公开(公告)号：US20080128643A1

公开(公告)日：2008-06-05

申请号：US11855328

申请日：2007-09-14

Applicant: Ulrich Mueller ,  Joachim Stuehler

Inventor： Ulrich Mueller ,  Joachim Stuehler

IPC: G01N21/86

CPC classification number: G03F7/7085 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/84 ,  G03F7/706 ,  G03F7/70666 ,  H01J43/045

Abstract: A microlithography projection exposure tool with a radiation detector for the locally resolved recording of electromagnetic radiation. The radiation detector comprises: a solid state body which is configured to multiply electric charge and a collector which is configured to determine the location of the multiplied electric charge by means of charge division.

Abstract translation: 一种具有辐射检测器的微光刻投影曝光工具，用于电磁辐射的局部解析记录。 辐射检测器包括：固态电路，被配置为乘以电荷和集电极，其被配置为通过电荷分割来确定所乘积的电荷的位置。

公开(公告)号：US07042155B2

公开(公告)日：2006-05-09

申请号：US11246528

申请日：2005-10-11

Applicant: Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

Inventor： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

IPC: H01J43/04 ,  H01J43/10

CPC classification number: H01J31/507 ,  H01J43/045 ,  H01J43/22

Abstract: A dynode constituting an electron multiplier or a photomultiplier may be provided with eight rows of channels each defined by an outer frame and a partitioning part of the dynode. In each channel, a plurality of electron multiplying holes may be arranged. In specified positions of the outer frame and the partitioning part of the dynode, glass receiving parts wider than the outer frame and the partitioning part may be provided integrally with the dynode. Glass parts may be bonded to all the glass receiving parts. The glass parts may be bonded by applying glass to the glass receiving parts and hardening the glass and each may have a generally dome-like convex shape. Each dynode may be formed after the dome-like glass part may be bonded to the glass receiving part.

Abstract translation: 构成电子倍增器或光电倍增管的倍增电极可以设置有八排通道，每个通道由倍增极的外框和分隔部分限定。 在每个通道中，可以布置多个电子倍增孔。 在外框的指定位置和倍增极的分隔部分中，可以与倍增极一体地设置比外框宽和分隔部宽的玻璃容纳部。 玻璃部件可以结合到所有的玻璃接收部件。 玻璃部件可以通过将玻璃施加到玻璃接收部分并使玻璃硬化，并且可以具有大致圆顶状的凸起形状。 每个倍增极可以在圆顶状玻璃部分可以结合到玻璃接收部分之后形成。

公开(公告)号：US20040069932A1

公开(公告)日：2004-04-15

申请号：US10468826

申请日：2003-08-25

Inventor： Hisaki Kato ,  Hideto Kawai

IPC: H01J040/14

CPC classification number: H01J43/28 ,  H01J43/045 ,  H01J43/06 ,  H01J43/18 ,  H01J43/22

Abstract: A photomultiplier eliminates the reflection of light off of focusing pieces in a focusing electrode and prevents the photocathode from emitting useless electrons in response to such reflected light by including an oxide film formed over the surface of each focusing piece. The oxide film is also formed on the surface of secondary electron emission pieces in the first and second stage dynodes to eliminate the reflection of light off of the secondary electron emission pieces and to prevent the photocathode from emitting useless electrons in response to such reflected light. Further, a light-absorbing glass partitioning part is provided in a light-receiving faceplate to suppress crosstalk between channels.

Abstract translation: 光电倍增器消除了聚焦电极中聚焦片的光的反射，并且通过在每个聚焦片的表面上形成氧化膜，防止光电阴极响应于这种反射光发射无用的电子。 氧化膜也形成在第一和第二级倍增电极中的二次电子发射片的表面上，以消除二次电子发射片的光的反射，并且防止光电阴极响应于这种反射光而发射无用的电子。 此外，在光接收面板中设置吸光玻璃分隔部，以抑制通道之间的串扰。

公开(公告)号：US06642493B1

公开(公告)日：2003-11-04

申请号：US10071515

申请日：2002-02-08

Applicant: Fernando J Barbosa ,  Stanislaw Majewski ,  Juan J. Vaquero

Inventor： Fernando J Barbosa ,  Stanislaw Majewski ,  Juan J. Vaquero

IPC: H01J4014

CPC classification number: H01J43/30 ,  H01J43/045

Abstract: A modular base for a position sensitive Photo-Multiplier Tube (PS-PMT) that can be connected to other similar modular bases to form arrays of PS-PMTs. X and Y resistor chains are provided within the base to connect all X and Y coordinate anodes from the PS-PMT, respectively. An amplifier is provided at each end of each resistor chain to amplify output signals when the base is used alone; not connected to other bases. Jumpers associated with each amplifier are provided to include the amplifier in the output signal path or bypass the amplifier and connect to jumpers of other bases. When a base is used alone, the jumpers, which provide either an X or Y output signal, are set to include the amplifier in the output signal path. When two bases are connected together, the jumpers are set to bypass their associated amplifiers and connect the respective X or Y resistor chains of the two bases. The present method advantageously maintains the number of required amplifiers for each X or Y coordinate at two, no matter how many bases are used in the a row or column.

Abstract translation: 用于位置敏感的光电倍增管（PS-PMT）的模块化基座，可连接到其他类似的模块化基座，以形成PS-PMT阵列。 X和Y电阻链设在基座内，分别连接PS-PMT的所有X和Y坐标阳极。 在每个电阻链的两端设置一个放大器，用于在单独使用基极时放大输出信号; 没有连接到其他基地。 提供与每个放大器相关联的跳线，以将放大器包括在输出信号路径中或者绕过放大器并连接到其他基座的跳线。 当单独使用基极时，提供X或Y输出信号的跳线被设置为在输出信号路径中包括放大器。 当两个基座连接在一起时，跳线被设置为绕过其相关的放大器并连接两个基座的相应的X或Y电阻器链。 本方法有利地将每个X或Y坐标的所需放大器的数量保持在两个，无论在一行或多列中使用多少个基底。

公开(公告)号：US06624406B1

公开(公告)日：2003-09-23

申请号：US09326252

申请日：1999-06-04

Applicant: Joseph P. Estrera ,  Michael J. Iosue ,  Timothy W. Sinor

Inventor： Joseph P. Estrera ,  Michael J. Iosue ,  Timothy W. Sinor

IPC: H01J4014

CPC classification number: H01J43/045 ,  H01J31/507 ,  H01J43/246 ,  H01J2231/5016

Abstract: The present invention comprises a method for detecting photons and generating a representation of an image. A photocathode receives photons from the image. The photocathode discharges electrons in response to the received photons. A microchannel plate is located no more than about 125 microns from the photocathode. The microchannel plate has an unfilmed input face and an output face. The microchannel plate receives the electrons from the photocathode and produces secondary emission electrons which are emitted from the output face. A screen receives the secondary electrons and displays a representation of the image.

Abstract translation: 本发明包括一种用于检测光子并产生图像的表示的方法。 光电阴极从图像接收光子。 光电阴极响应于所接收的光子而放电。 微通道板距离光电阴极不超过约125微米。 微通道板具有不合格的输入面和输出面。 微通道板从光电阴极接收电子并产生从输出面发射的二次发射电子。 屏幕接收二次电子并显示图像的表示。

公开(公告)号：US5969361A

公开(公告)日：1999-10-19

申请号：US983436

申请日：1998-02-11

Applicant: Didier Blavette ,  Alain Bostel ,  Bernard Deconihout

Inventor： Didier Blavette ,  Alain Bostel ,  Bernard Deconihout

IPC: H01J43/04 ,  H01J43/00

CPC classification number: H01J43/045

Abstract: This detector comprises electron multiplication means (14) producing a cluster of electrons under the impact of each particle (2), a layer (6) that this cluster passes through, and which emits a light pulse by interaction with the layer, and transparent electron detection means (8) capable of determining the moment of impact of the particle and supplying information about the impact positions for each moment thus determined, so that these positions can be determined and correlated with the moments determined by the detection means.

Abstract translation: PCT No.PCT / FR96 / 01100 Sec。 371日期1998年2月11日 102（e）1998年2月11日PCT PCT 1996年7月16日PCT公布。 出版物WO97 / 04335 日期1997年2月6日该检测器包括在每个粒子（2）的冲击下产生电子簇的电子倍增装置（14），该簇通过的层（6），并且通过与 层和透明电子检测装置（8），其能够确定颗粒的冲击力矩并且提供关于如此确定的每个时刻的冲击位置的信息，使得可以确定这些位置并与由检测装置确定的力矩相关联 。

公开(公告)号：US5103083A

公开(公告)日：1992-04-07

申请号：US480645

申请日：1990-02-15

Applicant: David A. Reed ,  Bruce H. Newcome

Inventor： David A. Reed ,  Bruce H. Newcome

IPC: G01T1/29 ,  H01J43/04

CPC classification number: H01J43/246 ,  G01T1/2928 ,  H01J43/045

Abstract: A position sensitive detector and method are disclosed wherein an image of incident radiation is detected and amplified and an accelerated charged image is produced corresponding spatially to the incident radiation. The accelerated charged image is successively impinged on successive pairs of interdigitated electrodes having different electrode patterns and the output of the electrodes is compared for determining the location of the charges making up the charged image.

Abstract translation: 公开了一种位置敏感检测器和方法，其中检测和放大入射辐射的图像，并且在空间上产生与入射辐射相对应的加速带电图像。 加速充电图像被连续地照射在具有不同电极图案的连续成对的交错电极上，并且比较电极的输出以确定构成带电图像的电荷的位置。

公开(公告)号：US4117366A

公开(公告)日：1978-09-26

申请号：US519218

申请日：1974-10-30

Applicant: Gordon Peter Davis

Inventor： Gordon Peter Davis

IPC: B31B1/90 ,  B65H39/14 ,  H01J40/00 ,  H01J43/04 ,  H01J43/28 ,  H01J39/00 ,  H01J39/02

CPC classification number: H01J43/28 ,  H01J43/045

Abstract: A multi-channel photomultiplier tube in which light radiation from distinct sources passes through an entrance window to a photo-cathode, the window being divided into parts so that light from a source passes through a respective part to an associated part of the photo-cathode, the division of the window into parts constraining the light from incidence upon other parts of the photo-cathode.

公开(公告)号：US20060291882A1

公开(公告)日：2006-12-28

申请号：US10563609

申请日：2004-05-13

Applicant: Andrew Tulloch ,  Norman Pratt

Inventor： Andrew Tulloch ,  Norman Pratt

IPC: G03G15/01

CPC classification number: H01J43/045 ,  G03G15/0435 ,  H01J43/22

Abstract: The imaging machine which may form part of a photocopier, scanner or the like has a light source, a platen (21) consisting of an upper, light transparent plate (23) and beneath the upper plate an image collector unit (25) and an image data processor (30). The image collector unit (25) consists of a photosensitive sheet arranged above an array of electron multiplier channels. Light reflected from an object laid on the surface (24) of the upper plate (23) is converted by the photosensitive sheet into electrons that are multiplied by the electron multiplier channels to amplify the image of the object resting on the upper plate. The surface area of the electron multiplier array corresponds to the imaging area of the imaging machine making it possible for a complete image to be captured simultaneously across the entire imaging area rather than by means of scanning optics. Moreover, the use of the electron multiplier array enables lower powered light sources to be employed.

Abstract translation: 可以形成复印机，扫描仪等的一部分的成像机具有光源，由上部透明板（23）组成的压板（21），并且在上板下方形成图像采集器单元（25）和 图像数据处理器（30）。 图像收集器单元（25）由布置在电子倍增器通道阵列上方的感光片组成。 从放置在上板（23）的表面（24）上的物体反射的光由感光片转换成与电子倍增器通道相乘的电子，以放大搁置在上板上的物体的图像。 电子倍增器阵列的表面积对应于成像机的成像区域，使得可以在整个成像区域而不是通过扫描光学器件同时捕获完整图像。 此外，使用电子倍增器阵列能够使用较低功率的光源。

公开(公告)号：US07102284B2

公开(公告)日：2006-09-05

申请号：US10468817

申请日：2002-02-22

Applicant: Hisaki Kato ,  Hideto Kawai

Inventor： Hisaki Kato ,  Hideto Kawai

IPC: H01J43/04 ,  H01J43/18 ,  H01J43/00 ,  H01J43/30 ,  H01J40/14

CPC classification number: H01J43/28 ,  H01J43/045 ,  H01J43/06 ,  H01J43/18 ,  H01J43/22

Abstract: In a photomultiplier, focusing pieces of a focusing electrode are formed with sufficient height that the photocathode in the adjacent channels cannot be viewed from the first and second stage dynodes of each channel in order to prevent light reflected from the first and second stage dynodes from returning to the adjacent channels. This construction prevents the photocathode from emitting undesired electrons, thereby suppressing crosstalk. Further, by arranging condensing lenses on the outer surface of a light-receiving faceplate in correspondence with each channel, light is reliably condensed in each channel. Further, an oxide film formed over the surface of the focusing pieces prevents the reflection of light off the focusing pieces.

Abstract translation: 在光电倍增器中，聚焦电极的聚焦片形成有足够的高度，使得相邻通道中的光电阴极不能从每个通道的第一和第二级倍增电极观察，以防止从第一和第二级倍增电极反射的光返回 到相邻信道。 这种结构防止光电阴极发射不需要的电子，从而抑制串扰。 此外，通过在每个通道对应于在受光面板的外表面上布置聚光透镜，在每个通道中可靠地冷凝光。 此外，形成在聚焦片表面上的氧化膜防止光从聚焦片反射。