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    ALIGNER
    3.
    发明专利
    ALIGNER 失效

    公开(公告)号：JPH0758010A

    公开(公告)日：1995-03-03

    申请号：JP15850494

    申请日：1994-07-11

    Applicant: CANON KK

    Inventor： YAMAMOTO SEKINORI ,  OKAWA SHINKICHI ,  MATSUSHITA KOICHI ,  KAWAI YASUO ,  HIGOMURA MAKOTO ,  KARIYA TAKUO

    IPC: G01B21/00 ,  G03F7/20 ,  G03F9/00 ,  G12B5/00 ,  H01L21/027 ,  H01L21/68

    Abstract: PURPOSE:To provide a vertical aligner which can accurately position by an effective and stable operating mechanism. CONSTITUTION:The aligner comprises a frame MF in which its interior is held hermetically sealed, a wafer conveying section MW0 provided in the frame MF, a first stage Y2S movable between the wafer conveying section and a wafer exposure unit, a second stage XS, Y1S placed in the first stage and movable in a plane including a vertical component, and means Y1M, XM for relatively moving the second stage to exposure luminous flux EX to be introduced substantially from a horizontal direction.

    ALIGNER
    4.
    发明专利
    ALIGNER 失效

    公开(公告)号：JPH0758006A

    公开(公告)日：1995-03-03

    申请号：JP15850094

    申请日：1994-07-11

    Applicant: CANON KK

    Inventor： YAMAMOTO SEKINORI ,  OKAWA SHINKICHI ,  MATSUSHITA KOICHI ,  KAWAI YASUO ,  HIGOMURA MAKOTO ,  KARIYA TAKUO

    IPC: G01B21/00 ,  G03F7/20 ,  G03F9/00 ,  G12B5/00 ,  H01L21/027

    Abstract: PURPOSE:To provide a vertical scanning type X-ray aligner which can accurately position by an effective and stable operating mechanism. CONSTITUTION:The aligner comprises stages XS, Y1S, Y2S movable in a direction including a vertical component, and means for relatively scanning the stages to an X-ray EX of parallel luminous fluxes to be substantially introduced from a horizontal direction, and exposes a wafer by scanning exposure. In this case, the wafer and a mask are held substantially integrally, and the mask and the wafer are fed at a constant speed to the fluxes thereby to expose to transfer a mask pattern to the wafer.

    POLISHING METHOD
    5.
    发明专利
    POLISHING METHOD 失效

    公开(公告)号：JPS63232937A

    公开(公告)日：1988-09-28

    申请号：JP6261487

    申请日：1987-03-19

    Applicant: CANON KK

    Inventor： NAKAMURA NOBUO ,  YAMAMOTO SEKINORI

    IPC: B24B1/00 ,  B24B13/00

    Abstract: PURPOSE:To make high-grade surface smoothness attainable in particular, by making abrasive grains collide with the work surface of an optical element from a direction along the surface, and polishing a protruding part of the surface to be removed while irradiating a laser beam against it. CONSTITUTION:A laser beam 10 is irradiated on a protruding part 7 beyond the range of tolerance detected at work surface form measurement before polishing, and simultaneously abrasive fluid is spouted out of a nozzle 8 toward this protruding part 7, making abrasive grains collode with the said part 7. Here, the abrasive fluid will not cause any chemical change to a workpiece at a certain temperature of, for example, 15-40 deg.C, but if exceeding this temperature range, chemical change occurs, so that simultaneously with the protruding part 7 heated by laser beam irradiation, the ambient abrasive fluid is also heated, thus temperature on and around the protruding part locally goes up. With this temperature rise, only the protruding part grows larger in reactivity with the abrasive fluid and thereby it becomes weakened by reaction, and furthermore being also fragile by thermal expansion, thus it comes to be easily removed selectively by the collision abrasive grains. After polishing of proper time, the protruding part 7 is thus selectively removed.

    SURFACE SHAPE MEASURING INSTRUMENT
    6.
    发明专利
    SURFACE SHAPE MEASURING INSTRUMENT 失效

    公开(公告)号：JPS63223511A

    公开(公告)日：1988-09-19

    申请号：JP5830587

    申请日：1987-03-13

    Applicant: CANON KK

    Inventor： NOSE TETSUSHI ,  NIWA YUKICHI ,  YAMAMOTO SEKINORI ,  OWADA MITSUTOSHI ,  NARUMI KOJI

    IPC: G01B11/24 ,  G01B11/245 ,  G01M11/00

    Abstract: PURPOSE:To prevent a surface to be inspected and the objective of a focusing state decision optical system from colliding against each other and to measure the entire scanning range with high accuracy by making the external diameter of the objective of the focusing state decision optical system or its lens barrel in a luminous flux scanning direction smaller than the external diameter in the direction orthogonal to the scanning direction and the optical axis of the objective. CONSTITUTION:The focusing state decision optical system 2 and a tilt angle measurement optical system 4 are arranged in the casing 6 of a surface shape measuring instrument, and the optical system 2 discriminates the focusing state of incident light to and its reflected light from a body 50 to be measured. The optical system 4 measures the surface shape of the body 50 to be measured from the decision result. The surface of the body 50 to be measured is scanned with the luminous flux from the objective 20. The external diameter of this objective 20 or lens barrel in the scanning direction is made smaller than the external diameter in the direction crossing the scanning direction and the optical axis of the objective 20. Then any curved surface with a large open angle is measured over the entire scanning range with high accuracy without causing the surface to be inspected to collide against the objective 20.

    FLUID BEARING
    8.
    发明专利
    FLUID BEARING 失效

    公开(公告)号：JPS62110019A

    公开(公告)日：1987-05-21

    申请号：JP25044685

    申请日：1985-11-08

    Applicant: CANON KK

    Inventor： YAMAMOTO SEKINORI

    IPC: F16C32/00 ,  H01L21/027 ,  H01L21/30

    Abstract: PURPOSE:To obtain a simple fluid bearing to which high vacuum is applied by providing a magnetic fluid means on both end parts of said bearing and removing need for using pipes for feeding and discharging a high pressure fluid. CONSTITUTION:When an actuator 5 oscillates, its frequency causes an annular vibrating member 4 to vibrate. Thereby, a magnetic fluid 3 which exists in a gap between the vibrating member 4 and the surface of a contacting bearing guide 1, is pressurized generating high pressure, which makes a bearing body 2 and a table device float up with respect to a bearing guide 1. Since the magnetic fluid 3 is only moving in and out of this gap in a bearing, it is not necessary to externally feed or discharge a high pressure fluid. Accordingly, a simple fluid bearing to which high vacuum is applied, without need for using piping, can be obtained.

    PROJECTION EXPOSING APPARATUS
    9.
    发明专利
    PROJECTION EXPOSING APPARATUS 失效

    公开(公告)号：JPS61251030A

    公开(公告)日：1986-11-08

    申请号：JP9089885

    申请日：1985-04-30

    Applicant: CANON KK

    Inventor： ISOHATA JUNJI ,  MATSUSHITA KOICHI ,  YAMAMOTO SEKINORI ,  MIYAZAKI MAKOTO ,  OZAWA KUNITAKA ,  YOSHINARI HIDEKI

    IPC: H01L21/30 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/67

    Abstract: PURPOSE:To prevent the printing precision from deteriorating by a method wherein any changeable attitude of a carriage due to shifting of the center of gravity of carriage is corrected to eliminate any deflection of printing range of a pattern. CONSTITUTION:When the center of gravity of a substrate stage mounted on a carriage 9 is shifted by movement etc. of the substrate stage including the carriage 9 by DELTAtheta, the relative positions with projection system of carriage 9 are as represented by solid lines in figure. At this time, the gap between an LAB7 and a guide rail 8 is detected first of all. Any jetting air out of LAB7 is controlled by a controller of microprocessor (CPU) etc. This CPU controls the air pressure jetted from each part of LAB7 so that e.g. the gaps detected by each sensor 10 may be equalized by corresponding to gaps detected by the gap sensor 10 to correct the changeable attitude of carriage 9. When the carriage 9 is canned as it is corrected, a pattern can be exposed without any deflection of printing range.

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