公开(公告)号：EP0895484A4

公开(公告)日：2000-12-06

申请号：EP97917644

申请日：1997-03-25

Applicant: SAES PURE GAS INC

Inventor： LORIMER D ARCY H

IPC: B01D8/00 ,  F04B37/02 ,  F04B37/08 ,  F04B37/16

CPC classification number: F04B37/02 ,  F04B37/08 ,  Y10S417/901

Abstract: A combination cryopump/getter pump (50) including a cryopump section (52) having a cryopump inlet (76), a getter pump section (54) having a getter pump inlet (86), and a mechanism (60) for coupling the cryopump section (52) and the getter pump section (54) to a single port (58) of a process chamber to be evacuated. Preferably, a cylindrical getter pump section (54) surrounds a cylindrical cryopump section (52). Preferably, the cryopump section (52) and the getter pump section (54) are coupled to the common port (58) of the process chamber by a gate valve mechanism (60). In one embodiment, the gate valve mechanism (60) isolates the cryopump inlet (76) and the getter pump inlet (86) when in a closed position. In another embodiment, the gate valve mechanism (60) does not isolate the cryopump inlet (76) and the getter pump inlet (86) when in a closed position. Preferably, thermal insulation (78) is provided between the getter pump section (54) and the cryopump section (52) to thermally isolate the two sections. The cryopump section preferably includes both a 15 °K array (72) and an 80 °K array (70a-d).