公开(公告)号：DE69103064D1

公开(公告)日：1994-09-01

申请号：DE69103064

申请日：1991-03-23

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: G01R31/36 ,  H01M10/44 ,  H01M10/48 ,  H02J7/04 ,  H02J7/10

Abstract: A charge detecting apparatus for detecting completion of charging of a secondary battery using electrolyte. Bubbling sounds produced inside the secondary battery being charged are detected outside a container of the battery and converted into a quantity of electricity. A charge completion signal is output when the quantity of electricity reaches a predetermined reference level.

公开(公告)号：DE69103064T2

公开(公告)日：1995-03-09

申请号：DE69103064

申请日：1991-03-23

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: G01R31/36 ,  H01M10/44 ,  H01M10/48 ,  H02J7/04 ,  H02J7/10

Abstract: A charge detecting apparatus for detecting completion of charging of a secondary battery using electrolyte. Bubbling sounds produced inside the secondary battery being charged are detected outside a container of the battery and converted into a quantity of electricity. A charge completion signal is output when the quantity of electricity reaches a predetermined reference level.

公开(公告)号：JP2002136143A

公开(公告)日：2002-05-10

申请号：JP2000317259

申请日：2000-10-18

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: H05G1/08 ,  H02M7/10

Abstract: PROBLEM TO BE SOLVED: To provide a DC-high voltage generator, capable of mounting rectifying circuit elements in a DC high-voltage transformer of full-wave rectifier type. SOLUTION: A secondary winding of the transformer is divided into secondary windings S1-S5, and the output voltages of the respective secondary windings may be 10 kV, for example. Diodes for high voltage rectification D1-D12 are connected at both ends of the respective secondary windings S1-S5, and the polarities of the respective secondary windings S1-S5 are connected so that the generated voltages of the respective secondary windings are added. The number of rectifying circuit elements can be reduced and obtain high voltage output of 50 kV with the full-wave rectified type, when the voltages of the respective secondary windings are 10 kV.

公开(公告)号：JPH05232050A

公开(公告)日：1993-09-07

申请号：JP3780492

申请日：1992-02-25

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: G01N23/225 ,  G01N1/28

Abstract: PURPOSE:To perform surface analysis with high accuracy by demagnetizing the residual magnetic flux of the magnetic body of a surface analyzing device which is composed of an electromagnet having a demagnetizing function by means of magnetic field change and a power source applying demagnetizing current to the electromagnet. CONSTITUTION:This device demagnetizes the residual magnetic flux of a snorkel lens M. A d.c. exciting power source PS1 and a demagnetizing a.c. power source PS2 are connected to the snorkel lens M via a switching circuit SW. When the snorkel lens M is used for the primary purpose thereof, the switching circuit SW is connected to the d.c. exciting power source PS1 side, so that d.c. current is applied to and excites the snorkel lens M. On the other hand, in order to demagnetize the residual magnetic flux of the snorkel lens M, the switching circuit SW is connected to the demagnetizing a.c. power source PS2 side so that decaying a.c. current is applied to the snorkel lens M for a.c. exciting. Owing to the application of the decaying a.c. current, the residual magnetic flux of the snorkel lens M is demagnetized. The influence of the residual magnetic flux of a magnetic body used for an analyzing device is so much reduced as no influence is practically left, and it is possible to perform surface analysis with high accuracy.

公开(公告)号：JP2008269837A

公开(公告)日：2008-11-06

申请号：JP2007108261

申请日：2007-04-17

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： SUZUKI MASAYASU ,  OSANAI KATSUTOYO

IPC: H05B6/10 ,  C23C14/50 ,  C23C16/46 ,  H05B6/02 ,  H05B6/04 ,  H05H1/46

Abstract: PROBLEM TO BE SOLVED: To suppress occurrence of glow discharge, heat radiation from a heating object, and temperature rise by heating a work coil and a circumferential mechanism by the heat radiation, in a space between the work coil and the heating object.
SOLUTION: A heating mechanism used in a subatmospheric pressure environment and using a high-frequency induction heating action is provided with a heating object part holding a board, and the work coil supplied with high-frequency power, and heating the heating object part by carrying an induction current thereto by high-frequency induction. In the heating mechanism, the work coil and the heating object part are arranged at a predetermined distance; an electric field shield is arranged between the work coil and the heating object part; the heating object part and the electric field shield are set at the same potential; the electric field shield has two stacked electric field shield antennas; each electric field shield antenna is provided with a plurality of first wires without intersecting with one another, and a second wire short-circuiting the plurality of first wires to the ground potential; and the first wires provided for the respective electric field shield antennas are stacked on one another at angles around 90° with respect to each other.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：通过在工作线圈和加热对象之间的空间中抑制辉光放电的发生，来自加热物体的热辐射和通过加热工作线圈和周向机构的温度升高 。 解决方案：在低于大气压的环境中使用并且使用高频感应加热动作的加热机构设置有保持板的加热对象部分，并且供给高频电力的工作线圈，并且加热加热对象 部分地通过高频感应传送感应电流。 在加热机构中，工作线圈和加热对象部分以预定距离布置; 在工作线圈和加热对象部分之间设置电场屏蔽; 加热对象部分和电场屏蔽被设定为相同的电位; 电场屏蔽层有两层叠电场屏蔽天线; 每个电场屏蔽天线设置有多个第一布线，而不相互交叉;以及第二布线，将多条第一布线短路到地电位; 并且为每个电场屏蔽天线设置的第一布线彼此相对于彼此以大约90°的角度彼此堆叠。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2004319378A

公开(公告)日：2004-11-11

申请号：JP2003114478

申请日：2003-04-18

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： TOMITA SADAMU ,  TAMURA TOMOMI ,  MITAMURA SHIGEHIRO ,  OTA MASAHIRO ,  OSANAI KATSUTOYO

IPC: H01J37/141

Abstract: PROBLEM TO BE SOLVED: To solve the problem that the magnetic intensity by hysteresis characteristic of a magnetic lens cannot be determined uniquely.
SOLUTION: The magnetic lens 5 is a magnetic lens for focusing an electron beam or ion beam, which comprises a magnetic sensor 11 at the sample-side tip of a magnetic yoke 5b constituting the magnetic lens at least outside the axis 6 of an electronic optical system relative to the magnetic yoke 5b on the axis 6 side of the electronic optical system. The magnitude of the current supplied to a magnetic coil 5a is controlled by use of the output of the magnetic sensor, whereby the magnetic intensity is controlled to a predetermined value. According to this, the magnetism generated by the magnetic lens is controlled to a predetermined intensity to control the magnetic intensity to the predetermined value, whereby the focal distance is uniquely determined, and the distance on an observation sample is uniquely determined.
COPYRIGHT: (C)2005,JPO&NCIPI

公开(公告)号：JP2004170143A

公开(公告)日：2004-06-17

申请号：JP2002334020

申请日：2002-11-18

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： OSANAI KATSUTOYO

IPC: G01N23/223 ,  G01N23/22 ,  G01T1/17 ,  G01T1/36

Abstract: PROBLEM TO BE SOLVED: To remove an influence of electrical noise in an X-ray analysis using a low energy characteristic radiation.
SOLUTION: In the X-ray analysis using the low energy characteristic radiation, a signal with the reduced influence due to the electrical noise is found by respectively finding a detection signal including the low energy characteristic radiation and a noise component and a detection signal including only the noise component and subtracting the detection signal including only the noise component from the detection signal including the low energy characteristic radiation and the noise component. The X-ray analysis is provided with a first measurement process for measuring the characteristic radiation on an optical path between an analysis sample and an X-ray detector in a vacuum state, a second measurement process for measuring a residual characteristic radiation absorbing the low energy X-ray on the optical path and a calculation process for subtracting a signal measured in the second measurement process from a signal measured in the first measurement process.
COPYRIGHT: (C)2004,JPO

公开(公告)号：JPH0845696A

公开(公告)日：1996-02-16

申请号：JP17713694

申请日：1994-07-28

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: H05G1/02 ,  H01J35/10

Abstract: PURPOSE:To facilitate maintenance of a rotary anode X-ray tube by substantially extending the lifetime of the water seal part of X-ray tube. CONSTITUTION:An X-ray generating device has a rotary anode part 3 including a rotary shaft 6 and stationary part, and the gap between the shaft 6 and stationary part is sealed by a water seal part 9 of rubber against a cooling water 12 which cools the rotary anode part 3. The output of a power limit setting device 20 to set the maximum of the electric power to be supplied to rotary anode X-ray tube is compared with the supply power, and an appropriate signal is passed to an X-ray power controlling part 21 and also sent to a motor speed controlling part 26. Control is made so that the revolving speed of a motor 16 to rotate the rotary anode part 3 is retarded with smaller setting value of power limiting, and the lifetime of the water seal part 9 is prolonged substantially.

公开(公告)号：JP2005266695A

公开(公告)日：2005-09-29

申请号：JP2004082884

申请日：2004-03-22

Applicant: Shimadzu Corp ,  株式会社島津製作所

Inventor： OSANAI KATSUTOYO

IPC: G02F1/13 ,  H01L51/50 ,  H05B33/14

Abstract: PROBLEM TO BE SOLVED: To shorten the processing time needed for TFT panel inspection by reducing data processing for acquiring detection data on a TFT panel.
SOLUTION: The inspection processing time is shortened by reducing the data processing for acquiring the detection data by making measuring ranges of a plurality of electron guns and a secondary electron detectors arrangement change correspond to respective TFT panels according to the number and arrangement of multiple panels formed of one substrate from which the multiple panels are obtained. A TFT panel inspecting device 1 which supplies an inspection signal to a substrate and detects its drive state to inspect a TFT panel on the substrate is equipped with an installation member 6 for installing an electron gun 4 and a secondary electron detector in a vacuum chamber, and the installation member 6 is equipped with a plurality of installation positions for installing the electron gun and secondary electron detector. The electron gun and secondary electron detector are fitted at installation positions selected out of the plurality of installation positions and then the installation positions of the electron gun and secondary electron detector in the vacuum chamber are changed.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：通过减少在TFT面板上获取检测数据的数据处理来缩短TFT面板检查所需的处理时间。 解决方案：通过根据多个电子枪的测量范围减少用于获取检测数据的数据处理和二次电子检测器布置改变对应于各个TFT面板的数据和布置来缩短检查处理时间 多个面板由一个基板形成，从该基板获得多个面板。 向基板提供检查信号并检测其驱动状态以检查基板上的TFT面板的TFT面板检查装置1配备有用于在真空室中安装电子枪4和二次电子检测器的安装构件6， 并且安装构件6配备有用于安装电子枪和二次电子检测器的多个安装位置。 电子枪和二次电子检测器安装在从多个安装位置中选择的安装位置，然后电子枪和二次电子检测器在真空室中的安装位置改变。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2001050845A

公开(公告)日：2001-02-23

申请号：JP22483699

申请日：1999-08-09

Applicant: SHIMADZU CORP

Inventor： OSANAI KATSUTOYO

IPC: H01J41/00 ,  G01L21/30 ,  H02M3/28

Abstract: PROBLEM TO BE SOLVED: To obtain a power supply for an ionization in which the capacity, heat generation and size are reduced by realizing output characteristics corresponding to the voltage-current characteristics of an ionization load where the load current is low under high voltage and high under low voltage. SOLUTION: The power supply for ionization comprises a high voltage DC/DC converter 2 applying a DC voltage to an ionization electrode and a voltage control section 4 controls the primary voltage of the high voltage DC/DC converter 2 based on a load current generated through ionization to vary the secondary voltage of the high voltage DC/DC converter 2 reversely to the varying direction of the load current I. In place of output voltage control using voltage drop across a resistor, output voltage control depending on the load current I is carried out and the capacity, heat generation and size of the power supply are reduced by realizing output characteristics corresponding to the voltage- current characteristics of an ionization load.