公开(公告)号：JP2005316071A

公开(公告)日：2005-11-10

申请号：JP2004132997

申请日：2004-04-28

Applicant: Hamamatsu Photonics Kk ,  Olympus Corp ,  オリンパス株式会社 ,  浜松ホトニクス株式会社

Inventor： ADACHI SADASHI ,  KURITA NORIO ,  OSAJIMA TETSUYA

IPC: G02B7/28 ,  B23K26/04 ,  B23K26/06 ,  B23K101/40 ,  G02B13/00

Abstract: PROBLEM TO BE SOLVED: To easily correct spherical aberration without causing trouble with a simple constitution. SOLUTION: The laser machining device 1 is equipped with a laser beam source for emitting a laser beam L, a beam collimating means for collimating the flux of the laser beam L emitted from the laser beam source to parallel beams, a condensing optical system 3 condensing the laser beam L in a parallel beams state to the medium, a 1st lens group 4 arranged to move along in the optical axis direction of the parallel beams in the parallel beams between the beam collimating means and the condensing optical system 3 and constituted of one or more lenses, a 2nd lens group 5 arranged in a fixed state in the parallel beams between the 1st lens group 4 and the condensing optical system 3 and constituted of one or more lenses, and a moving means 6 for moving the 1st lens group 4 in accordance with the refractive index of the medium to which the laser beam L is to be condensed and a distance from the surface of the medium to the position to which the laser beam L is to be condensed. In the laser machining device 1, the 2nd lens group 5 is arranged so that its focal position on a back side may exist at least near the position of the entrance pupil of the condensing optical system 3. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了容易地校正球面像差而不会产生简单结构的麻烦。

解决方案：激光加工装置1配备有用于发射激光束L的激光束源，用于使从激光束源发射的激光束L的光束对准平行光束的光束准直装置，聚光光学 系统3将激光束L以平行光束状态聚光到介质上;第一透镜组4，被布置成沿着光束准直装置和聚光光学系统3之间的平行光束中的平行光束的光轴方向移动;以及 由一个或多个透镜构成的第二透镜组5，在第一透镜组4和聚光光学系统3之间的平行光束中以固定状态布置并由一个或多个透镜构成的第二透镜组5和用于移动第一透镜组的移动装置6 透镜组4根据激光束L将被冷凝的介质的折射率和从介质表面到激光束L将被冷凝的位置的距离。 在激光加工装置1中，第二透镜组5布置成使得其后侧的焦点位置可以至少存在于聚光光学系统3的入射光瞳的位置附近。（C）2006 ，JPO＆NCIPI

公开(公告)号：JP2005199285A

公开(公告)日：2005-07-28

申请号：JP2004005831

申请日：2004-01-13

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA

IPC: B23K26/06 ,  B23K26/02 ,  B23K26/03 ,  B23K26/04 ,  B23K26/42

CPC classification number: B23K26/046 ,  B23K26/0057 ,  B23K26/048 ,  B23K26/40 ,  B23K26/702 ,  B23K2203/50

Abstract: PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that can converge a laser beam for machining a workpiece on a position separated as little as possible from a prescribed position. SOLUTION: This laser beam machining apparatus emits a machining laser beam, with a condensing point focused inside a workpiece, turning out a reformed area by multi-photon absorption inside the workpiece along its intended cutting line. The apparatus is equipped with an objective lens unit 5 including a machining objective lens 42 which coaxially converges the machining laser beam and a range-finding laser beam for measuring displacement of the main face of the workpiece, a light receiving section 45 which receives reflected light in the main face of the range-finding laser beam, and an actuator 43 which holds the machining objective lens 42 freely movably back and forth relative to the main face on the basis of the reflected light received, and is also equipped with a casing 21 mounted with a laser unit for emitting the machining laser beam. The objective lens unit 5 is installed attachably and detachably relative to the casing 21. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 解决的问题：提供一种激光束加工装置，其能够将用于加工工件的激光束会聚到从规定位置尽可能小地分离的位置。

解决方案：该激光束加工装置发射加工激光束，聚焦点聚焦在工件内部，通过沿着其预定切割线的工件内的多光子吸收而导出重整区域。 该装置配备有物镜单元5，该物镜单元5包括同时收敛加工激光束的加工物镜42和用于测量工件主面位移的测距激光束，受光部45，其接收反射光 在测距激光束的主面上，以及基于所接收的反射光，相对于主面自由移动地移动加工用物镜42的致动器43，还具备壳体21 安装有用于发射加工激光束的激光单元。 物镜单元5相对于壳体21可安装和拆卸地安装。版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005140854A

公开(公告)日：2005-06-02

申请号：JP2003374769

申请日：2003-11-04

Applicant: Hamamatsu Photonics Kk ,  浜松ホトニクス株式会社

Inventor： KURITA NORIO ,  OSAJIMA TETSUYA ,  KUSUNOKI MASAYOSHI ,  SUZUKI TATSUYA ,  WAKUTA TOSHIMITSU

IPC: G02B26/02 ,  B23K26/06 ,  G02B5/00

CPC classification number: G02B5/005

Abstract: PROBLEM TO BE SOLVED: To provide a shutter unit with which a laser beam scatter is prevented when the optical path of a laser beam is closed and which can be miniaturized and to provide a laser machining device using the shutter unit. SOLUTION: The shutter unit 1 is so composed that a rotating member 57 is rotated around an axis line γ when the optical path of the laser beam L is open, and that the laser beam L is passed through by locating an open part 61 on the optical axis α. On the other hand, the rotating member 57 is rotated and the laser beam l is made reflected by locating a reflection face 62 on the optical axis α when the optical path of the laser beam L is closed. Thus, the reflected laser beam L is absorbed by a light absorbing member 63 and the scatter of the laser beam L is prevented when the optical path of the laser beam L is closed. Further, both of the open part 61 and the reflection face 62 are formed on the rotating member 57 which rotates around the axis line γ substantially orthogonal to the optical axis α, thus the shutter unit 1 is miniaturized. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供当激光束的光路闭合并且可以小型化时防止激光束散射的快门单元，并且提供使用快门单元的激光加工装置。 解决方案：快门单元1被构成为当激光束L的光路打开时旋转部件57围绕轴线γ旋转，并且激光束L通过定位开放部分 61在光轴α上。 另一方面，当激光L的光路闭合时，使旋转部件57旋转，使激光束1反射，使反射面62位于光轴α上。 因此，反射的激光束L被光吸收构件63吸收，并且当激光束L的光路闭合时，防止了激光束L的散射。 此外，开口部61和反射面62都形成在旋转部件57上，旋转部件57围绕基本上与光轴α正交的轴线γ旋转，因此快门单元1被小型化。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2001209330A

公开(公告)日：2001-08-03

申请号：JP2000019077

申请日：2000-01-27

Applicant: HAMAMATSU PHOTONICS KK

Inventor： KURITA NORIO ,  FUKUMITSU KENJI ,  KUNO KOJI

IPC: G02F1/13 ,  B23K26/00 ,  G09F9/00

Abstract: PROBLEM TO BE SOLVED: To provide a defective pixel correction device which surely maintains the flatness of a panel in the defective pixel correction of the panel. SOLUTION: This defective pixel correction device 1 is required to keep the flatness of the panel 2 constant at all times in correcting the defective pixel 5 of the panel 2. A flat translucent plate 4 for supporting the surface 2a of the panel 2 from below while being brought into surface-to-surface contact with approximately the entire part of this surface is adopted. The defective pixel 5 is adequately irradiated with illumination from below while the flatness of the panel 2 is maintained by the flat translucent plate 4. Not the panel 2 is directly placed on the translucent plate 4 but the panel 2 is once placed on panel supporting pins 14 projected from the translucent plate 4 and thereafter the panel 2 is gently placed on the translucent plate 4 by lowering the panel supporting pins 14 in placing the panel 2 on the translucent plate 4. Consequently, the incidence that the panel 2 is broken may be adequately averted.

公开(公告)号：JPH02240983A

公开(公告)日：1990-09-25

申请号：JP6193589

申请日：1989-03-14

Applicant: HAMAMATSU PHOTONICS KK

Inventor： TAKAOKA HIDEJI ,  KURITA NORIO

IPC: H01S3/034 ,  H01S3/08

Abstract: PURPOSE:To capture magnetic metal particles that are scattering and prevent any adhesion of the above particles to a laser transmissive window and a reflecting mirror by installing a window for preventing contamination so that it is mounted removably at inner sides of the laser transmissive window and the reflecting mirror. CONSTITUTION:A window 13 for preventing contamination at the side of a laser transmissive window 11 is installed in a case 16 which is located on the laser transmissive hole 15 of a laser tube 1 and a though hole 17 which coincides with the laser transmissive hole 15 is bored in the case 16. The window 13 for preventing contamination consists of fluorides, e.g. MgF2, CaF2, and the like, sapphire, composite silica, and so on and moreover, it is installed to several times the length of the through hole 17. As to a window 14 for preventing contamination at the side of a reflecting mirror 12, it is also installed in the same manner as the case of the window 13. Rotation of a screw 21 by a knob 24 allows the foregoing windows 13 and 14 to move by sliding and then, a part of the second board to locate on the through hole 17. Once all of places are contaminated, a case cover 22 is removed and the windows 13 and 14 are cleaned. Contamination of the laser transmissive window 11 and the reflecting mirror 12 is thus prevented.