公开(公告)号：NL2011762A

公开(公告)日：2014-01-13

申请号：NL2011762

申请日：2013-11-08

Applicant: ASML NETHERLANDS BV

Inventor： SCHOOT JAN ,  EURLINGS MARKUS ,  KREUWEL HERMANUS

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2009352A

公开(公告)日：2013-03-25

申请号：NL2009352

申请日：2012-08-23

Applicant: ASML NETHERLANDS BV

Inventor： SCHOOT JAN ,  BANINE VADIM ,  YAKUNIN ANDREI ,  KREUWEL HERMANUS ,  MOORS JOHANNES ,  FRIJNS OLAV WALDEMAR VLADIMIR ,  SWINKELS GERARDUS ,  STAMM UWE ,  VANDERHALLEN IVO

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2007629A

公开(公告)日：2011-11-23

申请号：NL2007629

申请日：2011-10-20

Applicant: ASML NETHERLANDS BV

Inventor： VRIES GOSSE ,  SCHOOT JAN ,  JANSSEN FRANCISCUS ,  AERLE NICOLAAS

IPC: G03F7/20

公开(公告)号：NL2006604A

公开(公告)日：2011-06-09

申请号：NL2006604

申请日：2011-04-14

Applicant: ASML NETHERLANDS BV

Inventor： BANINE VADIM ,  BOEIJ WILHELMUS ,  DIJSSELDONK ANTONIUS ,  LOOPSTRA ERIK ,  MOORS ROEL ,  SCHOOT JAN ,  SWINKELS GERARDUS ,  YAKUNIN ANDREI

IPC: G03F7/20 ,  G21K1/06

公开(公告)号：NL2008250A

公开(公告)日：2012-09-11

申请号：NL2008250

申请日：2012-02-07

Applicant: ASML NETHERLANDS BV

Inventor： NIENHUYS HAN-KWANG ,  CUIJPERS MARTINUS ,  LEVASIER LEON ,  SCHOOT JAN ,  VIJVER YURI ,  VOZNYI OLEG ,  JANSSEN FRANCISCUS ,  PHILIPS DANNY ,  MIRANDA MARCIO ,  GALAKTIONOV OLEKSIY ,  BAL KURSAT ,  SCHMITZ ROGER ,  LEROUX ALAIN ,  RANJAN MANISH ,  RIJPMA ALBERT

IPC: G03F7/20

公开(公告)号：NL2005771A

公开(公告)日：2011-06-30

申请号：NL2005771

申请日：2010-11-29

Applicant: ASML NETHERLANDS BV

Inventor： BOEIJ WILHELMUS ,  LOOPSTRA ERIK ,  MICKAN UWE ,  SCHOOT JAN ,  VRIES GOSSE

IPC: G03F7/20

Abstract: An illumination system includes a field-facet mirror-device and a pupil mirror configured to condition a beam of radiation incident on the field-facet mirror-device. The field-facet mirror-device includes reflective field facets movable between first and second orientations relative to the incident beam. The field facets in their first orientations are effective to reflect the incident radiation towards respective reflective pupil facets so as to form part of a conditioned beam reflected from the pupil-facet mirror-device. The field facets in their second orientations are effective to reflect the incident radiation onto respective areas of the pupil-facet mirror-device designated as beam dump areas. The areas are arranged to prevent radiation incident on the areas from forming part of the conditioned beam and are arranged between the limits of an annular area on the pupil-facet mirror-device effective to define the inner and outer regions of the conditioned beam reflected from the pupil-facet mirror-device.

公开(公告)号：NL2003223A

公开(公告)日：2010-03-31

申请号：NL2003223

申请日：2009-07-17

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ,  BOEIJ WILHELMUS ,  BUTLER HANS ,  JONGH ROBERTUS ,  SCHOOT JAN ,  SENGERS TIMOTHEUS ,  WIJCKMANS MAURICE ,  JANSSEN FRANCISCUS

IPC: G03F7/20

公开(公告)号：NL2011580A

公开(公告)日：2014-05-08

申请号：NL2011580

申请日：2013-10-10

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ,  YAKUNIN ANDREI ,  BANINE VADIM ,  NIKIPELOV ANDREY ,  OSORIO OLIVEROS EDGAR ,  STRUYCKEN ALEXANDER ,  DRIE NHUIZEN BERT ,  SCHOOT JAN

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2010108A

公开(公告)日：2013-07-22

申请号：NL2010108

申请日：2013-01-10

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  BANINE VADIM ,  MOORS ROEL ,  SCHOOT JAN ,  VERHAGEN MARTINUS ,  FRIJNS OLAV WALDEMAR VLADIMIR ,  KRIVTSUN VLADIMIR ,  SWINKELS GERARDUS ,  RIEPEN MICHEL ,  SCHIMMEL HENDRIKUS ,  MEDVEDEV VIACHESLAV

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2004429A

公开(公告)日：2011-02-28

申请号：NL2004429

申请日：2010-03-18

Applicant: ASML NETHERLANDS BV

Inventor： VRIES GOSSE ,  BUIS EDWIN ,  DAM MARINUS ,  SCHOOT JAN ,  BOON FIDELUS ,  KREUWEL HERMANUS

IPC: G03F7/20