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公开(公告)号：AT524267T
公开(公告)日：2011-09-15
申请号：AT04820181
申请日：2004-12-06
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , UCHIYAMA NAOKI
Abstract: A laser processing apparatus which can correct the fluctuation in laser light emitting direction among laser heads is provided. In the laser processing apparatus 1, a laser head 13 is held and cooled by a cooling jacket 11, and thus can be operated stably. Also, even if the emitting direction of laser light L fluctuates when replacing the laser head 13 because of its damage or the like, a regulator 15 can adjusts the position and inclination of the cooling jacket 11 with respect to an optical system main part 4, so that the emitting direction of the laser light L can coincide with the optical axis of the optical system main part 4. Thus, the laser processing apparatus 1 can easily correct the fluctuation in the laser light emitting direction among the laser heads 13.
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公开(公告)号：MY131928A
公开(公告)日：2007-09-28
申请号：MYPI20044617
申请日：2004-11-04
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , OSAJIMA TETSUYA , SUZUKI TATSUYA , WAKUDA TOSHIMITSU , KUSU MASAYOSHI
Abstract: A SHUTTER UNIT CAPABLE OF PREVENTING THE SCATTERING OF THE LASER BEAM UPON CLOSING THE OPTICAL PATH OF THE LASER BEAM AND CAPABLE OF BEING MINIATURIZED, AND A LASER PROCESSING DEVICE EMPLOYING SUCH ASHUTTER UNIT. IN A SHUTTER UNIT 1, WHEN THE OPTICAL PATH OF THE LASER BEAM L IS OPENED, A ROTATING MEMBER 57 IS ROTATED AROUND AN AXIS LINE ( ), AND AN OPENING 61 IS POSITIONED ON AN OPTICAL AXIS (ALPHA) SO AS TO PASS THE LASER BEAM L THERETHROUGH. MEANWHILE, WHEN THE OPTICAL PATH OF THE LASER BEAM L IS CLOSED, THE ROTATING MEMBER 57 IS ROTATED AND A REFLECTIVE SURFACE 62 IS POSITIONED ON THE OPTICAL AXIS (ALPHA) SO AS TO REFLECT THE LASER BEAM L. HERE, SINCE THE REFLECTED LASER BEAM L IS ABSORBED BY AN OPTICAL ABSORPTION MEMBER 63, IT IS POSSIBLE TO PREVENT THE SCATTERING OF THE LASER BEAM L WHEN THE OPTICAL PATH OF THE LASER BEAM L IS CLOSED. IN ADDITION, SINCE THE OPENING 61 AND REFLECTIVE SURFACE 62 ARE BOTH FORMED ON THE ROTATING MEMBER 57 WHICH ROTATES AROUND THE AXIS LINE ( ) THAT IS SUBSTANTIALLY ORTHOGONAL TO THE OPTICAL AXIS (ALPHA), IT IS POSSIBLE TO REDUCE THE SIZE OF THE SHUTTER UNIT 1.(FIG 3)
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公开(公告)号：AT522313T
公开(公告)日：2011-09-15
申请号：AT04806951
申请日：2004-12-13
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , OSAJIMA TETSUYA
IPC: B23K26/03
Abstract: To provide a laser processing apparatus which can converge a laser beam for processing an object to be processed at a position as close as possible to a predetermined position. This laser processing apparatus is one for irradiating an object to be processed with a processing laser beam while positioning a converging point within the object so as to form a modified region caused by multiphoton absorption within the object along a line along which the object should be cut in the object, and comprises an objective lens unit 5 including a processing objective lens 42 which converges the processing laser beam and a rangefinding laser beam for measuring a displacement of a main surface of the object on an identical axis, a light-receiving part 45 which receives a reflected light beam of the rangefinding laser beam on the main surface, and an actuator 43 which holds the processing objective lens 42 according to the received reflected light beam such that the lens 42 is capable of freely advancing and retracting with respect to the main surface; and a housing 21 to which a laser unit for emitting the processing laser beam is attached. The objective lens unit 5 is detachably attached to the housing 21.
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公开(公告)号：MY139787A
公开(公告)日：2009-10-30
申请号：MYPI20050127
申请日：2005-01-12
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , OSAJIMA TETSUYA
IPC: B23K26/03
Abstract: TO PROVIDE A LASER PROCESSING APPARATUS (1) WHICH CAN CONVERGE A LASER BEAM (L1) FOR PROCESSING AN OBJECT TO BE PROCESSED (S) AT A POSITION AS CLOSE AS POSSIBLE TO A PREDETERMINED POSITION. THIS LASER PROCESSING APPARATUS (1) IS ONE FOR IRRADIATING AN OBJECT TO BE PROCESSED (S) WITH A PROCESSING LASER BEAM (L1) WHILE POSITIONING A CONVERGING POINT (P) WITHIN THE OBJECT (S) SO AS TO FORM A MODIFIED REGION (R) CAUSED BY MULTIPHOTON ABSORPTION WITHIN THE OBJECT (S) ALONG A LINE ALONG WHICH THE OBJECT (S) SHOULD BE CUT IN THE OBJECT (S), AND COMPRISES AN OBJECTIVE LENS UNIT (5) INCLUDING A PROCESSING OBJECTIVE LENS (42) WHICH CONVERGES THE PROCESSING LASER BEAM (L1) AND A RANGE FINDING LASER BEAM (L2) FOR MEASURING A DISPLACEMENT OF A MAIN SURFACE (S1) OF THE OBJECT (S) ON AN IDENTICAL AXIS (), A LIGHT-RECEIVING PART (45) WHICH RECEIVES A REFLECTED LIGHT BEAM OF THE RANGE FINDING LASER BEAM (L2) ON THE MAIN SURFACE (S1), AND AN ACTUATOR (43) WHICH HOLDS THE PROCESSING OBJECTIVE LENS (42) ACCORDING TO THE RECEIVED REFLECTED LIGHT BEAM SUCH THAT THE LENS (42) IS CAPABLE OF FREELY ADVANCING AND RETRACTING WITH RESPECT TO THE MAIN SURFACE (S1); AND A HOUSING (21) TO WHICH A LASER UNIT (3) FOR EMITTING THE PROCESSING LASER BEAM (L1) IS ATTACHED. THE OBJECTIVE LENS UNIT (5) IS DETACHABLY ATTACHED TO THE HOUSING (21).
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公开(公告)号：MY135053A
公开(公告)日：2008-01-31
申请号：MYPI20045118
申请日：2004-12-10
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , UCHIYAMA NAOKI
IPC: H01S3/00
Abstract: A LASER PROCESSING APPARATUS WHICH CAN CORRECT THE FLUCTUATION IN LASER LIGHT EMITTING DIRECTION AMONG LASER HEADS IS PROVIDED.IN THE LASER PROCESSING APPARATUS 1,A LASER HEAD 13 IS HELD AND COOLED BY A COOLING JACKET 11,AND THUS CAN BE OPERATED STABLY. ALSO,EVEN IF THE EMITTING DIRECTION OF LASER LIGHT L FLUCTUATES WHEN REPLACING THE LASER HEAD 13 BECAUSE OF ITS DAMAGE OR THE LIKE,A REGULATOR 15 CAN ADJUSTS THE POSITION AND INCLINATION OF THE COOLING JACKET 11 WITH RESPECT TO AN OPTICAL SYSTEM MAIN PART 4,SO THAT THE EMITTING DIRECTION OF THE LASER LIGHT L CAN COINCIDE WITH THE OPTICAL AXIS OF THE OPTICAL SYSTEM MAIN PART 4.THUS,THE LASER PROCESSING APPARATUS 1 CAN EASILY CORRECT THE FLUCTUATION IN THE LASER LIGHT EMITTING DIRECTION AMONG THE LASER HEADS 13.FIG.1
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Patent Agency Ranking
公开(公告)号：EP2070634A4
公开(公告)日：2015-04-01
申请号：EP07807875
申请日：2007-09-26
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KUNO KOJI , SUZUKI TATSUYA , KURITA NORIO , OSAJIMA TETSUYA
IPC: B23K26/38 , B23K26/00 , B23K26/04 , B23K26/06 , B23K26/067 , B23K26/08 , B23K26/40 , H01L21/301
CPC classification number: B23K26/38 , B23K26/0057 , B23K26/048 , B23K26/0624 , B23K26/0676 , B23K26/0853 , B23K26/0869 , B23K26/40 , B23K2201/40 , B23K2203/50
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公开(公告)号：EP1681591A4
公开(公告)日：2009-01-07
申请号：EP04799500
申请日：2004-11-04
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , OSAJIMA TETSUYA , KUSUNOKI MASAYOSHI , SUZUKI TATSUYA , WAKUDA TOSHIMITSU
CPC classification number: G02B5/005
Abstract: A shutter unit capable of preventing the scattering of a laser beam when the light path of a laser beam is blocked and being downsized, and a laser processing device using it. In the shutter unit (1), a rotation member (57) is rotated on an axial line gamma and an opening (61) is positioned on an optical axis alpha to let a laser beam L pass when the light path of the laser beam L is opened. When the light path of the laser beam L is blocked, the rotation member (57) is rotated and a reflection surface (62) is positioned on the optical axis alpha to reflect the laser beam L. Since the reflected laser beam L is absorbed by a light absorbing member (63), the scattering of the laser beam L when the light path of the laser beam L is blocked can be prevented. In addition, since both the opening (61) and the reflection surface (62) are formed on the rotation member (57) rotating on the axial line gamma almost orthogonal to the optical axis alpha, the shutter unit (1) can be downsized.
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公开(公告)号：EP1700666A4
公开(公告)日：2008-12-03
申请号：EP04820181
申请日：2004-12-06
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , UCHIYAMA NAOKI
CPC classification number: B23K26/043 , B23K26/04 , B23K26/042 , B23K26/703
Abstract: A laser processing apparatus which can correct the fluctuation in laser light emitting direction among laser heads is provided. In the laser processing apparatus 1, a laser head 13 is held and cooled by a cooling jacket 11, and thus can be operated stably. Also, even if the emitting direction of laser light L fluctuates when replacing the laser head 13 because of its damage or the like, a regulator 15 can adjusts the position and inclination of the cooling jacket 11 with respect to an optical system main part 4, so that the emitting direction of the laser light L can coincide with the optical axis of the optical system main part 4. Thus, the laser processing apparatus 1 can easily correct the fluctuation in the laser light emitting direction among the laser heads 13.
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公开(公告)号：EP1716961A4
公开(公告)日：2008-08-13
申请号：EP04806951
申请日：2004-12-13
Applicant: HAMAMATSU PHOTONICS KK
Inventor： KURITA NORIO , OSAJIMA TETSUYA
CPC classification number: B23K26/046 , B23K26/0057 , B23K26/048 , B23K26/40 , B23K26/702 , B23K2203/50
Abstract: A machining laser beam is condensed to a position as close as possible to a specified position. A laser beam machining system comprising an object lens unit (5) including a machining object lens (42) for condensing a machining laser beam and a distance-measuring laser beam that measures the displacement of the main surface of a work to the same axial line, a light receiving unit (45) for receiving the reflection light, off the main surface, of the distance-measuring laser beam, and an actuator (43) for holding the machining object lens (42) so as to be movable toward or from the main surface based on the received reflection light, and an enclosure (21) to which a laser unit for emitting a machining laser beam is mounted, the object lens unit (5) being detachably mounted to the enclosure (21).
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公开(公告)号：EP1684109A4
公开(公告)日：2007-06-13
申请号：EP05737135
申请日：2005-04-27
Applicant: OLYMPUS CORP , HAMAMATSU PHOTONICS KK
Inventor： EDA YUKIO , ADACHI SADASHI , KURITA NORIO , OSAJIMA TETSUYA
IPC: G02B27/00 , B23K26/04 , B23K26/06 , H01L21/301
CPC classification number: B23K26/046 , B23K26/0057 , B23K26/032 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/40 , B23K2201/40 , B23K2203/50
Abstract: A laser condensing optical system of the present invention includes a laser beam source which emits a laser beam, a condensing optical system which is arranged between the laser beam source and a medium and condenses the laser beam in the medium, and a laser divergence point moving unit which can move the position of a laser divergence point of the laser beam along an optical axis of the laser beam in accordance with the refractive index of the medium in which the laser beam is desired to be condensed and the distance from a surface of the medium to a position where the beam is desired to be condensed.
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