公开(公告)号：EP3117495A4

公开(公告)日：2017-11-29

申请号：EP15809376

申请日：2015-06-18

Applicant: KLA-TENCOR CORP

Inventor： CHUANG YUNG-HO ALEX ,  LOIU JUSTIN DIANHUAN ,  LU XIAOXU ,  ARMSTRONG J JOSEPH ,  DENG YUJUN ,  FIELDEN JOHN

IPC: H01S3/00 ,  G03F7/20

CPC classification number: H01S3/10046 ,  G03F7/70025 ,  H01S3/005 ,  H01S3/0071 ,  H01S3/08004 ,  H01S3/08054 ,  H01S3/08059 ,  H01S3/083 ,  H01S3/10 ,  H01S3/10061 ,  H01S2301/20 ,  H01S2301/203 ,  H01S2301/206

Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.