公开(公告)号：EP2453289B1

公开(公告)日：2015-11-04

申请号：EP11189299.8

申请日：2011-11-16

Applicant: IMEC

Inventor： Haspeslagh, Luc ,  Rottenberg, Xavier ,  Rochus, Veronique

IPC: G02B26/06

CPC classification number: G02B26/0841 ,  G02B26/06

公开(公告)号：EP2107038A2

公开(公告)日：2009-10-07

申请号：EP09156532.5

申请日：2009-03-27

Applicant: IMEC ,  Katholieke Universiteit Leuven

Inventor： De Wolf, Ingrid ,  Rottenberg, Xavier ,  Czarnecki, Piotr ,  Soussan, Philippe

IPC: B81B3/00

CPC classification number: B81B3/0008 ,  B81B2201/016 ,  H01G5/16 ,  H01H59/0009 ,  H01H2059/0018

Abstract: Electrostatically actuatable MEMS device comprising: a substrate (103) of which at least a top layer (106) comprises a dielectric material; a first conductor (102) fixed to the top layer of the substrate, forming a fixed electrode of the device; and a second conductor (100) fixed to the top layer of the substrate, the second conductor being electrically isolated from the first conductor and comprising a movable portion (100') which is suspended at a predetermined first distance (D1) above the first conductor. The movable portion forms a movable electrode of the device which approaches the fixed electrode upon applying an appropriate voltage difference between the first and second conductors. A substrate surface area (105) is defined as the orthogonal projection of the movable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess (107) is provided in at least the top layer of the substrate.

Abstract translation: 可静电致动的MEMS器件包括：基底（103），至少顶层（106）包括介电材料; 固定到所述基板的顶层的第一导体（102），形成所述装置的固定电极; 以及固定到所述基板的顶层的第二导体（100），所述第二导体与所述第一导体电隔离，并且包括可移动部分（100'），所述可移动部分被悬置在所述第一导体之上的预定的第一距离（D1） 。 可移动部分在第一和第二导体之间施加适当的电压差，形成该装置的可动电极，该可移动电极接近固定电极。 衬底表面区域（105）被定义为在第一和第二导体之间的衬底上的可移动部分的正交突起。 在衬底表面区域中，至少一个凹部（107）设置在衬底的至少顶层中。