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公开(公告)号:AU779988B2
公开(公告)日:2005-02-24
申请号:AU5773400
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00 , F16K17/00
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:NO20016268L
公开(公告)日:2002-02-27
申请号:NO20016268
申请日:2001-12-20
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00 , F16K
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:AU5773400A
公开(公告)日:2001-01-31
申请号:AU5773400
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00 , F16K17/00
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:CA2767084A1
公开(公告)日:2001-01-04
申请号:CA2767084
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: B81B3/00 , B29C69/00 , B81B7/02 , F15C1/06 , F15C1/22 , F15C3/04 , F15C3/16 , F15C5/00 , F16K20060101
Abstract: A microfabricated elastomeric device comprises a planar substrate and a first elastomeric layer having a top surface and a bottom surface. The bottom surface comprises a first recess, wherein the bottom surface of the first elastomeric layer is bonded to the planar substrate such that the first recess forms a first flow channel. The device also comprises a second elastomeric layer having a top surface and a bottom surface. The bottom surface comprises a second recess. The bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer such that the second recess forms a second flow channel. The first and second elastomeric layers form an elastomeric structure. The second flow channel extends across and above the first flow channel such that a fluid flow within the second flow channel is directed from before a first side of the first flow channel to beyond a second side of the first flow channel. A portion of the first elastomeric layer is a deflectable portion and is deflectable into the first flow channel upon pressurization of the second flow channel to form a planar sealing surface between the planar substrate and the deflectable portion of the first elastomeric layer.
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公开(公告)号:CA2378190A1
公开(公告)日:2001-01-04
申请号:CA2378190
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: THORSEN TODD A , CHOU HOU-PU , SCHERER AXEL , UNGER MARC A , QUAKE STEPHEN R
IPC: G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00
Abstract: A method of fabricating an elastomeric structure, comprising : forming a fir st elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first rece ss extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surfac e of the first elastomeric layer such that a control channel forms in the seco nd recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channe l forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:CA2767084C
公开(公告)日:2017-04-18
申请号:CA2767084
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: B81B3/00 , B29C69/00 , B81B7/02 , F15C1/06 , F15C1/22 , F15C3/04 , F15C3/16 , F15C5/00 , F16K20060101
Abstract: A microfabricated elastomeric device comprises a planar substrate and a first elastomeric layer having a top surface and a bottom surface. The bottom surface comprises a first recess, wherein the bottom surface of the first elastomeric layer is bonded to the planar substrate such that the first recess forms a first flow channel. The device also comprises a second elastomeric layer having a top surface and a bottom surface. The bottom surface comprises a second recess. The bottom surface of the second elastomeric layer is bonded to the top surface of the first elastomeric layer such that the second recess forms a second flow channel. The first and second elastomeric layers form an elastomeric structure. The second flow channel extends across and above the first flow channel such that a fluid flow within the second flow channel is directed from before a first side of the first flow channel to beyond a second side of the first flow channel. A portion of the first elastomeric layer is a deflectable portion and is deflectable into the first flow channel upon pressurization of the second flow channel to form a planar sealing surface between the planar substrate and the deflectable portion of the first elastomeric layer.
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公开(公告)号:CA2721172C
公开(公告)日:2012-04-10
申请号:CA2721172
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , CHOU HOU-PU , THORSEN TODD A , SCHERER AXEL , QUAKE STEPHEN R
IPC: B81B3/00 , G03F7/20 , B01L3/00 , B29C69/00 , B81B1/00 , B81B7/00 , B81B7/02 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C1/06 , F15C1/22 , F15C3/04 , F15C3/16 , F15C5/00 , F16K7/00 , F16K7/07 , F16K7/17 , F16K7/20 , F16K17/02 , F16K99/00 , H01H59/00
Abstract: A microfabricated elastomeric structure comprises an elastomeric block formed with microfabricated recesses having a width less than 1000 µm therein. A portion of the elastomeric block is deflectable into one of the recesses when the portion is actuated.
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公开(公告)号:DE60031540T2
公开(公告)日:2007-05-16
申请号:DE60031540
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER A , CHOU HOU-PU , THORSEN A , SCHERER AXEL , QUAKE R
IPC: F04B43/04 , G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:DE60018425D1
公开(公告)日:2005-04-07
申请号:DE60018425
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , SCHERER AXEL , QUAKE STEPHEN R , CHOU HOU-PU , THORSEN TODD A
IPC: G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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公开(公告)号:AT290166T
公开(公告)日:2005-03-15
申请号:AT01128819
申请日:2000-06-27
Applicant: CALIFORNIA INST OF TECHN
Inventor: UNGER MARC A , SCHERER AXEL , QUAKE STEPHEN R , CHOU HOU-PU , THORSEN TODD A
IPC: G03F7/20 , B01L3/00 , B81B1/00 , B81B3/00 , B81B7/00 , B81C1/00 , B81C99/00 , C12Q1/68 , F04B17/00 , F04B35/04 , F04B43/04 , F15C5/00 , F16K7/00 , F16K17/02 , F16K99/00
Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
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