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    FLUID BEARING DEVICE
    21.
    发明专利
    FLUID BEARING DEVICE 失效

    公开(公告)号：JPS61294213A

    公开(公告)日：1986-12-25

    申请号：JP13741185

    申请日：1985-06-24

    Applicant: CANON KK

    Inventor： YAMAMOTO SEKINORI ,  NAKASUGI MIKIO

    IPC: F16C17/10

    Abstract: PURPOSE:To enable to reduce sharply the number of rotations for starting floatation, by closing the breather of the thrust portion of a bearing in case of starting, and opening the breather during rotations. CONSTITUTION:Because on opening/closing member 4 is an elastic body, its central vicinity makes contact with a thrust bearing member 12. Thus, a breather 4a is closed up. When rotors 12, 3, 4 rotate, internal pressure in gaps 5a, 5b becomes high so that the rotors 12, 3, 4 float. As the breather 4a remains to be closed up immediately after the rotors 12, 3, 4 started to rotate, the pres sure reduction of fluid streamed into from an arrow A position is prevented. Therefore, flotation time of the rotors 12, 3, 4 becomes earlier and the flotation starts at a low rotational speed, so that the number of rotations can be sharply reduced.

    PROJECTION EXPOSING APPARATUS
    22.
    发明专利
    PROJECTION EXPOSING APPARATUS 失效

    公开(公告)号：JPS61251025A

    公开(公告)日：1986-11-08

    申请号：JP9089285

    申请日：1985-04-30

    Applicant: CANON KK

    Inventor： ISOHATA JUNJI ,  MATSUSHITA KOICHI ,  YAMAMOTO SEKINORI ,  MIYAZAKI MAKOTO ,  OZAWA KUNITAKA ,  YOSHINARI HIDEKI

    IPC: G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/67 ,  H01L21/68

    Abstract: PURPOSE:To simplify the structure for reducing the weight of movable parts during scanning process by a method wherein, when a negative shifting means and an exposed body shifting means are separately provided in a projection exposing apparatus optimum for a step and scanning operation to step-print a large picture for scanning said negative and exposed body, the shifting means is driven synchronously. CONSTITUTION:A holder 9 is fixed on a base 13 while the stroke of a mask stage 2 and a substrate stage 4 in Y direction is extended so that a mask and substrate 3 may be scanned on a projection optical system 5. A control circuit 15 is simultaneously controlling the movement of mask stage 2 and substrate stage 4 in Y direction during the scanning process is added to this unit. The control circuit 15 can make the stages 2 and 4 synchronize with each other for movement by means of controlling the pulse numbers and cycles of driving pulses to pulse motors 16 and 17 on the basis of data on stage positions from laser interferometers 18 and 19.

    PROJECTION EXPOSURE EQUIPMENT
    23.
    发明专利
    PROJECTION EXPOSURE EQUIPMENT 失效

    公开(公告)号：JPS61247027A

    公开(公告)日：1986-11-04

    申请号：JP8755385

    申请日：1985-04-25

    Applicant: CANON KK

    Inventor： MATSUSHITA KOICHI ,  ISOHATA JUNJI ,  YAMAMOTO SEKINORI ,  MIYAZAKI MAKOTO ,  OZAWA KUNITAKA ,  YOSHINARI HIDEKI

    IPC: G03F9/00 ,  H01L21/027 ,  H01L21/30

    Abstract: PURPOSE:To prevent deterioration in relative positioning accuracy between a original sheet and a body to be exposed and in relative position accuracy between the patterns obtained by divided printing, by holding the bottom surface of the carriage transporting the original sheet and the body to be exposed in a body so as to slide freely in the direction of the transportation to the base stand loaded with the main body of exposure equipment. CONSTITUTION:The carriage (holder) 9 transports the original sheet 1 such as the mask, etc. and the body to be exposed 3 in a body. The bottom surface of the carriage (holder) 9 is so held that it can slide freely in the direction of the transportation to the base stand 13. For example, the air jet pad 15 is installed on the bottom surface of the holder 9, and the linear bearing is constituted to support the bottom surface of the holder 9 with the pad 15 and the guide rail 16 installed on the base stand 13. The pad 15 is supported through the spherical base 20a of the fixture 20, so as to equalize automatically to the upper surface of the guide rail 16 when the holder 9 travels in the direction of Y. Thus, the shape of the carriage is more stabilized and the more precise printing is available.

    SCANNING LENS
    24.
    发明专利
    SCANNING LENS 失效

    公开(公告)号：JPS61243421A

    公开(公告)日：1986-10-29

    申请号：JP8462285

    申请日：1985-04-22

    Applicant: CANON KK

    Inventor： NAKAMURA NOBUO ,  YAMAMOTO SEKINORI

    IPC: G02B26/12 ,  G02B13/00 ,  G02B13/18 ,  G02B26/10

    Abstract: PURPOSE:To make no flaw in a finished surface and to maintain excellent work precision by providing a plane part for positioning which extends in the scanning direction of incident luminous flux on both sides of one of two light passing surfaces. CONSTITUTION:A glass blank is ground to finish flanks 12-15 as shown by A and a plane 16 is ground at right angles to them. Then a concave cylindrical surface is finished lengthwise by grinding and polishing in the center of the plane 16 as shown by B, thereby forming a light passing surface 4 and positioning planes 8 and 10. Further, a protection film is formed on the polished and finished surface 4 and the surface opposite the surface 4, on the other hand, is finished by grinding and polishing into a toric surface, thus obtaining a light passing surface 2. In this process, at least one of the flanks 12-15 and the planes 8 and 10 are positioned accurately and a holder 18 is positioned on the basis of them to obtain a lens having improved optical axis precision, thereby eliminating for positioning on the basis of the polished and finished surface 4.

    DYNAMIC PRESSURE HYDRAULIC BEARING DEVICE
    25.
    发明专利
    DYNAMIC PRESSURE HYDRAULIC BEARING DEVICE 失效

    公开(公告)号：JPS61211517A

    公开(公告)日：1986-09-19

    申请号：JP5306385

    申请日：1985-03-15

    Applicant: CANON KK

    Inventor： NAKASUGI MIKIO ,  YAMAMOTO SEKINORI ,  MURAKAMI HIDENORI ,  SUGIURA YOSHINORI ,  GOTO SHINJI

    IPC: F16C17/10

    Abstract: PURPOSE:To prevent excessive reduction in pressure by using porous member in the bottom face of the thrust bearing of a housing and having fluid flow outside through the porous member. CONSTITUTION:A housing 1 has a cylindrical porous member 33 settled in the center part of the bottom face 3 of a thrust bearing by use of the press-fit method. When a rotary shaft 4 is turned to float upward, fluid is throttled by the porous member 33 and then flows outside from the housing 1, whereby enabling moderation of reduction in pressure which is to be applied on the bottom face 3 of the thrust bearing. The permeability of the porous member 33 can be selected to the specified value so that excessive reduction in pressure inside the housing 1 may be prevented.

    STATIC PRESSURE SCREW ASSEMBLY
    26.
    发明专利
    STATIC PRESSURE SCREW ASSEMBLY 失效

    公开(公告)号：JPS60113855A

    公开(公告)日：1985-06-20

    申请号：JP22002983

    申请日：1983-11-22

    Applicant: CANON KK

    Inventor： YAMAMOTO SEKINORI ,  HAGA TERUO

    IPC: F16H25/24 ,  F16H25/20

    Abstract: PURPOSE:To improve rigidity and load capacity by dividing a female screw member into at least two segments longitudinally slitted and fixedly fitted in an outer tube. CONSTITUTION:A female screw member 1 is divided longitudinally into three segments 1A-1C made of perforated material and bonded to a carrier plate 3 divided similarly longitudianlly into three segments 3A-3C. These segments 1A, 3A;1B, 3B and 1C, 3C are fitted in an outer tube 4 and spacers 5 are press fitted between the respective segments to assemble the female screw member 1. Thus, the reproducibility of reassembly can be improved to adjust freely flow through the perforated material and improve rigidity and load capacity.

    REFLECTIVE MIRROR FOR OPTICAL APPARATUS
    27.
    发明专利
    REFLECTIVE MIRROR FOR OPTICAL APPARATUS 失效

    公开(公告)号：JPS57133402A

    公开(公告)日：1982-08-18

    申请号：JP1950581

    申请日：1981-02-12

    Applicant: CANON KK

    Inventor： SUGIURA HIROTSUGU ,  YAMAMOTO SEKINORI ,  NISHIDA KEIJIROU ,  SHIRAI NAOKI ,  TAKAHASHI KIMIO ,  NAKASUGI MIKIO ,  SAITOU NORIHISA

    IPC: G02B5/08 ,  G03B19/12

    Abstract: PURPOSE:To reduce the number of high-precision parts and to prevent the degradation of precision and the damage due to impuct force and temperature change, by subjecting the surface of nonferrous metals, which are worked into a plane plate, to mirror face finishing and coating to obtain a reflective face. CONSTITUTION:Nonferrous metals such as Al are formed into a desired reflective mirror by a drawing material, and this reflective mirror 1 is quenched at a temperature higher than the upper limit of the environmental temperature by 10-20 deg.C after the bending work and is subjected to punching works for a supporting pin 2, a reflective mirror rotation shaft 3, etc. which are used for operating this reflective mirror 1 in a camera. After a reflective face (a) of the reflective mirror 1 is subjected to the mirror face work, a coating work is performed to paint the reverse face and side faces with paint. Thus, since metals are made into a mirror face by polishing, the optical axis is centered with a mechanical precision, and the degradation of precision and the damage of exfoliation due to impact force and temperature change are prevented in the use.

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