公开(公告)号：DE3715987A1

公开(公告)日：1987-11-19

申请号：DE3715987

申请日：1987-05-13

Applicant: CANON KK

Inventor： OSANAI EIJI

IPC: G11B17/32 ,  G11B21/21 ,  G11B5/60

Abstract: A recording or reproducing apparatus includes a recording or reproducing head for recording or reproducing information in sliding contact with a rotating flexible disc, and a stabilizer member disposed opposite to the head with the disc put between them. On the stabilizer member, a groove is formed for recessing the moving of the head at the position facing the disc, and on both sides of the groove or on the downstream side in the rotating direction of the disc, a slant is formed for generating positive pressure in the direction of pressing the head to the facing disc. The groove and the slant are formed in conformity with the deformation of the disc due to the sliding contact with the disc.

公开(公告)号：JPH10321514A

公开(公告)日：1998-12-04

申请号：JP14298197

申请日：1997-05-19

Applicant: CANON KK

Inventor： OSANAI EIJI

IPC: G03F9/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To suppress the increases of the rigidity and size of the main body of a positioning device by interposing a supporting means between a first base for supporting a moving means and a stool for mounting the first base and a vibration removing means between the stool and a second base which supports the stool and making the supporting reaction of the vibration removing means for supporting the stool constant. SOLUTION: A moving means 6 moves an optical system 3 for exposure and a stage 5 on which a wafer which is an object to be exposed is mounted against the optical system 3. A first base 8 supports the moving means 6 and a stool 9 supports the optical system 3 and is mounted with the first base 8. A supporting means 10 is interposed between the first base 8 and stool 9 and a vibration removing means 11 is interposed between a second base 12 supporting the stool 9 and the stool 9. In addition, a force generating means 13 is interposed between the second base 12 and stool 9 and a control means which controls the force generated from the force generating means 13 so as to make the supporting reaction of the vibration removing means 11 supporting the stool 9 always constant is provided.

公开(公告)号：JPH09219353A

公开(公告)日：1997-08-19

申请号：JP2512496

申请日：1996-02-13

Applicant: CANON KK

Inventor： OSANAI EIJI ,  TSUI KOTARO

IPC: H01L21/68 ,  G03F7/20 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To provide a stage apparatus wherein through the reduction of the influence of the accompanying reaction forces of a stage by its acceleration/ deceleration a superior high accuracy to conventional ones can be achieved. SOLUTION: This apparatus has a surface plate 1 with a reference plane, a support means for supporting the surface plate 1, a first mobile body 3 for moving on the reference plane in a first direction, a first drive means 6 for driving the first mobile body 3, a second mobile body 5 for moving in a different second direction from the first direction using the first mobile body 3 as its reference, and a second drive means 7b for driving the second mobile body 5. Further, the driving reaction forces of the first and second drive means 6, 7b are received respectively by different bases 11, 12 from the surface plate 1. Also, a support mechanism 14 for supporting the second drive means 7b to make it movable very finely in the second direction relative to the first mobile body 3 is provided.

公开(公告)号：JPH08320728A

公开(公告)日：1996-12-03

申请号：JP14978895

申请日：1995-05-25

Applicant: CANON KK

Inventor： OSANAI EIJI ,  TSUI KOTARO

IPC: G01B11/00 ,  G05D3/00 ,  H01L21/027 ,  H01L21/68

Abstract: PURPOSE: To provide a positioning device which can obtain a position relation between a hold board and a surface plate without providing any other positioning means and is inexpensive and high in reliability. CONSTITUTION: The device, which is equipped with a moving means 6 for the translational motion and rotational movement of bodies and displacement quantity measuring means 8a and 8b, and 9a and 9b for measuring the displacement quantities of bodies on two different lines and positions the bodies by controlling the moving means according to the measurement results of the displacement quantity measuring means, is equipped with a position acquiring means which obtains the positions of the bodies according to the quantity of rotational movement and the quantity of displacement when the bodies are placed in the rotational movement.

公开(公告)号：JPH07254555A

公开(公告)日：1995-10-03

申请号：JP6896094

申请日：1994-03-15

Applicant: CANON KK

Inventor： OSANAI EIJI

IPC: G03F9/00 ,  G03B27/54 ,  G03F7/20 ,  H01L21/027 ,  G03B27/32

Abstract: PURPOSE:To make it possible to perform high-speed, high-accuracy positioning by preventing the transmission of vibration by using a simple configuration. CONSTITUTION:An optical system 3 for exposure, a stage 5 for mounting an object to be exposed, moving means 6 for moving the stage relative to the optical system for exposure, a first base 8 for supporting the moving means, a surface table 9 for supporting the optical system for exposure and for mounting the first base, a first supporting means 10 interposed between the first base and the surface table, a second base 12 for supporting the surface table, vibration eliminating means 11 interposed between the surface table and the second base, and second supporting means 13 interposed between the first base and the second base are all provided.

公开(公告)号：JPH06182644A

公开(公告)日：1994-07-05

申请号：JP33880492

申请日：1992-12-18

Applicant: CANON KK

Inventor： IZUMI MAKOTO ,  OSANAI EIJI

IPC: B23Q1/28

Abstract: PURPOSE:To provide a holding device having high holding force and rigidity and a stage device using it. CONSTITUTION:The periphery of a shaft 1 is pressed and held by the clamper 2 of a holding mechanism constituted of an elastic hinge 6 and the clamper 2 in the normal state. The displacement of a piezoelectric element 3 is transferred to the clamper 2 via a lever mechanism, and the clamper 2 is separated from the periphery of the shaft 1 to release the hold when the piezoelectric element 3 is driven.

公开(公告)号：JPH0560883A

公开(公告)日：1993-03-12

申请号：JP25283491

申请日：1991-09-05

Applicant: CANON KK

Inventor： KUBO TADAYUKI ,  OSANAI EIJI

IPC: G02B5/08 ,  G12B5/00

Abstract: PURPOSE:To prevent the generation of the displacement due to the acceleration and disturbance oscillation at the time of positioning by sucking a mirror by a vacuum suction method. CONSTITUTION:A mirror 1 is loaded on a base plate 2 in the state as pushed on the standard surface 2a provided on the base plate 2, the inside of a pocket 3 is kept in negative pressure with a vacuum pump 7 by way of a piping 5 and a suction hole 4 and thus the mirror is held by suction. Thenafter, the circuit is blocked with a solenoid valve 6 and the pocket 3 is in a closed state to keep the negative pressure state. The suction force due to the negative pressure inside of the pocket 3 acts on the mirror 1 as a distributed load and does not act directly on the surface constituting the reflecting surface 1a. Thus, the distortion of the reflecting surface 1a is suppressed and displacement does not occur.

公开(公告)号：JPH04223830A

公开(公告)日：1992-08-13

申请号：JP41274790

申请日：1990-12-21

Applicant: CANON KK

Inventor： SAKINO SHIGEO ,  OSANAI EIJI

IPC: B23Q1/00 ,  B23Q1/01 ,  B23Q1/38 ,  B23Q1/62 ,  G12B5/00 ,  H01L21/66

Abstract: PURPOSE:To increase the rigidity of a structure, to prevent a deformation or a characteristic change by a shock or an aged deterioration, and to improve the assembly efficiency and the serviceability. CONSTITUTION:A fixed board 1, a Y-direction guide means 2 provided on the fixed board 1, a Y-stage 3 moving in the Y direction along the Y-direction guide means 2, and an X-stage 4 installed on the Y-stage 3 and moving in the X direction square to the Y direction, to the Y-stage 3, are provided, and at least one side of the above Y-stage and the X-stage furnishes orthogonal members, which have vertical surfaces each other and formed integrally. Such a constitution is the feature of this movement guide device.

公开(公告)号：JPH02201913A

公开(公告)日：1990-08-10

申请号：JP1943389

申请日：1989-01-31

Applicant: CANON KK

Inventor： OSANAI EIJI ,  TOKUDA YUKIO ,  OMORI TARO

IPC: F16F15/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To enable fast positioning without transmitting vibration produced during driving of an XY-stage to an entire of a device by providing an air bearing between a state base and surface plate of the XY-stage and by floating and restricting the stage base. CONSTITUTION:In an exposure device of step and repeat system, XY-stages 3, 4 to mount a water chuck to fix a substrate are made to float slightly in direction of Z-axis from a surface plate 6. An air bearing is arranged through a fine clearance in direction of X-axis and Y-axis, that is, in a vertical direction to an optical axis of a projection lens to limit movement of a stage base 5. Thereby, various kinds of vibrations develop due to a fast movement of XY- stages 3, 4; however, since the stage base 5 floats from the surface plate 6 through air pats 8-1, 8-2, the vibrations are shielded and not transmitted to an entire of the device or a projection lens 1. Fast positioning can be realized in this way.

公开(公告)号：JP2002025881A

公开(公告)日：2002-01-25

申请号：JP2000199390

申请日：2000-06-30

Applicant: CANON KK

Inventor： OSANAI EIJI ,  TSUI KOTARO

IPC: G12B5/00 ,  F16F15/02 ,  G03F7/20 ,  G03F7/22 ,  H01L21/027 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To perform highly accurate positioning, without deforming a base and a surface plate. SOLUTION: This device is provided with a first stage 2 for loading an original plate, a second stage 5 for loading a body to be aligned, a moving means for moving the first stage 2 to a projection lens 3, a stage base 108 for supporting the moving means, the base 109 for supporting the stage base, a bearing surface 110 interposed between the stage base 108 and the base 109, the surface plate 4 for supporting the projection lens 3 and loading the base 109, a supporting structure body 12 for supporting and loading the surface plate 4, an air mount 11 interposed between the surface plate 4 and the supporting structure body 12 and an air cylinder 113 interposed between the supporting structure body 12 and the base 109. The seat surface 110 is disposed, so as to support and fix the stage base 108 at plural parts on the base 109, and the air cylinder 113 is provided directly below the bearing surface 110.