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    ACOUSTIC SENSOR WITH PIEZO-ARRANGEMENT FILM
    24.
    发明申请
    ACOUSTIC SENSOR WITH PIEZO-ARRANGEMENT FILM 审中-公开
    具有PIEZO-ARRANGEMENT膜的声学传感器

    公开(公告)号：WO2008082053A1

    公开(公告)日：2008-07-10

    申请号：PCT/KR2007/003639

    申请日：2007-07-27

    Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  YOON, Dong-Jin ,  LEE, Young-Sup ,  KWON, Jae-Hwa

    Inventor： YOON, Dong-Jin ,  LEE, Young-Sup ,  KWON, Jae-Hwa

    IPC: G01H11/08

    CPC classification number: G01H11/08

    Abstract: Provided is an acoustic sensor for measuring a sound wave propagating through a gas such as air or a fluid such as water and an elastic wave propagating through a solid medium, and more particularly, an acoustic sensor with a piezo-arrangement film capable of detecting frequencies in a broad band or amplifying a signal at a specific frequency by comparting a waveguide into an upper waveguide and a lower waveguide by means of a compartment diaphragm and arranging piezoelectric sensors on the compartment diaphragm in several forms. The acoustic sensor can be utilized as a resonant acoustic sensor in which the piezoelectric sensors are arranged on the compartment diaphragm in the same form so that a signal at a specific frequency overlaps for high sensibility or a broadband acoustic sensor in which the piezoelectric sensors are arranged in a different form to detect frequencies in a broad band. The sensor for measuring an acoustic wave includes a waveguide including a vibrating membrane for receiving the acoustic wave, an emitting membrane for emitting the acoustic wave, and a propagation medium filled therein for propagating the acoustic wave received by the vibrating membrane; a compartment diaphragm for comparting the waveguide into an upper waveguide and a lower waveguide; an omni-directional endpoint processing unit formed at an end of the waveguide for absorbing the acoustic wave received by the vibrating membrane; and a plurality of piezoelectric sensors formed on the compartment diaphragm for detecting the acoustic wave.

    Abstract translation: 提供一种用于测量传播通过诸如空气或诸如水的流体的气体和通过固体介质传播的弹性波的声波的声波传感器，更具体地，具有能够检测频率的压电布置膜的声学传感器 在宽带上放大或者以特定频率放大信号，通过隔室光阑将波导放置在上波导和下波导中，并以多种形式在隔室隔膜上布置压电传感器。 声传感器可以用作谐振声传感器，其中压电传感器以相同的形式布置在隔室隔膜上，使得特定频率的信号与高灵敏度重叠，或者布置压电传感器的宽带声传感器 以不同的形式检测宽带中的频率。 用于测量声波的传感器包括：波导，包括用于接收声波的振动膜，用于发射声波的发射膜，以及填充在其中的传播介质，用于传播由振动膜接收的声波; 用于将波导放置成上波导和下波导的隔室膜片; 形成在所述波导的端部处以吸收由所述振动膜接收的声波的全向端点处理单元; 以及形成在室隔膜上用于检测声波的多个压电传感器。

    A METHOD FOR FABRICATING SPM AND CD-SPM NANONEEDLE PROBE USING ION BEAM AND SPM AND CD-SPM NANONEEDLE PROBE THEREBY
    25.
    发明申请
    A METHOD FOR FABRICATING SPM AND CD-SPM NANONEEDLE PROBE USING ION BEAM AND SPM AND CD-SPM NANONEEDLE PROBE THEREBY 审中-公开
    使用离子束和SPM和CD-SPM纳米粒子探针制备SPM和CD-SPM纳米级探针的方法

    公开(公告)号：WO2006011714A1

    公开(公告)日：2006-02-02

    申请号：PCT/KR2005/002097

    申请日：2005-07-01

    Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE ,  PARK, Byong-Cheon ,  JUNG, Ki-Young ,  SONG, Won-Young ,  HONG, Jae-Wan ,  O, Beom-Hoan ,  AHN, Sang-Jung

    Inventor： PARK, Byong-Cheon ,  JUNG, Ki-Young ,  SONG, Won-Young ,  HONG, Jae-Wan ,  O, Beom-Hoan ,  AHN, Sang-Jung

    IPC: G01N13/10

    CPC classification number: G01Q70/12

    Abstract: The present invention relates to a method for fabricating a scanning probe microscope (SPM) nanoneedle probe using ion beam which is preferably focused ion beam and a nanoneedle probe thereby. More particularly, the present invention relates to a method for fabricating a SPM nanoneedle probe capable of being easily adjusted with an intended pointing direction of a nanoneedle attached on a tip of the SPM nanoneedle probe and of being easily straightened with the nanoneedle attached on the tip of the SPM nanoneedle probe along the intended pointing direction, and to a SPM nanoneedle probe thereby. Also, the present invention relates to a method for fabricating a critical dimension SPM(CD-SPM) nanoneedle probe capable of precisely scanning the sidewall of an sample object in nanoscale using ion beam which is preferably focused ion beam, and to a CD-SPM nanoneedle probe thereby. More particularly, the present invention relates to a method for fabricating a CD-SPM nanoneedle probe capable of precisely scanning the sidewall of the sample object in nanoscale by bending a portion of an end of the nanoneedle attached on the tip of the SPM nanoneedle probe in a specific angle toward a diretion other than an original direction in which the nanoneedle attached on the tip of the SPM nanoneedle probe extends out, and to a CD-SPM nanoneedle probe thereby. A method of fabricating scanning probe microscope (SPM) nanoneedle probe using ion beam, comprises: positioning the probe so that a tip of the probe on which the nanoneedle is attached faces toward a direction in which the ion beam is irradiated; and aligning the nanoneedle attached on the tip of the probe with the ion beam in parallel by irradiating the ion beam toward the tip of the probe on which the nanoneedle is attached. A method of fabricating a critical dimension scanning probe microscope (CD-SPM) nanoneedle probe using ion beam, comprises: screening a certain portion of the nanoneedle attached on a tip of the probe using a mask; and bending a part of the nanoneedle exposed out of the mask to align the part of the nanoneedle by irradiating the ion beam on the part of the nanoneedle exposed out of the mask, along the direction of the irradiated ion beam.

    Abstract translation: 本发明涉及一种使用离子束制造扫描探针显微镜（SPM）纳米针探针的方法，该探针优选为聚焦离子束和由此制成的纳米针探针。 更具体地说，本发明涉及一种制造SPM纳米针探头的方法，该探针能够容易地按照附着在SPM纳米针探针的尖端上的纳米针的预期指向方向进行调节，并且易于用连接在尖端上的纳米针矫正 的SPM纳米针探针沿着预期的指向方向，并由此与SPM纳米针探针。 此外，本发明涉及一种用于制造临界尺寸SPM（CD-SPM）纳米针探针的方法，该探针能够使用优选聚焦离子束的离子束以纳米尺度精确扫描样品物体的侧壁，并且涉及CD-SPM 纳米针探针。 更具体地说，本发明涉及一种制造CD-SPM纳米针探针的方法，其能够通过将附着在SPM纳米针探针的尖端上的纳米针的一端的一部分弯曲成纳米尺度来精确地扫描样品物体的侧壁 除了附着在SPM纳米针探头的前端的纳米针延伸出来的除原始方向之外的方向的特定角度，以及由此产生的CD-SPM纳米针探针。 使用离子束制造扫描探针显微镜（SPM）纳米针探针的方法包括：将探针定位成使得其上附着有纳米针的探针的尖端朝向照射离子束的方向; 并且通过将离子束照射到附着有纳米针的探针的末端，将附着在探针的尖端上的纳米针与离子束平行对准。 使用离子束制造临界尺寸扫描探针显微镜（CD-SPM）纳米针探针的方法包括：使用掩模筛选附着在探针末端的纳米针的某一部分; 并且将暴露于掩模外的纳米针的一部分弯曲，以沿着照射的离子束的方向照射从掩模露出的纳米针的部分上的离子束来对准纳米针的一部分。

    APPARATUS, METHOD, AND SYSTEM FOR MEASURING UNIFORMITY OF MAIN MAGNETIC FIELD IN MAGNETIC RESONANCE IMAGING SYSTEM AND RECORDING METHOD THEREFOR
    27.
    发明申请
    APPARATUS, METHOD, AND SYSTEM FOR MEASURING UNIFORMITY OF MAIN MAGNETIC FIELD IN MAGNETIC RESONANCE IMAGING SYSTEM AND RECORDING METHOD THEREFOR 审中-公开
    用于测量磁共振成像系统中主磁场的均匀性的装置，方法和系统及其记录方法

    公开(公告)号：WO2014189205A1

    公开(公告)日：2014-11-27

    申请号：PCT/KR2014/002947

    申请日：2014-04-07

    Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

    Inventor： SEO, Young Seob ,  AHN, Bong Young

    IPC: G01R33/38 ,  G01R33/20 ,  A61B5/055

    CPC classification number: G01R33/243 ,  A61B5/055 ,  A61B2560/0266

    Abstract: Disclosed herein are an apparatus, method, and system for measuring the uniformity of a main magnetic field in a magnetic resonance imaging system and a recording medium thereof and, more particularly, to a method of obtaining quantitative information using measurement equipment that may be implemented in response to automatic and semi-automatic type user-selective movements so as to measure a magnetic field within a three-dimensional (3D) space using a gauss meter and a flux meter and of automatically inputting and displaying the obtained quantitative information through software in order to measure the uniformity of a main magnetic field in a magnetic resonance imaging system which greatly influences the picture quality of a magnetic resonance medical image, thereby enabling efficient performance tests, follow-up management, and establishment of a measurement standard for a magnetic resonance imaging system.

    Abstract translation: 本文公开了一种用于测量磁共振成像系统及其记录介质中的主磁场的均匀性的装置，方法和系统，更具体地，涉及一种使用可实现的测量设备获得定量信息的方法 响应于自动和半自动型用户选择性运动，以便使用高斯计和通量计测量三维（3D）空间内的磁场，并通过软件自动输入和显示所获得的定量信息 以测量磁共振成像系统中的主磁场的均匀性，这极大地影响磁共振医学图像的图像质量，从而能够进行有效的性能测试，后续管理和建立磁共振成像测量标准 系统。

    SHIELDING APPARATUS, SHIELDING METHOD AND DEMAGNETIZING FOR MEASURING MAGNETIC FIELD
    28.
    发明申请
    SHIELDING APPARATUS, SHIELDING METHOD AND DEMAGNETIZING FOR MEASURING MAGNETIC FIELD 审中-公开
    屏蔽装置，用于测量磁场的屏蔽方法和去磁

    公开(公告)号：WO2014137012A1

    公开(公告)日：2014-09-12

    申请号：PCT/KR2013/001884

    申请日：2013-03-08

    Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

    Inventor： KIM, Ki Woong ,  LEE, Yong Ho ,  YU, Kwon Kyu ,  LEE, Seong-Joo

    IPC: G01R33/02 ,  H05K9/00

    CPC classification number: G01R33/0076 ,  G01R33/025 ,  H01F13/003 ,  H05K9/0069

    Abstract: The present invention relates to a shield apparatus and a shield method for measuring a subtle magnetic field. More specifically, the present invention relates to a shield apparatus having a precise magnetic sensor therein, for shielding an external magnetic field in a subtle magnetic field measurement apparatus including a magnetic field generation apparatus for exciting a sample, the shield apparatus for measuring a subtle magnetic field, including: a shield wall provided with a high-conductivity metal layer of high conductivity being partitioned into a plurality of segments and having a high-frequency shield property and a closed high-permeability soft magnetic layer spaced apart from the high-conductivity metal layer by a predetermined distance, so as to seal a measurement space.

    Abstract translation: 本发明涉及一种用于测量微妙磁场的屏蔽装置和屏蔽方法。 更具体地说，本发明涉及一种在其中具有精密磁传感器的屏蔽装置，用于在包括用于激发样品的磁场产生装置的微小磁场测量装置中屏蔽外部磁场，用于测量微妙磁性的屏蔽装置 包括：具有高导电性的高导电性金属层的屏蔽壁被分隔成多个段并具有高频屏蔽特性和与高导电性金属间隔开的封闭的高磁导率软磁性层 层预定距离，以便密封测量空间。

    METHOD OF DETERMINING SURFACE ORIENTATION OF SINGLE CRYSTAL WAFER
    29.
    发明申请
    METHOD OF DETERMINING SURFACE ORIENTATION OF SINGLE CRYSTAL WAFER 审中-公开
    确定单晶波的表面方位的方法

    公开(公告)号：WO2014077480A1

    公开(公告)日：2014-05-22

    申请号：PCT/KR2013/004828

    申请日：2013-05-31

    Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

    Inventor： KIM, Chang Soo ,  BIN, Seok Min

    IPC: H01L21/66

    CPC classification number: G01N23/207 ,  G01N2223/331 ,  G01N2223/6116 ,  H01L22/12

    Abstract: Provided is a method of determining a surface orientation of a single crystal wafer. The method of determining a surface orientation of a single crystal wafer using high resolution X-ray rocking curve measurement may determine a surface angle of the wafer and a direction of the surface angle using rocking curve measurement of a high resolution X-ray diffraction method and measuring a misalignment angle formed by a rotation axis of a measuring apparatus and a surface normal of the wafer and an orientation of the misalignment angle.

    Abstract translation: 提供了确定单晶晶片的表面取向的方法。 使用高分辨率X射线摇摆曲线测量来确定单晶晶片的表面取向的方法可以使用高分辨率X射线衍射方法的摇摆曲线测量来确定晶片的表面角度和表面角度的方向，以及 测量由测量装置的旋转轴和晶片的表面法线形成的不对准角以及不对准角的取向。

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