公开(公告)号：JP2005139547A

公开(公告)日：2005-06-02

申请号：JP2004083046

申请日：2004-03-22

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： KONISHI YOSHIYUKI ,  OSANAI KATSUTOYO

IPC: C23C14/54 ,  C23C16/00 ,  C23C16/52 ,  H01J37/32

CPC classification number: H01J37/32935 ,  C23C14/544 ,  C23C16/52

Abstract: PROBLEM TO BE SOLVED: To improve the reduction in the precision of film deposition control occurring at the time of depositing a thin film, particularly, the one with a film thickness of about ≤100 nm in a film deposition device having a film deposition chamber where the object to be film-deposited is made into plasma, and film deposition is performed thereto.
SOLUTION: The device is provided with: a plasma source 1 generating a plasma flow 3 being the mixture of positive ions of the material to be film-deposited and electrons; a guiding path 2 for guiding the plasma flow 3 into a film deposition chamber 6; a substrate holder 9 for holding a substrate 10, which has an opening in a direction facing the plasma flow 3; and a Faraday cup 21 formed of double circular cylinders insulated each other. A bias power source 22 is connected to the inner circular cylinder of the Faraday cup 21 for providing positive voltage and is connected to an ammeter 23 for measuring the electric current of electrons flowing into the Faraday cup 21. The ammeter is connected to a capacitor 24. Further, the capacitor 24 is connected to an amplifier 25 for integrating the quantity of electric charges passing through the ammeter 23. The integrated value of the quantity of the electric charges integrated by a monitoring means composed thereof is converted into a thickness of the film at real time, and is displayed as a film thickness output signal.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 解决的问题：为了提高薄膜沉积时的薄膜沉积控制的精度的降低，特别是膜厚约为100nm的薄膜沉积装置中具有薄膜 其中将待成膜的物体制成等离子体的沉积室，并对其进行膜沉积。 解决方案：该装置设置有：等离子体源1，其产生作为待沉积材料的正离子和电子的混合物的等离子体流3; 用于将等离子体流3引导到成膜室6中的引导路径2; 用于保持衬底10的衬底保持器9，衬底10在面向等离子体流3的方向上具有开口; 以及由彼此绝缘的双圆柱体形成的法拉第杯21。 偏置电源22连接到法拉第杯21的内圆柱体，用于提供正电压，并连接到电流计23，用于测量流入法拉第杯21的电子的电流。电流表连接到电容器24 此外，电容器24连接到放大器25，用于积分通过电流表23的电荷量。由其组成的监视装置积分的电荷量的积分值被转换成膜的厚度 并且被显示为膜厚度输出信号。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2003111402A

公开(公告)日：2003-04-11

申请号：JP2001307636

申请日：2001-10-03

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: H02M3/28

Abstract: PROBLEM TO BE SOLVED: To provide a variable output DC-DC converter with a simple structure and high efficiency capable of promptly responding to output fluctuations and obtaining high-voltage output on a secondary side, and to provide a variable output DC-DC converter of a simple structure and high efficiency capable of promptly responding to output fluctuations and obtaining high-voltage output on a secondary side. SOLUTION: A winding with a center tap is used for primary windings 8a of a transformer 8, two switching devices 4, 5 are connected with each of the primary windings 8a of the transformer 8 so that current alternately flows, a choke coil 2 with a transformer function is inserted between two switching devices 4, 5, and the primary windings 8a of the transformer 8. Energy stored in the choke coil 2 is returned to a DC power 1 through the primary windings 8a during an off period of the switching devices 4, 5, thereby attaining high efficiency. The output voltage can be easily changed by changing the on-off rate of the switching devices 4, 5, which provides a prompt response to the secondary side output fluctuations. Choke coils and the like are not required for the secondary side, thereby increasing the voltage on the secondary side.

公开(公告)号：JP2001016853A

公开(公告)日：2001-01-19

申请号：JP17764899

申请日：1999-06-24

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: H02M7/10

Abstract: PROBLEM TO BE SOLVED: To reduce wasteful electric power consumed inside a power supply. SOLUTION: Respective connecting points of a smoothing capacitor CF, connected in series and a capacitor C for Cockcroft-Walton type boosting circuit, are connected through a high resistor RB, and with a DC voltage existing at the respective stages of the boosting circuit given to the connecting point of the smoothing capacitor, and the potential of the smoothing capacitor is determined. Thus a breeder resistor, which was necessary hitherto for giving the voltage divided by parallel connection with the smoothing capacitor to the respective smoothing capacitors, is dispensed with. Also electric power consumed inside the power source is reduced, because no wasteful breeder current flows.

公开(公告)号：JPH03282229A

公开(公告)日：1991-12-12

申请号：JP8316990

申请日：1990-03-29

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: G01N1/00

Abstract: PURPOSE:To simplify the constitution of a vacuum chamber, to miniaturize a device and to handle a specimen excellently by supplying a current through a tightly closed cover, thereby supplying a current through an electromagnetic actuator, moving the movable part of the main body of a mechanism, and holding and moving the specimen. CONSTITUTION:An AC is made to flow through a primary coil 10 of an electromagnetic current supplying device 6 by the operation of a switch 13. Then the induced current is induced in a secondary coil 11. The induced current is rectified into the DC in a rectifying circuit 16. The current is imparted to an electromagnet 14 of an electromagnetic actuator 7. The electromagnet 14 attracts an armature 15 by the conduction of the DC. Thus, a chuck 8 is opened. Meanwhile, when the conduction through the coil 10 is cut, the chuck 8 is closed by energizing of a spring 9 because the electric power is not supplied to the electromagnet 14. In this way, the movable part of the main body of the mechanism is moved, and the specimen is held and moved. Thus, the specimen is handled excellently.

公开(公告)号：JPH03241648A

公开(公告)日：1991-10-28

申请号：JP4054390

申请日：1990-02-20

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: H01J37/248

Abstract: PURPOSE:To improve the control precision of accelerating voltage by providing a voltage compensating circuit between the middle point of a voltage dividing circuit and the transistor base of an active load circuit. CONSTITUTION:Thermoelectrons are emitted from the hair pin section (b) of a filament F to an anode AN, a current flows to an accelerating voltage source E1, and the potential at the connection point (c) of transistors Q1, Q2 of an active load circuit ALC is fluctuated and made inconsistent with the potential at the middle point (a) of a voltage dividing circuit RC. When the potential at the point (c) is made lower than the potential at the point (a), a control signal for compensating the voltage to a high level is outputted from a differential amplifier Amp. The current fed back to the power source E1 is increased or decreased to make the potential at the point (c) equal to the potential at the point (a) of the circuit RC. The potential at the point (c) of the circuit ALC is invariably made equal to the potential at the point (a), the potential at the hair pin section (b) is also made equal. The accelerating voltage set by the power source E1 is made equal to the accelerating voltage applied across the filament F and the anode AN, and the accelerating voltage can efficiently be controlled.

公开(公告)号：JPH0395842A

公开(公告)日：1991-04-22

申请号：JP23363989

申请日：1989-09-07

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: H01J37/06 ,  H01J37/248 ,  H01J37/252

Abstract: PURPOSE:To prevent the expanded energy distribution of electron beam by supplying a filament with pulse current and sampling analysis output in the period of non-electrification of the filament in synchronization with the pulse current. CONSTITUTION:A filament 1 is given negative potential against a target or a sample 3 to accelerate electrons between the filament and the target 3. Analysis information is obtained from target current. The target current, after amplified by a pre-amplifier 7, is input to one terminal of an AND gate 8. With the help of sampling pulse applied to the other input terminal of the AND gate, the AND gate 8 passes through only in the period of the pulse existence, and the output in the same period as that of the output of the pre-amplifier 7 is only sampled. In this case, since the filament is not electrified, all have the same potential. It is thus possible to prevent the expanded energy of electron beam resulting from different potentials.