公开(公告)号：WO03025503A9

公开(公告)日：2003-12-18

申请号：PCT/GB0204056

申请日：2002-09-06

Applicant: BAE SYSTEMS PLC ,  FELL CHRISTOPHER PAUL ,  ELEY REBECKA ,  FOX COLIN HENRY JOHN ,  MCWILLIAM STEWART

Inventor： FELL CHRISTOPHER PAUL ,  ELEY REBECKA ,  FOX COLIN HENRY JOHN ,  MCWILLIAM STEWART

IPC: G01C19/5677 ,  G01C19/56

CPC classification number: G01C19/5677

Abstract: A two axis gyroscope including a planar vibratory resonator (5) having a ring or hoop-like structure, carrier mode drive means (22) for causing the resonator (5) to vibrate in a cosntheta vibration mode, carrier mode pick-off means (23) for sensing movement of the resonator (5), x-axis and x-axis response mode pick-off means (25; 27) for detecting movement of the resonator in response to rotation about the x-axis and y-axis; x-axis and y-axis response mode drive means (24; 26) for nulling said motions and support means (9) for flexibly supporting the resonator (5) and for allowing the resonator to vibrate relative to the support means (9) in response to the drive means (22) and to applied rotation; wherein the support (9) means comprises only L legs, where, when L is even: L=2N/K, and where, when L is odd: L=N/K, where K is an integer, L > 2 and N is the carrier mode order.

Abstract translation: 包括具有环形或环状结构的平面振动谐振器（5）的双轴陀螺仪，用于使谐振器（5）以谐振振动模式振动的载体模式驱动装置（22），载波模式拾取装置 23），用于感测谐振器（5）的移动; x轴和x轴响应模式拾取装置（25; 27），用于响应围绕x轴和y轴的旋转检测谐振器的移动; x轴和y轴响应模式驱动装置（24; 26），用于使所述运动零点和支撑装置（9）用于柔性地支撑谐振器（5）并且允许谐振器相对于支撑装置（9）振动 响应于驱动装置（22）并施加旋转; 其中，所述支撑件（9）仅包括L脚，其中当L为偶数时：L = 2N / K，并且其中当L为奇数时：L = N / K，其中K是整数，L> 2和N 是载波模式的顺序。

公开(公告)号：AT293245T

公开(公告)日：2005-04-15

申请号：AT01915526

申请日：2001-03-28

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/56 ,  G01C19/567

Abstract: A vibrating structure gyroscope having a vibrating structure (3) primary drive means (4) and secondary drive means (7) and primary pick-off means (2) an secondary pick-off means (6) is provided with a control system. The control system includes a primary closed control loop (1) for controllably varying the drive signal applied to the primary drive means (4), a secondary closed control loop (5) for controllably varying the drive signal applied to the secondary drive means (7) in order to maintain a null value of the secondary pick-off means (6) and means (30) for actively adjusting the scalefactor in the primary and secondary closed control loops (1, 5). The means (30) includes means (34) for dividing a rate response signal from the loop (5) by a signal indicative of the amplitude of the primary mode vibration. The output form the means (34) is filtered to provide an applied rate output. A variable scalefactor loop (3) uses the output from the means (34) actively to adjust a reference voltage set level of loop (1) to adjust the in loop scalefactor of the system.

公开(公告)号：DE60103363T2

公开(公告)日：2004-09-23

申请号：DE60103363

申请日：2001-01-08

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： FELL CHRISTOPHER PAUL

IPC: B81B3/00 ,  G01C19/5684 ,  H01L29/84 ,  G01C19/56 ,  G01P9/04

Abstract: An angular rate sensor device (10) such as a micro-machined vibrating structure gyroscope, comprises a resonator (16), drive means (18), sensing means (20) and associated electronic control means. The resonator (16), drive means (18), sensing means (20) and control means are fabricated from a layer of crystalline silicon (12) having a [100] principal crystal plane. In order to make the resonator (16) operate in this type of material without degrading its performance, the resonator (16) is arranged to be operated by the drive and sensing means (18, 20) under the control of the electronic control means with a vibration mode pair having modal parameters, such as Young's Modulus, matched to provide a consistent resonator response. In particular, the resonator (16) is arranged to be operated with a Sin 3theta/Cos 3theta (vibration mode pair providing degenerate carrier and response parameters.

公开(公告)号：DE69817375T2

公开(公告)日：2004-04-01

申请号：DE69817375

申请日：1998-07-13

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： FELL CHRISTOPHER PAUL ,  HOPKIN IAN DAVID ,  TOWNSEND KEVIN

IPC: G01L1/10 ,  G01C19/567 ,  G01P15/10 ,  G01C19/56

公开(公告)号：AU770212B2

公开(公告)日：2004-02-19

申请号：AU2386801

申请日：2001-01-08

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN

IPC: G01C19/5677 ,  G01C19/5691 ,  G01C19/56 ,  G01P9/04

Abstract: A vibrating structure gyroscope comprises a resonant body, a drive transducer for driving resonant motion of the body, a pick-off for producing signals representative of the resonant motion, and a signal processor for extracting z-axis orientation information and x- and y-axis rate information from the signals. The resonant body is planar and the resonant motion takes place in a vibration mode pattern whose orientation angle with respect to the body varies in accordance with z-axis orientation of the body and couples energy into an out-of-plane response mode motion in accordance with rotation of the body about the x- or y-axis. The signal processor resolves the out-of-plane response mode motion with reference to a z-axis orientation signal to extract the x- and y-axis rate information.

公开(公告)号：AU750061B2

公开(公告)日：2002-07-11

申请号：AU5428699

申请日：1999-08-10

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  HOPKIN IAN DAVID

IPC: G01C19/5684 ,  G01C19/56

Abstract: An angular rate sensor or gyro includes a ring-like resonator (1) mounted by support beams (2) extending from the inner periphery of the ring (1) to a boss (4) on a base (3). The support beams (2) are flexible and allow the resonator (1) to vibrate in response to an electrostatic drive (6, 8) in a substantially undamped oscillation mode to permit the resonator to move relative to the support in response to turning rate. The support beams (2) and resonator (1) are made from crystalline silicon. Electrostatic sensors (7, 9) are provided for sensing movement of the resonator (1). The drive (6, 8) and sensors (7, 9) have plate-like elements made from crystalline silicon having surfaces located substantially normal to the plane of the resonator (1) at a spacing from the adjacent outer periphery of the resonator (1). The ratio of the thickness of the resonator (1) at the outer periphery (1b) to the width of the spacing (11) between the periphery (1b) and the element surfaces (10) is in the range of from 10:1 to 40:1.

公开(公告)号：CZ20012348A3

公开(公告)日：2001-11-14

申请号：CZ20012348

申请日：1999-12-17

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/56 ,  G01C19/5684

Abstract: A vibrating structure gyroscope having a silicon substantially planar ring vibrating structure (1) capacitive means for imparting drive motion to and sensing motion of the vibrating structure (1), and a screen layer (15) surrounding the capacitive means is made by depositing photoresist material (9) on a glass or silicon substrate (7), hardening, patterning and developing the photoresist (9) to expose areas of the substrate (7), etching the exposed areas to form cavities (10) therein, stripping any remaining photoresist material (9) attaching a silicon layer (8) to the cavitated substrate (7) depositing a layer of aluminium on the silicon layer (8), depositing photoresist material on the aluminium layer, hardening, patterning and developing the photoresist layer to expose areas of the aluminium layer, etching the exposed areas of the aluminium layer to leave regions of aluminium on the silicon layer providing bond pads (11, 12, 13 and 14), stripping the remaining photoresist from the aluminium layer, depositing another layer of photoresist material on the silicon layer (8) over the remaining deposited aluminium layer regions, hardening, patterning and developing the layer of photoresist material to expose areas of the silicon layer (8) and deep reactive ion etching the exposed areas of the silicon layer (8) to form therefrom the substantially planar ring vibrating structure (1) mounted by a hub (4) above the cavities (10).

公开(公告)号：NO20013151A

公开(公告)日：2001-08-22

申请号：NO20013151

申请日：2001-06-22

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  STURLAND IAN

IPC: G01C19/5684 ,  G01C19/56

CPC classification number: G01C19/5684

公开(公告)号：AU2531601A

公开(公告)日：2001-08-07

申请号：AU2531601

申请日：2001-01-08

Applicant: BAE SYSTEMS PLC

Inventor： FELL CHRISTOPHER PAUL

IPC: B81B3/00 ,  G01C19/5684 ,  H01L29/84 ,  G01C19/56 ,  G01P9/04

Abstract: An angular rate sensor device (10) such as a micro-machined vibrating structure gyroscope, comprises a resonator (16), drive means (18), sensing means (20) and associated electronic control means. The resonator (16), drive means (18), sensing means (20) and control means are fabricated from a layer of crystalline silicon (12) having a [100] principal crystal plane. In order to make the resonator (16) operate in this type of material without degrading its performance, the resonator (16) is arranged to be operated by the drive and sensing means (18, 20) under the control of the electronic control means with a vibration mode pair having modal parameters, such as Young's Modulus, matched to provide a consistent resonator response. In particular, the resonator (16) is arranged to be operated with a Sin 3theta/Cos 3theta (vibration mode pair providing degenerate carrier and response parameters.

公开(公告)号：DE69828713T2

公开(公告)日：2005-06-30

申请号：DE69828713

申请日：1998-02-17

Applicant: BAE SYSTEMS PLC FARNBOROUGH

Inventor： HOPKIN IAN DAVID ,  FELL CHRISTOPHER PAUL ,  TOWNSEND KEVIN ,  MASON TIMOTHY ROBERT

IPC: G01C19/5677 ,  G01C19/56

Abstract: A vibrating structure gyroscope has a vibratory resonator (1) having a substantially ring or hoop-like shape structure, electromagnetic drive means for causing the resonator (1) to vibrate, support means including a plurality of flexible support beams (5) for supporting the resonator whilst allowing it to vibrate and electromagnetic sensing means for sensing movement of the resonator (1). The support beams (5) and resonator (1) are made from silicon and the electromagnetic drive and sensing means are provided by metal tracks (7, 8) which extend externally along each support beam (5) onto and along respective segments of an outer substantially planar surface (1a) the ring-like resonator (1). The resonator (1) is substantially planar and means (13, 14, 14a) are provided to produce a magnetic field substantially perpendicular to the plane of the resonator (1).