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公开(公告)号:NL2005331A
公开(公告)日:2011-05-19
申请号:NL2005331
申请日:2010-09-08
Applicant: ASML NETHERLANDS BV
Inventor: SCHOOT JAN , INGEN SCHENAU KOEN , VRIES GOSSE
IPC: G03F7/20
公开(公告)号:NL2005331A
公开(公告)日:2011-05-19
申请号:NL2005331
申请日:2010-09-08
Applicant: ASML NETHERLANDS BV
Inventor: SCHOOT JAN , INGEN SCHENAU KOEN , VRIES GOSSE
IPC: G03F7/20