Abstract:
A differential pressure transmitter (200; 300; 400; 500; 600; 700) includes first (210; 310) and second (212;312) process fluid inlets. A differential pressure sensor (214; 338; 518; 638) is disposed within the transmitter (200; 300; 400; 500; 600; 700) and has first and second sensor inlets. A first isolator diaphragm (230; 330) is located proximate the first process fluid inlet (210; 310) and is operably coupled to the first sensor inlet through a first fill fluid volume (334). A second isolator diaphragm (232; 332) is located proximate the second process fluid inlet (212;312) and is operably coupled to the second sensor inlet through a second fill fluid volume (336). Measurement circuitry (218) is operably coupled to the differential pressure sensor (214; 338; 518; 638) and configured to measure an electrical parameter of the sensor (214; 338; 518; 638) and provide an indication of the measured parameter. A third fluid volume (354) substantially surrounds the differential pressure sensor. The third fluid volume (354) exerts a compressive force on the differential pressure sensor (214; 338; 518; 638).
Abstract:
A deflecting diaphragm differential pressure sensor (10) is formed so all electrical elements (30A-30D) and connections (34B) from external circuitry to the sensor (10) are isolated from the pressure media. The deflecting, pressure sensing diaphragm (22) is made of a semi-conductor material, having piezoresistors disposed on a surface (25) thereof to form strain gages to sense deflection of the diaphragm (22). The strain gage resistors are media isolated by a layer that overlies the strain gage resistors. All forms of the invention provide environmental protection for the electrical connections for external circuitry, which are subject to corrosion from the pressure media.
Abstract:
Un capteur (10) de pression différentielle à diaphragme de déflexion est formé de sorte que tous les éléments électriques (30A-30D) et toutes les connexions (34B) du réseau de circuit externe au capteur (10) sont isolés du milieu de pression. Le diaphragme de déflexion (22) captant la pression est constitué d'un matériau semi-conducteur ayant des piézorésistances disposées sur une surface (25) du matériau semi-conducteur pour former des jauges de contrainte qui détectent la déflexion du diaphragme (22). Les résistances des jauges de pression sont isolées du milieu de pression par une couche qui est placée au-dessus des résistances des jauges de contrainte. Toutes les formes d'exécution de l'invention protègent contre l'environnement les connexions électriques des circuits externes, soumises à la corrosion due au milieu de pression.