公开(公告)号：US20040208286A1

公开(公告)日：2004-10-21

申请号：US10795884

申请日：2004-03-08

Applicant: University of Central Florida

Inventor： Martin Richardson

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H05G2/003 ,  H05G2/005 ,  H05G2/008

Abstract: Metallic solutions at room temperature used a laser point source target droplets. Using the target metallic solutions results in damage free use to surrounding optical components since no debris are formed. The metallic solutions can produce plasma emissions in the X-rays, XUV, and EUV(extreme ultra violet) spectral ranges of approximately 11.7 nm and 13 nm. The metallic solutions can include molecular liquids or mixtures of elemental and molecular liquids, such as metallic chloride solutions, metallic bromide solutions, metallic sulphate solutions, metallic nitrate solutions, and organo-metallic solutions. The metallic solutions do not need to be heated since they are in a solution form at room temperatures.

Abstract translation: 金属溶液在室温下使用激光点源目标液滴。 使用目标金属溶液会导致对周围的光学部件的损坏，因为没有形成碎屑。 金属溶液可以在大约11.7nm和13nm的X射线，XUV和EUV（极紫外）光谱范围内产生等离子体发射。 金属溶液可以包括分子液体或元素和分子液体的混合物，例如金属氯化物溶液，金属溴化物溶液，金属硫酸盐溶液，金属硝酸盐溶液和有机金属溶液。 金属溶液不需要加热，因为它们在室温下处于溶液形式。

公开(公告)号：US20040208285A1

公开(公告)日：2004-10-21

申请号：US10756609

申请日：2004-01-13

Inventor： Joerg Freudenberger ,  Peter Schardt

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: A61N5/1001 ,  A61N5/1002 ,  H01J35/32 ,  H05G2/00 ,  H05G2/001

Abstract: An X-ray source to be introduced into the body vessels of a living being by means of a catheter is designed as a laser plasma X-ray source and is arranged in a housing, which has a diameter of a maximum of about 2 mm transversely to the direction from which the X-ray source is intended to be introduced into the body vessel. A catheter with such an X-ray source and a system for an intracorporeal X-ray source irradiation with such a catheter also are provided.

Abstract translation: 将通过导管引入活体体内的X射线源设计为激光等离子体X射线源，并且布置在壳体中，该壳体的直径最大为约2mm，横向 到X射线源将被引入人体血管的方向。 还提供了具有这种X射线源的导管和用这种导管照射体内X射线源的系统。

公开(公告)号：US20040057470A1

公开(公告)日：2004-03-25

申请号：US10600141

申请日：2003-06-23

Inventor： Charles K. Rhodes ,  Keith Boyer

IPC: H01S003/30 ,  H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H05G2/003 ,  G02F2001/354 ,  H01S4/00 ,  H05G2/008

Abstract: The generation of ultrabright, multikilovolt coherent tunable x-radiation resulting from amplification on hollow atom transition arrays is described. Amplification has been demonstrated by physical evidence including (a) the observation of selected spectral components of several Xeqnull hollow atom transition arrays (qnull30, 31, 32, 34, 35, 36, 37) radiated axially from confined plasma channels, (b) the measurement of line narrowing that is spectrally correlated with the amplified transitions, (c) evidence for spectral hole-burning in the spontaneous emission, a manifestation of saturated amplification, that corresponds spectrally with the amplified lines, and (d) the detection of an intense narrow (nullnullxnull0.2 mr) directed beam of radiation in the far field of the source.

Abstract translation: 描述了由空心原子转移阵列上的扩增产生的超立体，多千伏安相干可调谐x射线的产生。 已经通过物理证据证明了扩增，包括（a）观察从密闭的等离子体通道轴向辐射的几个Xe 空心原子跃迁阵列（q = 30,31,32,34,35,36,37）的选定光谱分量 ，（b）与放大的转变频谱相关的线窄化的测量，（c）自发发射中的光谱空穴燃烧的证据，与放大的线对应的光谱的饱和放大的表现，以及（d） 在源的远场中检测到强烈的狭窄（deltathetax〜0.2mr）定向的辐射束。

公开(公告)号：US20030223545A1

公开(公告)日：2003-12-04

申请号：US10157396

申请日：2002-05-30

Inventor： Moshe Ein-Gal

IPC: H01J035/00

CPC classification number: A61N5/1001 ,  H01J35/32

Abstract: An electromagnetic wave energy emitter including a generally cylindrical probe including generally coaxial first and second electrodes, each of the electrodes having an at least partially cylindrical shape, one of the electrodes being energizable to emit electrons and the other of the electrodes being adapted to receive the electrons and generate electromagnetic wave energy. A grid element may be placed between the first and second electrodes. A controller may be in communication with the grid element, adapted to control a potential of the grid element. The grid element may have an at least partially cylindrical shape. The grid element may be placed concentrically or non-concentrically with respect to the first and second electrodes.

Abstract translation: 一种电磁波能量发射器，包括大致圆柱形的探针，其包括大致同轴的第一和第二电极，每个电极具有至少部分圆柱形的形状，其中一个电极可激发以发射电子，另一个电极适于接收 电子并产生电磁波能量。 网格元件可以放置在第一和第二电极之间。 控制器可以与网格元件通信，适于控制网格元件的电位。 栅格元件可以具有至少部分圆柱形的形状。 栅格元件可以相对于第一和第二电极同心或非同心地放置。

公开(公告)号：US20020146091A1

公开(公告)日：2002-10-10

申请号：US09954635

申请日：2001-09-14

Inventor： Charles K. Rhodes ,  Keith Boyer

IPC: H01J035/00

CPC classification number: H05G2/003 ,  G21K1/00 ,  H05G2/008

Abstract: An apparatus and method for the generation of ultrabright multikilovolt x-rays from saturated amplification on noble gas transition arrays from hollow atom states is described. Conditions for x-ray amplification in this spectral region combine the production of cold, high-Z matter, with the direct, selective multiphoton excitation of hollow atoms from clusters using ultraviolet radiation and a nonlinear mode of confined, self-channeled propagation in plasmas. Data obtained is consistent with the presence of saturated amplification on several transition arrays of the hollow atom Xe(L) spectrum (nullnull2.9 null). An estimate of the peak brightness achieved is null1029 nullnullsnull1nullmmnull2nullmrnull2 (0.1% Bandwidth)null1, that is null105-fold higher than presently available synchotron technology.

Abstract translation: 描述了从空心原子状态的稀有气体过渡阵列上的饱和放大产生超立方多千伏X射线的装置和方法。 在该光谱区域中的x射线放大的条件将冷，高Z物质的产生与使用紫外辐射的簇的空心原子的直接，选择性多光子激发和等离子体中的限制，自通道传播的非线性模式相结合。 获得的数据与空心原子Xe（L）光谱（lambd〜2.9）的几个过渡阵列上的饱和扩增的存在一致。 所获得的峰值亮度估计为〜1029 gamma.s-1.mm-2.mr-2（0.1％带宽）-1，比目前可用的同步电子技术高约105倍。

公开(公告)号：US20020141537A1

公开(公告)日：2002-10-03

申请号：US10102868

申请日：2002-03-22

Inventor： Takayasu Mochizuki

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: G21B1/23

Abstract: A main laser beam is focused to irradiate a tip of a high-density spouting gas flow formed by heating and then vaporizing a target material by a light beam for preheating making it to the plasma. As the result, the generation of a fast debris in the target material can be suppressed. And a discharge of the fast debris from the target material is also suppressed and extinguished by heating and then vaporizing them by a light beam for transpiration which is emitted at an adjusted time after the generation of the plasma. Thus, the fast debris which still appears in the plasma formed after preheating can be almost perfectly vaporized and extinguished by the light beam for transpiration.

Abstract translation: 主激光束被聚焦以照射通过加热形成的高密度喷射气流的尖端，然后通过用于预热的光束将目标材料蒸发使其等离子体。 结果，可以抑制目标材料中快速碎屑的产生。 并且通过加热然后将来自目标材料的快速碎屑的放电也被抑制并熄灭，然后通过在产生等离子体之后的调整时间发射的用于蒸腾的光束蒸发它们。 因此，仍然出现在预热后形成的等离子体中的快速碎片几乎可以被蒸发的光束完全蒸发并熄灭。

公开(公告)号：US20020131554A1

公开(公告)日：2002-09-19

申请号：US09809465

申请日：2001-03-15

Inventor： Ray Fleming ,  Constantin Popa

IPC: H01J035/00

CPC classification number: H05G2/003 ,  A61L2/0041 ,  A61L2/082 ,  A61L2202/11 ,  A61L2202/22 ,  A61L2202/24 ,  H05G1/20

Abstract: An improved efficiency x-ray source comprised of a fluorescent x-ray tube and resonant high voltage power supply. The fluorescent x-ray tube is an arc discharge tube filled with a low-pressure vapor, xenon for example, that is excited by high-frequency, high-voltage pulses to produce x-rays. The power supply passes arcs through the tube that produce significantly more radiation per unit energy than equivalent conventional vacuum x-ray tubes. The power supply may be a high frequency resonant AC supply or it may be rectified to give resonant DC. The fluorescent tube is driven in cold cathode mode, avoiding a fragile filament. The arc gap may also be large or very small in order to serve as a broad beam source or point source.

Abstract translation: 由荧光X射线管和谐振高压电源组成的改进的效率x射线源。 荧光X射线管是一个充满低压蒸汽的电弧放电管，例如氙，被高频，高压脉冲激发，产生X射线。 电源通过电弧管，每单位能量的辐射比相当的常规真空X射线管产生更多的辐射。 电源可以是高频谐振AC电源，或者它可以被整流以产生谐振DC。 荧光管以冷阴极模式驱动，避免了易碎的灯丝。 为了充当宽的光束源或点光源，电弧间隙也可以是大的或非常小的。

公开(公告)号：US20020090054A1

公开(公告)日：2002-07-11

申请号：US09756909

申请日：2001-01-10

Inventor： Michael Sogard

IPC: H01J035/00

CPC classification number: B82Y10/00 ,  G03F7/70033 ,  G03F7/70916 ,  H01J2237/022

Abstract: A debris containment shutter useable in a photolithography system comprises one or more moving members that sweep and/or deflect debris that is associated with plasma generated from a target away from the structures to be protected from the debris. The members may be configured as a structure that moves across the plasma space in which the debris populates, such as a rotating or reciprocating structure. For controlling debris associated with pulsed radiation, the movement of the members is synchronized with the pulses of plasma emitted radiation. In one aspect of the present invention, the shutter comprises a plate rotatable about an axis of rotation, the plate defining at least one opening therethrough and at least one member (e.g., in the form of baffles or vanes) extending from a surface of the plate. The members may extend radially outward from a hub or inward from a perimeter. In another aspect of the invention, the shutter includes a manifold which extends at least partially around the perimeter of the members. The manifold preferably defines a volume for collection of debris from a space traversed by the member when the plate is rotated.

Abstract translation: 可用于光刻系统中的碎片收容挡板包括一个或多个移动构件，其扫掠和/或偏转与目标远离被保护结构的等离子体产生的等离子体碎屑。 这些构件可以被配置为移动穿过诸如旋转或往复运动结构的碎屑填充的等离子体空间的结构。 为了控制与脉冲辐射相关的碎片，构件的移动与等离子体发射的辐射的脉冲同步。 在本发明的一个方面中，闸门包括可围绕旋转轴线旋转的板，该板限定穿过其中的至少一个开口，以及至少一个从挡板或叶片的表面延伸的构件（例如，挡板或叶片的形式） 盘子。 构件可以从轮毂径向向外延伸或者从周边向内延伸。 在本发明的另一方面，闸门包括至少部分地围绕构件的周边延伸的歧管。 歧管优选地限定用于在板旋转时从由构件穿过的空间收集碎屑的体积。

公开(公告)号：US20020057760A1

公开(公告)日：2002-05-16

申请号：US09964872

申请日：2001-09-28

Inventor： Frank E. Carroll ,  Robert H. Traeger ,  Marcus H. Mendenhall ,  James W. Walters ,  Glenn Edwards ,  Charles A. Brau

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H05G2/00

Abstract: A system for generating tunable pulsed monochromatic X-rays includes a tabletop laser emitting a light beam that is counter-propagated against an electron beam produced by a linear accelerator. X-ray photon pulses are generated by inverse Compton scattering that occurs as a consequence of the nullcollisionnull that occurs between the electron beam and IR photons generated by the laser. The system uses a novel pulse structure comprising, for example, a single micropulse. In this way, pulses of very short X-rays are generated that are controllable on an individual basis with respect to their frequency, energy level, nulldirection,null and duration.

Abstract translation: 用于产生可调谐脉冲单色X射线的系统包括发射相对于由线性加速器产生的电子束相反传播的光束的桌面激光器。 X射线光子脉冲是通过由激光产生的电子束和IR光子之间发生的“碰撞”而产生的反康普顿散射产生的。 该系统使用包括例如单个微脉冲的新型脉冲结构。 以这种方式，产生非常短的X射线的脉冲，其相对于它们的频率，能级，“方向”和持续时间在个体基础上是可控的。

公开(公告)号：US20020048345A1

公开(公告)日：2002-04-25

申请号：US09973313

申请日：2001-10-09

Inventor： Peter Klaus Bachmann ,  Volker Van Elsbergen ,  Bernd David ,  Rainer Willi Eckart ,  Geoffrey Harding

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H01J33/04 ,  H01J5/18 ,  H01J35/18 ,  H01J2235/082

Abstract: The invention relates to a window transparent to electron rays comprising a foil (1, 10, 300a) transparent to electron rays and separated from a carrier substrate as well as a retaining element (2, 300b) for supporting a peripheral region of the foil transparent to electron rays in the operational state, which retaining element (2, 300b) is made of a material which has a linear thermal expansion coefficient which matches the linear thermal expansion coefficient of the foil material. The invention further relates to a method of manufacturing a window transparent to electron rays and an X-ray device with such a window.

Abstract translation: 本发明涉及对电子射线透明的窗口，该窗口包括对电子射线透明并与载体衬底分离的箔片（1,10,300a）以及用于支撑箔片周边区域透明的保持元件（2,300b） 与保持元件（2,300b）由具有与箔材料的线性热膨胀系数相匹配的线性热膨胀系数的材料制成的工作状态下的电子射线。 本发明还涉及制造对电子射线透明的窗口的方法和具有这种窗口的X射线装置。