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公开(公告)号：EP0645057A1
公开(公告)日：1995-03-29
申请号：EP93914396.0
申请日：1993-06-03
Applicant: ULTRASONIC POWER CORPORATION
Inventor： PUSKAS, Peter, J.
CPC classification number: B06B1/0246 , B06B2201/71 , H03L5/02
Abstract: A generator for driving an ultrasonic transducer for use in ultrasonic cleaning. The generator is based on a voltage controlled oscillator (26) which drives an output circuit which includes the ultrasonic transducer (22). The output circuit has a resonant frequency, and a resonance follower (30) produces a control voltage which tunes the voltage controlled oscillator to the resonant frequency. Operating in conjunction with the automatic tuning elements is a constant power control which allows the user to set a desired power level, and monitors the actual output power by means of an output wattmeter circuit (32) to cause the actual output power to match the level selected by the user. The constant output power circuit is effective even during resonance tracking of the system, or during frequency modulation of the ultrasonic output energy.
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公开(公告)号：EP0430072A3
公开(公告)日：1992-09-02
申请号：EP90122314.9
申请日：1990-11-22
Applicant: MDT CORPORATION
Inventor： Shewell, Robert Edward
CPC classification number: B06B1/0276 , B06B2201/71 , B08B3/12
Abstract: An improved ultrasonic cleaner is disclosed. Transducers are attached to a tank to vibrate liquid within the tank. A drive circuit is linked with the transducers to cause the transducers to oscillate at ultrasonic frequencies. The drive circuit includes an oscillator and a counter. The oscillator produces an ultrasonic signal. The counter divides the ultrasonic signal and feeds divided signals back into the oscillator to modulate the amplitude of the ultrasonic signal within a square-wave envelope and to step the frequency of the ultrasonic signal at discrete values about the center frequency.
Abstract translation: 公开了一种改进的超声波清洗器。 传感器连接到水箱以振动罐内的液体。 驱动电路与换能器连接，使换能器以超声频率振荡。 驱动电路包括振荡器和计数器。 振荡器产生超声信号。 计数器分割超声波信号，并将分割的信号反馈回振荡器，以调制方波包络内的超声波信号的振幅，并以关于中心频率的离散值对超声波信号的频率进行步进。
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公开(公告)号：EP3192635A1
公开(公告)日：2017-07-19
申请号：EP14901685.9
申请日：2014-09-09
Applicant: Blue Star R&D Co., Ltd.
Inventor： SHIBANO, Yoshihide
CPC classification number: B29C37/02 , B06B1/0269 , B06B2201/71 , B08B3/12 , B29C35/0261
Abstract: It is an object of the present invention to remove burrs effectively by further enhancing an impact force of cavitation generated by ultrasonic waves during deburring of the molded product through radiation of ultrasonic waves in the deburring washing water. In a deburring device configured to remove burrs of the molded product through radiation of ultrasonic waves, a height of the storage tank 2 is set to 1.25λ mm when a wavelength of an ultrasonic wave is set to λ mm. A frequency range of ultrasonic wave radiating means 6 arranged on a bottom side of the washing water storage tank 2 is set to from 18 KHz to 28 KHz, and power density is set to 2 W/cm 2 or higher. Further, there is arrangedoscillatingmeans 9 configured to allow the molded product immersed in the washing water to vertically move with a stroke of at least 1/2λ mm in a vertical direction. Further, an amount of dissolved oxygen in the washing water is set to 1 mg/litter or less, and a water temperature of the deburring washing water is set to from 4°C to 8°C.
Abstract translation: 本发明的目的是通过在去毛刺清洗水中通过超声波的照射对成型产品进行去毛刺期间进一步增强由超声波产生的气蚀的冲击力来有效地去除毛刺。 在通过超声波的照射去除成形品的毛刺的去毛刺装置中，将超声波的波长设定为λmm时，将储存槽2的高度设定为1.25λmm。 设置在洗涤水储罐2的底侧上的超声波辐射装置6的频率范围被设定为从18KHz到28KHz，并且功率密度被设定为2W / cm2或更高。 此外，存在配置的摆动装置9，该摆动装置9被构造成允许浸入洗涤水中的模制产品以垂直方向以至少1 /2λmm的行程垂直移动。 此外，洗涤水中的溶解氧量设定为1mg / l或更少，并且去毛刺洗涤水的水温设定为4℃至8℃。
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公开(公告)号：EP2610017A1
公开(公告)日：2013-07-03
申请号：EP12196408.4
申请日：2012-12-11
Applicant: Siltronic AG
Inventor： Haibara, Teruo , Tanabe, Etsuko , Mori, Yoshihiro , Uchibe, Masashi
IPC: B08B3/12
CPC classification number: B08B3/12 , B06B2201/71 , H01L21/02052 , H01L21/67057
Abstract: Ultrasonic cleaning method for irradiating ultrasonic waves to a solution having gas dissolved therein for cleaning an object to be cleaned in the solution. The method includes the following steps. Ultrasonic waves are irradiated to the solution having the first dissolved gas concentration. In the state where ultrasonic waves are irradiated to the solution, the dissolved gas concentration in the solution is changed from the first dissolved gas concentration to the second dissolved gas concentration lower than the first dissolved gas concentration. Sonoluminescence occurs by irradiating ultrasonic waves to the solution while the dissolved gas concentration in the solution is changed from the first dissolved gas concentration to the second dissolved gas concentration.
Abstract translation: 超声波清洗方法，用于向溶解有气体的溶液照射超声波，以清洁溶液中待清洁的物体。 该方法包括以下步骤。 将超声波照射到具有第一溶解气体浓度的溶液中。 在对溶液照射超声波的状态下，溶液中的溶解气体浓度从第一溶解气体浓度变为低于第一溶解气体浓度的第二溶解气体浓度。 通过在溶液中溶解的气体浓度从第一溶解气体浓度变为第二溶解气体浓度而向溶液中照射超声波而发生声发光。
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公开(公告)号：EP0612570A2
公开(公告)日：1994-08-31
申请号：EP94301254.2
申请日：1994-02-22
Applicant: Shibano, Yoshihide
CPC classification number: B06B1/0284 , B06B2201/71 , B08B3/12
Abstract: An ultrasonic vibrator (1) has a single natural frequency for radiating ultrasonic energy into a cleaning solution (4) to clean and deburr workpieces that are immersed in the cleaning solution. A plurality of oscillating signals (a,b,c) having respective different frequencies which are integral multiples of the natural frequency of the ultrasonic vibrator are generated, and successively outputted for respective periods of time thereby to generate a composite signal which is composed of a time series of the oscillating signals. The composite signal is applied as a drive signal to the ultrasonic vibrator to oscillate the ultrasonic vibrator. The oscillating signals may be outputted successively for said respective periods of time or intermittently with quiescent periods inserted therebetween.
Abstract translation: 超声波振动器（1）具有单一固有频率，用于将超声波能量发射到清洁溶液（4）中以清洁和去除浸在清洁溶液中的工件的毛刺。 产生具有各自不同频率的多个振荡信号（a，b，c），这些频率是超声波振动器的固有频率的整数倍，并且在相应的时间周期内连续输出，从而产生一个合成信号，该合成信号由 时间序列的振荡信号。 复合信号作为驱动信号施加到超声波振动器以振动超声波振动器。 振荡信号可以连续输出所述各个时间段或者间歇地插入其间的静止时段。
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Patent Agency Ranking
公开(公告)号：EP0430072A2
公开(公告)日：1991-06-05
申请号：EP90122314.9
申请日：1990-11-22
Applicant: MDT CORPORATION
Inventor： Shewell, Robert Edward
CPC classification number: B06B1/0276 , B06B2201/71 , B08B3/12
Abstract: An improved ultrasonic cleaner is disclosed. Transducers are attached to a tank to vibrate liquid within the tank. A drive circuit is linked with the transducers to cause the transducers to oscillate at ultrasonic frequencies. The drive circuit includes an oscillator and a counter. The oscillator produces an ultrasonic signal. The counter divides the ultrasonic signal and feeds divided signals back into the oscillator to modulate the amplitude of the ultrasonic signal within a square-wave envelope and to step the frequency of the ultrasonic signal at discrete values about the center frequency.
Abstract translation: 公开了一种改进的超声波清洗器。 传感器连接到水箱以振动罐内的液体。 驱动电路与换能器连接，使换能器以超声频率振荡。 驱动电路包括振荡器和计数器。 振荡器产生超声信号。 计数器分割超声波信号，并将分割的信号反馈回振荡器，以调制方波包络内的超声波信号的振幅，并以关于中心频率的离散值对超声波信号的频率进行步进。
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公开(公告)号：JP5526118B2
公开(公告)日：2014-06-18
申请号：JP2011283338
申请日：2011-12-26
Applicant: ジルトロニック アクチエンゲゼルシャフトSiltronic AG
IPC: H01L21/304
CPC classification number: B08B3/12 , B06B2201/71 , H01L21/02052 , H01L21/67057
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公开(公告)号：JP5226141B1
公开(公告)日：2013-07-03
申请号：JP2012016484
申请日：2012-01-30
Applicant: 株式会社カイジョー
IPC: B08B3/12 , H01L21/304
CPC classification number: B08B3/12 , B06B1/0253 , B06B2201/71
Abstract: [Problem] To provide an ultrasonic cleaning apparatus which is capable of further improving reliability of power management. [Solution] This ultrasonic cleaning apparatus is provided with a subject to be cleaned (11), a cleaning solution (12), an ultrasonic vibrator (13), an oscillator (14), a power supply unit (16), and a power meter (15). The oscillator (14) has: an oscillating unit (17); a control unit (18), which controls first power oscillated by means of the oscillating unit (17) such that the first power is at a set power value, and which outputs the power to the ultrasonic oscillator (13); a detecting unit (19), which detects the second power outputted to the ultrasonic oscillator (13) by means of the control unit (18); and a calculating unit (20). The calculating unit (20) has a functions of: deriving a first corrected power value obtained by correcting the first detected power value with a collection value (alpha); deriving a second corrected value obtained by correcting a measured power value with a correction value (beta), said measured power value having been measured by means of the power meter (15); and in cases where the first corrected power value deviated from the second corrected power value by a fixed value or more, recording a corrected correction value (alpha') in a recording unit (21), said corrected correction value having been obtained by correcting the correction value (alpha) such that the first corrected power value is equal to the second corrected power value.
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公开(公告)号：KR101108901B1
公开(公告)日：2012-02-20
申请号：KR1020057014555
申请日：2003-12-23
Applicant: 램 리써치 코포레이션
IPC: H01L21/302
CPC classification number: B08B3/12 , B06B1/0253 , B06B2201/71 , B08B3/10 , H01L21/67057 , H01L21/67253
Abstract: 기판 (202) 세정 시스템 및 방법은 변환기 (210) 및 기판 (202) 을 포함하는 메가소닉 챔버 (206) 를 포함한다. 변환기 (210) 는 기판 (202) 을 향해진다. 가변 거리 d 는 변환기 (210) 와 기판 (202) 을 분리시킨다. 시스템 (200) 은 또한 변환기에 커플링된 출력부를 가지는 동적으로 조절가능한 RF 생성기 (212) 를 포함한다. 동적으로 조절가능한 RF 생성기 (212) 는 발진기의 출력 (306) 전압과 RF 생성기 출력 전압의 위상과의 위상 비교에 의해 제어될 수 있다. 동적으로 조절가능한 RF 생성기 (212) 는 출력 신호의 피크 전압을 모니터링하는 것과 피크 전압을 소정의 전압 범위 내에서 유지하도록 RF 생성기를 제어하는 것에 의해 또한 제어될 수 있다. 동적으로 조절가능한 RF 생성기 (212) 는 가변 DC 전원 전압을 동적으로 제어하는 것에 의해 또한 제어될 수 있다.
RF 생성기, 순간 공진 주파수, VCO, 세정 챔버, 피드백 회로-
公开(公告)号：KR1020120081513A
公开(公告)日：2012-07-19
申请号：KR1020110002880
申请日：2011-01-11
Applicant: 삼성디스플레이 주식회사
Inventor： 강택교
CPC classification number: B08B3/12 , H01L51/56 , B06B2201/71 , B08B7/028 , H01L51/0011
Abstract: PURPOSE: A mask cleaning apparatus is provided to improve detergency by continuously rotating a mask in cleaning solutions of a bath. CONSTITUTION: A bath(101) is filled with cleaning solutions(L). An ultrasonic generator(140) generates ultrasonic waves and applies the ultrasonic waves to the cleaning solutions. A support member(120) supports the mask. A driving unit(130) rotates the mask in the bath.
Abstract translation: 目的：提供一种面罩清洁装置，通过在浴液的清洁溶液中连续旋转面罩来改善洗涤力。 构成：浴液（101）装有清洁剂（L）。 超声波发生器（140）产生超声波并将超声波施加到清洁溶液。 支撑构件（120）支撑面罩。 驱动单元（130）使浴缸中的面罩旋转。
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