公开(公告)号：US20020020220A1

公开(公告)日：2002-02-21

申请号：US09813030

申请日：2001-03-21

Applicant: NIKON CORPORATION

Inventor： Yoshihiko Suzuki

IPC: G01L001/00 ,  G01N021/00

CPC classification number: G01L1/103 ,  G01L5/0047

Abstract: An apparatus for measuring internal stress of a membrane formed in a reticle, including a temperature adjustment device configured to change a temperature of the membrane from a first temperature to a second temperature; a resonance frequency finding device configured to find a first resonance frequency of the membrane at the first temperature and a second resonance frequency of the membrane at the second temperature; and a stress calculating device configured to calculate the internal stress based on the first and second resonance frequencies.

Abstract translation: 一种用于测量形成在掩模版中的膜的内应力的装置，包括温度调节装置，其被配置为将膜的温度从第一温度改变到第二温度; 谐振频率发现装置，被配置为在所述第二温度下发现所述膜的第一温度的第一共振频率和所述膜的第二共振频率; 以及应力计算装置，被配置为基于所述第一和第二共振频率来计算所述内部应力。

公开(公告)号：US06178821B2

公开(公告)日：2001-01-30

申请号：US09236427

申请日：1999-01-25

Applicant: Sudhir Dattatraya Savkar ,  Walter Whipple

Inventor： Sudhir Dattatraya Savkar ,  Walter Whipple

IPC: G01D900

CPC classification number: G01L1/103 ,  G01D5/145

Abstract: A vibration sensing device including a strip bearing a pattern of markings. The strip is caused to slide back and forth in front of a sensor as the result of vibration or displacement of an object to which either the strip or the sensor is attached. By varying the spacing between the markings on strip, the direction and approximate speed of the motion can be sensed by the frequency of the signal generated by movement of the pattern past the sensor and its rate of change. The vibration sensing device can be made to sense out of balance (OOB) or vibratory motion of a piece of equipment such as a washing machine, motor engine or other device during use or transport.

Abstract translation: 一种振动感测装置，包括带有标记图案的条带。 由于带或传感器所附着的物体的振动或位移，导致条带在传感器前面前后滑动。 通过改变条带上的标记之间的距离，运动的方向和近似速度可以通过由图案经过传感器的移动产生的信号的频率及其变化率来感测。 振动感测装置可以在使用或运输期间使感知不平衡（OOB）或诸如洗衣机，发动机或其他装置的设备的振动运动。

公开(公告)号：US5844236A

公开(公告)日：1998-12-01

申请号：US785494

申请日：1997-01-17

Applicant: Mark Lowell Wilson

Inventor： Mark Lowell Wilson

IPC: G01D21/00 ,  G01K11/26 ,  G01L1/10 ,  G01L9/00 ,  G01J1/04

CPC classification number: G01L1/103 ,  G01L9/002

Abstract: A method of driving and sensing a resonant sensor network wherein a least a one resonant sensor is driven by a first light from a first light source at a first frequency, wherein said first light source is modulated by an a.c. source. A second light source at a second frequency is utilized sense the resonant frequency of the at least one resonant sensor. Wherein said at least one resonant sensor modulates said second light source. The modulated light is provided to a photo detector and the first light source is filtered out of said reflected light. The detector ac amplifies the filtered reflected light, thereby detecting said the resonant frequency of the resonant sensor.

Abstract translation: 一种驱动和感测谐振传感器网络的方法，其中至少一个谐振传感器由来自第一频率的第一光源的第一光驱动，其中所述第一光源由等直流调制。 资源。 利用第二频率的第二光源来感测至少一个谐振传感器的谐振频率。 其中至少一个谐振传感器调制所述第二光源。 将调制的光提供给光检测器，并且将第一光源从所述反射光中滤出。 检测器交流放大经滤波的反射光，从而检测谐振传感器的谐振频率。

公开(公告)号：US5115128A

公开(公告)日：1992-05-19

申请号：US456787

申请日：1989-12-29

Applicant: Alan J. Cook

Inventor： Alan J. Cook

IPC: G01D5/26 ,  G01L1/10

CPC classification number: G01L1/103 ,  G01D5/268

Abstract: A resonant beam sensor is excited into resonance by directing onto it a drive signal comprising light which has been amplitude modulated at the resonant frequency. A portion of the drive signal reflected by the sensor is demodulated by a photodetector to provide a measurement signal.

公开(公告)号：US4717240A

公开(公告)日：1988-01-05

申请号：US888556

申请日：1986-07-21

Applicant: Anthony C. Gilby

Inventor： Anthony C. Gilby

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G02B27/144 ,  G01L1/103 ,  G01L1/167 ,  G01L1/24 ,  G01L9/0023 ,  G02B6/2821

Abstract: Beamsplitter means for directing light in a Michelson interferometric drive and frequency sense scheme for use with a mechanical resonator. In a first embodiment a special prism is used. In a second embodiment a four-port coupler is used.

Abstract translation: 分束器用于将光引导到迈克尔逊干涉仪驱动和频率感应方案中，以用于机械谐振器。 在第一实施例中，使用特殊的棱镜。 在第二实施例中，使用四端口耦合器。

公开(公告)号：US4470313A

公开(公告)日：1984-09-11

申请号：US365678

申请日：1982-04-05

Applicant: Richard W. Kalinoski ,  George E. Sgourakes ,  Duane Thompson

Inventor： Richard W. Kalinoski ,  George E. Sgourakes ,  Duane Thompson

IPC: G01L1/10 ,  G01L1/16 ,  G01L9/00 ,  G01P15/10

CPC classification number: G01L9/0014 ,  G01L1/103 ,  G01L1/167 ,  G01P15/10 ,  Y10S73/01

Abstract: A resonant wire instrument for producing a measurement signal, which is derived from the resonant frequency of a vibratable wire tensioned in accordance with the magnitude of a physical variable being measured, wherein a force impulse produced mechanically by an apparatus is applied to displace laterally one end of the vibratable wire so as to excite the wire into resonant motion. In one embodiment, the one end is rigidly attached to a housing and a piston applies a transverse force impulse to that end by momentarily striking the housing. In another embodiment, the one end is connected to a piezoelectric crystal which responds to a short-duration electric field to displace momentarily that end. In one species of this other embodiment, the crystal is made to oscillate at the resonant frequency of the tensioned wire by the application of an alternating-polarity voltage signal that is generated by a voltage source having an output connected to the crystal, and a feedback circuit coupled to receive the measurement signal operates to produce a control signal that is used for controlling the voltage source so that the voltage signal being applied to the crystal has a frequency which varies in accordance with changes in the resonant frequency of the wire.

Abstract translation: 一种用于产生测量信号的共振线路仪器，其根据被测量的物理变量的幅度拉伸的可振动线材的共振频率导出，其中施加由设备机械地产生的力脉冲以横向移位一端 的振动线，以便将线激发成共振运动。 在一个实施例中，一端刚性地附接到壳体，活塞通过瞬间撞击壳体向该端施加横向力冲击。 在另一个实施例中，一端连接到压电晶体，该压电晶体响应于短持续时间的电场以瞬时移动该端。 在该另一实施例的一个种类中，通过施加由具有连接到晶体的输出的电压源产生的交流极性电压信号，使晶体以张紧线的谐振频率振荡，并且反馈 耦合以接收测量信号的电路操作以产生用于控制电压源的控制信号，使得施加到晶体的电压信号具有根据线的谐振频率的变化而变化的频率。

公开(公告)号：US4345482A

公开(公告)日：1982-08-24

申请号：US94097

申请日：1979-11-14

Applicant: Morgan Adolfsson ,  Torgny Brogardh

Inventor： Morgan Adolfsson ,  Torgny Brogardh

IPC: G01B17/04 ,  G01D5/26 ,  G01D5/58 ,  G01H9/00 ,  G01K1/02 ,  G01L1/08 ,  G01L1/10 ,  G01L9/00 ,  G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01B17/04 ,  G01D5/268 ,  G01D5/58 ,  G01H9/006 ,  G01K1/024 ,  G01L1/086 ,  G01L1/103 ,  G01L9/0017 ,  G01L9/0077

Abstract: The invention relates to a fiber optical device for measuring physical magnitudes such as force, elongation, pressure, acceleration, temperature, etc., comprising a transducer unit and an electronic unit, in which the quantity to be measured is supplied to the transducer unit to affect the resonance frequency of an oscillating body included in the tansducer unit by changing the dimensions, mass, density, modulus of elasticity and/or mechanical stress of the body. A property of the body oscillation, such as frequency, phase position and/or amplitude, is used as a value of the quantity to be measured. The oscillations of the body are detected optically by means of a fiber optical position/movement detector.

Abstract translation: 本发明涉及一种用于测量诸如力，伸长率，压力，加速度，温度等物理量值的光纤装置，其包括换能器单元和电子单元，其中待测量的量被提供给换能器单元 通过改变身体的尺寸，质量，密度，弹性模量和/或机械应力来影响包括在调味剂单元中的振动体的共振频率。 使用身体振动的特性，例如频率，相位位置和/或振幅，作为待测量的值。 通过光纤位置/移动检测器光学检测身体的振荡。

公开(公告)号：US20180328798A1

公开(公告)日：2018-11-15

申请号：US15776287

申请日：2016-10-12

Applicant: Rutgers, The State University of New Jersey

Inventor： Frederick H. Silver ,  Dmitry Khavulya ,  Mark Pierce

IPC: G01L1/10 ,  A61B5/00 ,  G01L5/06

CPC classification number: G01L1/103 ,  A61B5/00 ,  A61B5/0051 ,  A61B5/0066 ,  G01L1/00 ,  G01L5/06

Abstract: Systems and methods for determining a Material's (“MTL”) mechanical properties. The methods comprise: coupling a first end of MTL to a First Mechanical Mechanism (“FMM”) movable in a First Direction (“FD”) and coupling a second end of MTL to a Second Mechanical Mechanism (“SMM”) movable in a Second Direction (“SD”); applying a first Pulling Force (“PF”) to MTL; applying an Oscillating Force (“OF”) to MTL; applying a second PF to MTL so as to cause any undulations in MTL to be removed and to cause a loading of fibers or polymeric units that support MTL; allowing MTL to oscillate through a series of cycles of loading and unloading; measuring a strain/stress on MTL as a function of time; determining a natural frequency of MTL based on the strain/stress; and determining an elastic modulus of MTL using the natural frequency.

公开(公告)号：US09182300B2

公开(公告)日：2015-11-10

申请号：US13648644

申请日：2012-10-10

Applicant: Service Solutions U.S. LLC

Inventor： Jeremy Themm ,  William W. Wittliff, III ,  Reed Selkirk ,  Kevin Gray

IPC: G01L1/00 ,  G01L1/10 ,  G01H1/00 ,  G01H3/00 ,  G01H9/00 ,  G01H11/00

CPC classification number: G01L1/00 ,  G01H1/00 ,  G01H3/00 ,  G01H9/00 ,  G01H11/00 ,  G01L1/10 ,  G01L1/103 ,  G01L5/042 ,  G01L5/105

Abstract: A measuring system including a sensor positioned to a belt to measure an oscillation or vibration of the belt based at least in part on a trigger threshold. Also, the measuring system may include a diagnostic tool coupled the sensor to receive a plurality of measurements of the oscillation or vibration of the belt, wherein the diagnostic tool may determine a tension of the belt based at least in part on an average of the plurality of measurements of the oscillation or vibration of the belt.

Abstract translation: 一种测量系统，包括至少部分地基于触发阈值定位到皮带上以测量皮带的振动或振动的传感器。 此外，测量系统可以包括诊断工具，耦合传感器以接收带的振荡或振动的多个测量值，其中诊断工具可以至少部分地基于多个平均值来确定皮带的张力 测量皮带的振动或振动。

公开(公告)号：US20150276522A1

公开(公告)日：2015-10-01

申请号：US14736360

申请日：2015-06-11

Applicant: BANDO CHEMICAL INDUSTRIES, LTD.

Inventor： Hirofumi MIYATA ,  Yoshikazu WAKIZAKA ,  Yasushi CHIDA

IPC: G01L5/04

CPC classification number: G01L5/042 ,  G01H13/00 ,  G01L1/103 ,  G01L5/045 ,  G01L5/103

Abstract: The tension of a belt is determined accurately at a low cost. A natural-frequency measurement device is configured to measure, in a belt transmission system including at least two pulleys between which a belt is stretched, the natural frequency of the belt based on a vibration generated by hitting a portion of the belt stretched between two adjacent ones of the at least two pulleys, and includes: an acceleration sensor attached to the portion of the belt to sense acceleration resulting from the vibration of the belt; and a measuring instrument configured to measure the natural frequency of the belt based on the acceleration sensed by the acceleration sensor. The measuring instrument transmits the natural frequency to a belt tension calculator which determines the tension of the belt based on the natural frequency.

Abstract translation: 以低成本准确地确定皮带的张力。 自然频率测量装置被配置为在带传动系统中测量包括至少两个皮带之间的带被拉伸的带轮的固有频率，其基于通过撞击在两个相邻 所述至少两个滑轮中的一个，并且包括：附接到所述皮带的所述部分的加速度传感器，以感测由所述皮带的振动引起的加速度; 以及测量仪器，其被配置为基于由所述加速度传感器感测到的加速度来测量所述带的固有频率。 测量仪器将固有频率传输到皮带张力计算器，其根据固有频率确定皮带的张力。