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公开(公告)号：DE69106165D1
公开(公告)日：1995-02-09
申请号：DE69106165
申请日：1991-02-20
Applicant: CANON KK
Inventor： SAKINO SHIGEO , OSANAI EIJI
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公开(公告)号：DE69712256D1
公开(公告)日：2002-06-06
申请号：DE69712256
申请日：1997-06-03
Applicant: CANON KK
Inventor： INOUE MITSURU , EBINUMA RYUICHI , IWAMOTO KAZUNORI , OSANAI EIJI , TAKEISHI HIROAKI
IPC: G03F7/20 , H01L21/027
Abstract: A scanning exposure apparatus wherein a portion of a pattern of an original is projected on to a substrate through a projection optical system and wherein the original and the substrate are scanningly moved relatively to the projection optical system whereby the pattern of the original is transferred on to the substrate. The apparatus includes an original stage for holding the original, a base for supporting the original stage, and a supporting system for supporting the base at three positions, through dampers and pillar.
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公开(公告)号：DE3608396A1
公开(公告)日：1986-10-16
申请号：DE3608396
申请日：1986-03-13
Applicant: CANON KK
Inventor： OSANAI EIJI
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公开(公告)号：DE69739621D1
公开(公告)日：2009-11-26
申请号：DE69739621
申请日：1997-06-03
Applicant: CANON KK
Inventor： INOUE MITSURU , EBINUMA RYUICHI , IWAMOTO KAZUNORI , OSANAI EIJI , TAKEISHI HIROAKI
IPC: G03F7/20 , H01L21/027
Abstract: A scanning exposure apparatus wherein a portion of a pattern of an original is projected on to a substrate through a projection optical system and wherein the original and the substrate are scanningly moved relatively to the projection optical system whereby the pattern of the original is transferred on to the substrate. The apparatus includes an original stage for holding the original, a base for supporting the original stage, and a supporting system for supporting the base at three positions, through dampers and pillar.
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公开(公告)号：FR2599882A1
公开(公告)日：1987-12-11
申请号：FR8706855
申请日：1987-05-15
Applicant: CANON KK
Inventor： OSANAI EIJI
Abstract: A recording or reproducing apparatus includes a recording or reproducing head for recording or reproducing information in sliding contact with a rotating flexible disc, and a stabilizer member disposed opposite to the head with the disc put between them. On the stabilizer member, a groove is formed for recessing the moving of the head at the position facing the disc, and on both sides of the groove or on the downstream side in the rotating direction of the disc, a slant is formed for generating positive pressure in the direction of pressing the head to the facing disc. The groove and the slant are formed in conformity with the deformation of the disc due to the sliding contact with the disc.
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Patent Agency Ranking
公开(公告)号：FR2579003A1
公开(公告)日：1986-09-19
申请号：FR8603596
申请日：1986-03-13
Applicant: CANON KK
Inventor： OSANAI EIJI
IPC: G11B17/32
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公开(公告)号：EP0811883A3
公开(公告)日：1998-12-16
申请号：EP97303781
申请日：1997-06-03
Applicant: CANON KK
Inventor： INOUE MITSURU , EBINUMA RYUICHI , IWAMOTO KAZUNORI , OSANAI EIJI , TAKEISHI HIROAKI
IPC: G03F7/20 , H01L21/027
CPC classification number: G03F7/70358 , G03F7/70716 , G03F7/70725 , G03F7/70833 , G03F7/709
Abstract: A scanning exposure apparatus wherein a portion of a pattern of an original is projected on to a substrate through a projection optical system (2) and wherein the original and the substrate are scanningly moved relatively to the projection optical system (2) whereby the pattern of the original is transferred on to the substrate. The apparatus includes an original stage (1) for holding the original, a base (9) for supporting the original stage (1), and a supporting system for supporting the base (9) at three positions, through dampers (11) and pillars (12).
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公开(公告)号：DE69605337D1
公开(公告)日：2000-01-05
申请号：DE69605337
申请日：1996-02-21
Applicant: CANON KK
Inventor： YAMANE YUKIO , OSANAI EIJI , AKUTSU KOTARO
IPC: G03F9/00 , B23Q1/26 , B23Q1/38 , B23Q1/48 , B23Q1/62 , F16C32/06 , G03F7/20 , H01L21/027 , H01L21/30 , H01L21/68 , H01L21/00
Abstract: A positioning system wherein a holding surface (11) for holding a substrate is movable relative to a base (55) in directions of X, Y and Z axes and in rotational directions about the X, Y and Z axes, wherein there are plural guiding devices associated respectively with motions in the directions of X, Y and Z axes and in the rotational directions about the X, Y and Z axes, respectively, and wherein each guiding device comprises a non-contact static bearing device.
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公开(公告)号：DE69419688D1
公开(公告)日：1999-09-02
申请号：DE69419688
申请日：1994-09-30
Applicant: CANON KK
Inventor： AKUTSU KOTARO , OSANAI EIJI , KAMATA SHIGETO
IPC: B23Q1/00 , B23Q1/26 , B23Q1/38 , F16C29/02 , F16C32/06 , G03F7/20 , H01L21/027 , H01L21/68 , H01L21/687 , H01L21/00
Abstract: A tare supporting apparatus supports the tare of a structure required to have very high surface precision, without affecting the surface precision of the structure. For that, the tare supporting apparatus comprises a driving unit for moving a driven body in the direction of gravity with respect to a base, and a supporting unit for supporting the tare of the driven body at a position after driven, wherein the driving unit and supporting unit are so arranged that a drive force of the driving unit and a support force of the supporting unit are on a same axis.
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公开(公告)号：GB2190534B
公开(公告)日：1991-01-23
申请号：GB8711394
申请日：1987-05-14
Applicant: CANON KK
Inventor： OSANAI EIJI
IPC: G11B17/32
Abstract: A recording or reproducing apparatus includes a recording or reproducing head for recording or reproducing information in sliding contact with a rotating flexible disc, and a stabilizer member disposed opposite to the head with the disc put between them. On the stabilizer member, a groove is formed for recessing the moving of the head at the position facing the disc, and on both sides of the groove or on the downstream side in the rotating direction of the disc, a slant is formed for generating positive pressure in the direction of pressing the head to the facing disc. The groove and the slant are formed in conformity with the deformation of the disc due to the sliding contact with the disc.
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