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    Optical technique for detecting buried defects in opaque films
    22.
    发明授权
    Optical technique for detecting buried defects in opaque films 有权

    公开(公告)号：US07027142B2

    公开(公告)日：2006-04-11

    申请号：US10423354

    申请日：2003-04-25

    Applicant: Daniel Some

    Inventor： Daniel Some

    IPC: G01N21/00

    CPC classification number: G01N21/956 ,  G01N21/171 ,  G01N21/636 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

    Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

    Channel power monitor
    24.
    发明授权
    Channel power monitor 失效
    通道功率监视器

    公开(公告)号：US06735372B2

    公开(公告)日：2004-05-11

    申请号：US10163153

    申请日：2002-06-04

    Applicant: Dennis Chi Zhou ,  Kai Zhang ,  Shou-Jong Sheih

    Inventor： Dennis Chi Zhou ,  Kai Zhang ,  Shou-Jong Sheih

    IPC: G02B600

    CPC classification number: G01J1/4257 ,  G01J1/04 ,  G01J1/0418 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104 ,  G02B6/266 ,  G02B6/4215 ,  G02B6/4286 ,  H04B10/077 ,  H04B10/07955

    Abstract: The present invention is directed towards a channel power monitor for monitoring channel power levels for each of N signal channels. The value of each channel power level is designated as p(&lgr;i), where &lgr;i is a channel parameter that characterizes each channel. An embodiment of the invention includes a variable channel attenuator having M attenuation profiles where M≧N, and where a k-th attenuation profile is characterized as a function of the channel parameter &lgr;i by Ak(&lgr;i). This embodiment also includes a detector for measuring a k-th integrated attenuated power level, the value of which is represented by Pk. An analysis unit receives all of the values Pk of the integrated attenuated power levels and thereupon derives the values p(&lgr;i) of the channel power levels by solving a set of linear equations.

    Abstract translation: 本发明涉及用于监视N个信号信道中的每一个的信道功率电平的信道功率监视器。 每个通道功率电平的值被指定为p（lambdai），其中lambdai是表示每个通道的通道参数。 本发明的实施例包括具有M衰减分布的可变信道衰减器，其中M> = N，并且其中第k个衰减分布被表征为Ak（lambdai）的信道参数lambdai的函数。 该实施例还包括用于测量第k个积分衰减功率电平的检测器，其值由Pk表示。 分析单元接收积分衰减功率电平的所有值Pk，并且通过求解一组线性方程式导出信道功率电平的值p（lambdai）。

    FLUORESCENCE DETECTION DEVICE
    27.
    发明申请
    FLUORESCENCE DETECTION DEVICE 有权
    荧光检测装置

    公开(公告)号：US20150153281A1

    公开(公告)日：2015-06-04

    申请号：US14405491

    申请日：2013-06-11

    Applicant: Sharp Kabushiki Kaisha

    Inventor： Ryohhei Kawamuki

    IPC: G01N21/64

    CPC classification number: G01N21/6456 ,  G01N21/6486 ,  G01N27/44721 ,  G01N27/44778 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/101 ,  G01N2201/104

    Abstract: A scanning module (9) is disposed over a first plate (32). A first motor (39) of moving the scanning module (9) in a second scanning direction and a second motor (49) of moving the scanning module (9) in a first scanning direction are disposed under the first plate (32). In this manner, the first motor (39) and the second motor (49) being a heat source are disposed on a side opposite to a scanning module (9) side using the first plate (32) as a boundary, and thus a transferred amount of heat from the first motor (39) and the second motor (49) to the scanning module (9) decreases. As a result, accuracy of fluorescence detection is prevented from degrading due to thermal distortion of a detection optical system in the scanning module (9).

    Abstract translation: 扫描模块（9）设置在第一板（32）上。 在第一扫描方向上移动扫描模块（9）的第一马达（39）和沿第一扫描方向移动扫描模块（9）的第二马达（49）设置在第一板（32）的下方。 以这种方式，作为热源的第一马达39和第二马达49利用第一板32作为边界设置在与扫描模块9相反的一侧，由此转移 从第一马达39和第二马达49到扫描模块9的热量减少。 结果，由于扫描模块（9）中的检测光学系统的热失真，防止荧光检测的精度降低。

    High speed laser scanning inspection system
    28.
    发明授权
    High speed laser scanning inspection system 有权
    高速激光扫描检测系统

    公开(公告)号：US07365836B2

    公开(公告)日：2008-04-29

    申请号：US11317156

    申请日：2005-12-22

    Applicant: Daniel Some

    Inventor： Daniel Some

    IPC: G01N21/00

    CPC classification number: G01N21/9501 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2021/95676 ,  G01N2201/10 ,  G01N2201/104

    Abstract: An optical inspection system rapidly evaluates a substrate by illumination of an area of a substrate larger than a diffraction-limited spot using a coherent laser beam by breaking temporal or spatial coherence. Picosecond or femtosecond pulses from a modelocked laser source are split into a plurality of spatially separated beamlets that are temporally and/or frequency dispersed, and then focused onto a plurality of spots on the substrate. Adjacent spots, which can overlap by up to about 60-70 percent, are illuminated at different times, or at different frequencies, and do not produce mutually interfering coherence effects. Bright-field and dark-field detection schemes are used in various combinations in different embodiments of the system.

    Abstract translation: 光学检查系统通过打破时间或空间相干性，通过使用相干激光束照射大于衍射受限点的基板的面积来快速评估基板。 来自锁模激光源的皮秒或飞秒脉冲被分割成时间上和/或频率分散的多个空间上分离的子束，然后聚焦到衬底上的多个点上。 可以重叠高达约60-70％的相邻斑点在不同的时间或不同的频率被照亮，并且不产生相互干扰的相干效应。 在系统的不同实施例中，明场和暗场检测方案以各种组合使用。

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