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公开(公告)号：US20240128042A1
公开(公告)日：2024-04-18
申请号：US18547556
申请日：2022-02-22
Applicant: TWI Limited
Inventor： Colin RIBTON
IPC: H01J37/065 , H01J1/18 , H01J1/88 , H01J3/02
CPC classification number: H01J37/065 , H01J1/18 , H01J1/88 , H01J3/024 , H01J2201/19 , H01J2203/02
Abstract: The present invention relates to an electron gun cathode mount adapted at one end to secure a thermionic cathode and at the other end to be connected to an attachment member, wherein the electron gun cathode mount is structured so as to be capable of, when in use, reducing heat transfer from the thermionic cathode to the attachment member, and the material forming the electron gun cathode mount has a thermal conductivity of less than 10 Wm−1K−1 at the operating temperature of the thermionic cathode in a direction from the thermionic cathode to the attachment member. The present invention also relates to an electron gun assembly having the electron gun cathode mount installed therein.
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公开(公告)号：US09697983B1
公开(公告)日：2017-07-04
申请号：US15056244
申请日：2016-02-29
Inventor： Stefan Lanio , Aleksandra Kramer , John Breuer
IPC: H01J37/073 , H01J1/16 , H01J19/10 , H01J9/02
CPC classification number: H01J37/073 , H01J1/16 , H01J9/02 , H01J9/04 , H01J19/10 , H01J19/82 , H01J37/065 , H01J37/3178 , H01J2201/19 , H01J2237/06308 , H01J2237/06341
Abstract: An electron beam device for inspecting a sample with an electron beam is described. The electron beam device includes an electron beam source including a thermal field emitter, which includes an emitter tip having an emission facet configured for electron emission, wherein the emission facet has an emission facet width; and a first side facet and a second side facet, wherein an edge facet is formed between the first side facet and the second side facet, which has an edge facet width. The edge facet width is between 20% and 40% of the emission facet width. The electron beam source further includes an extractor device; and a heating device for heating the thermal field emitter. The electron beam device further includes electron beam optics and a detector device for detecting secondary charged particles generated at an impingement or hitting of the primary electron beam on the sample.
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23.发明授权Method for producing an electrode for a high-pressure discharge lamp and high-pressure discharge lamp comprising at least one electrode thus produced 有权一种高压放电灯用电极的制造方法以及由此制造的至少一个电极的高压放电灯公开(公告)号：US08876570B2
公开(公告)日：2014-11-04
申请号：US13883723
申请日：2011-10-28
Applicant: Wolfgang Seitz
Inventor： Wolfgang Seitz
IPC: H01J9/00 , H01J61/073 , H01J9/04 , H01J1/20
CPC classification number: H01J9/042 , H01J1/20 , H01J9/04 , H01J61/0732 , H01J2201/19 , H01J2209/02
Abstract: A method for producing an electrode (16) for a high-pressure discharge lamp (10), comprising the following steps: a) scanning at least part of the electrode surface for producing an oxide layer (step 120); b) at least partially sublimating the oxide layer formed in step a) (step 120); and c) reducing the rest of the oxide layer.
Abstract translation: 一种用于制造高压放电灯（10）的电极（16）的方法，包括以下步骤：a）扫描用于制备氧化物层的电极表面的至少一部分（步骤120）; b）至少部分地升华步骤a）中形成的氧化物层（步骤120）; 和c）减少氧化物层的其余部分。
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24.发明申请Method for Producing an Electrode for a High-Pressure Discharge Lamp and High-Pressure Discharge Lamp Comprising at least One Electrode thus Produced 有权生产用于高压放电灯的电极的方法和包括至少一个如此生产的电极的高压放电灯公开(公告)号：US20130221842A1
公开(公告)日：2013-08-29
申请号：US13883723
申请日：2011-10-28
Applicant: Wolfgang Seitz
Inventor： Wolfgang Seitz
IPC: H01J9/04 , H01J61/073
CPC classification number: H01J9/042 , H01J1/20 , H01J9/04 , H01J61/0732 , H01J2201/19 , H01J2209/02
Abstract: A method for producing an electrode (16) for a high-pressure discharge lamp (10), comprising the following steps: a) scanning at least part of the electrode surface for producing an oxide layer (step 120); b) at least partially sublimating the oxide layer formed in step a) (step 120); and c) reducing the rest of the oxide layer.
Abstract translation: 一种用于制造高压放电灯（10）的电极（16）的方法，包括以下步骤：a）扫描用于制备氧化物层的电极表面的至少一部分（步骤120）; b）至少部分地升华步骤a）中形成的氧化物层（步骤120）; 和c）减少氧化物层的其余部分。
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25.发明公开VERFAHREN ZUM HERSTELLEN EINER ELEKTRODE FÜR EINE HOCHDRUCKENTLADUNGSLAMPE UND HOCHDRUCKENTLADUNGSLAMPE MIT MINDESTENS EINER DERART HERGESTELLTEN ELEKTRODE 有权方法制造电极用于高压放电灯及高压放电灯具有至少一个这样的电极MANUFACTURED
公开(公告)号：EP2526563A1
公开(公告)日：2012-11-28
申请号：EP11778853.9
申请日：2011-10-28
Applicant: OSRAM AG
Inventor： SEITZ, Wolfgang
IPC: H01J61/073 , H01J1/20 , H01J9/04
CPC classification number: H01J9/042 , H01J1/20 , H01J9/04 , H01J61/0732 , H01J2201/19 , H01J2209/02
Abstract: The invention relates to a method for producing an electrode (16) for a high-pressure discharge lamp (10), comprising the following steps: a) passing over at least a portion of the electrode surface for generating an oxide layer (step 120), preferably using a laser beam; b) at least partially sublimating the oxide layer created in step a) (step 120); and c) reducing the remaining oxide layer (140). The invention further relates to a high-pressure discharge lamp (10) comprising at least one electrode thus produced.
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Patent Agency Ranking
公开(公告)号：EP1564774B1
公开(公告)日：2012-04-25
申请号：EP04029003.3
申请日：2004-12-07
Applicant: NuFlare Technology, Inc.
Inventor： Katsap, Victor
CPC classification number: H01J9/042 , H01J1/148 , H01J1/15 , H01J2201/19 , H01J2237/06308
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公开(公告)号：JP5693740B2
公开(公告)日：2015-04-01
申请号：JP2013537087
申请日：2011-10-28
Applicant: オスラム ゲーエムベーハー , OSRAM GmbH
Inventor： ヴォルフガング ザイツ
IPC: H01J61/073 , H01J9/02
CPC classification number: H01J9/042 , H01J1/20 , H01J61/0732 , H01J9/04 , H01J2201/19 , H01J2209/02
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公开(公告)号：JP4976367B2
公开(公告)日：2012-07-18
申请号：JP2008328567
申请日：2008-12-24
Applicant: ツィンファ ユニバーシティ , 鴻海精密工業股▲ふん▼有限公司
CPC classification number: H01J1/14 , H01J2201/19 , H01J2201/30469
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公开(公告)号：JP2005228741A
公开(公告)日：2005-08-25
申请号：JP2005018549
申请日：2005-01-26
Applicant: Nuflare Technology Inc , 株式会社ニューフレアテクノロジー
Inventor： KATSAP VICTOR
CPC classification number: H01J9/042 , H01J1/148 , H01J1/15 , H01J2201/19 , H01J2237/06308
Abstract: PROBLEM TO BE SOLVED: To elongate life of and improve electrooptic performance of a thermionic cathode for a device using electron beams such as a lithography device, a scanning electron microscope (SEM), and a transmission electron microscope (TEM). SOLUTION: The thermionic cathode of an improved type is provided with a conical part with its outside face covered with a carbon film having a comparatively small conical angle of not more than 60°, and has large angular intensity and brightness of emitted electron beams and a long life. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：为了延长使用诸如光刻装置，扫描电子显微镜（SEM）和透射电子显微镜（TEM）的电子束的装置的热离子阴极的寿命并提高电离性能。 解决方案：改进型的热离子阴极设置有圆锥形部分，其外表面覆盖有不大于60°的较小锥角的碳膜，并且具有大的角度强度和发射电子的亮度 梁和寿命长。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2017157558A
公开(公告)日：2017-09-07
申请号：JP2017035711
申请日：2017-02-28
Inventor： ステファン ラニオ , アレクサンドラ クラメル , ジョン ブロイアー
IPC: H01J37/073
CPC classification number: H01J37/073 , H01J1/16 , H01J19/10 , H01J37/065 , H01J9/02 , H01J9/04 , H01J2201/19 , H01J2237/06308 , H01J2237/06341
Abstract: 【課題】電子ビームでサンプルを検査する電子ビーム装置を提供すること。 【解決手段】電子ビーム装置は、熱電界エミッタを含む電子ビーム源を含み、熱電界エミッタは、エミッタチップを含み、エミッタチップは、電子放出のために構成され、放出ファセット幅を有する放出ファセットと、第1の側部ファセットおよび第2の側部ファセットとを有し、第1の側部ファセットと第2の側部ファセットとの間にエッジファセットが形成され、エッジファセットは、エッジファセット幅を有する。エッジファセット幅は、放出ファセット幅の20%〜40%である。電子ビーム源は、抽出装置と、熱電界エミッタを加熱する加熱装置とをさらに含む。電子ビーム装置は、電子ビーム光学系と、1次電子ビームがサンプルに衝突または到達する際に生成される2次荷電粒子を検出する検出装置とをさらに含む。 【選択図】図1
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