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公开(公告)号：CA2141688A1
公开(公告)日：1994-03-17
申请号：CA2141688
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate assembly mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause a center diaphragm section to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate so that when the diaphragm is deflected toward the base plate under high over-pressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accomodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：WO0150104A2
公开(公告)日：2001-07-12
申请号：PCT/US0034648
申请日：2000-12-20
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , FRICK ROGER L , SITTLER FRED C , TOY ADRIAN C
CPC classification number: G01L9/0075
Abstract: A pressure sensor (100, 222) integrally formed in the shape of a beam (102) around a central channel. The beam (102) has an integral blind end (104) that is pressurized by the fluid. The beam has an opposite end (106) that is shaped to provide a stepped corner (107) with a gap (108) opening at the base of the stepped corner (107), where the gap (108) and isolated from the fluid. A sensing film (112) in the channel adjacent the blind end (104) has an electrical parameter that varies with pressure and electrical leads (110) that extend from the channel and out the gap. A seal (115) fills the gap (108) around the leads (110) and the seal (115) fills a portion of the stepped corner (107). The sensor (100) is preferably formed by direct bonding of single crystal alumina layers (114, 116). Applications include industrial pressure transmitters, aerospace and turbine engine pressure sensing.
Abstract translation: 一体形成为围绕中心通道的梁（102）形状的压力传感器（100,222）。 梁（102）具有由流体加压的整体的盲端（104）。 梁具有相对的端部（106），其被成形为提供在台阶角（107）的基部处开口的间隙（108）的阶梯式角（107），其中间隙（108）与流体隔离。 邻近盲端（104）的通道中的感测膜（112）具有随着压力而变化的电参数，以及从通道延伸出来并且离开间隙的电引线（110）。 密封件（115）围绕引线（110）填充间隙（108），并且密封件（115）填充阶梯式角部（107）的一部分。 传感器（100）优选通过单晶氧化铝层（114,116）的直接接合形成。 应用包括工业压力变送器，航空航天和涡轮发动机压力传感。
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公开(公告)号：SG43764A1
公开(公告)日：1997-11-14
申请号：SG1996000673
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KREUGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：AU4841293A
公开(公告)日：1994-03-29
申请号：AU4841293
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：AU2629901A
公开(公告)日：2001-07-16
申请号：AU2629901
申请日：2001-01-05
Applicant: ROSEMOUNT INC
Inventor： ROMO MARK G , RUD STANLEY E JR , LUTZ MARK A , SITTLER FRED C , TOY ADRIAN C
Abstract: A sensor has an electrical interconnect grown in a cavity between first and second layers that are bonded together. Electrically conductive grain growth material is selectively deposited on at least one of two electrically conductive film interconnect regions that face one another across the cavity. The grain growth material is then grown upon predetermined conditions to form the electrical interconnect between the two interconnect regions. A sensor element deposited in the cavity is electrically coupled between the layers by the interconnect. The grain growth material can be tantalum that is heated after the layers are bonded to grow grains that interconnect the electrically conductive films.
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Patent Agency Ranking
公开(公告)号：HUT70345A
公开(公告)日：1995-09-28
申请号：HU9500617
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：HU9500617D0
公开(公告)日：1995-04-28
申请号：HU9500617
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：MX9305342A
公开(公告)日：1994-06-30
申请号：MX9305342
申请日：1993-09-01
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：BR9306946A
公开(公告)日：1999-01-12
申请号：BR9306946
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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公开(公告)号：PL173699B1
公开(公告)日：1998-04-30
申请号：PL30759193
申请日：1993-08-30
Applicant: ROSEMOUNT INC
Inventor： LUTZ MARK A , KRUEGER WILLIAM B
Abstract: A low range pressure sensor includes a base plate of brittle material, and a diaphragm plate mounted on the base plate and sealed around a periphery to the base plate. Pressures are introduced to cause the diaphragm to deflect toward the base plate, and the deflection of the diaphragm is sensed through strain gauges to provide an indication of the pressure. The diaphragm is provided with a plurality of individual support posts on a side facing the base plate, so that when the diaphragm is deflected toward the base plate under high overpressures the support posts will support the diaphragm against movement to avoid failure or breakage of the diaphragm. The number of support posts can be varied as desired. In a preferred form of the invention, the base plate is provided with a very thin layer of silicon dioxide, which is a good electrical insulator and which also serves to help accommodate slight movement of the support posts as they touch the surface of the base plate to reduce stress buildup in the diaphragm as the overpressure increases.
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