公开(公告)号：AU5428699A

公开(公告)日：2000-03-06

申请号：AU5428699

申请日：1999-08-10

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  HOPKIN IAN DAVID

IPC: G01C19/5684 ,  G01C19/56

Abstract: An angular rate sensor or gyro includes a ring-like resonator (1) mounted by support beams (2) extending from the inner periphery of the ring (1) to a boss (4) on a base (3). The support beams (2) are flexible and allow the resonator (1) to vibrate in response to an electrostatic drive (6, 8) in a substantially undamped oscillation mode to permit the resonator to move relative to the support in response to turning rate. The support beams (2) and resonator (1) are made from crystalline silicon. Electrostatic sensors (7, 9) are provided for sensing movement of the resonator (1). The drive (6, 8) and sensors (7, 9) have plate-like elements made from crystalline silicon having surfaces located substantially normal to the plane of the resonator (1) at a spacing from the adjacent outer periphery of the resonator (1). The ratio of the thickness of the resonator (1) at the outer periphery (1b) to the width of the spacing (11) between the periphery (1b) and the element surfaces (10) is in the range of from 10:1 to 40:1.

公开(公告)号：CA2338616A1

公开(公告)日：2000-02-24

申请号：CA2338616

申请日：1999-08-10

Applicant: BAE SYSTEMS PLC

Inventor： HOPKIN IAN DAVID ,  FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/5684 ,  G01C19/56

Abstract: An angular rate sensor or gyro includes a ring-like resonator (1) mounted by support beams (2) extending from the inner periphery of the ring (1) to a bo ss (4) on a base (3). The support beams (2) are flexible and allow the resonato r (1) to vibrate in response to electrostatic drive means (6, 8) in a substantially undamped oscillation mode to permit the resonator to move relative to the support means in response to turning rate. The support beams (2) and resonator (1) are made from crystalline silicon. Electrostatic sensi ng means (7, 9) are provided for sensing movement of the resonator (1). The dri ve means (6, 8) and sensing means (7, 9) have plate-like elements made from crystalline silicon having surfaces located substantially normal to the plan e of the resonator (1) at a spacing from the adjacent outer periphery of the resonator (1). The ratio of the thickness of the resonator (1) at the outer periphery (1b) to the width of the spacing (11) between the periphery (1b) a nd the element surfaces (10) is in the range of from 10:1 to 40:1.

公开(公告)号：DE69727756T2

公开(公告)日：2004-07-29

申请号：DE69727756

申请日：1997-10-07

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： FELL CHRISTOPHER PAUL

IPC: G01C19/5677 ,  G01C19/56

Abstract: A rate sensor for sending applied rate on at least two and preferably three axes includes a vibrating structure (6). Means are provided for vibrating the structure (6) in a Cos 2&thetas; carrier mode at a Cost 2&thetas; frequency. This carrier mode provides the linear momentum components necessary to couple energy into response modes in every geometric plane. Rotation about one or other of the axes in the plane of the vibrating structure will generate Coriolis forces which cause a rocking motion of the vibrating structure (6) about the same axis at the carrier mode frequency. The vibrating structure (6) has a substantially planar substantially ring or hoop like form shaped and dimensioned to match the frequencies of the Cos 2&thetas; mode and rocking mode vibrations in the structure (6) resulting in a resonant amplification of the rocking mode vibrations caused by rotations around axes in the plane of the structure (6). Rotation about the third axis normal to the plane of the structure (6) generates Coriolis forces which couple energy into the degenerate Cos 2&thetas; response mode. The Cos 2&thetas; response and rocking mode vibration amplitudes are proportional to the applied rate and means are provided for detecting the Cos 2&thetas; response mode and rocking mode vibration and thereby the applied rate.

公开(公告)号：DE60103363D1

公开(公告)日：2004-06-24

申请号：DE60103363

申请日：2001-01-08

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： FELL CHRISTOPHER PAUL

IPC: B81B3/00 ,  G01C19/5684 ,  H01L29/84 ,  G01C19/56 ,  G01P9/04

Abstract: An angular rate sensor device (10) such as a micro-machined vibrating structure gyroscope, comprises a resonator (16), drive means (18), sensing means (20) and associated electronic control means. The resonator (16), drive means (18), sensing means (20) and control means are fabricated from a layer of crystalline silicon (12) having a [100] principal crystal plane. In order to make the resonator (16) operate in this type of material without degrading its performance, the resonator (16) is arranged to be operated by the drive and sensing means (18, 20) under the control of the electronic control means with a vibration mode pair having modal parameters, such as Young's Modulus, matched to provide a consistent resonator response. In particular, the resonator (16) is arranged to be operated with a Sin 3theta/Cos 3theta (vibration mode pair providing degenerate carrier and response parameters.

公开(公告)号：AT267384T

公开(公告)日：2004-06-15

申请号：AT01900486

申请日：2001-01-08

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL

IPC: B81B3/00 ,  G01C19/5684 ,  H01L29/84 ,  G01C19/56 ,  G01P9/04

Abstract: An angular rate sensor device (10) such as a micro-machined vibrating structure gyroscope, comprises a resonator (16), drive means (18), sensing means (20) and associated electronic control means. The resonator (16), drive means (18), sensing means (20) and control means are fabricated from a layer of crystalline silicon (12) having a [100] principal crystal plane. In order to make the resonator (16) operate in this type of material without degrading its performance, the resonator (16) is arranged to be operated by the drive and sensing means (18, 20) under the control of the electronic control means with a vibration mode pair having modal parameters, such as Young's Modulus, matched to provide a consistent resonator response. In particular, the resonator (16) is arranged to be operated with a Sin 3theta/Cos 3theta (vibration mode pair providing degenerate carrier and response parameters.

公开(公告)号：ES2205520T3

公开(公告)日：2004-05-01

申请号：ES98933784

申请日：1998-07-13

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  HOPKIN IAN DAVID ,  TOWNSEND KEVIN

IPC: G01L1/10 ,  G01C19/567 ,  G01P15/10 ,  G01C19/56

公开(公告)号：CA2458604A1

公开(公告)日：2003-03-27

申请号：CA2458604

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  MCWILLIAM STEWART ,  FOX COLIN HENRY JOHN ,  ELEY REBECKA

IPC: G01C19/5684 ,  G01C19/56

Abstract: A three axis rate sensor includes a substantially planar vibratory resonator (5) having a substantially ring or hoop-like structure with inner (6) and outer peripheries extending around a common axis, drive means (22) for causi ng the resonator to vibrate in a Cos2.theta. vibration mode, carrier mode pick- off means (23) for sensing movement of the resonator (5) in response to the applied drive means, x-axis, y-axis and z-axis response mode, pick-off means (25, 27, 31) for detecting movement of the resonator in response to rotation about the x-axis, y-axis and z-axis, x-axis, y-axis and z-axis response mode drive means (24, 26, 30) for nulling said motion and support means (9) for flexibly supporting the resonator and for allowing the resonator (5) to vibrate relative to the support means (9) in response to the drive means (22 ) and the applied rotation wherein the support means (9) comprises only L support beams, where L .noteq. 2k, and k = 0, 1, 2 or 3.

公开(公告)号：CA2458594A1

公开(公告)日：2003-03-27

申请号：CA2458594

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC

Inventor： ELEY REBECKA ,  FELL CHRISTOPHER PAUL ,  FOX COLIN HENRY JOHN ,  MCWILLIAM STEWART

IPC: G01C19/5684 ,  G01C19/56

Abstract: A single axis rate sensor (10) including a substantially planar vibratory resonator (16) having a substantially ring or hoop-like structure with inner (24) and outer peripheries extending around a common axis, drive means (18) for causing the resonator to vibrate in a Cos3.theta. vibration mode, carrie r mode pick-off means (20) for sensing movement of the resonator in response t o said drive means (18), pick-off means (36) for sensing resonator movement induced in response to rotation of the rate sensor about the sensitive axis, drive means (38) for mulling said motion, and support means (22) for flexibl y supporting the resonator (16) and for allowing the resonator (16) to vibrate relative to the support means (22) in response to the drive means, and to applied rotation wherein the support means (16) comprises only L support beams, where L .noteq. 3 x 2K-1, L> 2 and K = 1, 2 or 3.

公开(公告)号：NO20024839L

公开(公告)日：2002-10-07

申请号：NO20024839

申请日：2002-10-07

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/56 ,  G01C19/567

Abstract: A vibrating structure gyroscope having a vibrating structure (3) primary drive means (4) and secondary drive means (7) and primary pick-off means (2) an secondary pick-off means (6) is provided with a control system. The control system includes a primary closed control loop (1) for controllably varying the drive signal applied to the primary drive means (4), a secondary closed control loop (5) for controllably varying the drive signal applied to the secondary drive means (7) in order to maintain a null value of the secondary pick-off means (6) and means (30) for actively adjusting the scalefactor in the primary and secondary closed control loops (1, 5). The means (30) includes means (34) for dividing a rate response signal from the loop (5) by a signal indicative of the amplitude of the primary mode vibration. The output form the means (34) is filtered to provide an applied rate output. A variable scalefactor loop (3) uses the output from the means (34) actively to adjust a reference voltage set level of loop (1) to adjust the in loop scalefactor of the system.

公开(公告)号：NO20024839A

公开(公告)日：2002-10-07

申请号：NO20024839

申请日：2002-10-07

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/567 ,  G01C19/56

CPC classification number: G01C19/567