公开(公告)号：EP3178783A1

公开(公告)日：2017-06-14

申请号：EP16175301.7

申请日：2016-06-20

Applicant: STMicroelectronics S.r.l.

Inventor： GIUSTI, Domenico ,  CARMINATI, Roberto ,  MERLI, Massimiliano

IPC: B81B3/00 ,  G02B26/08

CPC classification number: G02B26/105 ,  B81B3/0048 ,  B81B3/0083 ,  B81B2201/042 ,  G02B26/0858 ,  H04N9/3173

Abstract: A micromechanical device (50) having an tiltable structure (52) rotatable about a first rotation axis (B); a fixed structure (51); and an actuation structure (54) of a piezoelectric type, coupled between the tiltable structure and the fixed structure. The actuation structure (54) is formed by spring elements (55, 56) having a spiral shape. The spring elements (55, 56) are each formed by a plurality of actuation arms (70-73) extending transversely to the first rotation axis (B), each actuation arm carrying a respective piezoelectric band (74, 75) of piezoelectric material. The actuation arms are divided into two sets biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis (B).

Abstract translation: 具有可围绕第一旋转轴线（B）旋转的可倾斜结构（52）的微机械装置（50）; 固定结构（51）; 以及耦合在可倾斜结构和固定结构之间的压电型致动结构（54）。 致动结构（54）由具有螺旋形状的弹簧元件（55,56）形成。 弹簧元件（55,56）各自由横向于第一旋转轴线（B）延伸的多个致动臂（70-73）形成，每个致动臂承载压电材料的相应压电带（74,75）。 致动臂被分成两组，它们以相位相反的方式偏置，以绕第一旋转轴线（B）绕可倾斜结构的相反方向旋转。