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    Solid-state imaging apparatus, its manufacturing method, and camera
    22.
    发明专利
    Solid-state imaging apparatus, its manufacturing method, and camera 有权
    固态成像设备，其制造方法和摄像机

    公开(公告)号：JP2008098345A

    公开(公告)日：2008-04-24

    申请号：JP2006277421

    申请日：2006-10-11

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： MAEDA KENSAKU

    IPC: H01L27/14 ,  G02B5/20 ,  H04N9/07

    Abstract: PROBLEM TO BE SOLVED: To provide a solid-state imaging apparatus where a color shading characteristic and a spectral characteristic can be improved without deteriorating a condensing rate and sensitivity of oblique incidence light, and to provide a manufacturing method of the apparatus and a camera.
    SOLUTION: Photodiodes 11 and charge reading parts (vertical CCD parts) 12 reading signal charges of the photodiodes are formed on a semiconductor substrate 10 by segmentation in units of pixels. Color filter parts (33G, 34R and 35B) and flattening films 36a are formed above the photodiodes. Microlenses 40a are formed on the upper layer. The color filter part is provided with at least a first color filter 33G having a first spectral characteristic and a second color filter 34R having a second spectral characteristic and having a projected square shape 34Ra projected to a flattening film-side at a boundary with the first color filter. A top surface of the projected square shape 34Ra is flattened at the same height as the upper face of the flattening film 36a.
    COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种可以在不降低倾斜入射光的冷凝速度和灵敏度的情况下提高遮光特性和光谱特性的固态成像装置，并且提供该装置的制造方法和 相机。 解决方案：通过以像素为单位的分割，在半导体衬底10上形成读取光电二极管的信号电荷的光电二极管11和电荷读取部分（垂直CCD部分）12。 滤光片部分（33G，34R和35B）和平坦化膜36a形成在光电二极管的上方。 微透镜40a形成在上层。 滤色器部分至少设置有具有第一光谱特性的第一滤色器33G和具有第二光谱特性的第二滤色器34R，并且具有投射到与第一滤光器边界的边界处的平坦化膜侧的投影正方形34Ra 滤色片 投影方形34Ra的上表面在与平坦化膜36a的上表面相同的高度处被平坦化。 版权所有（C）2008，JPO＆INPIT

    Optical element, manufacturing method thereof, and solid-state imaging element
    24.
    发明专利
    Optical element, manufacturing method thereof, and solid-state imaging element 审中-公开
    光学元件，其制造方法和固态成像元件

    公开(公告)号：JP2006332407A

    公开(公告)日：2006-12-07

    申请号：JP2005155028

    申请日：2005-05-27

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： MAEDA KENSAKU

    IPC: H01L27/14 ,  G02B3/00 ,  H04N5/335 ,  H04N5/369

    Abstract: PROBLEM TO BE SOLVED: To provide an optical element provided with microlenses that can efficiently collect light by eliminating a gap between the microlenses and decreasing the distance between the microlenses and pixels. SOLUTION: The optical element wherein a plurality of the lenses are arranged corresponding to each of photodiodes 11 of a plurality of the pixels uses color lenses CL each having a color on the basis of a particular spectral characteristic wherein no gap is formed between the adjacent lenses. Further, the color lenses CL are formed with the photolithography using a halftone mask and applied to a chemically amplified negative color resist. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种具有微透镜的光学元件，其可以通过消除微透镜之间的间隙并减小微透镜与像素之间的距离来有效地收集光。 解决方案：其中对应于多个像素中的每个光电二极管11布置的多个透镜的光学元件使用基于特定光谱特性的具有颜色的颜色透镜CL，其中在两个像素之间没有形成间隙之间形成间隙 相邻镜片。 此外，彩色透镜CL通过使用半色调掩模的光刻法形成，并施加到化学放大的负色抗蚀剂上。 版权所有（C）2007，JPO＆INPIT

    Solid-state imaging device, manufacturing method thereof, and electronic device
    25.
    发明专利
    Solid-state imaging device, manufacturing method thereof, and electronic device 有权
    固态成像装置及其制造方法及电子装置

    公开(公告)号：JP2010263228A

    公开(公告)日：2010-11-18

    申请号：JP2010139992

    申请日：2010-06-18

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： OTSUKA YOICHI ,  ENOMOTO YASUYUKI ,  NAGAHATA KAZUNORI ,  KIMURA TADAYUKI ,  HAYASHI TOSHIHIKO ,  AOYANAGI KENICHI ,  TABUCHI KIYOTAKA ,  SUGIURA IWAO ,  MAEDA KENSAKU

    IPC: H01L27/14 ,  G02B5/20 ,  H04N9/07

    Abstract: PROBLEM TO BE SOLVED: To provide a solid-state image pickup apparatus to enable, for example, improvement in processing accuracy of a color filter and suppression of mixture of colors, and to provide a method of manufacturing the apparatus and an electronic device. SOLUTION: The method of manufacturing the solid-state image pickup apparatus includes a step of forming a hard mask, having an aperture on the front surface of image pickup area where a plurality of pixels, having photoelectric converting elements are arranged and a step of forming any one of the first, second and third color filter elements within the aperture of hard mask. This manufacturing method, additionally, includes a step of forming the remaining color filter elements on the aperture formed, by removing the hard mask in which respective peripheral areas of the second and third color filter elements form the color filter surrounded by a first color filter element. COPYRIGHT: (C)2011,JPO&INPIT

    Abstract translation: 要解决的问题：提供一种固态图像拾取装置，例如能够提高滤色器的处理精度和抑制颜色混合，并提供制造该装置和电子装置的方法 设备。 解决方案：制造固态摄像装置的方法包括：形成硬掩模的步骤，该硬掩模在其上布置有光电转换元件的多个像素的图像拾取区域的前表面上具有孔，并且 在硬掩模的孔内形成第一，第二和第三滤色器元件中的任何一个的步骤。 此外，该制造方法还包括通过去除其中第二和第三滤色器元件的各个周边区域形成由第一滤色器元件围绕的滤色器的硬掩模形成所形成的孔的剩余滤色器元件的步骤 。 版权所有（C）2011，JPO＆INPIT

    Color filter, method of manufacturing color filter, solid-state imaging device and electronic apparatus
    26.
    发明专利
    Color filter, method of manufacturing color filter, solid-state imaging device and electronic apparatus 审中-公开
    彩色滤光片，彩色滤光片的制造方法，固态成像装置和电子装置

    公开(公告)号：JP2010128382A

    公开(公告)日：2010-06-10

    申请号：JP2008305569

    申请日：2008-11-28

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： MAEDA KENSAKU

    IPC: G02B5/20 ,  H01L27/14 ,  H04N9/07

    Abstract: PROBLEM TO BE SOLVED: To provide a color filter capable of suppressing the occurrence of color mixing of incident light.
    SOLUTION: The color filter 30 includes a region (BLU)31 of transmitting blue color light, an region (GRE)33 of transmitting green color light and an region (RED)32 of transmitting red color light. Then, at least two adjacent regions of the region (BLU)31 of transmitting blue color light, the region (GRE)33 for transmitting green color light and the region (RED)32 for transmitting red color light are configured by a combination of complementary color filters 34, 35, 36 which transmit complementary color light. Further in adjacent regions, the complementary color filters 34, 35, 36 which transmit the same color light are disposed on the incident-surface side of light.
    COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：提供能够抑制入射光的混色发生的滤色器。 滤色器30包括透射蓝色光的区域（BLU）31，透射绿色光的区域（GRE）33和透射红色光的区域（RED）32。 然后，透射蓝色光的区域（BLU）31，用于透射绿色光的区域（GRE）33和用于透射红色光的区域（RED）32）的至少两个相邻区域被配置为互补的 滤色器34,35,36，其传输互补色光。 此外，在相邻区域中，透光相同色光的补色滤色器34,35,36设置在光的入射面侧。 版权所有（C）2010，JPO＆INPIT

    Methods of manufacturing color filter and solid imaging device
    28.
    发明专利
    Methods of manufacturing color filter and solid imaging device 审中-公开
    制造彩色滤光片和固体成像装置的方法

    公开(公告)号：JP2006292870A

    公开(公告)日：2006-10-26

    申请号：JP2005110825

    申请日：2005-04-07

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： HARASAWA MASANORI ,  OTSUKA YOICHI ,  MAEDA KENSAKU

    IPC: G02B5/20 ,  H01L27/14

    Abstract: PROBLEM TO BE SOLVED: To provide a method of manufacturing color filter capable of improving a positional precision of a color filter pattern and to provide a method of manufacturing a solid imaging device provided with the color filter. SOLUTION: The color filter pattern 31 of the first color having an arrangement that surrounds a pattern non-formation region is formed on a substrate 1 to be treated. Subsequently, a chemical amplification negative-type colored photosensitive resin 32a of and after the second color is formed on the substrate 1 to be treated so as to cover the color filter pattern. Then, the chemical amplification negative-type colored photosensitive resin 32a is exposed. Therein, the exposure is performed so that the inner side of a region surrounded by the color filter pattern 31 of the first color becomes a photosensitive region 32b. Subsequently, heating treatment is performed for the chemical amplification negative-type colored photosensitive resin 32a. Thereafter, the chemical amplification negative-type colored photosensitive resin 32a is developed and, thereby, a color filter pattern 32 of and after the second color is formed. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 解决问题的方案：提供一种能够提高滤色器图案的位置精度的彩色滤光片的制造方法，并且提供一种制造具有滤色器的固体成像装置的方法。 解决方案：在待处理的基板1上形成具有围绕图案非形成区域的布置的第一颜色的滤色器图案31。 随后，在待处理的基板1上形成第二种颜色之后和之后的化学放大负型着色光敏树脂32a以覆盖滤色器图案。 然后，暴露出化学放大负型着色感光性树脂32a。 其中，进行曝光，使得由第一颜色的滤色器图案31包围的区域的内侧成为感光区域32b。 随后，对化学放大负型着色感光性树脂32a进行加热处理。 此后，显影化学放大负型着色感光性树脂32a，从而形成第二色后的滤色片图案32。 版权所有（C）2007，JPO＆INPIT

    Chemical sensor, chemical sensor module, biomolecule detection device, and biomolecule detection method
    29.
    发明专利
    Chemical sensor, chemical sensor module, biomolecule detection device, and biomolecule detection method 审中-公开
    化学传感器，化学传感器模块，生物分子检测装置和生物分子检测方法

    公开(公告)号：JP2013088378A

    公开(公告)日：2013-05-13

    申请号：JP2011231470

    申请日：2011-10-21

    Applicant: Sony Corp ,  ソニー株式会社

    Inventor： MATSUZAWA NOBUYUKI ,  MAEDA KENSAKU ,  MORIYA YUSUKE ,  OZAWA KEN

    IPC: G01N21/64 ,  G01N33/53 ,  G01N33/543 ,  H01L27/14 ,  H01L27/146

    CPC classification number: C12Q1/6834 ,  G01N21/6454 ,  G01N33/54373 ,  G01N33/582

    Abstract: PROBLEM TO BE SOLVED: To provide a chemical sensor, a chemical sensor module, a biomolecule detection device, and a biomolecule detection method that enable biomolecules to be detected with high precision.SOLUTION: A chemical sensor of the present invention comprises a substrate, an on-chip lens, and a planarization layer. The substrate has a plurality of photodiodes formed thereon and arranged in a flat shape. The on-chip lens is provided on the substrate and condenses incident light on the photodiodes. The planarization layer covers and planarizes the on-chip lens and forms a probe support surface for supporting a probe material.

    Abstract translation: 要解决的问题：提供能够以高精度检测生物分子的化学传感器，化学传感器模块，生物分子检测装置和生物分子检测方法。 解决方案：本发明的化学传感器包括基板，片上透镜和平坦化层。 基板具有形成在其上的多个光电二极管并且被布置成平坦的形状。 片上透镜设置在基板上，并将入射光聚光在光电二极管上。 平坦化层覆盖并平面化片上透镜并形成用于支撑探针材料的探针支撑表面。 版权所有（C）2013，JPO＆INPIT

    Colored photosensitive composition, and color filter array and solid-state image pickup device using the same
    30.
    发明专利
    Colored photosensitive composition, and color filter array and solid-state image pickup device using the same 审中-公开
    彩色感光性组合物，和彩色滤光片阵列和使用其的固态图像拾取装置

    公开(公告)号：JP2009175452A

    公开(公告)日：2009-08-06

    申请号：JP2008014218

    申请日：2008-01-24

    Applicant: Sony Corp ,  Sumitomo Chemical Co Ltd ,  ソニー株式会社 ,  住友化学株式会社

    Inventor： MIYA YOSHIKO ,  FUJITA TAKUMA ,  NATORI TAICHI ,  MAEDA KENSAKU

    IPC: G03F7/004 ,  C09B35/03 ,  C09B67/20 ,  G02B5/20 ,  H01L27/14

    CPC classification number: C09B35/03 ,  C09B11/24 ,  C09B35/18 ,  G03F7/0007 ,  G03F7/105 ,  H01L27/14621 ,  H01L27/14685

    Abstract: PROBLEM TO BE SOLVED: To provide a colored photosensitive composition which can form a color filter array having improved light resistance. SOLUTION: The colored photosensitive composition comprises a compound represented by formula (I) or a salt thereof, wherein Z 1 and Z 2 represent an oxygen atom or a sulfur atom; R 1 -R 4 represent a hydrogen atom, a saturated aliphatic hydrocarbon group (which may be substituted by a hydroxyl group or the like), an aryl group, an aralkyl group or an acyl group; R 5 -R 12 represent a hydrogen atom, a halogen atom, a (halogenated) saturated aliphatic hydrocarbon group, an alkoxyl group, a carboxyl group, a sulfo group or a (N-substituted) sulfamoyl group, and at least one of R 5 -R 12 is an N-substituted sulfamoyl group. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 解决的问题：提供可以形成具有改进的耐光性的滤色器阵列的着色光敏组合物。 解决方案：着色光敏组合物包含由式（I）表示的化合物或其盐，其中Z 1 和Z 2 表示氧原子或硫 原子; R SP 1表示氢原子，饱和脂肪族烃基（可以被羟基等取代），芳基，芳烷基 或酰基; R 4表示氢原子，卤素原子，（卤代）饱和脂族烃基，烷氧基，羧基，磺基或 （N-取代的）氨磺酰基，并且R“S”中的至少一个是N-取代的氨磺酰基。 版权所有（C）2009，JPO＆INPIT

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