公开(公告)号：EP0670995A4

公开(公告)日：1996-05-01

申请号：EP93921244

申请日：1993-08-30

Applicant: ROSEMOUNT INC

Inventor： LUTZ MARK A ,  KRUEGER WILLIAM B

IPC: G01L7/08 ,  G01L9/00 ,  G01L9/06 ,  G01L9/12 ,  G01L19/06

CPC classification number: G01L19/0618 ,  G01L9/0042

Abstract: A low range pressure sensor (10) includes a base plate of brittle material (12), and a diaphragm plate assembly (14) mounted on the base plate (12) and sealed around a periphery (16) to the base plate (12). Pressures are introduced to cause a center diaphragm section (18) to deflect toward the base plate (12), and the deflection of the diaphragm (18) is sensed through strain gauges (32) to provide an indication of the pressure. The diaphragm (18) is provided with a plurality of individual support posts (36) on a side facing the base plate (12), so that when the diaphragm (18) is deflected toward the base plate (12) under high overpressures the support posts (36) will support the diaphragm (18) against movement to avoid failure or breakage of the diaphragm (18). The number of support posts (36) can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer (40) of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts (36) as they touch the surface of the base plate (12) to reduce stress buildup in the diaphragm (18) as the overpressure increases.

Abstract translation: 低范围压力传感器包括脆性材料基板和安装在基板上并围绕基板周围密封的隔膜板。 引入压力以使隔膜朝向基板偏转，并且通过应变计感测隔膜的偏转以提供压力的指示。 隔膜在面向基板的一侧设置有多个单独的支撑柱，使得当隔膜在高超压下偏转到底板时，支撑柱将支撑隔膜以防止运动，以避免隔膜的故障或破裂 。 支持员的数量可以根据需要变化。 在本发明的优选形式中，底板设置有非常薄的二氧化硅层，其是良好的电绝缘体，并且还用于帮助支撑柱接触基板的表面时的轻微移动 以减轻隔膜中的压力增加。