ROTATION SUPPORTING DEVICE FOR POLYGON MIRROR

    公开(公告)号:JPH0627402A

    公开(公告)日:1994-02-04

    申请号:JP20338692

    申请日:1992-07-30

    Applicant: EBARA CORP

    Abstract: PURPOSE:To provide the rotation supporting device of a polygon mirror which is not nonuniformly deformed caused by high-speed rotation. CONSTITUTION:A shaft sleeve 27 is provided on the outside circumference of a fixed shaft 25 and a ceramic rotor 28 is supported by the sleeve 27 and upper and lower thrust plates 29 and 30. Such supporting is executed by dynamic pressure generation grooves 29a and 30a. A rotor 33 which is provided with a mirror surface M and made of aluminum is arranged on the outside circumference of a cylindrical part 31a at the inside part of the flange part 32 of a yoke 31 provided with a magnet 33a. Then, the rotor 33 is fixed to the flange part 32 of the yoke 31 by a fixing bolt 311 and the yoke 31 and the rotor 28 are fixed. Besides, the rotor 28 and the rotor 33 are not coupled.

    ROTARY SUPPORT DEVICE FOR POLYGON MIRROR

    公开(公告)号:JPH05203891A

    公开(公告)日:1993-08-13

    申请号:JP18329992

    申请日:1992-07-10

    Applicant: EBARA CORP

    Abstract: PURPOSE:To obtain an excellent image by fixing a yoke and an aluminum rotor radially outside a ceramic rotor and fixing a magnet arranged on a ring to the yoke. CONSTITUTION:Upper and lower thrust plates 29 and 30 which are made of ceramic are provided above and below the ceramic rotor 28 and receive the axial thrust load of a rotary body R, and spiral grooves 29a and 30a are formed in the surfaces of the respective rotors 28. The ring-shaped yoke 31 is fixed to the outer periphery of the lower part of the rotor 28 by, for example, shrinkage fitting and the magnet 33a which is arranged in a ring shape is fitted by adhesion inside a flange part 32 extending to below, for example, steel yoke 31. Further, the aluminum rotor 33 which has a mirror surface M as its outer peripheral surface even when the plane shape of the outer peripheral surface is polygonal is fixed on the outer peripheral surface of the ceramic rotor 28 by, for example, shrinkage fitting, above the yoke 31.

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