公开(公告)号：DE112008001297T5

公开(公告)日：2010-04-08

申请号：DE112008001297

申请日：2008-04-14

Applicant: ULVAC INC

Inventor： NAKAJIMA TOYOAKI ,  KUROKAWA YUJIROU ,  YURI TSUTOMU ,  TANAKA RYOTA ,  YOSHIDA SHUJI

IPC: G01N27/62 ,  H01J41/10 ,  H01J49/42

Abstract: A mass spectrometry unit of the present invention includes a mass spectrometry portion that detects ion current values of a gas to be measured according to mass-to-charge ratio, to thereby measure partial pressures of the gas to be measured. The mass spectrometry unit further includes: a control portion for preliminary storing a record of a mass-to-charge ratio of a specific gas that decreases a function of a specific portion of the mass spectrometry unit, in which if an ion current value with the mass-to-charge ratio of the specific gas detected by the mass spectrometry portion is not less than a predetermined value, the control portion outputs a warning signal denoting a functional decrease in the specific portion.

公开(公告)号：AT450878T

公开(公告)日：2009-12-15

申请号：AT04001306

申请日：2004-01-22

Applicant: GSI HELMHOLTZZENTRUM SCHWERIONENFORSCHUNG GMBH

Inventor： MUELLER MICHAEL ,  JANIK JAN

IPC: H01J27/04 ,  H01J27/18 ,  H01J27/20 ,  H01J27/22 ,  H01J37/08 ,  H01J41/04 ,  H01J41/10

公开(公告)号：CA2345989A1

公开(公告)日：2000-04-27

申请号：CA2345989

申请日：1999-10-13

Applicant: SIEMENS APPLIED AUTOMATION INC

Inventor： ARNOLD ROBERT W ,  LITTLEJOHN DUANE P

IPC: H01J41/10 ,  H01J49/38 ,  H01J41/06 ,  H01J49/42

Abstract: During operation of a FTICR MS the time after the opening of the pulsed valv e sample gas inlet system that the peak of sample gas pressure occurs in the vacuum chamber is determined by measuring the amplitude of the ion pump current. The FTICR MS then uses that time and the known period of time for which a source of electrons used for an ionization event is energized to energize the electron source so that the known period of time includes the peak of vacuum chamber sample gas pressure. This allows ions to be created during the peak of the sample gas pressure to thereby obtain the maximum sensitivity during measurements.

公开(公告)号：JPWO2015118681A1

公开(公告)日：2017-03-23

申请号：JP2015561133

申请日：2014-02-10

Applicant: 株式会社島津製作所

Inventor： 慎二郎 藤田 ,  慎二郎 藤田

IPC: H01J49/02 ,  G01N27/62 ,  H01J41/10 ,  H01J49/10

CPC classification number: H01J49/165 ,  G01N30/7266 ,  G01N30/8631 ,  G01N30/8651 ,  H01J49/0031 ,  H01J49/107 ,  H01J49/168 ,  H01J49/24 ,  H01J49/4215

Abstract: ESIプローブ(201)及びESI電源(24)とコロナニードル(202)及びAPCI電源(24)を有するイオン化源と、1乃至複数の成分を含む液体試料に関する前記ESI電圧の値又は/及び前記APCI電圧の値が異なる複数のイオン化条件を記憶するイオン化条件記憶部(41)と、前記複数のイオン化条件のそれぞれを用いて前記液体試料から生成したイオンを質量分析する質量分析実行部(43)と、前記複数のイオン化条件のそれぞれについて得られた質量分析の結果の中から、前記1乃至複数の成分のそれぞれについて、分析に適した強度でイオンが検出されている質量分析結果を選出する質量分析結果選出部(44)と、を備えることを特徴とする質量分析装置を提供する。

公开(公告)号：JP2003004572A

公开(公告)日：2003-01-08

申请号：JP2001234191

申请日：2001-06-18

Applicant: Horizon:Kk ,  株式会社ホリゾン

Inventor： HORIKAWA YUICHI

IPC: H01J9/14 ,  G01L21/30 ,  H01J41/10 ,  H01J49/42

Abstract: PROBLEM TO BE SOLVED: To accurately and easily assemble a quadrupole section of a partial pressure vacuum gauge using a jig.
SOLUTION: The partial pressure vacuum gauge with a quadrupole section employs an assembling jig and an assembling method by which electrode rods are fixed and spaced with the accuracy identical to that of the jig without being affected by the dimensional accuracy of an insulating support member when the quadrupole section is assembled.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：使用夹具精确和容易地组装分压真空计的四极段。 解决方案：具有四极截面的分压真空计采用组装夹具和组装方法，其中电极棒以与夹具相同的精度固定和间隔，而不受绝缘支撑构件的尺寸精度的影响，当绝缘支撑构件 四极段组装。

公开(公告)号：JPH1172406A

公开(公告)日：1999-03-16

申请号：JP4965998

申请日：1998-03-02

Applicant: GRANVILLE PHILLIPS CO

Inventor： BILLS DANIEL GRANVILLE

IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04

Abstract: PROBLEM TO BE SOLVED: To enhance precision and stability by using a multiple ion collector in a small-sized ionization vacuum gauge. SOLUTION: An electronic source is disposed outside an anode volume of a releasing anode 14, and a plurality of ion collector electrodes 18, 18' are disposed in the anode volume, and a plurality of anode props 16, 16' extending to an axial direction for supporting the releasing anode are electrically connected to the releasing anode 14. In order to strongly repel electrons from the anode props 16, 16', the plurality of ion collector electrodes 18, 18' are disposed so as to sufficiently approach the plurality of anode props 16, 16' extending in an axial direction, respectively.

公开(公告)号：JP2839243B1

公开(公告)日：1998-12-16

申请号：JP4965998

申请日：1998-03-02

IPC: G01L21/30 ,  H01J41/02 ,  H01J41/04 ,  H01J41/10 ,  H01J49/04

公开(公告)号：DE112008001297B4

公开(公告)日：2016-06-09

申请号：DE112008001297

申请日：2008-04-14

Applicant: ULVAC INC

Inventor： NAKAJIMA TOYOAKI ,  KUROKAWA YUJIROU ,  YURI TSUTOMU ,  TANAKA RYOTA ,  YOSHIDA SHUJI

IPC: G01N27/62 ,  H01J41/10 ,  H01J49/42

Abstract: Massenspektrometrieeinheit (10), umfassend einen Massenspektrometrieabschnitt (1) zum Detektieren von Ionenstromwerten eines zu messenden Gases entsprechend einem Masse-zu-Ladung-Verhältnis, um somit Partialdrücke des zu messenden Gases zu messen, wobei die Massenspektrometrieeinheit (10) ferner enthält: einen Steuerabschnitt (63) zum vorläufigen Speichern einer Aufzeichnung von Masse-zu-Ladung-Verhältnissen spezifischer Gase, die die Funktion eines Ionenquellenabschnitts (22) oder eines Ionendetektionsabschnitts (27) der Massenspektrometrieeinheit (10) herabsetzen, wobei der Steuerabschnitt (63) angepasst ist, ein Warnsignal auszugeben, das eine Herabsetzung der Funktion des Ionenquellenabschnitts (22) oder des Ionendetektionsabschnitts (27) anzeigt, wenn ein Ionenstromwert mit dem Masse-zu-Ladung-Verhältnis irgendeines der spezifischen Gase, der vom Massenspektrometrieabschnitt (1) detektiert wird, nicht kleiner als ein entsprechender vorgegebener Wert ist.

公开(公告)号：DE502004010435D1

公开(公告)日：2010-01-14

申请号：DE502004010435

申请日：2004-01-22

Applicant: GSI HELMHOLTZZENTRUM SCHWERIONENFORSCHUNG GMBH

Inventor： MUELLER MICHAEL DR ,  JANIK JAN PROF ING

IPC: H01J27/18 ,  H01J27/04 ,  H01J27/20 ,  H01J27/22 ,  H01J37/08 ,  H01J41/04 ,  H01J41/10

公开(公告)号：DE602004021326D1

公开(公告)日：2009-07-16

申请号：DE602004021326

申请日：2004-06-22

Applicant: VARIAN SPA

Inventor： CORREALE RAFFAELE

IPC: H01J41/06 ,  G01L21/34 ,  H01J41/10

Abstract: The present invention relates to an ionisation vacuum gauge for measuring the residual pressure of a gaseous material remaining in a container (10), more particularly after operation of a vacuum pump. The gauge comprises an electron-emitting cathode (31) made by exploiting the nanotube technology, a grid (13; 33; 133; 133') for accelerating the electrons emitted by the cathode, and a plate (15; 35) collecting the ions and/or the ionised positive molecules of the gas. Measuring the plate current by a galvanometer allows determining the value of the residual pressure inside the container.