Abstract:
A method for making a surface enhanced Raman scattering element in accordance with one aspect of the present invention comprises a first step of forming a nanoimprint layer on a main surface of a wafer including a plurality of portions each corresponding to a substrate; a second step of transferring, by using a mold having a pattern corresponding to a fine structural part, the pattern to the nanoimprint layer after the first step, and thereby forming the molded layer including the fine structural part for each portion corresponding to the substrate; a third step of forming a conductor layer on the fine structural part after the second step; and a fourth step of cutting the wafer into each portion corresponding to the substrate after the second step.
Abstract:
A surface-enhanced Raman scattering unit comprises a measurement board used upon measurement; a surface-enhanced Raman scattering element, secured to the measurement board, having a substrate and an optical function part, formed on the substrate, for generating surface-enhanced Raman scattering; and a pressing member, secured to the measurement board, having a ring-shaped contact part contacting a peripheral part of the surface-enhanced Raman scattering element and pressing the surface-enhanced Raman scattering element toward the measurement board.
Abstract:
A SERS element 2 comprises a substrate 21 having a front face 21 a; a fine structure part 24 formed on the front face 21a and having a plurality of pillars 27; and a conductor layer 23 formed on the fine structure part 24 and constituting an optical function part 20 for generating surface-enhanced Raman scattering. The conductor layer 23 has a base part 28 formed along the front face 21a and a plurality of protrusions 29 protruding from the base part 28 at respective positions corresponding to the pillars 27. The base part 28 is formed with a plurality of grooves 28a surrounding the respective pillars 27 when seen in the projecting direction of the pillars 27, while an end part 29a of the protrusion 29 is located within the groove 28a corresponding thereto.
Abstract:
A SERS element 3 comprises a substrate 4; a fine structure part 7 formed on a front face 4a of the substrate 4 and having a plurality of pillars 11; and a conductor layer 6 formed on the fine structure part 7 and constituting an optical function part 10 for generating surface-enhanced Raman scattering. The pillars 11 have respective side faces provided with grooves. A plurality of gaps G are formed in the conductor layer by entering the grooves.
Abstract:
A surface-enhanced Raman scattering element comprises a substrate having a principal surface; a molded layer having a support part formed on the principal surface of the substrate so as to extend along the principal surface and a fine structure part formed on the support part; and a conductor layer formed on the fine structure part and constituting an optical functional part for generating surface-enhanced Raman scattering; the molded layer being relatively thinner in a direction intersecting the principal surface of the substrate at a center edge part of a fine structure area formed with the fine structure part in the molded layer than at an outer edge part of the fine structure area.
Abstract:
The spectrometer 1 is provided with a package 2 in which a light guiding portion 7 is provided, a spectorscopic module 3 accommodated inside the package 2, and a support member 29 arranged on an inner wall plane of the package 2 to support the spectorscopic module 3. The spectorscopic module 3 is provided with a body portion 11 for transmitting light made incident from the light guiding portion 7 and a spectroscopic portion 13 for dispersing light passed through the body portion 11 on a predetermined plane of the body portion 11, and the spectroscopic portion 13 is supported by the support member 29 on the predetermined plane in a state of being spaced away from the inner wall plane.
Abstract:
The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a light detecting element 4 having a light detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the light detecting element 4 to transmit the light L1, L2. The light detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a reservoir portion 43 is formed on a rear plane 4a of the body portion 2 side in the light detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.