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    Apparatus and method for inspecting pattern
    21.
    发明授权
    Apparatus and method for inspecting pattern 失效
    用于检查图案的装置和方法

    公开(公告)号：US07081953B2

    公开(公告)日：2006-07-25

    申请号：US10979169

    申请日：2004-11-03

    Applicant: Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunzi Maeda ,  Atsushi Shimoda

    Inventor： Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunzi Maeda ,  Atsushi Shimoda

    IPC: G01N21/00

    CPC classification number: G01N21/21 ,  G01N21/33 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/151 ,  G01N2021/95615 ,  G01N2201/06113 ,  G01N2201/1035

    Abstract: An apparatus for inspecting defects including a table which mounts a specimen to be inspected and which is movable in a plane, an ultraviolet light source for emitting ultraviolet light, an illuminating unit for illuminating the specimen mounted on the table with light emitted from the ultraviolet light source, a detecting unit for forming an image of the specimen illuminated by the illuminating unit and for detecting the image with an image sensor, and an image processing unit for processing the image detected by the image sensor and for outputting information about defects detected on the specimen. The illuminating unit and detecting unit are disposed in a clean environment which is supplied therein with clean gas and which is separated from outside by a wall.

    Abstract translation: 一种用于检查缺陷的装置，包括安装待检查样本并且可在平面中移动的台面，用于发射紫外线的紫外光源的照明单元，用于对从紫外线发射的光照射安装在桌子上的样本的照明单元 源，用于形成由所述照明单元照射的所述样本的图像并且用图像传感器检测图像的检测单元，以及图像处理单元，用于处理由所述图像传感器检测到的图像，并且用于输出关于在所述图像传感器上检测到的缺陷的信息; 标本。 照明单元和检测单元设置在清洁的环境中，其中提供有清洁的气体并且由壁与外部分离。

    Programmable Digital Machine Vision Inspection System
    22.
    发明申请
    Programmable Digital Machine Vision Inspection System 有权
    可编程数字机器视觉检测系统

    公开(公告)号：US20150254833A1

    公开(公告)日：2015-09-10

    申请号：US14638652

    申请日：2015-03-04

    Applicant: Tyco Electronics (Shanghai) Co., Ltd. ,  Tyco Electronics Corporation ,  Shenzhen AMI Technology Co., Ltd.

    Inventor： Yingcong Deng ,  Dandan Zhang ,  Robert-Francisco-Yi Lu ,  Lvhai Hu ,  Zinglong Zeng

    IPC: G06T7/00 ,  B25J9/16

    CPC classification number: G06T7/0004 ,  B07C5/3422 ,  B07C2501/0063 ,  B25J9/1697 ,  G01N21/9515 ,  G01N2021/9518 ,  G01N2201/1035 ,  G01R31/2893 ,  G05B2219/39106 ,  G05B2219/45047 ,  G05B2219/45066 ,  Y10S901/44 ,  Y10S901/47

    Abstract: A programmable digital machine vision inspection system is disclosed having a programmable automatic feeding system that supplies elements to be inspected, a programmable robot system, a programmable inspection system, a qualified product receiving container, and an unqualified product receiving container. The programmable robot system has a first vision system with an inspection area, and a robot that grips the supplied element and moves the gripped element to and from the inspection area. The programmable inspection system has a second vision system that identifies features of the elements in the inspection area, and determines whether the element is a qualified product based on the identified features. The qualified product receiving container receives identified qualified products from the robot, and the unqualified product receiving container that receives identified unqualified products from the robot.

    Abstract translation: 公开了一种可编程数字机器视觉检查系统，其具有可供选择的被检查元件的可编程自动进给系统，可编程机器人系统，可编程检查系统，合格产品接收容器和不合格产品接收容器。 可编程机器人系统具有具有检查区域的第一视觉系统，以及握住所提供的元件并将夹持的元件移动到检查区域并从检测区域移动的机器人。 可编程检查系统具有第二视觉系统，其识别检查区域中的元件的特征，并且基于所识别的特征来确定元件是否是合格的产品。 合格产品接收容器从机器人接收识别的合格产品，以及从机器人接收识别的不合格产品的不合格产品接收容器。

    Apparatus and method for inspecting pattern
    23.
    发明授权
    Apparatus and method for inspecting pattern 有权
    用于检查图案的装置和方法

    公开(公告)号：US08451439B2

    公开(公告)日：2013-05-28

    申请号：US13423862

    申请日：2012-03-19

    Applicant: Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunzi Maeda ,  Atsushi Shimoda

    Inventor： Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunzi Maeda ,  Atsushi Shimoda

    IPC: G01N21/00

    CPC classification number: G01N21/21 ,  G01N21/33 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/151 ,  G01N2021/95615 ,  G01N2201/06113 ,  G01N2201/1035

    Abstract: A method and apparatus for inspecting defects includes emitting an ultraviolet light from an ultraviolet light source, illuminating a specimen with the ultraviolet light in which a polarization condition of the ultraviolet light is controlled, controlling a polarization condition of light reflected from the specimen which is illuminated by the polarization condition controlled ultraviolet light, detecting the light reflected from the specimen, processing the detected light so as to detect defects, and outputting information about the defects. The ultraviolet light source is disposed in a clean environment supplied with clean gas and separated from outside.

    Abstract translation: 用于检查缺陷的方法和装置包括从紫外光源发射紫外光，用受紫外光的偏振条件的紫外线照射样本，控制从被照射的样本反射的光的偏振状态 通过偏光条件控制的紫外光，检测从样本反射的光，处理检测到的光以检测缺陷，并输出关于缺陷的信息。 紫外光源设置在清洁环境中，并提供清洁气体并与外界分离。

    Apparatus and method for inspecting pattern
    24.
    发明申请
    Apparatus and method for inspecting pattern 失效
    用于检查图案的装置和方法

    公开(公告)号：US20050062961A1

    公开(公告)日：2005-03-24

    申请号：US10979169

    申请日：2004-11-03

    Applicant: Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunzi Maeda ,  Atsushi Shimoda

    Inventor： Sachio Uto ,  Minoru Yoshida ,  Toshihiko Nakata ,  Shunzi Maeda ,  Atsushi Shimoda

    IPC: G01N21/33 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G01N21/88

    CPC classification number: G01N21/21 ,  G01N21/33 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/151 ,  G01N2021/95615 ,  G01N2201/06113 ,  G01N2201/1035

    Abstract: An apparatus for inspecting defects including a table which mounts a specimen to be inspected and which is movable in a plane, an ultraviolet light source for emitting ultraviolet light, an illuminating unit for illuminating the specimen mounted on the table with light emitted from the ultraviolet light source, a detecting unit for forming an image of the specimen illuminated by the illuminating unit and for detecting the image with an image sensor, and an image processing unit for processing the image detected by the image sensor and for outputting information about defects detected on the specimen. The illuminating unit and detecting unit are disposed in a clean environment which is supplied therein with clean gas and which is separated from outside by a wall.

    Abstract translation: 一种用于检查缺陷的装置，包括安装待检查样本并且可在平面中移动的台面，用于发射紫外线的紫外光源的照明单元，用于对从紫外线发射的光照射安装在桌子上的样本的照明单元 源，用于形成由所述照明单元照射的所述样本的图像并且用图像传感器检测图像的检测单元，以及图像处理单元，用于处理由所述图像传感器检测到的图像，并且用于输出关于在所述图像传感器上检测到的缺陷的信息; 标本。 照明单元和检测单元设置在清洁的环境中，其中提供有清洁的气体并且由壁与外部分离。

    Video microimaging system
    26.
    依法登记的发明
    Video microimaging system 失效
    视频微成像系统

    公开(公告)号：USH687H

    公开(公告)日：1989-10-03

    申请号：US341599

    申请日：1989-04-17

    Applicant: C. Denton Marrs

    Inventor： C. Denton Marrs

    IPC: G01N21/88

    CPC classification number: G01N21/88 ,  G01N2201/1035

    Abstract: An apparatus for observing defects in and evolution of induced damage on aest surface is created by combining an illumination system with a magnification system. A visible light source is used to illuminate the surface of an optical sample. A test laser system is aligned to illuminate the identical surface areas of the optical sample with light of preselected wavelength (frequency) and intensity. A telescope is focused on the illuminated surface area. The output image of the telescope is fed to a video camera system which in turn is connected to a video tape system.

    Inspection device for pattern defect
    28.
    发明专利
    Inspection device for pattern defect 审中-公开
    用于图案缺陷的检查装置

    公开(公告)号：JP2003042967A

    公开(公告)日：2003-02-13

    申请号：JP2001228166

    申请日：2001-07-27

    Applicant: Hitachi Ltd ,  株式会社日立製作所

    Inventor： UTO YUKIO ,  YOSHIDA MINORU ,  NAKADA TOSHIHIKO ,  MAEDA SHUNJI ,  SHIMODA ATSUSHI

    IPC: G01N21/33 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66

    CPC classification number: G01N21/21 ,  G01N21/33 ,  G01N21/55 ,  G01N21/9501 ,  G01N21/956 ,  G01N21/95607 ,  G01N2021/151 ,  G01N2021/95615 ,  G01N2201/06113 ,  G01N2201/1035

    Abstract: PROBLEM TO BE SOLVED: To provide an inspection device for pattern defects, capable of realizing high reliability stable pattern defect inspection, having high resolution relative to minute patterns by using an ultraviolet laser beam as the light source.
    SOLUTION: In this pattern defect inspection device, the quantity change in the ultraviolet laser beam is detected during inspection, to thereby determine the existence of an influence on the inspection, and service life prediction and abnormality of the light source are detected, and the inside of an optical system is cleaned, to thereby ensure prolongation of service life and long-term reliability of optical parts.
    COPYRIGHT: (C)2003,JPO

    Abstract translation: 要解决的问题：提供一种能够实现高可靠性稳定图案缺陷检查的图形缺陷检查装置，通过使用紫外激光束作为光源，相对于微小图案具有高分辨率。 解决方案：在该图案缺陷检查装置中，在检查期间检测紫外激光束的数量变化，从而确定对检查的影响的存在，并检测使用寿命预测和光源的异常，并且内部 清洁光学系统，从而确保光学部件的使用寿命延长和长期可靠性。

    TOMOGRAPHIEANLAGE UND VERFAHREN FÜR GROSSVOLUMIGE AUFNAHMEN
    29.
    发明公开
    TOMOGRAPHIEANLAGE UND VERFAHREN FÜR GROSSVOLUMIGE AUFNAHMEN 审中-公开
    用于大容量记录的层析摄影系统和方法

    公开(公告)号：EP3162290A1

    公开(公告)日：2017-05-03

    申请号：EP16191079.9

    申请日：2016-09-28

    Applicant: Siemens Healthcare GmbH

    Inventor： Divoky, Robert

    IPC: A61B6/02 ,  A61B6/03 ,  A61B6/00

    CPC classification number: G01T1/2985 ,  A61B6/025 ,  A61B6/032 ,  A61B6/4014 ,  A61B6/4441 ,  G01N21/6456 ,  G01N23/046 ,  G01N2201/1035 ,  G01N2223/419 ,  G01T1/2964

    Abstract: Die Erfindung betrifft eine Tomographieanlage (R) mit einer ersten Strahlquelle (Q1) und einem ersten Detektor (RD1), der der ersten Strahlquelle (Q1) zugeordnet ist, sowie mit einer zweiten Strahlquelle (Q2) und einem zweiten Detektor (RD2), der der zweiten Strahlquelle (Q2) zugeordnet ist. Die Tomographieanlage (R) ist dazu vorbereitet, einen Scan durchzuführen, wobei der erste Detektor (RD1) in einer ersten Rotationsebene (RE1) entlang einer ersten kreissegmentförmigen Bahnkurve (BKD1) geführt wird, während der zweite Detektor (RD2) synchron in einer zweiten Rotationsebene (RE2) entlang einer zweiten kreissegmentförmigen Bahnkurve (BKD2) geführt wird. Außerdem ist die Tomographieanlage (R) dazu vorbereitet, hierbei mit dem ersten Detektor (RD1) einen ersten Datensatz (DS1) und mit dem zweiten Detektor (RD2) einen zweiten Datensatz (DS2) zu gewinnen. Die beiden Rotationsebenen (RE1, RE2) sind zueinander beabstandet angeordnet.
    Die Erfindung betrifft auch ein entsprechendes Verfahren (100) zum Betreiben einer Tomographieanlage (R).

    Abstract translation: 本发明涉及一种成像系统（R）与第一光束源（Q1）和与所述第一光束源（Q1），以及与第二束源（Q2）和第二检测器（RD2）相关联的第一检测器（RD1）中， 与第二束源（Q2）相关联。 所述断层摄影系统（R）是准备执行扫描，其中，所述在（RE1）沿第一圆弧段形路径曲线（BKD1）旋转的第一平面的第一检测器（RD1）被引导，而所述第二检测器（RD2），其与所述第二同步地旋转平面 （RE2）沿着第二圆形段形轨迹（BKD2）被引导。 另外，准备层析成像系统（R）以获得具有第一检测器（RD1）的第一数据集（DS1）和具有第二检测器（RD2）的第二数据集（DS2）。 两个旋转平面（RE1，RE2）彼此间隔一定距离排列。 本发明还涉及用于操作断层摄影系统（R）的对应方法（100）。

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