FLAT TYPE BLOWER
    21.
    发明专利

    公开(公告)号:JPH01249987A

    公开(公告)日:1989-10-05

    申请号:JP7584688

    申请日:1988-03-31

    Applicant: EBARA CORP

    Abstract: PURPOSE:To enable a blower to be run without any troubles even in the start by forming a thrust dynamic pressure bearing between the upper surface of an impeller and a casing and between the lower side face of the impeller and the casing. CONSTITUTION:When current is supplied to a stator coil 27, a rotary drive force is given to a permanent magnet 24 and an impeller 10 starts to rotate so that gas to be handled is sucked into and discharged from a casing 3 while a stationary running condition is reached. Even if a thrust acts to press the impeller against the casing 3 side, the thrust is received by a spiral groove thrust dynamic pressure bearing on the lower side face consisting of the rotary side thrust receiving surface 14 on the lower surface of the impeller 10 and the fixed side thrust receiving surface 17 of a bearing plate. When the reversed thrust acts. it is received by a spiral groove thrust dynamic pressure bearing on the upper side face.

    BLOWER FOR HIGH TEMPERATURE GAS
    22.
    发明专利

    公开(公告)号:JPH01249985A

    公开(公告)日:1989-10-05

    申请号:JP7584488

    申请日:1988-03-31

    Applicant: EBARA CORP

    Abstract: PURPOSE:To prevent a blower from the effect of thermal strain and improve the stability and durability by interconnecting a rotor and an impeller through an elastic member capable of supporting them mainly with joint constitution capable of transmitting rotary torque. CONSTITUTION:A blower casing 5 is mounted directly on an end of a motor casing 8 receiving a motor 4. A motor rotor 2 and an impeller 10 are rotatably supported on a fixed shaft 1 provided to extend through the centers of said casings 8, 5 through spiral groove radial dynamic pressure bearings 12, 13. The rotor 2 and impeller 10 are interconnected mainly by joint constitution 24 capable of transmitting rotary torque through an elastic member 21 capable of elastically supporting said rotor 2 and impeller 10. The heat of high temperature gas flowing in the blower casing 5 is insulated by the irregular connecting surface of the elastic member 21.

    POLYGON MIRROR
    23.
    发明专利

    公开(公告)号:JPS6410210A

    公开(公告)日:1989-01-13

    申请号:JP16546887

    申请日:1987-07-03

    Applicant: EBARA CORP

    Abstract: PURPOSE:To improve the perpendicularity and parallelism of a polygon rotor by interposing and arranging a slide member between a rotary body and a support body and arranging exposingly a stator coil which is provided corresponding to a magnet to the outside of an enclosed case in an atmosphere open state. CONSTITUTION:The slide member 10 made of a ceramic material where a groove 11 for dynamic pressure generation, i.e. spiral groove is formed is interposed and arranged between the rotary body 3 and support body 4, and a hollow chamber 20 wherein the polygon rotor can be put is enclosed by the support body 4, a cover body 12 fitted thereupon, and a seal material 23 such as an O ring. In this case, atmospheric heat radiation structure wherein the stator coil 6 is provided outside the cover body 12 fitted on the support body 4 is employed instead of providing the stator coil 6 outside the support body 4 constituting the enclosed case. Consequently, even if the rotary body is put in operation in the enclosed structure, heat radiation is excellent and the perpendicularity and parallelism of the polygon mirror are improved greatly.

    POLYGON MIRROR
    24.
    发明专利

    公开(公告)号:JPS6410208A

    公开(公告)日:1989-01-13

    申请号:JP16546687

    申请日:1987-07-03

    Applicant: EBARA CORP

    Abstract: PURPOSE:To improve the perpendicularity and parallelism of a polygon rotor by interposing and arranging a slide member between a rotary body and a support, enclosing a hollow chamber wherein the polygon rotor is put by the support and a cover body fitted onto the support, and holding it under reduced pressure. CONSTITUTION:The slide member 10 made of a ceramic material where a groove 11 for dynamic pressure generation, i.e. spiral groove is formed is interposed and arranged between the rotary body 3 and support 4, and the hollow chamber 20 wherein the polygon rotor can be put is enclosed by the support 4, the cover body 12 fitted onto the support 4, and a seal material 23 such as an O ring, held under reduced pressure, and put in operation under the reduced pressure. In this case, the hollow chamber 20 is linked with a vacuum pump 21 as a pressure reduction source and its degree of vacuum is held within a range of 700-200mmHg. Consequently, the perpendicularity and parallelism of the polygon mirror are improved greatly and the windage loss at the time of rotary operation to enable fast rotation.

    MOTOR-DRIVEN PUMP
    25.
    发明专利

    公开(公告)号:JPS63289288A

    公开(公告)日:1988-11-25

    申请号:JP12390087

    申请日:1987-05-22

    Applicant: EBARA CORP

    Abstract: PURPOSE:To improve durability, economize labor for maintenance, and prevent the contamination and deformation of the transported liquid due to the generation of abrasion dusts and the local generation of heat by installing a spiral groove dynamic pressure thrust bearing made of ceramics. CONSTITUTION:Revolution side thrust receiving plates 16 and 17 are fixed onto an impeller 4, and fixed side thrust receiving plates 20 and 21 fixed inside a front casing 18 and a rear casing 19. The thrust receiving plates 16, 17, 20, and 21 consist of the annular ceramics sintered bodies, and a spiral groove for generating a dynamic pressure is formed on one surface on the opposed surfaces between the thrust receiving plates 16 and 20 and thrust receiving plates 17 and 21. Therefore, a large thrust is supported by the dynamic pressure of the liquid sealed in the spiral groove, and the opposed plate is protected from solid contact, generation of abrasion, and the local generation of heat.

    MOLECULAR TURBOPUMP
    26.
    发明专利

    公开(公告)号:JPS63255596A

    公开(公告)日:1988-10-21

    申请号:JP8873587

    申请日:1987-04-13

    Applicant: EBARA CORP

    Abstract: PURPOSE:To improve the lubricity by forming a thrust bearing by forming a dynamic pressure generating groove on one between a thrust receiving plate and a supporting member and fitting the edge part of a motor shaft into a fluid sealed chamber. CONSTITUTION:A thrust bearing part is formed from a thrust receiving plate 7 having a spiral groove 6 and a supporting member 8, and supported in rotatable ways by a radial bearing 11 installed at the edge part of a motor shaft. The motor shaft edge part is fitted into a fluid sealed chamber 9, and used as spiral groove bearing. Therefore, the generation of decomposition gas of the lubricating oil which is generated in case of the prior ball bearing can be suppressed, and the deterioration of the lubricating agent can be prevented.

    POLYGON MIRROR
    27.
    发明专利

    公开(公告)号:JPS63241517A

    公开(公告)日:1988-10-06

    申请号:JP7449887

    申请日:1987-03-30

    Applicant: EBARA CORP

    Abstract: PURPOSE:To permit stable and high speed rotation with compact constitution by constituting a rotating body of a ceramics material and fixing a stator coil provided opposite to a magnet to a cover body provided on a supporting body CONSTITUTION:The rotating body 3 is constituted of the ceramics material and the stator coil provided opposite to the magnet 7 is fixed to the cover body 12 provided on the supporting body 4. Since the sp. gr. of the ceramics material is relatively small, weight of the rotating body is small and the controllability of the rotating speed is good. The easy balance adjustment of a polygon rotor is possible. The reduction in the thickness, size and weight of the mirror and the higher speed rotation are thereby permitted.

    ROTATION SUPPORTING DEVICE FOR POLYGON MIRROR

    公开(公告)号:JPH0627403A

    公开(公告)日:1994-02-04

    申请号:JP20340692

    申请日:1992-07-30

    Applicant: EBARA CORP

    Abstract: PURPOSE:To provide the rotation supporting device of a polygon mirror which is not nonuniformly deformed caused by high-speed rotation. CONSTITUTION:A shaft sleeve 27 is provided on the outside circumference of a fixed shaft 25 and a ceramic rotor 28 is supported by the sleeve 27 and upper and lower thrust plates 29 and 30. Such supporting is executed by dynamic pressure generation grooves 29a and 30a, and a rotor 33 which is provided with a mirror surface M and which is made of aluminum is fitted to a yoke 31 provided with a magnet 33a by a pressing bolt 35. Besides, the yoke 31 and the rotor 28 are fixed and the rotor 28 and the rotor 33 are not coupled.

    BLOWER FOR HIGH TEMPERATURE GAS
    29.
    发明专利

    公开(公告)号:JPH01249999A

    公开(公告)日:1989-10-05

    申请号:JP7584388

    申请日:1988-03-31

    Applicant: EBARA CORP

    Abstract: PURPOSE:To provide stable running by interposing a partition wall formed of an insulation material between a motor casing and a blower casing and making the connecting surface irregular to construct a cooling surface provided with a clearance adjusting member. CONSTITUTION:A blower casing 5 is mounted directly on an end of a motor casing 8. A rear casing 7 of a partition wall made of an insulating material is interposed between the motor casing 8 and the blower casing 5 and the connecting surface is made of an irregular one 211 to construct a cooling surface provided with a clearance adjusting member 21. Thus, the heat of high temperature gas flowing in the blower casing 5 is not transmitted to the motor casing 8 to restrain the temperature rise in the motor casing 8, so that stable running can be attained.

    BLOWER FOR HIGH TEMPERATURE GAS
    30.
    发明专利

    公开(公告)号:JPH01249996A

    公开(公告)日:1989-10-05

    申请号:JP7585288

    申请日:1988-03-31

    Applicant: EBARA CORP

    Abstract: PURPOSE:To prevent a rotor section from temperature rise by forming an impeller of a ceramic sintered body and providing a spiral groove thrust dynamic pressure bearing on the rear surface side of the impeller. CONSTITUTION:An impeller 10 formed of a ceramic sintered body is provided on the rear surface side with a rotary side thrust receiving surface 19 and bearing plate 21. A spiral groove 22 is provided on a fixed side thrust receiving surface 21' opposed to said surface 19 of the bearing plate 21 to form a spiral groove thrust dynamic pressure bearing of the bearing plate 21 and said surface 19. Thus, since dynamic pressure generating gas can flow circumferentially, a motor 1 is prevented from the intrusion of high pressure gas, so that a rotor 17 can be prevented from temperature rise.

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