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公开(公告)号：KR101240146B1
公开(公告)日：2013-03-07
申请号：KR1020110087537
申请日：2011-08-31
Applicant: 한국과학기술원
Abstract: PURPOSE: A wavelength scanning mode confocal spectromicroscope using a Galvano mirror is provided to obtain a spectrum structure capable of converting wavelengths at a rapid switching speed, thereby forming a system relatively simple and enhancing the detection speed. CONSTITUTION: A wavelength scanning mode confocal spectromicroscope using a Galvano mirror(16) comprises a light source unit, a polarizing plate, a diffraction unit, a scanning mirror(8), an irradiation unit, a prism(13), a lens unit, and an optical detecting part(20). The polarizing plate polarizes lasers being emitted from the light source unit. The scanning mirror scans lights diffracted through the diffraction unit. The irradiation unit irradiates beams scanned in the scanning mirror to a specimen. The prism disperses fluorescence signals, which are reflected after being irradiated to the specimen, according to the wavelengths. The lens unit determines the sizes of the lights penetrated through the prism. The Galvano mirror determines the wavelengths of the lights emitted from the lens unit. The optical detecting unit detects the corresponding lights when the lights with the arbitrary wavelengths selected by the Galvano mirror passes through a pinhole.
Abstract translation: 目的：提供使用Galvano镜的波长扫描模式共聚焦显微镜，以获得能够以快速切换速度转换波长的光谱结构，从而形成相对简单的系统并提高检测速度。 构成：使用Galvano镜（16）的波长扫描模式共聚焦显微镜包括光源单元，偏振片，衍射单元，扫描镜（8），照射单元，棱镜（13），透镜单元， 和光学检测部（20）。 偏光板使从光源单元发射的激光器偏振。 扫描镜扫描通过衍射单元衍射的光。 照射单元将扫描镜中扫描的光束照射到样本。 棱镜根据波长分散被照射到样品后反射的荧光信号。 透镜单元确定穿透棱镜的光的尺寸。 Galvano镜子确定从镜头单元发出的光的波长。 当由Galvano镜选择的任意波长的光通过针孔时，光学检测单元检测相应的光。
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公开(公告)号：KR102207945B1
公开(公告)日：2021-01-26
申请号：KR1020190045142
申请日：2019-04-17
Applicant: 주식회사 더웨이브톡 , 한국과학기술원
Abstract: 본발명의일 실시예는, 시료로부터출사되는출사파동을시계열순으로촬영한복수의영상을수신하는수신부, 상기시계열순으로촬영한복수의영상으로부터시간에따른변화의특징(feature)을추출하는검출부, 상기추출된특징을기초로분류기준을기계학습하는학습부및 상기분류기준을기초로시료에포함된미생물의종류또는농도를구분하는판단부를포함하고, 상기복수의영상각각은상기시료로입사되는파동에기인하여상기미생물에의해다중산란(multiple scattering)되어발생되는스펙클(speckle) 정보를포함하는, 미생물정보제공장치를제공한다.
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公开(公告)号：KR1020170136989A
公开(公告)日：2017-12-12
申请号：KR1020170066365
申请日：2017-05-29
Applicant: 주식회사 더웨이브톡 , 한국과학기술원
Abstract: 본발명의일 관점에따르면, 파동원으로부터기판상에일정한패턴을가지는구조물이형성된패턴영역을포함하는샘플로파동을조사하는단계; 정보수집부를이용하여상기패턴영역에서의다중산란에의해형성된스펙클(speckle)에대한정보를수집하는단계; 및사이수집된정보를기준정보와비교하여상기패턴영역에형성된구조물형태의이상여부를분석하는단계;를포함하는, 패턴구조물검사방법이제공된다.
Abstract translation: 根据本发明的一个方面，提供了一种制造半导体器件的方法，包括：将来自波源的波照射到包括图案区域的样本，其中在衬底上形成具有预定图案的结构; 使用信息收集单元收集关于由图案区域中的多次散射形成的散斑的信息; 并将所收集的信息与参考信息进行比较，以分析在图案区域中形成的结构的形状的异常。
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公开(公告)号：KR101505745B1
公开(公告)日：2015-03-26
申请号：KR1020130128066
申请日：2013-10-25
Applicant: 한양대학교 산학협력단 , 한국과학기술원
CPC classification number: G02B21/008 , G02B21/0032 , G02B21/06 , G02B21/18 , G02B21/26
Abstract: 시편의 높이의 정보를 검출하는 공초점 현미경 및 시편의 높이의 정보를 검출하는 방법이 제공된다. 실시예의 공초점 현미경은 복수의 핀홀을 구비하고, 복수의 핀홀을 통과한 반사광의 세기에 기반하여 시편의 높이의 정보를 검출할 수 있고, 검출된 시편의 높이의 정보에 기반하여 시편의 3 차원이 생성될 수 있다. 실시예의 공초점 현미경은 공초점 현미경 및/또는 시편의 기계적인 이송 없이 시편의 높이의 정보를 검출할 수 있고, 시편을 2 차원 평면에서 스캔하는 것만으로 시편의 3 차원 영상을 생성할 수 있다.
Abstract translation: 提供了共焦显微镜和用于检测关于样品的高度的信息的方法。 根据本发明的实施例，具有多个针孔的共聚焦显微镜能够基于穿过针孔传输的反射光的强度来检测样本的高度的信息，并且能够产生三维图像 基于检测到的关于样品高度的信息。 共聚焦显微镜能够检测样品的高度信息，而不需要共聚焦显微镜和/或样品的机械运动，并且能够通过在两个样品上扫描样品来产生样品的三维图像 维平面。 共聚焦显微镜包括：透射发射到样本的光的物镜，并且当光发射到样本时由样本反射的反射光被透射; 透射通过分束器从反射光分离第一反射光的第一针孔; 第二针孔，通过分束器沿与第一反射光不同的方向从反射光分离的第二反射光透过该第二针孔; 以及处理部，其基于所述第一反射光的第一强度和所述第二反射光的第二强度，检测由所述共聚焦显微镜观察到的所述样本的高度的信息，其中，所述第一和第二销孔的尺寸不同 。
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Patent Agency Ranking
公开(公告)号：KR1020140116341A
公开(公告)日：2014-10-02
申请号：KR1020130031131
申请日：2013-03-22
Applicant: 한국과학기술원
CPC classification number: G02B26/103 , A61B1/00096 , A61B1/07 , G02B6/262 , G02B6/3624 , G02B23/26
Abstract: The present invention relates to an endo-microscopic probe based on the non-resonant scanning of optical fiber. An endo-microscopic probe includes: a housing of a preset size; optical fiber which is located in the inner part of the housing and transmits a light source; a tube-type piezoelectric element which includes a guide part which has a structure of surrounding the optical fiber in the housing, has an end for guiding the movement of the optical fiber, receives power from the outside to transmit a deformation value according to deformation to the optical fiber through the guide part, and provides the deformation (deformation value); and a lens part which is located in the inner part of the piezoelectric element to transmit light emitted from the end of the optical fiber to a sample and is fixed at the end of the housing.
Abstract translation: 本发明涉及一种基于光纤的非共振扫描的内窥镜探针。 内窥镜探针包括：预定尺寸的壳体; 光纤，其位于壳体的内部并透射光源; 一种管状压电元件，其包括具有围绕壳体中的光纤的结构的引导部，具有用于引导光纤的移动的端部，从外部接收功率以将变形值根据变形传递到 光纤通过引导部分，并提供变形（变形值）; 以及透镜部，其位于压电元件的内部，用于将从光纤端部发射的光透射到样品，并且固定在壳体的端部。
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公开(公告)号：KR1020130083258A
公开(公告)日：2013-07-22
申请号：KR1020120003933
申请日：2012-01-12
Applicant: 한국과학기술원
CPC classification number: G02B21/0032 , G02B21/008 , G02B21/02 , G02B21/06 , G02B21/08 , G02B27/1046
Abstract: PURPOSE: A spatial phase modulator capable of using an electro-optic modulator and a confocal microscope using thereof are provided to image by extracting only the ballistic, thereby obtaining an improved depth of penetration. CONSTITUTION: A spatial phase modulator is comprised of a light source (110), a collimator (120), an electro-optic modulator (130), a polarizing plate (140), and a wavelength plate (150). The light source emits the laser light. The collimator makes the parallel light with the laser light which is emitted from the light source. The electro-optic modulator phase modulates the primary wave beam in the linearly polarized light which is emitted from the collimator and prevents the frequency deviation by modulating the secondary wave beam. The polarizing plate comprises a secondary wave polarizing plate and a primary wave polarizing plate integrally and phase modulates only the primary wave. Only one side of the polarizing plate is comprised of a half-wave plate, which equalizes the polarizing direction of the final beam output and outputs the beam to phase-modulate only the primary wave.
Abstract translation: 目的：通过仅提取弹道来提供能够使用电光调制器和共焦显微镜的空间相位调制器，从而获得改善的穿透深度。 构成：空间相位调制器由光源（110），准直器（120），电光调制器（130），偏振板（140）和波长板（150）组成。 光源发射激光。 准直仪用从光源发出的激光进行平行光。 电光调制器相位调制从准直器发射的线偏振光中的主波束，并通过调制次波束来防止频偏。 偏振板包括一次侧波偏振板和一次波偏振片，并且仅对一次波进行相位调制。 仅偏振片的一侧由半波片组成，其平均最终光束输出的偏振方向，并输出光束以仅对一次波进行相位调制。
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公开(公告)号：KR1020150146074A
公开(公告)日：2015-12-31
申请号：KR1020140075940
申请日：2014-06-20
Applicant: 한국과학기술원
IPC: G02B21/00
Abstract: 멀티모달현미경이개시된다. 멀티모달현미경은일반광학현미경(wide-field), 공초점현미경(confocal microscope), 이광자현미경(TPM, Two Photons Microscope), 형광수명시간이미징현미경(FLIM, Fluorescence Lifetime Imaging Microscope), 스펙트럴이미징(Spectral Imaging) 분광현미경의각각의광학계를배치하여하나로통합한멀티모달현미경을포함하며, 멀티모달현미경의모달리티를변경하여스위칭필터방식으로선택된광학계의광경로에따라빔 스플리터가선택되어하나의시편을여러모달리티의영상을획득하여종합적인시편분석을하게되었다.
Abstract translation: 公开了一种多模式显微镜。 多模显微镜是通过整合常规宽视野显微镜，共聚焦显微镜，双光子显微镜（TPM），荧光寿命成像显微镜（FLIM）和光谱成像光谱显微镜的每个光学系统来形成的。 通过改变多模式显微镜的形状，根据由切换滤波器方法选择的光学系统的光路来选择分束器，以获取一个样本的各种图像的形式; 从而进行总体样本分析。
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公开(公告)号：KR101117501B1
公开(公告)日：2012-03-07
申请号：KR1020100013238
申请日：2010-02-12
Applicant: 한국과학기술원
Abstract: 선형(linear)의광이서로수직교차되는조명광을출사하는광생성부, 상기광생성부에서출사된광을분리하는빔스플리터, 상기빔스플리터를통과한서로수직교차되는조명광을스캐닝미러를통해스캐닝하고, 이를대물렌즈를통해측정대상물에조사한후 반사및 산란되는광을다시전달하는측정부및 상기측정부로부터반사되는광을획득하여대상물을측정하는검출부를포함하는것을특징으로한다. 이와같이구성되는본 발명은시편또는패턴의회전없이한번에조명하고, 복수개의스캐닝미러가독립적으로스캐닝함으로써고속으로영상을획득할수 있는이점이있다.
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公开(公告)号：KR1020110093291A
公开(公告)日：2011-08-18
申请号：KR1020100013238
申请日：2010-02-12
Applicant: 한국과학기술원
CPC classification number: G02B21/0032 , G02B21/004 , G02B21/0068 , G02B21/008
Abstract: PURPOSE: A structured illumination confocal microscope using a cross structure illumination linear pattern is provided to obtain an image at high speed by using a two-axis high speed mirror scanner. CONSTITUTION: A structured illumination confocal microscope includes a light generator(10), a beam splitter(20), a measuring unit(30), and a detecting unit(40). The light generator emits illumination light made by vertically crossing linear light. The beam splitter separates light emitted from the light generator. A measuring unit scans the illumination light passing through the beam splitter by a scanning mirror. An object lens radiates light to a target and transmits light which is reflected or scattered. The detecting unit measures the object by obtaining light reflected from the measuring unit.
Abstract translation: 目的：提供使用交叉结构照明线性图案的结构照明共焦显微镜，以通过使用双轴高速镜扫描仪高速获得图像。 结构：结构照明共焦显微镜包括光发生器（10），分束器（20），测量单元（30）和检测单元（40）。 光发生器发射通过垂直交叉的线性光产生的照明光。 分束器分离从发光器发出的光。 测量单元通过扫描镜扫描通过分束器的照明光。 物镜将光照射到目标物并透射反射或散射的光。 检测单元通过获得从测量单元反射的光来测量物体。
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