公开(公告)号：WO2008043201A8

公开(公告)日：2009-06-04

申请号：PCT/CN2006002609

申请日：2006-10-08

Applicant: RAE SYSTEMS SHANGHAI INC ,  QIAN YONGBIAO ,  SU AIMIN ,  LIU XIAOJUN ,  HSI PETER C

Inventor： QIAN YONGBIAO ,  SU AIMIN ,  LIU XIAOJUN ,  HSI PETER C

IPC: G01N27/66

CPC classification number: G01N27/66 ,  H01J41/02

Abstract: A photo-ionization detector for detecting gas concentration and method thereof. Said detector includes a first bias electrode and a first measurement electrode. The first bias electrode is connected with a first bias circuit for absorbing one type of charge ion. The first measurement electrode is connected with a measurement circuit for absorbing one type of reverse charge ion. The constituent of inert gases in said ultraviolet lamp, the material of optical window and the material of low potential electrode, which is the material of said first measurement electrode or said first bias electrode, are selected that the ultraviolet light createdby the ultraviolet lamp and transmitted through said optical window incident upon the surface of said low potential electrode can create the photoelectric effect and that said driver electrodes can apply an high voltage AC signal on said ultraviolet lamp, which is high enough so that the number of discharged electrons overflow from the surface of said low potential electrode are enough to neutralize the positive ions, which are deposited near the three-dimensional space range of said low potential electrode, so that the saturated phenomenon of concentration measurement caused by the deposition of positive ions can be eliminated.

Abstract translation: 一种用于检测气体浓度的光电离检测器及其方法。 所述检测器包括第一偏置电极和第一测量电极。 第一偏置电极与用于吸收一种类型的电荷离子的第一偏置电路连接。 第一测量电极与用于吸收一种反向电荷离子的测量电路连接。 选择所述紫外灯中的惰性气体的组分，光学窗口的材料和作为所述第一测量电极或所述第一偏置电极的材料的低电位电极的材料，使得由紫外线灯产生的紫外线和透射 通过入射在所述低电位电极的表面上的所述光学窗口可以产生光电效应，并且所述驱动电极可以对所述紫外线灯施加高电压AC信号，所述高电压AC信号足够高，使得放电的电子数量从表面溢出 所述低电位电极足以中和沉积在所述低电位电极的三维空间范围附近的正离子，从而可以消除由正离子的沉积引起的饱和浓度测量现象。

公开(公告)号：JP4053817B2

公开(公告)日：2008-02-27

申请号：JP2002155806

申请日：2002-05-29

Applicant: ラエ・システムズ・インコーポレイテッドRae Systems,Inc.

Inventor： ピーター・シー・シー ,  ホング・ティー・スン

IPC: G01N27/64 ,  G01N27/66 ,  G01N33/00 ,  H01J41/02

CPC classification number: G01N33/0026 ,  G01N27/66 ,  G01N33/0029 ,  G01N33/0047 ,  H01J41/02

公开(公告)号：US09404827B2

公开(公告)日：2016-08-02

申请号：US14174386

申请日：2014-02-06

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

公开(公告)号：US20150300904A1

公开(公告)日：2015-10-22

申请号：US14377449

申请日：2013-02-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker

IPC: G01L19/06 ,  H01J41/02 ,  H01J1/52 ,  G01L21/30

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

公开(公告)号：US20110062961A1

公开(公告)日：2011-03-17

申请号：US12860050

申请日：2010-08-20

Applicant: Gerardo A. Brucker

Inventor： Gerardo A. Brucker

IPC: G01L21/30

CPC classification number: G01L21/30 ,  G01L21/32 ,  G01L21/34 ,  H01J41/02

Abstract: An ionization gauge to measure pressure and to reduce sputtering yields includes at least one electron source that generates electrons. The ionization gauge also includes a collector electrode that collects ions formed by the collisions between the electrons and gas molecules. The ionization gauge also includes an anode. An anode bias voltage relative to a bias voltage of a collector electrode is configured to switch at a predetermined pressure to decrease a yield of sputtering collisions.

Abstract translation: 用于测量压力和减少溅射产生的电离计包括产生电子的至少一个电子源。 电离计还包括收集由电子和气体分子之间的碰撞形成的离子的集电极。 电离计还包括阳极。 相对于集电极的偏置电压的阳极偏置电压被配置为在预定压力下切换以降低溅射碰撞的产量。

公开(公告)号：US20090015264A1

公开(公告)日：2009-01-15

申请号：US11827370

申请日：2007-07-11

Applicant: Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

Inventor： Richard A. Knott ,  Gerardo A. Brucker ,  Paul C. Arnold

IPC: G01L21/34

CPC classification number: G01L21/34 ,  H01J41/02

Abstract: An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.

Abstract translation: 一种电离计，消除热阴极或灯丝，但保持接近热阴极电离计的气体密度测量精度水平。 电离计包括设置在离子化体积中的集电极，不具有加热阴极的电子源和调节电子源和电离体积之间的电子流的静电快门。 基于来自限定电离体积的阳极的反馈，静电快门控制电子流。 电子源可以是Penning或辉光放电电离计。

公开(公告)号：US06515482B2

公开(公告)日：2003-02-04

申请号：US09770656

申请日：2001-01-29

Applicant: Yousuke Kawasaki

Inventor： Yousuke Kawasaki

IPC: G01L2130

CPC classification number: G01L21/32 ,  H01J41/02

Abstract: An ionization vacuum gauge which can stably perform measurements of pressure in the intermediate vacuum to high vacuum regions, that is performed by an ionization-type first measurement element, as well as in the measurement region intrinsic to a second measurement element. This ionization vacuum gauge comprises a measurement element vessel, and first and second measurement parts provided within this measurement element vessel. The first measurement part comprises component electrodes including a filament, grid and ion collector, and is of an ionization-type construction for measurement of the pressure of vacuum states. The second measurement part is of a construction having different functions from those of the first measurement part, and is disposed in a space that is near the extension of the grid axis, and is away from the principal space for flying of thermal electrons emitted from the filament. A shield plate is provided between the second measurement part and the component electrodes, to spatially separate the second measurement part and the component electrodes. The second measurement part is fixed to an element fastening plate made from a material with excellent thermal conductivity.

Abstract translation: 一种电离真空计，其可以稳定地执行中间真空中的压力到高真空区域的测量，其由电离型第一测量元件以及第二测量元件固有的测量区域进行。 该电离真空计包括测量元件容器，以及设置在该测量元件容器内的第一和第二测量部件。 第一测量部件包括包括灯丝，栅格和离子收集器的元件电极，并且是用于测量真空状态的压力的电离型结构。 第二测量部件具有与第一测量部件不同的功能的结构，并且设置在靠近网格轴的延伸部的空间中，并且远离主空间，用于使从 灯丝。 在第二测量部件和部件电极之间设置屏蔽板，以在空间上分离第二测量部件和部件电极。 第二测量部件被固定到由具有优异导热性的材料制成的元件紧固板。

公开(公告)号：US2884591A

公开(公告)日：1959-04-28

申请号：US29558552

申请日：1952-06-25

Applicant: SNYDER VERNE D

Inventor： SNYDER VERNE D

IPC: G01M3/20 ,  H01J41/02

CPC classification number: H01J41/02 ,  G01M3/202

公开(公告)号：WO2013119851A1

公开(公告)日：2013-08-15

申请号：PCT/US2013/025198

申请日：2013-02-07

Applicant: BROOKS AUTOMATION, INC.

Inventor： BRUCKER, Gerardo, A.

IPC: G01L21/32

CPC classification number: G01L21/32 ,  G01L19/0627 ,  G01L21/30 ,  H01J1/52 ,  H01J41/02 ,  H01J41/04

Abstract: An ionization gauge to measure pressure, while controlling the location of deposits resulting from sputtering when operating at high pressure, includes at least one electron source that emits electrons, and an anode that defines an ionization volume. The ionization gauge also includes a collector electrode that collects ions formed by collisions between the electrons and gas molecules and atoms in the ionization volume, to provide a gas pressure output. The electron source can be positioned at an end of the ionization volume, such that the exposure of the electron source to atom flux sputtered off the collector electrode and envelope surface is minimized. Alternatively, the ionization gauge can include a first shade outside of the ionization volume, the first shade being located between the electron source and the collector electrode, and, optionally, a second shade between the envelope and the electron source, such that atoms sputtered off the envelope are inhibited from depositing on the electron source.

Abstract translation: 用于测量压力的电离计，同时控制在高压下操作时由溅射产生的沉积物的位置，包括至少一个发射电子的电子源和限定电离体积的阳极。 电离计还包括收集电极，其收集由电子和气体分子之间的碰撞形成的离子和电离体积中的原子，以提供气体压力输出。 电子源可以位于电离体积的末端，使得电子源暴露于从集电极电极和包膜表面溅射的原子通量被最小化。 或者，电离计可以包括离子化体积外的第一阴影，第一阴影位于电子源和集电极之间，以及可选地，在封套和电子源之间的第二阴影，使得原子溅射 该封套被禁止沉积在电子源上。

公开(公告)号：WO2013068216A2

公开(公告)日：2013-05-16

申请号：PCT/EP2012/070561

申请日：2012-10-17

Applicant: GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH

Inventor： KOLLMUS, Holger

IPC: G01L21/32

CPC classification number: G01L21/32 ,  A61N5/1048 ,  F04C2270/0421 ,  G01L21/34 ,  H01J41/02 ,  H05H1/0012 ,  H05H7/00 ,  H05H2007/008

Abstract: Die Erfindung betrifft eine Messvorrichtung (1, 2, 3, 4, 5) mit einer Elektronenfreisetzungsvorrichtung (8), einer Elektronenaufnahmevorrichtung (13, 31, 32) und einer lonenaufnahmevorrichtung (19, 23, 24), wobei eine Messstreckeneinrichtung (6) vorgesehen ist, welche gesondert von der zumindest einen Elektronenaufnahmevorrichtung (13, 31, 32) ausgebildet ist.

Abstract translation: 本发明涉及一种测量装置（1，2，3，4，5）具有电子释放装置（8），电子接收装置（13，31，32）和一个lonenaufnahmevorrichtung（19，23，24），其特征在于，测量路径装置（6）设置 是，这是从所述至少一个电子接收装置（13，31，32）分别形成。