-
1.发明公开
公开(公告)号：EP2453289A1
公开(公告)日：2012-05-16
申请号：EP11189299.8
申请日：2011-11-16
Applicant: IMEC
Inventor： Haspelagh, Luc , Rottenberg, Xavier , Rochus, Veronique
IPC: G02B26/08
CPC classification number: G02B26/0841 , G02B26/06
Abstract: A DND device (20) comprising a nano-mirror (21), and an actuating mechanism for moving the nano-mirror (21) in an upward and/or downward position. The actuating mechanism comprises a cantilever (32) mounted to a fixed structure (26) and at least one first electrode (23) for moving the cantilever (32) in an upward and/or downward position. Such DND devices (20) may be arranged in a 2D array.
Abstract translation: 包括纳米镜（21）的DND装置（20）和用于在上和/或下位置移动纳米镜（21）的致动机构。 致动机构包括安装到固定结构（26）的悬臂（32）和用于在向上和/或向下位置移动悬臂（32）的至少一个第一电极（23）。 这样的DND设备（20）可以被布置成2D阵列。
-
2.发明公开
公开(公告)号：EP2362199A1
公开(公告)日：2011-08-31
申请号：EP10166586.7
申请日：2010-06-18
Applicant: IMEC
Inventor： Rottenberg, Xavier , Jansen, Roelof , Tilmans, Hendrikus
CPC classification number: G01K7/32 , H03H3/0076 , H03H9/02275 , H03H9/02338 , H03H9/02377 , H03H2009/02299 , H03H2009/02496
Abstract: The invention relates to a micromechanical resonator device and a method for measuring a temperature. The device comprising a resonator body, an excitation module associated with the resonator body, a control module and a frequency detection module. The resonator body is adapted to resonate separately in at least a first and a second predetermined resonance state, selected by applying a different bias, the states being of the same eigenmode but having a different resonance frequency, each resonance frequency having a different temperature dependence.
Abstract translation: 本发明涉及一种微机械谐振器装置和一种用于测量温度的方法。 该装置包括谐振器体，与谐振器本体相关联的激励模块，控制模块和频率检测模块。 谐振器体适于以至少第一和第二预定谐振状态分别谐振，通过施加不同的偏置来选择，状态具有相同本征模，但是具有不同的谐振频率，每个谐振频率具有不同的温度依赖性。
-
公开(公告)号：EP2107038A3
公开(公告)日：2010-01-27
申请号：EP09156532.5
申请日：2009-03-27
Applicant: IMEC , Katholieke Universiteit Leuven
Inventor： De Wolf, Ingrid , Rottenberg, Xavier , Czarnecki, Piotr , Soussan, Philippe
CPC classification number: B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
Abstract: Electrostatically actuatable MEMS device comprising: a substrate (103) of which at least a top layer (106) comprises a dielectric material; a first conductor (102) fixed to the top layer of the substrate, forming a fixed electrode of the device; and a second conductor (100) fixed to the top layer of the substrate, the second conductor being electrically isolated from the first conductor and comprising a movable portion (100') which is suspended at a predetermined first distance (D1) above the first conductor. The movable portion forms a movable electrode of the device which approaches the fixed electrode upon applying an appropriate voltage difference between the first and second conductors. A substrate surface area (105) is defined as the orthogonal projection of the movable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess (107) is provided in at least the top layer of the substrate.
-
公开(公告)号：EP4020471A1
公开(公告)日：2022-06-29
申请号：EP20217355.5
申请日：2020-12-28
Applicant: Imec VZW
Inventor： Keulemans, Grim , Rochus, Veronique , Rosmeulen, Maarten , Rottenberg, Xavier
Abstract: The disclosure relates to a storage devices (10) configured to store data on a tape (11). The storage device (10) comprises the tape (11), which is configured to store data, and a data head (14), which is configured to read and/or write data from and/or to the tape (11). The storage device (10) further comprises an actuator (15) configured to move the tape (11) in a length direction in a step-wise manner. The actuator (15) comprises a number of pulling electrodes (16), wherein each pulling electrode (16) can be activated to exert a pulling force on the tape (11), and a number of clamping electrodes (17), wherein each clamping electrode (17) can be activated to clamp the tape (11).
-
公开(公告)号：EP1398811B1
公开(公告)日：2011-08-10
申请号：EP03020159.4
申请日：2003-09-05
Applicant: IMEC
Inventor： Rottenberg, Xavier , Jansen, Henri , Tilmans, Hendrikus , De Raedt, Walter
IPC: H01H59/00
CPC classification number: H01H59/0009 , B81B3/001 , B81B2201/016 , B81C2201/115 , H01G5/16 , H01G5/18
-
Patent Agency Ranking6.发明授权Method for designing a micro electromechanical device with reduced self-actuation 有权用于设计具有减小的自致动的微机电装置的方法
公开(公告)号：EP1675148B1
公开(公告)日：2009-12-02
申请号：EP05112976.5
申请日：2005-12-23
Applicant: IMEC
Inventor： Rottenberg, Xavier , Tilmans, Hendrikus
IPC: H01H59/00
CPC classification number: H01P1/127
-
公开(公告)号：EP2618201A1
公开(公告)日：2013-07-24
申请号：EP12152010.0
申请日：2012-01-20
Applicant: IMEC
Inventor： Jayapala, Murali , Van Der Plas, Geert , Rochus, Veronique , Rottenberg, Xavier , Severi, Simone , Donnay, Stephane
CPC classification number: G02B27/00 , G02B1/00 , G02B6/352 , G02B6/359 , G02B26/0825 , G02B26/0841 , G02B2207/00 , H04N1/00
Abstract: Described herein is a built-in self-calibration system and method for a micro-mirror array device, for example, operating as a variable focal length lens. The calibration method comprises determining a capacitance value for each micro-mirror element in the array device at a number of predetermined reference angles (530) to provide a capacitance-reference angle relationship (540). From the capacitance values, an interpolation step (550) is carried to determine intermediate tilt angles for each micro-mirror element in the array. A voltage sweep is applied to the micro-mirror array and capacitance values, for each micro-mirror element in the array, are measured (560). For a capacitance value that matches one of the values in the capacitance-reference angle relationship, the corresponding voltage is linked to the associated tilt angle to provide a voltage-tilt angle characteristic which then stored in a memory for subsequent use (570).
Abstract translation: 这里描述的是用于微镜阵列器件的内置自校准系统和方法，例如，作为可变焦距透镜操作。 校准方法包括以多个预定参考角度（530）确定阵列器件中每个微镜元件的电容值，以提供电容参考角度关系（540）。 根据电容值，进行内插步骤（550），以确定阵列中每个微镜元件的中间倾斜角度。 对微镜阵列施加电压扫描，测量阵列中每个微镜元件的电容值（560）。 对于与电容 - 参考角度关系中的一个值匹配的电容值，相应的电压与相关联的倾斜角度相关联，以提供随后存储在存储器中用于随后使用的电压 - 倾斜角特性（570）。
-
公开(公告)号：EP2479891A1
公开(公告)日：2012-07-25
申请号：EP11168324.9
申请日：2011-05-31
Applicant: IMEC
Inventor： Rottenberg, Xavier , Jansen, Roelof , Stoffels, Steve , Tilmans, Hendrikus
IPC: H03H9/02
CPC classification number: H03H9/02338 , H03H2009/0244 , H03H2009/02496
Abstract: MEMS resonator comprising: a substrate; a resonator body (1) suspended above the substrate by means of clamped-clamped beams (4), each beam comprising two support legs (41, 42) with a common connection (5) to the resonator body, the resonator body (1) being adapted for resonating at an operating frequency (fres); excitation means (6, 7) for exciting the resonator body into a vibration at the operating frequency (fres). Each beam is adapted for oscillating in a flexural mode at a given flexural wavelength as a result of said vibration of said resonator body at said operating frequency (fres). Each leg is acoustically long with respect to said flexural wavelength of the beam.
Abstract translation: MEMS谐振器，包括：基板; 谐振器体（1），其通过夹紧的梁（4）悬挂在基板上方，每个梁包括具有与谐振器主体的共同连接（5）的两个支撑腿（41,42），谐振器主体（1） 适于以工作频率（fres）谐振; 激励装置（6,7），用于将谐振器体激发成工作频率（fres）的振动。 作为所述谐振器本体在所述工作频率（fres）下的所述振动的结果，每个光束适于以给定弯曲波长的弯曲模式振荡。 相对于梁的所述弯曲波长，每条腿在声学上是长的。
-
-
公开(公告)号：EP3089227A1
公开(公告)日：2016-11-02
申请号：EP15165984.4
申请日：2015-04-30
Applicant: IMEC VZW
Inventor： Adelmann, Christoph , Rottenberg, Xavier
CPC classification number: H03H9/22 , B82Y25/00 , G01B7/24 , G01R33/1284 , G01R33/18 , H01F10/126 , H01F10/14 , H01L41/00 , H01L41/12 , H03B15/006 , H03H9/171 , H03H9/24
Abstract: Devices and corresponding methods for generating and detecting spin waves are provided, the devices (100, 200, 300, 400) comprising a magnetostrictive film (102), a deformation film (104) changing physical dimensions in response to an actuation, and an acoustic isolation resonator (106, 108). The magnetostrictive film (102) and the deformation film (104), preferably of piezoelectric material, are connected such that a change in physical dimensions of the deformation film produces a mechanical stress in the magnetostrictive film, resulting in a change in magnetization of the magnetostrictive film.
Abstract translation: 提供装置和用于产生和检测自旋波相应的方法，包括：磁致伸缩电影（102），变形电影（104）改变物理尺寸响应于在致动装置（100，200，300，400），并在声学 隔离谐振器（106，108）。 磁致伸缩电影（102）和所述变形电影（104），优选压电材料的，被连接搜索做在变形的物理尺寸的变化膜产生机械应力在磁致伸缩电影，在磁致伸缩的磁化强度的变化而引起 影片。
-
-
-
-
-
-
-
-
-
Search Results
22
records
(took 0.021 seconds)
