2气氛中分别去除有机物和氢氧化物; 在1100-1500℃烧结1-8小时。 在他气氛中。

公开(公告)号：KR100252184B1

公开(公告)日：2000-04-15

申请号：KR1019980019262

申请日：1998-05-27

Applicant: 삼성전자주식회사

Inventor： 백영민 ,  오정현

IPC: C03B20/00

CPC classification number: C03C13/045 ,  C03B19/12 ,  C03C1/006 ,  C03C3/06 ,  C03C2201/02 ,  C03C2203/22 ,  C03C2203/32 ,  C03C2203/52 ,  Y02P40/57

Abstract: PURPOSE: A manufacturing method of high purity silica glasses by sol-gel process is provided. The resultant silica glasses having no cracks, and much reduced drying time and shrinkage are applied to large-sized silica glass tubes for optical fiber preforms, semiconductors and optical lenses. CONSTITUTION: The method comprises the steps of: preparing a sol by adding fumed silica and dispersant to premix solution obtained from dissolving 2-20wt.% of monomer for forming acrylic resin and 0.05-1.0wt.% of crosslinker into distilled water, based on the amount of premix solution, where the mixing ratio of silica and premix solution is 4:6-6:4, mixing and dispersing and adjusting to pH11-13; defoaming and aging; adding polymerization initiator such as ammonium persulfate, catalyst such as N, N, N', N'- tetraethylenediamine, gelling promoter such as methyl formate, methyl lactate and ethyl lactate, and adjusting to pH9-11; gelling and aging; drying at 20-50deg.C; thermal-treating at 300-700deg.C for 2-8hrs in air, and 800-1100deg.C for 1-8hrs. in Cl2 gas atmosphere for removing organics and hydroxides, respectively; sintering at 1100-1500deg.C for 1-8hrs. in He gas atmosphere.

Abstract translation: 目的：提供通过溶胶 - 凝胶法制备高纯度二氧化硅玻璃的方法。 对于光纤预制棒，半导体和光学透镜的大尺寸石英玻璃管，将不产生裂纹的所得二氧化硅玻璃以及干燥时间和收缩率大大降低。 方法：该方法包括以下步骤：通过将热解法二氧化硅和分散剂加入到预混物溶液中制备溶胶，该预混合溶液是将2-20重量％的形成丙烯酸树脂的单体和0.05-1.0重量％的交联剂溶解在蒸馏水中得到的，基于 二氧化硅和预混溶液的混合比例为4：6-6：4的预混溶液的量，混合分散并调节至pH11-13; 消泡和老化; 加入过硫酸铵等聚合引发剂，N，N，N'，N'-四亚乙基二胺等催化剂，甲酸甲酯，乳酸甲酯，乳酸乙酯等胶凝促进剂，pH9〜11。 凝胶化和老化; 20-50℃干燥; 热处理300-700℃，空气中2-8小时，800-1100℃，1-8小时。 在Cl2气氛中分别去除有机物和氢氧化物; 在1100-1500℃烧结1-8小时。 在他气氛中。

公开(公告)号：KR100248062B1

公开(公告)日：2000-03-15

申请号：KR1019970074971

申请日：1997-12-27

Applicant: 삼성전자주식회사

Inventor： 오정현 ,  백영민

IPC: C03C3/04

Abstract: 본 발명은 실리카 글래스 조성물 및 이를 이용한 실리카 글래스의 제조방법을 개시한다. 상기 실리카 글래스 조성물은 퓸 실리카, 결합제인 아크릴 수지, 겔화제 및 분산제를 포함하고 있다. 본 발명에 따르면, 저렴한 제조단가로 건조후 균열이 거의 발생되지 않고 소결후 수축율이 현저하게 낮아진 고순도의 실리카 글래스 튜브를 제조할 수 있다. 그리고 대형의 실리카 글래스 튜브를 제조하는 것도 가능해진다. 본 발명에 따른 실리카 글래스 조성물은 광섬유 제조용 지지체 튜브(substrate tube) 및 외피 튜브(over-jacketing tube) 제조시에도 사용가능하다.