公开(公告)号：EP3293753A1

公开(公告)日：2018-03-14

申请号：EP17187555.2

申请日：2017-08-23

Applicant: Edwards Vacuum, LLC

Inventor： WYNOHRAD, Anthony ,  LANGEBERG, Joel

IPC: H01J41/18

CPC classification number: H01J41/12 ,  H01J41/18

Abstract: An ion pump includes an anode, a backing surface having at least one surface structure extending toward the anode and a cathode positioned between the anode and the backing surface and having an opening such that the at least one surface structure is aligned with the opening.

Abstract translation: 离子泵包括阳极，具有朝向阳极延伸的至少一个表面结构的背衬表面以及位于阳极和背衬表面之间并具有开口的阴极，使得至少一个表面结构与开口对齐。

公开(公告)号：EP0893817B1

公开(公告)日：2007-09-26

申请号：EP98410073.5

申请日：1998-06-26

Applicant: CANON KABUSHIKI KAISHA

Inventor： Mougin, Stéphane ,  Rivière-Cazaux, Lionel

IPC: H01J41/18 ,  H01J29/94 ,  H01J31/12

CPC classification number: H01J41/18 ,  H01J7/16 ,  H01J9/39 ,  H01J29/94

公开(公告)号：EP1814136A3

公开(公告)日：2007-08-15

申请号：EP07102656.1

申请日：1998-06-26

Applicant: Canon Kabushiki Kaisha

Inventor： Mougin, Stéphane ,  Rivière-Cazaux, Lionel

IPC: H01J41/18 ,  H01J29/94 ,  H01J31/12

CPC classification number: H01J41/18 ,  H01J7/16 ,  H01J9/39 ,  H01J29/94

Abstract: L'invention concerne un écran plat à micropointes comportant une cathode (1) pourvue de zones actives de micropointes (2) d'émission électronique ; une anode (5) cathodoluminescente pourvue, au moins en regard desdites zones actives de micropointes, de zones actives d'éléments luminophores (16) ; une grille principale (3) d'extraction d'électrons émis par les micropointes actives (2) en direction des éléments luminophores (16) ; et, côté cathode (1), au moins une zone sacrificielle de micropointes (2') propre à être adressée, hors de périodes de fonctionnement de l'écran et indépendamment desdites zones actives.

公开(公告)号：EP1403903A3

公开(公告)日：2005-05-11

申请号：EP03015579.0

申请日：2003-07-11

Applicant: NaWoTec GmbH

Inventor： Koops, Hans Wilfried Peter Dr.

IPC: H01J41/18

CPC classification number: H01J41/18

Abstract: Die Erfindung betrifft eine Orbitron-Pumpe 10 zur Erzeugung von Vakuum in einem zu evakuierenden Raum-Pumpenraum 24 -, mit einer Elektronenquelle 18, mit Mitteln zum Erzeugen eines Feldes, das die Elektronen der Elektronenquelle 18 im Pumpenraum 24 auf eine Kreisbahn zwingt. Die Erfindung zeichnet sich dadurch aus, dass die Elektronenquelle als Feldelektronenquelle 18 ausgebildet ist, die einen kalten Feldelektronen-Emitter 22 und eine Beschleuniger-Elektrode 20 umfasst, welche die aus dem Feldelektronen-Emitter 22 austretenden Elektronen in Richtung auf das Feld beschleunigt, und dass der Abstand zwischen dem Feldelektronen-Emitter 22 und der Beschleuniger-Elektrode 20 kleiner als die mittlere freie Weglänge der Atome des zu evakuierenden Gases - Restgas - in dem Pumpenraum 24 ist.

公开(公告)号：EP1814136B1

公开(公告)日：2010-10-06

申请号：EP07102656.1

申请日：1998-06-26

Applicant: Canon Kabushiki Kaisha

Inventor： Mougin, Stéphane ,  Rivière-Cazaux, Lionel

IPC: H01J41/18 ,  H01J29/94 ,  H01J7/16 ,  H01J9/39

CPC classification number: H01J41/18 ,  H01J7/16 ,  H01J9/39 ,  H01J29/94

公开(公告)号：EP0867622B1

公开(公告)日：2004-08-04

申请号：EP98300914.3

申请日：1998-02-09

Applicant: New Technology Management Co., Ltd.

Inventor： Yokota, Shinichi 1941-B1-301 ,  Otsubo, Jasafumi ,  Nakada, Takeshi 461-11-503 Eda-cho ,  Edamura, Kazuya

IPC: F15B21/06

CPC classification number: F15C5/00 ,  F15B21/065 ,  F15C1/04 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0013 ,  F16K99/0042 ,  F16K99/0057 ,  F16K2099/0094 ,  H01J41/18 ,  H02N11/006 ,  Y10S137/909 ,  Y10T137/0318 ,  Y10T137/2082 ,  Y10T137/2191 ,  Y10T137/85978

公开(公告)号：EP1147691A1

公开(公告)日：2001-10-24

申请号：EP99962863.9

申请日：1999-12-10

Applicant: Tokyo Electron Limited

Inventor： JOHNSON, Wayne, L. ,  DANDL, Raphael, A. ,  GUEST, Gareth, E.

IPC: H05H1/00

CPC classification number: H01J37/32834 ,  H01J41/12 ,  H01J41/18 ,  H05H1/54

Abstract: A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits (30); a group of magnets (24) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources (14) for creating electrostatic fields which accelerate ions from the conduits to the second region.

公开(公告)号：EP0499239A2

公开(公告)日：1992-08-19

申请号：EP92102346.1

申请日：1992-02-12

Applicant: EBARA CORPORATION

Inventor： Nagai, Kazutoshi ,  Satake, Tohru ,  Hayashi, Hideaki ,  Yasui, Takanari

IPC: H01J41/14

CPC classification number: H01J41/18 ,  H01J41/14

Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

Abstract translation: 公开了一种包括这种高真空装置（50）和辅助真空泵（31）的排气装置和高真空泵送单元，其中在真空容器中实现高真空，使真空容器内的气体分子被离子化， 加速耗尽，此外，在高真空泵送单元中，从真空泵吸收或解吸的那些气体分子被离子化并加速回到真空泵。

公开(公告)号：JP2007324134A

公开(公告)日：2007-12-13

申请号：JP2007145763

申请日：2007-05-31

Applicant: Varian Spa ,  ヴァリアン ソシエタ ペル アジオーニ

Inventor： BONMASSAR LUCA ,  MURA MICHELE

IPC: H01J41/12

CPC classification number: H01J41/18

Abstract: PROBLEM TO BE SOLVED: To provide a sputter ion pump capable of providing satisfactory pumping speeds even at low pressures, while having limited overall size and weight.
SOLUTION: The sputter ion pump 1 has an improved magnet assembly comprising main magnets 9a, 9b disposed on both end parts of the pump cells of an anode, and auxiliary magnets 11; 11', 11" disposed on one side only of the pump cells, whereby the assembly exhibits an asymmetrical configuration. The sputter ion pump with the improved magnet assembly allows for attaining high pumping speeds even at low pressures while size, weight, and manufacturing cost of the pump itself are being suppressed.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供即使在低压下能够提供令人满意的泵送速度的溅射离子泵，同时具有有限的总体尺寸和重量。 解决方案：溅射离子泵1具有改进的磁体组件，其包括设置在阳极的泵电池的两端部上的主磁体9a，9b和辅助磁体11; 11'，11“仅设置在泵电池的一侧，由此组件呈现不对称的构造，具有改进的磁体组件的溅射离子泵允许即使在低压下获得高泵送速度，同时尺寸，重量和制造成本 的泵本身正在被压制。版权所有（C）2008，JPO＆INPIT

公开(公告)号：JPS59123152A

公开(公告)日：1984-07-16

申请号：JP23274982

申请日：1982-12-28

Applicant: Hajime Ishimaru

Inventor： ISHIMARU HAJIME ,  NARISHIMA KATSUYA ,  MOMOSE TAKASHI

IPC: H01J41/20 ,  H01J41/12 ,  H01J41/18

CPC classification number: H01J41/18 ,  H01J41/12

Abstract: PURPOSE: To obtain an ion pump of a high exhaustion efficiency at a low cost by using an aluminum-system metal to make both a pump casing and an anode which are installed and caused to work in a magnetic field and causing the pump casing to work also as a cathode.
CONSTITUTION: A pump casing 12 is installed in a magnetic field formed between the N and the S poles of a permanent magnet 11. A high-voltage terminal 13 is attached to one end wall of the casing 12 and the other end wall is provided with a flange 14 connected to a vacuum case such as an accelerator. The casing 12 is made by subjecting an aluminum-system metal to extrusion molding. Heating wires 17 are fixed in grooves 15 formed during the molding and a magnet 11 is fixed to a convex section 16. An anode 18, which is made by joining together a plural number of rolled cylindrical members 18 made of thin aluminum-system metallic films, is supported inside the casing 12 with insulating members 19 and 20 interposed. The casing 12 also serves as a cathode and formed by adding a minute quantity of titanium, zirconium or magnesium to an aluminum-system metallic member. By the means mentioned above, the exhaustion efficiency of the ion pump can be enhanced.
COPYRIGHT: (C)1984,JPO&Japio

Abstract translation: 目的：通过使用铝系金属来制造具有高耗尽效率的离子泵，使泵壳体和阳极都安装并使其在磁场中工作并使泵壳工作 也作为阴极。 构成：将泵壳体12安装在永磁体11的N极和S极之间的磁场中。高压端子13安装在壳体12的一个端壁上，另一个端壁设置有 连接到诸如加速器的真空壳体的凸缘14。 外壳12是通过对铝系金属进行挤出成型而制成的。 加热丝17固定在模制过程中形成的槽15中，并且磁体11固定到凸部16上。阳极18通过将多个由薄的铝系金属膜制成的轧制圆柱形构件18 被插入到壳体12的内部，绝缘构件19和20被插入。 壳体12还用作阴极并通过向铝系金属构件中加入少量的钛，锆或镁而形成。 通过上述方式，可以提高离子泵的耗尽效率。