公开(公告)号：US06760406B2

公开(公告)日：2004-07-06

申请号：US09974975

申请日：2001-10-12

Applicant: Hans Martin Hertz ,  Oscar Ĥemberg ,  Lars Rymell ,  Björn A.M. Hansson ,  Magnus Berglund

Inventor： Hans Martin Hertz ,  Oscar Ĥemberg ,  Lars Rymell ,  Björn A.M. Hansson ,  Magnus Berglund

IPC: H01J3500

CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05G2/006 ,  H05G2/008

Abstract: In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.

Abstract translation: 在产生X射线或EUV辐射的方法中，通过出口促使物质沿着从出口的方向产生射流，至少一个能量束被引导到射流上，能量束与射流相互作用以产生 X射线或EUV辐射，并且控制出口的温度，从而提高射流的稳定性。 还公开了一种设备。

公开(公告)号：US06718012B2

公开(公告)日：2004-04-06

申请号：US10157396

申请日：2002-05-30

Applicant: Moshe Ein-Gal

Inventor： Moshe Ein-Gal

IPC: H01J3500

CPC classification number: A61N5/1001 ,  H01J35/32

Abstract: An electromagnetic wave energy emitter including a generally cylindrical probe including generally coaxial first and second electrodes, each of the electrodes having an at least partially cylindrical shape, one of the electrodes being energizable to emit electrons and the other of the electrodes being adapted to receive the electrons and generate electromagnetic wave energy. A grid element may be placed between the first and second electrodes. A controller may be in communication with the grid element, adapted to control a potential of the grid element. The grid element may have an at least partially cylindrical shape. The grid element may be placed concentrically or non-concentrically with respect to the first and second electrodes.

Abstract translation: 一种电磁波能量发射器，包括大致圆柱形的探针，其包括大致同轴的第一和第二电极，每个电极具有至少部分圆柱形的形状，其中一个电极可激发以发射电子，另一个电极适于接收 电子并产生电磁波能量。 网格元件可以放置在第一和第二电极之间。 控制器可以与网格元件通信，适于控制网格元件的电位。 栅格元件可以具有至少部分圆柱形的形状。 栅格元件可以相对于第一和第二电极同心或非同心地放置。

公开(公告)号：US06674837B1

公开(公告)日：2004-01-06

申请号：US10172704

申请日：2002-06-14

Applicant: Nikhil R. Taskar ,  Rameshwar Nath Bhargava ,  Paul J. Patt

Inventor： Nikhil R. Taskar ,  Rameshwar Nath Bhargava ,  Paul J. Patt

IPC: H01J3500

CPC classification number: A61B6/542 ,  A61B6/00 ,  A61B6/4028 ,  A61B6/4216 ,  A61B6/482 ,  G01T1/2928 ,  H01J2235/068 ,  Y10S977/928

Abstract: An X-ray imaging system utilizing a pixelated X-ray source and a X-ray imaging detector operated synchronously. The imaging system may be used in industrial and medical applications. The X-ray source and X-ray detector are synchronized such that a corresponding area of the X-ray detector is activated when the corresponding area of the X-ray source is emitting X-rays. Synchronized and adaptive emission and detection of the X-rays results in scatter rejection, improved image quality, and optimum exposure and dose reduction.

Abstract translation: 使用像素化X射线源的X射线成像系统和同步运行的X射线成像检测器。 成像系统可用于工业和医疗应用。 X射线源和X射线检测器被同步，使得当X射线源的相应区域发射X射线时，X射线检测器的相应区域被激活。 X射线的同步和自适应发射和检测导致散射抑制，改善的图像质量以及最佳的曝光和剂量降低。

公开(公告)号：US06658088B2

公开(公告)日：2003-12-02

申请号：US09792072

申请日：2001-02-26

Applicant: Jonas Tiren

Inventor： Jonas Tiren

IPC: H01J3500

CPC classification number: A61N5/1001 ,  H01J35/32 ,  H01J2201/304 ,  H01J2235/164

Abstract: A miniature X-ray source includes a support structure provided with a through hole, an anode arranged at one end of the hole and a cathode at the other end of the hole, thereby defining a cavity, wherein the anode and cathode are adapted to be energized to generate X-ray radiation. The support structure has a cross-sectional shape that is determined such that a desired radiation distribution of the radiation generated by the X-ray source is achieved. Also a method of manufacturing miniature X-ray sources is disclosed.

Abstract translation: 微型X射线源包括设置有通孔的支撑结构，布置在孔的一端的阳极和在孔的另一端的阴极，从而限定空腔，其中阳极和阴极适于 通电以产生X射线辐射。 支撑结构具有被确定为使得由X射线源产生的辐射的期望的辐射分布被实现的横截面形状。 还公开了一种制造微型X射线源的方法。

公开(公告)号：US06654446B2

公开(公告)日：2003-11-25

申请号：US09955658

申请日：2001-09-18

Applicant: Howard Albert Bender, III

Inventor： Howard Albert Bender, III

IPC: H01J3500

CPC classification number: H05G2/003 ,  H05H1/2406 ,  H05H2001/2418

Abstract: Debris generation from an EUV electric discharge plasma source device can be significantly reduced or essentially eliminated by encasing the electrodes with dielectric or electrically insulating material so that the electrodes are shielded from the plasma, and additionally by providing a path for the radiation to exit wherein the electrodes are not exposed to the area where the radiation is collected. The device includes: (a) a body, which is made of an electrically insulating material, that defines a capillary bore that has a proximal end and a distal end and that defines at least one radiation exit; (b) a first electrode that defines a first channel that has a first inlet end that is connected to a source of gas and a first outlet end that is in communication with the capillary bore, wherein the first electrode is positioned at the distal end of the capillary bore; (c) a second electrode that defines a second channel that has a second inlet end that is in communication with the capillary bore and an outlet end, wherein the second electrode is positioned at the proximal end of the capillary bore; and (d) a source of electric potential that is connected across the first and second electrodes, wherein radiation generated within the capillary bore is emitted through the at least one radiation exit and wherein the first electrode and second electrode are shielded from the emitted radiation.

Abstract translation: 通过用电介质或电绝缘材料封装电极，可以显着减少或基本上消除来自EUV放电等离子体源装置的碎片，从而使电极与等离子体屏蔽，另外通过提供用于辐射的路径，其中， 电极不暴露于收集辐射的区域。 该装置包括：（a）由电绝缘材料制成的主体，其限定具有近端和远端并限定至少一个辐射出口的毛细孔; （b）限定第一通道的第一电极，所述第一通道具有连接到气体源的第一入口端和与所述毛细管孔连通的第一出口端，其中所述第一电极位于所述第一通道的远端 毛细孔; （c）第二电极，其限定具有与毛细孔连通的第二入口端和出口端的第二通道，其中所述第二电极位于所述毛细孔的近端; 以及（d）跨越所述第一和第二电极连接的电位源，其中在所述毛细孔内产生的辐射通过所述至少一个辐射出口发射，并且其中所述第一电极和所述第二电极被屏蔽所发射的辐射。

公开(公告)号：US06542576B2

公开(公告)日：2003-04-01

申请号：US09766777

申请日：2001-01-22

Applicant: Rodney A. Mattson

Inventor： Rodney A. Mattson

IPC: H01J3500

CPC classification number: H01J35/26

Abstract: An x-ray tube assembly (16) includes a vacuum envelope (52) and an x-ray permeable exit window (58). An anode (50) is positioned within the vacuum envelope (52) such that a near side is adjacent to the exit window (58) and a far side is opposite thereof. A cathode assembly (66) is also mounted within the vacuum envelope (52) which directs an electron beam (72) toward a focal spot or point (62) on the far side of the anode (50). The anode further includes a central cavity or indentation (70) which provides a location for mounting a set of radiation attenuating vanes (64) in addition to a shaped x-ray filter or compensator (68). Close placement of the vanes (64) and the filter (68) relative to the focal spot of the anode desirably reduce off focal radiation and allow beam shaping. An externally located collimator (18) further shapes the output x-ray beam.

Abstract translation: X射线管组件（16）包括真空外壳（52）和x射线可透过的出射窗（58）。 阳极（50）位于真空封壳（52）内，使得近侧与出射窗（58）相邻，远侧与其相反。 阴极组件（66）也安装在真空外壳（52）内，真空外壳（52）将电子束（72）引向阳极（50）的远侧上的焦点或点（62）。 阳极还包括中心腔或凹口（70），除了成形的x射线滤波器或补偿器（68）之外，还提供用于安装一组辐射衰减叶片（64）的位置。 叶片（64）和过滤器（68）相对于阳极的焦点的紧密放置期望地减少了聚焦辐射，并允许光束成形。 外部定位的准直器（18）进一步使输出的X射线束成形。

公开(公告)号：US06419389B1

公开(公告)日：2002-07-16

申请号：US09667454

申请日：2000-09-22

Applicant: Manfred Fuchs ,  Erich Hell ,  Wolfgang Kutschera ,  Thomas Ohrndorf

Inventor： Manfred Fuchs ,  Erich Hell ,  Wolfgang Kutschera ,  Thomas Ohrndorf

IPC: H01J3500

CPC classification number: F28D20/02 ,  H05G1/025 ,  H05G1/04 ,  Y02E60/145

Abstract: An x-ray generating system has an x-ray source arranged in a coolant-filled housing, and a phase change store which contains a phase change material disposed in the coolant in the housing.

Abstract translation: x射线产生系统具有布置在冷却剂填充的壳体中的x射线源，以及相变存储器，其包含设置在壳体中的冷却剂中的相变材料。

公开(公告)号：US06389106B1

公开(公告)日：2002-05-14

申请号：US09555819

申请日：2000-07-28

Applicant: Willi Neff ,  Rainer Lebert ,  Guido Schriever ,  Klaus Bergmann

Inventor： Willi Neff ,  Rainer Lebert ,  Guido Schriever ,  Klaus Bergmann

IPC: H01J3500

CPC classification number: H05G2/003 ,  G03F7/70033 ,  H05H1/48

Abstract: A method and a device for generating extreme ultraviolet (EUV) and soft x-ray radiation from a gas discharge. The device has at least two electrodes each having a flush opening by which an axis of symmetry is defined, in which an intermediate space with a wide spatial homogenous gas filling between anode and cathode is provided. The electrodes are formed in such a way, that the gas discharge is formed exclusively in the volume defined by the flush openings. The current pulses with respect to amplitude and period duration are selected in such a way that a dense hot plasma channel is formed on the axis of symmetry, the plasma being the source of EUV and/or soft x-ray radiation. The preferred area of application is the EUV projection lithography in the spectral range around 13 nm.

Abstract translation: 一种用于从气体放电产生极紫外（EUV）和软X射线辐射的方法和装置。 该装置具有至少两个电极，每个电极具有齐平的开口，通过该开口限定对称轴，其中提供了在阳极和阴极之间填充宽空间均匀气体的中间空间。 电极以这样的方式形成，即气体排出仅在由冲洗开口限定的体积中形成。 选择相对于振幅和周期持续时间的电流脉冲，使得在对称轴上形成致密的热等离子体通道，等离子体是EUV和/或软X射线辐射源。 优选的应用领域是在约13nm的光谱范围内的EUV投影光刻。

公开(公告)号：US06333967B1

公开(公告)日：2001-12-25

申请号：US09405219

申请日：1999-09-27

Applicant: Naohisa Osaka ,  Seiichi Hayashi

Inventor： Naohisa Osaka ,  Seiichi Hayashi

IPC: H01J3500

CPC classification number: H01J35/02 ,  H05G1/02

Abstract: An X-ray generator includes a hermetically sealed main generator unit, and an electron gun and a target housed inside the main generator unit, and bombards the target with electrons emitted from the electron gun and passes an X-ray beam emitted from the surface of the target owing to the bombardment to the exterior through an exit window. An X-ray optical element is provided inside the main generator unit on the output path of the X-ray beam emitted from the target for regulating the X-ray beam and the X-ray beam regulated by the X-ray optical element is passed through the exit window. This configuration improves the durability of the X-ray optical element and enables the length of the X-ray path to the X-ray irradiation point to be shortened so as to suppress attenuation of the emitted X-ray beam by air resistance and thereby reduce power consumption.

Abstract translation: X射线发生器包括密封的主发电机单元，以及电子枪和收容在主发电机单元内的目标，并且用电子枪发射的电子轰击目标，并将从该表面发射的X射线束 目标是由于通过出口窗对外部的轰炸。 X射线光学元件设置在从用于调节X射线束的靶发射的X射线束的输出路径上的主发电机单元的内部，并且由X射线光学元件调节的X射线束通过 通过出口窗口。 该结构提高了X射线光学元件的耐久性，能够缩短X射线照射点的X射线路径的长度，以便抑制由空气阻力引起的X射线束的衰减，从而减少 能量消耗。

公开(公告)号：US06333966B1

公开(公告)日：2001-12-25

申请号：US09481874

申请日：2000-01-12

Applicant: Neil Charles Schoen

Inventor： Neil Charles Schoen

IPC: H01J3500

CPC classification number: G21K1/06 ,  G21K1/003 ,  H01J35/00

Abstract: A technology for generating femtosecond time regime x-ray pulses for application to the study of the structure and reactions of biological molecules, photosynthesis reactions, semiconductor device fabrication, structural determination and dynamic performance, and other chemical, biological and physical processes taking place on sub-picosecond time scales. Electrons are accelerated to hundreds of keV to tens of MeV energies using high energy, femtoseconds duration laser pulses, and are then converted to x-rays by one of several physical processes. Because the laser accelerated electrons have the pulse width of the laser driver, extremely short (less than 100 femtoseconds) x-ray pulses can be produced from these electrons. The x-ray energy and emittance can be controlled by electron beam production and beam transport techniques and/or collimators or x-ray optical systems. The use of laser acceleration and novel electron to x-ray conversion processes should result in significantly lower costs than current synchrotron-based x-ray sources, and lead to widespread introduction of this tool into commercial biological and medical x-ray and materials structure research laboratory environments. In addition, multi-beam sources of electrons from conventional electron devices, such as field emission diodes and thermionic emission devices, can be used in conjuction with novel x-ray beam combining techniques to produce a long pulse, high flux collimated x-ray beam suitable for use in biological x-ray crystallography studies.

Abstract translation: 用于生成飞秒时间方案x射线脉冲的技术用于研究生物分子的结构和反应，光合作用反应，半导体器件制造，结构测定和动态性能以及其他化学，生物和物理过程发生在子 - 第二秒时间尺度 使用高能量，飞秒持续时间的激光脉冲将电子加速到数百keV至几十MeV能量，然后通过几种物理过程之一转换成x射线。 因为激光加速电子具有激光驱动器的脉冲宽度，所以能够从这些电子产生非常短的（小于100飞秒）的X射线脉冲。 X射线能量和发射率可以通过电子束产生和光束传输技术和/或准直器或x射线光学系统来控制。 使用激光加速和新颖的电子对x射线转换过程应该导致比当前基于同步加速器的x射线源显着降低的成本，并导致将该工具广泛引入商业生物和医学x射线和材料结构研究 实验室环境。 此外，来自常规电子器件（例如场致发射二极管和热离子发射器件）的多束电子源可以与新颖的x射线束组合技术结合使用，以产生长脉冲，高通量准直X射线束 适用于生物X射线晶体学研究。